ZS-DSU41

2D CMOS Laser Type High-precision Displacement Measurement Sensors Bringing Smart Sensors into New Fields. ZS-HL Series More P.6 Highly Advanced Sensing Fu Very High-performance Sensors that Support Core Quality from Very Long-range to Extremely Precise Measurements Range of models with measuring center distance of 20 to 1,500 mm. Achieves maximum resolution of 0.25 Pm. Maximum response speed of 110 Ps. Parallel output supported. ZS-HLDS150 Measuring center distance 1500 See ZS-HLDS60 600 ZS-HLDS10 ZS-HLDS5T ZS-LD10GT/LD15GT ZS-HLDS2T* ZS-HLDS2VT 100 25±2mm 20±1mm 50 20 15 10 02 15±0.75mm 10±0.5mm 50±5mm 100±20mm 600±350mm 1500±500mm * Orders have been discontinued at the end of August 2019. Record Control Data Storage Unit ZS-DSU ZS-DSU Multi-Controller ZS-MDC Ideal for ZS Series Data Logging Enables full application of Sensor Controller information. Enables onsite high-speed logging of data in external memory (compact flash card) for the Sensor Controller or Multi-Controller. Effective for building traceability systems, statistical process control (SPC), and much more. Transfers data between multi-connected Sensor Controllers and performs high-speed multiprocessing. Connects to up to nine Sensor Controllers. High-speed sampling rate: 150 µs Powerful support for logging data using various trigger functions. More P.18 More P.17 Smart Sensor nctions in a Compact Package Business card size +XX-XX-XXX-XXX +XX-XX-XXX-XXX ZS-L Series High-performance Sensors Advanced technology is carried More P.14 USB Standard Sensors Standard Sensors Most Suitable for a Variety of High-precision Displacement Measurements, Including Spot Detection, Wide-range Detection, and Long-distance Detection. Manipulate Monitor Sensor Controllers ZS-HLDC/LDC SmartMonitor Professional ZS-SW11E V3 Enable maximum sensing performance with fully digital processing. Culmination of OMRON's lead-edge digital technology. Enables easy utilization of the ultimate in measurement performance. Business card size USB provided as a standard feature. More P.12 350 Setting Software for the ZS Series Meets a wide range of logging needs. Supports high-speed simultaneous multichannel waveform graphs. Excel macros provided for simple analysis. More P.19 Diffuse Reflective Sensors Regular Reflective Sensors ZS-LD350S ZS-LD200 200 130 ZS-LD130 80 ZS-LD80 50 40 ZS-LD50/LD50S 20 Spot beam ZS-LDC Ratings and Specifications Measuring center distance Expansion Units Beam Shapes Spot and line beam selection. Wide Range of Products Long-range, middle-range, and short-range models. ZS-LD40T ZS-LD20T/LD20ST Line beam Line beam Line beam Line/spot beam Line beam Line/spot beam 03 Main Applications High Performance ZS-HL Series Very High-performance Sensors that Support Core Quality from Very Long-range to Extremely Precise Measurements ZS-LD10GT/LD15GT Sealer coating ZS-HLDS2T* ZS-HLDS2VT ZS-HLDS5T ZS-HLDS10 ZS-HLDS60 ZS-HLDS150 Ideal for measuring the thickness of silicone or compound semiconductor wafers in polishing and testing processes. Ideal for measuring the potting resin height for electronic components. Ideal for measuring liquid gasket (FPIG) application amounts. Prevents defects such as insufficient seal. Ideal for confirming positioning and repeatability accuracy of XY stages. Ideal for level detection for liquid crystal coaters and PDP fluorescent substances. Protruding objects and steps can be measured from a distance for measurement objects that cannot be accessed easily. Glass substrate Ideal for measuring and controlling dispenser nozzle gaps when applying sealer. * Orders have been discontinued at the end of August 2019. Standard ZS-L Series Standard Sensors Ideal for a Variety of High-precision Displacement Measurements, Including Spot Detection, Wide-range Detection, and Long-distance Detection ZS-LD20ST ZS-LD40T ZS-LD50/LD80 ZS-LD200 ZS-LD350S Ideal for measuring glass thickness and nozzle gaps when coating glass with resist or sealer. Ideal for measuring the warp of resin blades in copy machine toners. Ideal for checking the precision of door installations. Ideal for checking the flatness of robot arms that transport wafers in load ports. 3D shape measurement using automatic X-Y stage Ideal for measurements requiring discrimination between minute parts or fine shape repeatability. 04 S ma rt Se nso r Advanced technology is carried Applications by Industry Automobile and Automotive Parts Measuring Car Bodies Measuring Door Attachment Offsets Electronic Components Measuring Tire Exteriors Inspecting Board Heights Inspecting for Board Coplanarity Measuring Shape for Positioning Laminated Ceramics 1 axis scan Capacitor PCB SmartMonitor graph screen Spot beam Line beam Semiconductors Measuring Electrode Thickness on Compound Semiconductors Household Appliances and Audio-visual Measuring Wafer Warping and Thickness Measuring Arm Inclination LCDs and PDPs Measuring Glass Undulation Simultaneous Measuring of Touch Panel Film Thickness and Gap DVD Chassis Flatness Inspections Digital Camera Tube Lens Inspection Rubber, Resin, and Film Measuring Glass Surfaces Inspecting Glass Heights (Autofocus) Measuring Electrode Thickness on Dielectrics Moving Workpieces (Black Rubber) Measuring Depth of O-Ring Insertion 05 High-performance Sensors High grade High-performance Sensors ZS-HL Series Product Lineup 2D CMOS High-end Displacement Sensors Advanced sensing technology packed into the best Sensor Head for the highest sensing precision Wide lineup of products from 0.25 Pm high-resolution models to 1,500 mm long-range models. Model ZS-HLDS150 Measuring center distance 1500±500 mm Resolution 500 Pm Linearity ±0.2%F.S. Beam shape 1.5 mm × 40 mm 06 ZS-HLDS60 ZS-HLDS10 ZS-HLDS5T ZS-HLDS2T* ZS-HLDS2VT