MS54XX
Miniature SMD Pressure Sensor
SPECIFICATIONS
FEATURES
Low cost SMD package
Small size
High reliability, low drift
-40 °C to +125 °C operation
range
Gel protection against humidity
and water
The MS54XX SMD pressure sensor series is designed for pressure
sensor systems with highest demands on resolution and accuracy. The
device consists of a silicon micromachined pressure sensor die mounted
on a 6.2 x 6.4 mm ceramic carrier. The MS54XX can be delivered in a
high sensitivity version giving a maximal output voltage or in a high
linearity version. Both versions provide an output voltage directly
proportional to the applied pressure.
APPLICATIONS
1, 7, and 12 bar absolute pressure range
Uncompensated
Piezoresistive silicon micromachined sensor
Miniature surface mount
Ceramic carrier
Low noise, high sensitivity, high linearity
High resolution altimeters,
variometers
Barometers
Engine management
Waterproof watches and diving
computers
Carrier
Ceramic
1 bar
High Sensitivity Versions
Full
Product
Linearity
scale
code
span
MS5401-AM 240 mV ±0.20 % FS
7 bar
MS5407-AM
Full scale
pressure
392 mV
±0.20 % FS
12 bar
SENSOR SOLUTIONS ///MS54XX
High Linearity Versions
Full
Product
Linearity
scale
code
span
MS5401-BM 150 mV ±0.05 % FS
MS5412-BM
06/2018
150 mV
±0.05 % FS
Page 1
MS54XX
Miniature SMD Pressure Sensor
PERFORMANCE SPECIFICATIONS
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Overpressure MS5401-AM
MS5401-BM (1)
MS5407-AM (2)
MS5412-BM
Symbol
VS+
TS
Conditions
Ta = 25 °C
P
Ta = 25 °C
Min
-40
-
Max
20
+125
5
10
21
30
Unit
V
°C
bar
NOTES
1)
2)
The MS5401-BM is qualified referring to ISO Standard 22810 and can withstand an absolute pressure of 11 bar in salt water or 100 m
water respectively.
The MS5407-AM is qualified referring to ISO Standard 22810 and can withstand an absolute pressure of 21 bar in salt water or 200 m
water specifically.
ELECTRICAL CHARACTERISTICS HIGH SENSITIVITY VERSION
MS5401-AM
MS5407-AM
All Ranges
Parameter
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating temperature range
Zero pressure offset
Pressure hysteresis
Temperature hysteresis
Repeatability
Bridge resistance
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
Min
0
190
190
0
322
46
-40
-40
3.0
+2'400
-1'500
-80
Typ
240
240
±0.15
392
56
±0.15
0
0.3
3.4
2'900
-1'900
-
Max
1
290
290
±0.40
7
462
66
±040
125
40
±0.20
0.8
±0.20
3.8
+3'300
-2'300
+80
(Vs+ = 5 V; Ta = 25 °C)
Unit
Notes
bar
mV
mV/bar
% FS
1, 6
bar
mV
mV/bar
% FS
1, 6
°C
mV
% FS
2, 6
% FS
3, 6
% FS
4, 6
kΩ
ppm/°C
5, 6
ppm/°C
5, 6
µV/°C
5, 6
NOTES
1)
2)
3)
4)
5)
6)
Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure range.
Maximum difference in offset after one thermal cycle from -40°C to +125°C.
Same as 2) after 10 pressure cycles.
Slope of the end-point straight line from 25°C to 60°C.
Not 100% tested.
SENSOR SOLUTIONS ///MS54XX
06/2018
Page 2
MS54XX
Miniature SMD Pressure Sensor
PERFORMANCE SPECIFICATIONS (CONTINUED)
ELECTRICAL CHARACTERISTICS HIGH LINEARITY VERSIONS
MS5401-BM
MS5412-BM
All Ranges
Parameter
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating temperature range
Zero pressure offset
Pressure hysteresis
Temperature hysteresis
Repeatability
Bridge resistance
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
Min
0
120
120
0
120
10
-40
-40
3.0
+2'400
-1'500
-80
Typ
150
150
±0.05
150
12.5
±0.05
0
0.3
3.4
2'900
-1'900
-
Max
1
180
180
±0.20
12
180
15
±0.15
125
40
±0.20
0.8
±0.20
3.8
+3'300
-2'300
+80
(Vs+ = 5 V; Ta = 25 °C)
Unit
Notes
bar
8
mV
mV/bar
% FS
1, 6
bar
8
mV
mV/bar
% FS
1, 6
°C
mV
% FS
2, 6
% FS
3, 6
% FS
4, 6, 7
kΩ
ppm/°C
5, 6
ppm/°C
5, 6
µV/°C
5, 6
NOTES
1)
2)
3)
4)
5)
6)
7)
8)
Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure range.
Maximum difference in offset after one thermal cycle from -40°C to +125°C.
Same as 2) after 10 pressure cycles.
Slope of the end-point straight line from 25°C to 60°C.
Not 100% tested.
MS5412-BM: Max. 0.3% FS
This sensor family is optimized for the linearity; it is suitable for applications with higher pressure where the linearity requirement is
less critical.
SENSOR SOLUTIONS ///MS54XX
06/2018
Page 3
MS54XX
Miniature SMD Pressure Sensor
APPLICATION INFORMATION
GENERAL
The MS54XX is a miniaturized absolute pressure sensor series which has been designed as a surface mount device
(SMD). Its main advantages are the high performance of the semiconductor sensor and a design which makes it
suitable for applications requiring small dimensions and cost efficiency.
The sensor element of the MS54XX consists of a micromachined silicon membrane with borosilicate glass waferbonded under vacuum to the back side for reference pressure. Implanted resistors make use of the piezo-resistive
effect to sense pressure applied to the membrane. The sensor is mounted using a special process allowing best
offset stability making the device suitable for direct PCB assembly.
Typical applications for this miniaturized pressure sensor MS54XX are altitude measurements and the
measurement of atmospheric reference pressure in medical and industrial equipment as well as in automotive and
household applications, consumer electronics and pneumatics.
Full Scale
Pressure
1 bar
7 bar
12 bar
High Sensitivity Versions
(MS54XX-AX)
Variometer, Altimeter, Barometer
Divers Watch, Tire Pressure, Electronic Scale
High Linearity Versions
(MS54XX-BX)
High End Altimeter, Medical Instrumentation
High End Electronic Scale
Pneumatic Brake, Diving Computer
HUMIDITY, WATER PROTECTION
MS54XX-XM WITH METAL CAP
The MS54XX-AM / - BMXXBA has an anticorrosive and antimagnetic metallic protection cap filled with silicone gel
for enhanced protection against humidity. The properties of this gel ensure function of the sensor even when in
direct water contact. This feature can be useful for waterproof watches or other applications, where direct water
contact cannot be avoided. Nevertheless the user should avoid drying of hard materials like for example salt
particles on the silicone gel surface. In this case it is advisable to rinse with clean water afterwards. Special care
has to be taken not to mechanically damage the gel. Damaged gel may lead to air entrapment and consequently to
unstable sensor signal, especially if the damage is close to the sensor surface.
The metal cap is fabricated of special anticorrosive alloy in order to avoid any galvanic effects within the end product.
The MS5401-BM is qualified referring to the ISO Standard 22810 and can withstand a pressure of 11 bar in salt
water. The concentration of the sea water used for the qualification is 41 g of sea salt per 1 litre of DI water. The
MS5407-BM satisfies salt-water testing with a pressure capability of 21 bar.
For underwater operations as specified in ISO Standard 22810 it is important to seal the sensor with a rubber Oring around the metal cap. Any salt water reaching the contact side (ceramic and pads) of the sensor could lead to
permanent damage. Especially for "water-resistant 100 m" watches and for diving computers, it is recommended
to provide a stable mechanical pusher from the backside of the sensor; otherwise the overpressure may push the
sensor backwards and even deform the electronic board on which the sensor is mounted.
SENSOR SOLUTIONS ///MS54XX
06/2018
Page 4
MS54XX
Miniature SMD Pressure Sensor
LIGHT SENSITIVITY
The MS54XX is sensitive to sunlight (visible and near-infrared spectrum). This is due to the strong photo effect of
silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final product the
sensor cannot be exposed to direct light during operation as it effects the measurement. This can be achieved for
instance by placing mechanical parts with holes in such that light cannot pass.
CONNECTION TO PCB
The package outline of the module enables the use of a flexible PCB to connect it. This can be important for
applications in watches and other special devices, and will also reduce mechanical stress on the device.