ZS-LD10GT/LD15GT 600±350 mm 8 Pm 100±20 mm 1 Pm 50±5 mm 0.25 Pm 20±1 mm 0.25 Pm 25±2 mm 0.6 Pm 10±0.5 mm /15±0.75 mm 0.25 Pm ±0.07%F.S. ±0.1%F.S. ±0.1%F.S. ±0.05%F.S. ±0.2%F.S. ±0.1%F.S. 0.3 mm × 16 mm 60 Pm × 3.5 mm 30 Pm × 1 mm 20 Pm × 1 mm 45 Pm × 2.2 mm 25 Pm × 900 Pm * Orders have been discontinued at the end of August 2019. Smart Sensor Advanced technology is carried 2D CMOS Laser Image Sensing Element Very high resolution The three basics of sensing precision, speed, and sensitivity - can be balanced because ideal measurement settings can be made for light reception area. Digital Sensing Totally reliable measurements with completely digital sensing. ±0.05% FS Linearity High-performance Sensors All Models Are Class 2 Lasers. High Resolution at 0.001 Pm (ZS-LD10GT) OMRON's digital sensing technology achieves unbelievably high resolution. (ZS-HLDS2T)* Unique OMRON algorithms reduce Extreme stability detection error to improve workpiece measurement accuracy. * Orders have been discontinued at the end of August 2019. Super-high-speed Sampling at 110 Ps High precision Extremely Sensitive Lenses High speed (ZS-HLDS@@/LD@@) You get exact sensing with superior workpiece following performance. CMOS high-speed data reading accurately catches moving workpieces inline. Extreme Stability Ideal Size and Stability Superior Moving Resolution Reduced Error for Different Materials Head Size Increased Lens Resolution 2D CMOS 0 1000 2000 3000 4000 5000 6000 0 5 10 10 Constant distance Travel distance Moving resolution when measuring SUS ZS-HLDS5T 5 4.5 Pm 0 5 0 10 500 1000 1500 2000 2500 3000 Travel distance Sampling: 4 ms Error (Pm) 13.5 Pm Previous OMRON models Moving resolution when measuring SUS 5 Previous OMRON models Cr Glass 10 Pmp-p 5 0 5 10 15 0 20 40 Travel distance (mm) SUS 10 Cr Constant distance Cr ZS-HLDS5T Error (Pm) Measurement value (Pm) 10 With a CCD, the charge overflows to the next pixel when excessive light is received. This phenomenon does not occur with CMOS, so there are no effects from light fluctuations from different materials or excessive light reception. ZS-HL Series Note: ZS-HLDS2T not applicable. * Orders have been discontinued at the end of August 2019. Measurement value (Pm) ZS-HLDS2T* ZS-HLDS5T/ HLDS10 ZS-HL Series ZS-HLDS60/HLDS150 Moving resolution (error based on workpiece surface position) has been reduced dramatically by optimizing the optical system with increased sensitivity and resolution of the light receiving lenses. Previous OMRON models Complete sensing stability with optimum Sensor Head size for best performance and holding mechanism secured at 3 points. (See note.) Glass Glass 5 0.7 Pmp-p 0 5 10 0 20 40 Travel distance (mm) Sampling: 4 ms 07 High-performance Sensors High grade High-performance Sensors ZS-HLDS5T/HLDS10 Reduced Variation in Linearity between Different Objects, and Linearity Determines Measurement Accuracy. Makes it easier to introduce a variety of detection objects. Detect Essentially Any Object Measuring Car Body Widths Linearity Characteristic Model Measuring center distance Resolution Linearity Beam shape ±0.1%F.S. 30 µm × 1 mm ZS-HLDS10 0.15 0.10 0.10 0.05 0.00 −0.05 40.0 100±20 mm −0.10 1 µm −0.15 ±0.1%F.S. 60 µm × 3.5 mm 42.0 44.0 46.0 48.0 0.05 0.00 −0.05 40 42 44 46 48 Specified range Beam shape 0.25 µm ZS-HLDS5T Regular reflection 0.15 Linearity (% F.S.) Linearity Previous OMRON models Regular reflection 50±5 mm Specified range Resolution ZS-HLDS5T Linearity (% F.S.) Model Measuring center distance (ZS-HLDS10) −0.10 −0.15 Measuring range (mm) Measuring range (mm) No.1 Sample-A Sample-B Sample-C Sample-D Sample-E No.2 No.3 No.4 No.5 Note: Typical examples Manage trends by measuring widths of each car model. ZS-HLDS60/HLDS150 A Long Range That Handles Essentially Any Installation Site First 1,500 mm long range sensing in the industry enables measurement of previously impossible points. Model Measuring center distance Resolution Linearity Beam shape Model Measuring center distance Resolution Linearity Beam shape ZS-HLDS60 Simple Long-distance Step Measurement 600±350 mm 8 µm Peak ±0.07%F.S. Bottom 0.3 mm × 16 mm ZS-HLDS150 Peak Bottom 1500±500 mm 500 µm ±0.2%F.S. 1.5 mm × 40 mm Peak/bottom measurement 08 Note: This function may not be applicable in bright surrounds. Smart Sensor Advanced technology is carried High-performance Sensors ZS-HLDS2VT Ideal for Measuring the Height and Thickness of Transparent Objects Tilted and moving workpieces can also be stably measured. Resolution Linearity Beam shape ZS-HLDS2VT 25±2 mm 0.6 µm ±0.2%F.S. 45 µm × 2.2 mm Aspherical lens (newly developed) Angle Characteristics 6 5 Limit angle ( ° ) Model Measuring center distance A special aspherical lens was developed for the ZS-HLDS2VT, and the design of the optical structure was optimized for regular-reflective workpieces. This has greatly increased the allowable degree of tilt and improved stability for measuring transparent and regularreflective workpieces. 4 3 2 1 0 Previous OMRON model Vertical + direction Vertical - direction ZS-HLDS2VT Horizontal + direction Vertical direction Horizontal direction Horizontal - direction 09 High-performance Sensors High grade High-performance Sensors ZS-HLDS2T*/ZS-LD10GT/LD15GT The Only Way to Very High-precision Measurements Superior Features for Semiconductor Wafer, Glass, and Other Measurements Requiring Precision mm Simultaneous Measuring of Touch Panel Film Thickness and Gap Measuring center distance ZS-HLDS2T* 20±1 mm Resolution 0.25 µm Thickness Linearity ±0.05%F.S. Film Glass Beam shape 20 µm × 1 mm 100 400 95 350 90 300 Gap [µm] Model Thickness [µm] Slim 26. 4 85 80 75 250 200 150 70 100 65 50 60 0 0.2 0.2 0.4 0.6 0.8 0 1 0 0.2 0.4 Travel distance (mm) 0.6 0.8 1 Travel distance (mm) Gap * Orders have been discontinued at the end Simultaneous measurement of transparent object thickness and gap of August 2019. An unbelievable stationary measurement precision of 0.25 µm, the highest in this product class. Ideal for Measuring Nozzle Gaps! Model Measuring center distance Resolution Linearity Beam shape 10 ZS-LD10GT/LD15GT 1 ZS-LD10GT/LD15GT 0 -1 -2 -3 -4 Sealant application 0.25 µm 25 × 900 µm ZS-LD10GT 2 Nozzle Emitter Measurement point Inspection of Disk Play on HDD Motor Rotating Plate Sealant supply nozzle Nozzle Gap Sensor 10±0.5 mm/15±0.75 mm ±0.1%F.S. Height Control of Sealant Dispensers Displacement [µm] Reduced pattern influence for moving measurement, the best in the moving resolution industry. Possible to match nozzle drip point and measurement point then measure. Sensor Head with separate light emission and reception in one unit to create nozzle space. Glass substrate -5 1 251 501 Receiver Measures amplitude undulations of 5 µm. 751 Number of data Sm a rt Senso r Advanced technology is carried High-performance Sensors Technology With OMRON's sensing technology and newly developed algorithms, stable, high-precision measurement is possible of workpieces that were difficult to measure using laser displacement meters due to laser light penetration, transmission, excessive reflection, or insufficient light. Mechanisms for Stable Measurement Patent Pending Mechanisms for Stable Measurement Patent Pending Mechanisms for High Resolution Patent Pending No more errors due to reflection coefficients between glass gaps No more errors due to workpiece reflection coefficients. No more resolution errors. No more error due to penetration. Stable measurement by adding received light waveform in 2D image and digital zoom processing. Stable measurement using laser power algorithms that can be adjusted to any value. Digital processing technology between the Sensor and Controller provides high resolution. Stable measurements are achieved by correctly recognizing the light reception distribution on the 2D CMOS. Digital communications (2) Mechanisms for Stable Measurement (3) (1) (Near) Small (Black rubber) Mirror (Large) Reflection coefficient Detects the measurement position after adding the received light lines. Received light amount Adding and averaging ZS Series Removed Position Then with digital processing... ZS-HL Series Measurement cycle time 1/8 better than previous models with addition of received light waveform captured by 2D CMOS and simultaneous measurement of front and back glass surfaces with separate sensitivities. ZS Series Laser Pulse Control Light quantity adjustment to any level. 31 levels 80 ns min. Measurement error Previous products Sensitivity switching Light quantity adjustment algorithms have evolved for stable measurement of a variety of measurement objects. Even if the workpiece status changes suddenly, the sensitivity can compensate at any level so there is no measurement error from sensitivity switching. (1) Received Light Signal Control No clock offset. (2) Large Previous products Light quantity fluctuation error Error between clocks Small (3) (Near) No error ZS Series Received light surface (Far) Real peak position on surface Large Incorrect peak calculation as a result of laser light penetration Received light amount Small (Far) 10,000 levels min. (essentially infinite) No measurement error Received light amount Detects the measurement position for each received light line. Laser power Received light amount One line at a time Previous products Large Light noise Received light waveform disruption due to penetration Small (Near) High-speed digital communications (LVDS) used between Sensor and Controller. Image signal stabilizes because the clock error between the control signal from the Controller and the light reception device disappears. Optimum light quantity adjustment is possible with laser power algorithms that can be adjusted to any level, which facilitates super high resolution. Received light surface (Far) Real surface displacement detected by eliminating penetration effects for PCBs, plastic, and other workpieces penetrated by laser light. 11 High-performance Sensors High grade High-performance Sensors Sensor Controllers ZS-HLDC (Multitasking) Enables maximum sensing performance with fully digital processing and multitasking functions. A controller the size of a business card filled with OMRON's leading-edge digital technology. Enables easy utilization of the ultimate in measurement performance. High-performance Sensing (Multitasking) Simultaneous Measurement and Output of Up to 4 Features For detection of small recesses and protrusions in measurement location When simultaneous measurement of distance to glass, glass thickness, gap, etc., required in glass measurement applications Enlarged Setting example ■Task 1: Step Setting example ■Task 1: Average ■Task 2: Thickness For measurement of steps in different locations with moving Sensor or workpiece For simultaneous measurement of HDD surface deflection and distance to HDD surface Setting example ■Task 1: Average Self-down trigger Average hold With delay ■Task 2: Average Average hold With delay ■Task 3: Calculation (Task 2 - Task 1) Setting example ■Task 1: Average, Average hold ■Task 2: Average, Point-to-point hold Trigger level Delay time 1 Delay time 2 Simultaneous Control in 2 Systems of Data Confirmation and Analysis and Data Collection, Control, and Changeovers ZS-HLDC Multitask Mode Sensing TASK1 TASK2 TASK3 TASK4 I/O Settings Measurement point Filter Output Control Using No-protocol Communications Control Using CompoWay/F* Outline of Functions ZS-LDC Top Operation Menu Single Task Mode (Standard