For applications subjected to mechanical shock, it is recommended to enhance the mechanical reliability of the
solder junctions by covering the rim or the corners of MS54XX ceramic substrate with glue or globtop-like material.
SOLDERING
Please refer to the application note AN808 for all soldering issues.
CLEANING
The MS54XX has been manufactured under clean-room conditions. Each device is inspected for homogeneity and
cleanness of the silicone gel. It is therefore recommended to assemble the sensor under class 10 000 or better
conditions. Should this not be possible, it is recommended to protect the sensor opening during assembly from
entering particles and dust. To avoid cleaning of the PCB, solder paste of type “no-clean” must be used. Cleaning
might damage the sensor.
SENSOR SOLUTIONS ///MS54XX
06/2018
Page 5
MS54XX
Miniature SMD Pressure Sensor
PIN CONFIGURATION
3: VS+
4: OUT+
1: OUT-
2: GND
PIN DESCRIPTION
Pin Name
OUTGND
VS+
OUT+
Pin No
1
2
3
4
Function
Negative output voltage of Wheatstone bridge
Ground
Supply voltage of Wheatstone bridge
Positive output voltage of Wheatstone bridge
RECOMMENDED PAD LAYOUT
Recommended pad layout for soldering of the MS54XX on a printed circuit board
SENSOR SOLUTIONS ///MS54XX
06/2018
Page 6
MS54XX
Miniature SMD Pressure Sensor
PACKAGE OUTLINES
CERAMIC CARRIER AND METAL CAP
Device package outlines of MS54XX-AM and MS54XX-BM
(M = anticorrosive and antimagnetic stainless steel cap)
PACKAGING
The MS54XX is packed in 51 cm (20-inch) antistatic plastic tubes with rubber end-plugs of different colors: one
green and one black. The dot on the carrier next to Pin 1 is facing the green end-plug. Each tube contains 80
sensors. The tubes are marked "ANTISTATIC" and have an information label.
See the drawings below for more details.
PACKING TUBE OUTLINES
Information label
8.2
510
All measures in mm
SENSOR SOLUTIONS ///MS54XX
06/2018
Page 7
MS54XX
Miniature SMD Pressure Sensor
ORDERING INFORMATION
Product code
Product
MS5401-AM
Miniature pressure sensor 1 bar, High
sensitivity
Art. No
325401001-00
325401001-50
325401006-00
325401000-00
325401000-50
MS5401-BM
Pressure sensor 1 bar, High linearity
325401002-00
MS5407-AM
MS5412-BM
Miniature pressure sensor 7 bar, High
sensitivity
Pressure sensor 12 bar, High linearity
325407000-00
325407000-50
325407001-00
Package
Ceramic carrier
Ceramic carrier
Ceramic carrier,
without
transparent gel
Ceramic carrier
Ceramic carrier
Ceramic carrier,
without
transparent gel
Ceramic carrier
Ceramic carrier
Ceramic carrier,
without
transparent gel
325412000-00
Ceramic carrier
325412000-50
Ceramic carrier
Delivery Form
Tube
Tape and Reel
Tube
Tube
Tape and Reel
Tube
Tube
Tape and Reel
Tube
Tube
Tape and Reel
AX = high sensitivity
BX = high linearity
XM = anticorrosive and antimagnetic metallic cap
NORTH AMERICA
EUROPE
ASIA
Measurement Specialties, Inc.,
a TE Connectivity Company
Tel: 800-522-6752
Email: customercare.frmt@te.com
Measurement Specialties (Europe), Ltd.,
a TE Connectivity Company
Tel: 800-440-5100
Email: customercare.lcsb@te.com
Measurement Specialties (China), Ltd.,
a TE Connectivity Company
Tel: 0400-820-6015
Email: customercare.shzn@te.com
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might be trademarks of their respective owners.
The information given herein, including drawings, illustrations and schematics which are intended for illustration purposes only, is believed to be reliable. However, TE Connectivity makes
no warranties as to its accuracy or completeness and disclaims any liability in connection with its use. TE Connectivity‘s obligations shall only be as set forth in TE Connectivity‘s Standard
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TE Connectivity Ltd. family of companies
SENSOR SOLUTIONS ///MS54XX
All Rights Reserved.
06/2018
Page 8