Mode) Sensing TASK1 I/O Settings Filter Output Data Confirmation and Analysis Data collection, control, and changeovers • Checks sensing screen. • Checks measurement values. • Logs measurement values. * OMRON's unique communications protocol. USB RS-232C • Gets measurement results. • Resets to zero. • Switches banks. Improved Total Cycle Time with 1-second High-speed Bank Switching 12 S ma rt Sens or High-performance Sensors Advanced technology is carried Easy Sensing with an HMI That Couldn't Be Easier to Use (Common Functions) Information at the Touch of a Button Set Sensing Directly In RUN (measurement) Mode, measured values and information are displayed using 2 rows of 8-segment LEDs. The large LED display improves visibility. Measurement information includes the threshold, current, resolution, and received light amount and is available with simple key operations. LCD screens can be customized to change the display of desired information to easier-to-understand terminology. In FUN (setting) Mode, setting menus are displayed on the 2 rows of the LCD. Easy-to-understand guidance simplifies setting the many display capabilities of the LCD. Function keys correspond to displayed menu items for intuitive setting of measurement conditions and other parameters. You can also easily switch between Japanese and English displays. Communication with the operator is better than ever before. RUN (measurement mode) Measured value displayed. Example of Display Customization Threshold, current, resolution, received light amount, etc. Device: OMRON #1 MAIN:MEASURE SUB :THRESH Patent Pending FUN (setting mode) Switch measurement information at the touch of a button. Direct setting with function keys. MAIN:MEASURE SUB :THRESH Threshold MAIN:MEASURE SUB :CURRENT Current MAIN:MEASURE SUB :RESOLU Resolution ZS-LDC LD POWER 80.0% SUB:BRIGHT Received light amount Mount to DIN Track or directly to control panels. Patent Pending Single Task Controller Connect directly to a PC using USB. USB 2.0 and RS-232C provided as standard features. LVDS, a new-generation digital high-speed communications interface, is used between the Sensor Head and Controller, an industry first. If USB is used to connect to the computer, high-speed all digital measurement data transfer is possible. Firmware can be updated easily using the SmartMonitor WarpEngine. Simple Operation Reasonable Price USB Connection Panel Mounting Adapter (Option, Sold Separately) 13 Standard Sensors Standard ZS-L Series Product Lineup 2D CMOS Low-end Displacement Sensors Advanced sensing technology packed into the smallest Sensor Heads in this class. Smallest size in this class (65 × 65 mm) Uniform Sensor Head size Line/spot beam type Detects black rubber, mirror, and transparent workpieces Standard Sensors ZS-LD50/LD80/LD130/LD200/LD350S 2D CMOS image sensor Laser Class 2 Degree of Protection: IP67 (Models with 2 m cable) Super Sensitive Lens Note: The ZS-LD50 uses high-precision ganged lenses. ZS-LD20T/LD40T ZS-LD20ST/LD50S Spot Beam Sensors Measurement range: 10 mm ZS-LD50 Measuring center: 50 mm Measurement range: 30 mm 2D CMOS image sensing element ZS-LD80 Measuring center: 80 mm High-precision ganged lenses Measurement range: 30 mm ZS-LD130 Measuring center: 130 mm ZS-LD200 Measuring center: 200 mm Laser Class 2 Degree of Protection: IP67 (Models with 2 m cable) Measurement range: 100 mm ZS-LD20T Measuring center: 20 mm Resolution: 0.25 μm More than sufficient range ZS-LD350S ∗1 Measuring center: 350 mm ∗1. Spot Beam Sensors. Note: Sensor Head can be installed to for either diffuse reflection or regular reflection. (except ZS-LD350S) Correctly compensates measurement values to suit different applications. 14 Measurement range: 270 mm ZS-LD40T Measuring center: 40 mm Resolution: 0.4 μm Line beam (900 × 25 μm) Measurement range: 2 mm Measurement range: 10 mm Line beam (2000 × 35 μm) Diffuse Reflection Sensors ZS-LD50S Measuring center: 50 mm Measurement range: 5 mm Spot beam (50 μm dia.) Measurement range: 2 mm Diffuse Reflection Sensor Regular Reflection Sensors Regular reflection Sensors ZS-LD20ST Measuring center: 20 mm Spot beam (25 μm dia.) S ma rt Sens or Advanced technology is carried All you need to do is select the proper mode to achieve stable sensing of PCBs, resins, black rubber, and other light-penetrating workpieces (these could not be easily handled with previous reflective laser displacement meters.) ZS-LD80 Measuring the Shape of Black Resin Workpieces 15.000 Gain setting: 5 0 Height (mm) 10.000 Line Beam Sensors for Emphasis on Stable Measurement Spot Beam Sensors Ideal for Minute Workpieces and Shape Measurement Line beams produce an averaging affect that is less likely to be affected by surface irregularities, creating stable measurements. Ideal for stable measurements that do not rely on the surface of the target workpiece. Ideal for measurements requiring minute shape repeatability while matching laser beam position with a minute target measurement area. Standard Sensors Stable Measurements for PCBs, Black Resin, and Metal 10 5.000 20 0.000 Travel 30 −5.000 Travel 40 −10.000 −15.000 Number of data Travel distance Complete measurement data will be obtained at angles of up to 40°. Beam width ZS-LD50 Measuring the Shape PCB Surfaces Height (mm) 1.75 Response: 8 ms, High-precision mode, Black gain: 0, Red gain: 5 (max.) Line Beam sensors Amount of displacement Beam diameter Travel distance Amount of displacement Beam diameter ZSZSZSLD20T LD40T LD50 35 μm 60 μm ZSLD80 ZSZSLD130 LD200 1.73 Beam diameter 25 μm 1.71 Beam width 0.9 mm 2 mm 0.9 mm 0.9 mm 0.6 mm 0.9 mm 60 μm 70 μm 100 μm Spot Beam sensors ZS-LD20ST ZS-LD50S ZS-LD350S Beam width 25 μm dia. 50 μm dia. 240 μm dia. 1.69 1.67 1.65 Penetration mode and gain settings used. PCB shapes can be measured without burs or waveform disruptions. Just select High-precision Mode to stably measure black rubber. Just select Penetration Mode to stably measure PCBs or black resin. Stable Measurements for Glass Stably measure height and undulations in transparent, coated, or colored glass on work tables. Stable detection at 40 mm with a line beam of 2 mm. A 2-mm line beam reduces the influence of black and white patterns on granite work tables to achieve stable measurements. ZS-LD40T Measuring Glass Surfaces Easy Sensing with an HMI That Couldn't Be Easier to Use Set Sensing Directly FUN (setting mode) Measurements for Moving Glass [μm] 4 3 2 1 0 −1 −2 −3 −4 Response for glass 8 ms Direct setting with function keys. 0.2 μm Ideal for measuring glass thickness and slit nozzle gaps when coating glass with resist or sealer. 15 Expansion Units Enhancing unit System Configuration Sensors Controllers ZS-HL Series Peripheral Devices Parallel I/O Sensor Controllers Expansion I/O Units PLC Multi-Controllers Data Storage Units High-speed Input Boards (PC) Expansion Units ZG-RPD USB ZS-L Series SmartMonitor (PC) ZS-SW11V3E RS-232C ZS-MDC ZS-DSU Calculating measurement results for each sensor. Log measurement Values. PLCs etc. Analog Data logger etc. Connection Cable ZS-XC02D ZS-HL-series Long-distance Extension Cable 25 m max. Sensor Head ZS-HLDS@ 16 Flexible Long-distance Extension Cable ZS-XC15CR/XC25CR Controller ZS-HLDC@ Sm a r t S enso r Advanced technology is carried Multi-Controller ZS-MDC Centralized Controller Information Calculations Transfers data between multi-connected Controllers and performs high-speed multiprocessing. High-speed Connections for Up To 9 Controllers See the difference in applications requiring multipoint measurement, such as thickness, steps, and flatness measurements. Connect up to 9 Controllers with the fastest high-speed bus in the industry. Digital processing prevents data dropouts to provide the capability to measure exactly what is seen. Sampling speed with 3 Controllers connected: 110 μs, Sampling speed with 9 Controllers connected: 380 μs Note: When using communications commands. SmartMonitor Expansion Units Multi-Controllers Sensor Head Monitor connected Controllers together USB Multipoint measurement (flatness of resins or metals) ZS-MDC Processing results Processing Enabled by the Multi-Controller Flatness Calculations Reference Step Calculations Relative Step Calculations Twisting Calculations Calculating the difference between the maximum and minimum values. Calculating the difference between a reference point (A) and other points. Calculating the difference between all points. Calculating twisting between opposing sides. C A B Number of Sensor Controllers: 3 to 9 A C B Number of Sensor Controllers: 3 to 9 Calculation: A C Number of Sensor Controllers: 3 to 9 Calculation: B TASK1 = A − B TASK2 = B − C TASK3 = C − A TASK1 = A − B TASK2 = A − C ··· Calculation: Task 1 = Max. (A, B, ···) − Min. (A, B, ···) Individual judgments Individual judgments A B D C Number of Sensor Controllers: 4 Calculation: TASK1 = (A − B) − (D − C) Multipoint Thickness Calculations Average Height Calculations Warp Calculations User-set Calculations Calculating the difference between pairs of points. Calculating the average surface height. Calculating warping of selected sides Formulas can be flexibly set. A B C D E F Number of Sensor Controllers: 2, 4, 6, or 8 Calculation: TASK1 = K − (A + B) TASK2 = K − (C + D) TASK3 = K − (E + F) Individual judgments A C B Number of Sensor Controllers: 2 to 9 Calculation: Task 1 = Average (A, B, C, ···) A B C Number of Sensor Controllers: 3 Calculation: Task 1 = B − (A + C)/2 [K + mX + nY] Multi-calculations of Data Multipoint measurement High-speed data transfer 17 Expansion Units Enhancing unit Data Storage Unit ZS-DSU Logging Software for Onsite Installed Efficiently stores sensing data using a variety of logging functions. High-speed, long term logging settings can be used to precisely process the required sensing data, which can be reliably and completely collected using USB and an all-digital bus. Sensor setting data can also be stored. Data for up to 128 banks can be stored and transferred to the Master Unit for changeovers. Expansion Units High-speed sampling rate: 150 μs max. Powerful support for logging data using various trigger functions. Configuration Number of connectable Controllers 10 max. (ZS-MDC: 1, ZS-HLDC/LDC: 9 max.) Connectable Controllers ZS-HLDC@, ZS-LDC@, ZS-MDC@ Data resolution 32 bits Sampling rate • Shortest high-speed logging mode (One-shot Mode) ∗1 • Long-term logging mode (Repeat Mode) ∗2 • Sampling period: 10 ms to 1 h (at 1-ms intervals) Performance Trigger functions Functions Other functions Software (included) Multipoint data collection Traceability Changeover Unit 18 Start and end triggers can be set separately. External trigger/data trigger (self-trigger) Time triggers 1 2 4 9 Min. sampling interval 150 μs 200 μs 350 μs 650 μs Sensor Controller (ZS-LDC) Sensor Controller (ZS-LDC) CF Card • External bank function • Alarm output function • Saved data format customization function • Time function (timestamps) • CSV file generation Software • Excel macros for simple analysis (Equivalent to software provided with SmartMonitor Professional.) ∗1) For One-shot Mode • Connected to ZS-LDC Number of channels Data Storage Unit (ZS-DSU) ∗2) For Repeat Mode (Logging time depends on capacity of Memory Card.) • Example for 64-MB Memory Card Longest logging time 10 min 6.5 min 5.5 min 4.5 min Typical examples Number of Min. sampling interval channels 1 2 4 9 10 ms 10 ms 10 ms 10 ms Longest logging time 20 h 10 h 5h 2h Typical examples Data Storage Unit ZS-DSU • Connected to ZS-MDC Number of Min. sampling interval channels 1 2 4 9 350 μs 400 μs 500 μs 700 μs Longest logging time 20 min 12 min 8 min 5 min Typical examples Sm a r t Sen so r Advanced technology is carried Setting Software for ZS Series SmartMonitor V3 Professional ZS-SW11V3E Use a Computer for Everything from Ideal ZS Settings to Powerful Support of Data Collection and Analysis. Easy Settings Using USB. More Powerful Setting Support Meets a wide range of logging needs. The CMOS light reception image and the received light waveform can be displayed. The real power of the SmartMonitor is seen when measuring transparent objects and other workpieces that create multiple received light waveforms. Log measurement results at various times to leave judgment and inspection results. The fastest sampling interval is 500 μs (see note). ●Received Light Monitor Note: Data may be skipped, depending on the computer system. Use a computer that meets the recommended system requirements. Expansion Units ●Logging Light reception image Received light waveform (Light Brightness) High-speed simultaneous multichannel waveform graphs. Excel macro provided for simple analysis. High-speed display: 2-ms interval at max. speed (see note); Simultaneous multichannel waveform display: Up to 9 waveforms can be displayed. Data collected by logging can be processed with an Excel macro using filters, slope compensation, filter median transitions, differentiation, integration, and arithmetic functions and then used for nominal judgments and other determinations. Note: Data may be skipped, depending on the computer system. Use a computer that meets the recommended system requirements. ●Multi-channel Waveform Display ●Analysis Recommended System Requirements SmartMonitor Professional OS: Windows 10 (32-bit/64-bit version) Windows 7 (32-bit/64-bit version) Windows XP (Service Pack3 or higher, 32-bit version) CPU: Intel Pentium III 1 GHz or faster (2 GHz min. recommended.) Memory: 1 GB min. Available hard disk space: 50 MB min. Display screen: 1,024 × 768 dots min., 16 million colors min. Note: If the recommended system requirements are not met, data may be interrupted and waveforms not displayed correctly when using the logging, high-speed graph drawing, and multi-channel waveform drawing functions. SmartAnalyzer Macro Edition For Microsoft Excel Macro Programming Microsoft Excel 2000 or later required. - Window is registered trademarks of Microsoft Corporation in the USA and other countries. - Other company names and product names in this document are the trademarks or registered trademarks or their respective companies. 19 Ratings and Specifications S p e c i fi c a t i o n Ordering Information Smart Sensor ZS-HL-series Sensor Heads Optical system Sensing distance Regular Reflective Models Diffuse Reflective Models ZS-HL-series Sensor Controllers Beam shape Beam diameter 20±1 mm Line beam 1.0 mm × 20 m 0.25 m 25±2 mm Line beam 2.2 mm × 45 m 0.6 m 50±5 mm Line beam 1.0 mm × 30 m 0.25 m 100±20 mm Line beam 3.5 mm × 60 m 1 m 600±350 mm Line beam 16 mm × 0.3 mm 8 m 1500±500 mm Line beam 40 mm × 1.5 mm 500 m Resolution (see note) Cable length 2m 0.5 m 2m 0.5 m 2m 0.5 m 2m 0.5 m 2m 0.5 m 2m 0.5 m Model ZS-HLDS2T 2M* ZS-HLDS2T 0.5M* ZS-HLDS2VT 2M ZS-HLDS2VT 0.5M ZS-HLDS5T 2M ZS-HLDS5T 0.5M ZS-HLDS10 2M ZS-HLDS10 0.5M ZS-HLDS60 2M ZS-HLDS60 0.5M ZS-HLDS150 2M ZS-HLDS150 0.5M Shape Supply voltage Ratings and Specifications Note : Shape Supply voltage Beam diameter 10±0.5 mm Line beam 900 × 25 m 0.25 m 15±0.75 mm Line beam 900 × 25 m 0.25 m Resolution (see note) Cable length 2m 0.5 m 2m 0.5 m ZS-LD10GT 2M ZS-LD10GT 0.5M ZS-LD15GT 2M ZS-LD15GT 0.5M Beam shape Beam diameter Resolution (see note) Cable length Line beam 900 × 25 m 0.25 m Spot beam 25 m dia. 0.25 m Line beam 2000 × 35 m 0.4 m Line beam 900 × 60 m 0.8 m Spot beam 50 m dia. 0.8 m 80±15 mm Line beam 900 × 60 m 2 m 130±15 mm Line beam 600 × 70 m 3 m 200±50 mm Line beam 900 × 100 m 5 m 350±135 mm Spot beam 240 m dia. 20 m 20±1 mm Note : No. of samples to average: 128 when set to High-precision Mode. *1. Orders have been discontinued at the end of August 2019. *2. Orders have been discontinued at the end of January 2021. 20 Control outputs Model NPN outputs ZS-LDC11 PNP outputs ZS-LDC41 Shape Supply voltage Control outputs Model NPN outputs ZS-MDC11 PNP outputs ZS-MDC41 Control outputs Model 24 VDC 50±5 mm Diffuse Reflective Models ZS-HLDC41 Multi-Controllers ZS-L-series Sensor Heads 40±2.5 mm PNP outputs Model Refer to the table of ratings and specifications for details. Regular Reflective Models ZS-HLDC11 24 VDC Beam shape Optical system Sensing distance NPN outputs ZS-L-series Sensor Controllers ZS-HL-series Sensor Heads (For Nozzle Gaps) Regular Reflective Models Model 24 VDC Note : Refer to the table of ratings and specifications for details. * Orders have been discontinued at the end of August 2019. Optical system Sensing distance Control outputs 2m 0.5 m 2m 0.5 m 4m 2m 0.5 m 2m 0.5 m 2m 0.5 m 2m 1m 0.5 m 2m 0.5 m 2m 0.5 m 2m 0.5 m Model ZS-LD20T 2M ZS-LD20T 0.5M ZS-LD20ST 2M ZS-LD20ST 0.5M ZS-LD40T 4M*1 ZS-LD40T 2M ZS-LD40T 0.5M ZS-LD50 2M ZS-LD50 0.5M ZS-LD50S 2M ZS-LD50S 0.5M ZS-LD80 2M ZS-LD80 1M*2 ZS-LD80 0.5M ZS-LD130 2M ZS-LD130 0.5M ZS-LD200 2M ZS-LD200 0.5M ZS-LD350S 2M ZS-LD350S 0.5M Data Storage Units Shape Supply voltage NPN outputs ZS-DSU11 PNP outputs ZS-DSU41 24 VDC Smart Sensor Advanced technology is carried Accessories (Sold Separately) Controller Link Unit Extension Cables for Sensor Heads Shape Cable length Model ZS-XCN Panel Mount Adapter Shape Model ZS-XPM1 ZS-XPM2 For 1st Controller For expansion (from 2nd Controller on) Model Personal computer (2 m) Qty ZS-XRS3 Shape Qty 1m ZS-XC1A 1 4m ZS-XC4A 1 5m ZS-XC5B (∗1, ∗2) 1 8m ZS-XC8A 1 10 m ZS-XC10B (∗1) 1 Long Extension Cables for Sensor Heads (Used with a Digital Equalizer for ZS-HL Series) Name Model Control outputs Model NPN outputs ZG-RPD11-N PNP outputs ZG-RPD41-N Memory Cards ∗1. Up to two ZS-XC@B Cables can be connected. (22 m max.) ∗2. A Robot Cable (ZS-XC5BR) is also available. RS-232C Cables Connected to Realtime Parallel Output Unit (for ZS-HL Series) Model Model Capacity HMC-EF283 HMC-EF583 256 MB 512 MB Qty Digital Equalizer (Relay) ZS-XEQ 1 Extension Cable (long distance, flexible 15 m cable) ZS-XC15CR 1 Extension Cable (long distance, flexible 25 m cable) ZS-XC25CR 1 Digital Equalizer Connection Cable (0.2 m) ZS-XC02D 1 1 Logging Software ZS-XPT3 Name 1 Model SmartMonitor Professional Ratings and Specifications PLC/PT (2 m) ZS-SW11V3E Quick Reference for Extension Cable Connections Extension Cable Model Length ZS-XC1A 1m ZS-XC4A 4m ZS-XC8A 8m ZS-XC5B 5m ZS-XC10B 10m ZS-XC5BR 5m ZS-XC15CR 15m ZS-XC25CR 25m Bend resistant Sensor Head ZS-LD@ ZS-HLDS2V ZS-HLDS2/ -HLDS5/-HLDS10/ -HLDS60/-HLDS150 Controller ZS-LDC@ ZS-HLDC@ Remarks Only one Extension Cable can be used. Up to two Extension Cables can be used. (The maximum length is 22 m.) A ZS-XEQ Digital Equalizar and ZS-XC02D Digital Equalizar Connecting Cable are requied. 21 Ratings and Specifications ZS-HL/L-series Sensor Controllers Item Model ZS-HLDC11/LDC11 ZS-HLDC41/LDC41 No. of samples to average 1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096 Number of mounted Sensors 1 per Sensor Controller Connection method Serial I/O Serial I/O: connector, Other: pre-wired (Standard cable length: 2 m) USB 2.0 Judgment output External interface Output Ratings and Specifications Inputs Linear output Laser OFF, ZERO reset timing, RESET Status indicators PNP open collector, 50 mA max., residual voltage 1.2 V max. Selectable from 2 types of output, voltage or current (selected by slide switch on bottom). • Voltage output: −10 to 10 V, output impedance: 40 Ω • Current output: 4 to 20 mA, maximum load resistance: 300 Ω ON: Short-circuited with 0 V terminal or 1.5 V or less ON: Short-circuited to supply voltage or within 1.5 V of supply voltage. OFF: Open (leakage current: 0.1 mA max.) OFF: Open (leakage current: 0.1 mA max.) HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (orange), and ENABLE (green) 8-segment red LED, 6 digits Sub-digital 8-segment green LEDs, 6 digits 16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8 pixel matrix Setting keys Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4) Slide switch Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN) Power supply voltage 21.6 V to 26.4 VDC (including ripple) Current consumption 0.5 A max. (when Sensor Head is connected) Ambient temperature Operating: 0 to 50°C, Storage: −15 to +60°C (with no icing or condensation) Ambient humidity Degree of protection Materials Cable length Weight Accessories ∗1. Can be used with ZS-HLDC@1 when Multitask Mode selected. ∗2. Terminal block output is a function of the ZS-HLDC@1. 22 HIGH/PASS/LOW: 3 outputs NPN open collector, 30 VDC, 50 mA max., residual voltage 1.2 V max. Main digital LCD Setting inputs 1 port, 115,200 bps max. HIGH/PASS/LOW 3 outputs Display: Measured value, threshold value, voltage/current, received light amount, and resolution/terminal block output ∗2 Sensing: Mode, gain, measurement object, head installation Measurement point ∗1: Average, peak, bottom, thickness, step, and calculations Filter: Smooth, average, and differentiation Outputs: Scaling, various hold values, and zero reset I/O settings: Linear (focus/correction), judgments (hysteresis and timer), non-measurement, and bank (switching and clear) ∗2 System: Save, initialization, measurement information display, communications settings, key lock, language, and data load Task: ZS-HLDC@1: Single task or multitask (up to 4) ZS-LDC@1: Single task Functions Segment display 1 port, Full Speed (12 Mbps max.), MINI-B RS-232C Operating and storage: 35% to 85% (with no condensation) IP20 (IEC60529) Case: Polycarbonate (PC) 2m Approx. 280 g (excluding packing materials and accessories) Ferrite core (1), instruction sheet Smart Sensor Advanced technology is carried Ratings and Specifications ZS-HL-series Sensor Heads Item ZS-HLDS2T Model ZS-HLDS2VT ZS-HLDS5T ZS-HLDS10 Optical system ZS-HLDS60 ZS-HLDS150 Diffuse reflection ZS-HLDC series Applicable Controllers Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Measuring center distance 20 mm 5.2 mm 25 mm 50 mm 44 mm 100 mm 94 mm 600 mm 1500 mm Measuring range ±1 mm ±1 mm ±2 mm ±5 mm ±4 mm ±20 mm ±16 mm ±350 mm ±500 mm Regular reflection Diffuse reflection Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2) Beam shape Line beam Beam diameter 1 Linearity 2 Resolution 3 1.0 mm × 20 Pm 2.2 mm × 45 Pm ±0.05%F.S. ±0.2%F.S. 0.25 Pm (No. of samples to average: 256) Temperature characteristic 4 0.01%F.S./qC 0.6 Pm (No. of samples to average: 128) 1.0 mm × 30 Pm 3.5 mm × 60 Pm 16 × 0.3 mm (at 500 mm) ±0.1%F.S. 0.25 Pm (No. of samples to average: 512) 1 Pm (No. of samples to average: 64) 0.1%F.S./qC 40 × 1.5 mm (at 1,500 mm) ±0.07%F.S. (250 to 750 mm), ±0.1%F.S. (750 to 950 mm) 8 Pm (No. of samples to average: 64 at 250 mm), 40 Pm (No. of samples to average: 64 at 600 mm) ±0.2%F.S. 500 Pm (No. of samples to average: 64) 0.01%F.S./qC 110 Ps (High-speed Mode), 500 Ps (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode) Sampling cycle Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. LED Indicators Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range. FAR indicator Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. Illumination on received light surface: 1000 lx or less (incandescent light) Illumination on received light surface: 3000 lx or less (incandescent light) Operating ambient illumination Illumination on received light surface: 500 lx or less (incandescent light) Operating: 0 to 50qC, Storage: 15 to 60qC (with no icing or condensation) Ambient temperature Operating and storage: 35% to 85% (with no condensation) Ambient humidity Degree of protection 5 IP64 IP67 IP66 6 Cable length 0.5 m: IP66, cable length 2 m: IP67 Case: Aluminum die-cast, Front cover: Glass Materials 0.5 m, 2 m Cable length 2m 0.5 m, 2 m Approx. 350 g Weight Accessories Ratings and Specifications Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range. NEAR indicator Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (4), insure locks (2), instruction sheet Approx. 600 g Laser labels (1 each for JIS/EN), ferrite cores (2), insure locks (2), instruction sheet Approx. 800 g Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (4), insure locks (2), instruction sheet 1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam. 2. This is the error in the measured value with respect to an ideal straight line. 3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center 4. This is the value obtained at the measuring center distance Linearity may change according to the workpiece. distance in high-precision mode when the number of samples to average is set to within the graph. when the Sensor and workpiece are fixed by an aluminum jig. The following options are available. The maximum resolution at 250 mm is also shown for the ZS-HLDS60. The following options are available. (typical example) 5. Protection structure of connector area is IP40. Model Diffuse reflection Mirror reflection Model Diffuse reflection Mirror reflection 6. Ask your OMRON representative about Sensor Heads with ZS-HLDS2T SUS block Glass ZS-HLDS2T SUS block Glass IP67 protection. ZS-HLDS2VT --Glass ZS-HLDS2VT --Glass ZS-HLDS5T ZS-HLDS10 ZS-HLDS60/HLDS150 White alumina ceramic Glass White alumina ceramic White alumina ceramic --- ZS-HLDS5T ZS-HLDS10 ZS-HLDS60/HLDS150 White alumina ceramic Glass White alumina ceramic White alumina ceramic --- 23 Ratings and Specifications ZS-L-series Sensor Heads Item ZS-LD20T Model ZS-LD20ST ZS-LD40T Applicable Controllers Optical system ZS-LD15GT Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Measuring center distance 20 mm 6.3 mm 20 mm 6.3 mm 40 mm 30 mm 10 mm 15 mm Measuring range ±1 mm ±1 mm ±1 mm ±1 mm ±2.5 mm ±2 mm ±0.5 mm ±0.75 mm Light source Regular reflection Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2) Beam shape Beam diameter ∗1 Line beam Spot beam 900 × 25 μm 25 μm dia. Line beam 2000 × 35 μm Linearity ∗2 Approx. 25 × 900 μm ±0.1% FS Resolution ∗3 0.25 μm Temperature characteristic ∗4 0.04% FS/°C 0.25 μm 0.4 μm 0.04% FS/°C 0.02% FS/°C 0.25 μm 0.25 μm 0.04% FS/°C 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode) Sampling cycle Ratings and Specifications ZS-LD10GT ZS-HLDC/LDC Series Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range. NEAR indicator Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. LED Indicators Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range. FAR indicator Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. Operating ambient illumination Illumination on received light surface: 3000 lx or less (incandescent light) Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation) Ambient temperature Ambient humidity Degree of protection ∗5 Operating and storage: 35% to 85% (with no condensation) Cable length 0.5 m: IP66, cable length 2 m: IP67 Materials Cable length Weight Accessories IP40 Case: Aluminum die-cast, Front cover: Glass 0.5 m, 2 m Approx. 350 g Approx. 400 g Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet Laser safety labels (1 each for JIS/EN), ferrite cores (2), insure locks (2) ∗1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam. ∗2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the regular reflection mode. Linearity may change according to the workpiece. ∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics and glass in the regular reflection mode. ∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig. (typical example) ∗5. Protection structure of connector area is IP40. 24 Sm ar t Senso r Advanced technology is carried Ratings and Specifications ZS-L-series Sensor Heads Item ZS-LD50 Model ZS-LD50S ZS-LD80 Applicable Controllers Optical system ZS-LD130 ZS-LD200 ZS-LD350S ZS-HLDC/LDC Series Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Measuring center distance Diffuse reflection Regular reflection 50 mm 47 mm 50 mm 47 mm 80 mm 78 mm 130 mm 130 mm 200 mm 200 mm 350 mm Measuring range ±5 mm ±4 mm ±5 mm ±4 mm ±15 mm ±14 mm ±15 mm ±12 mm ±50 mm ±48 mm ±135 mm Light source Diffuse reflection Regular reflection Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2) Beam shape Beam diameter ∗1 Line beam Spot beam 900 × 60 μm 50 μm dia. Linearity ∗2 ±0.1% FS Resolution ∗3 Line beam 900 × 60 μm 600 × 70 μm ±0.1% FS 0.8 μm Temperature characteristic ∗4 Line beam 0.02% FS/°C ±0.25% FS Line beam Spot beam 900 × 100 μm 240 μm dia. ±0.1% FS ±0.25% FS ±0.1% FS 0.8 μm 2 μm 3 μm 5 μm 20 μm 0.02% FS/°C 0.01% FS/°C 0.02% FS/°C 0.02% FS/°C 0.04% FS/°C Ratings and Specifications 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode) Sampling cycle Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range. NEAR indicator Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. LED Indicators Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range. FAR indicator Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. Operating ambient illumination Ambient temperature Ambient humidity Degree of protection ∗5 Materials Illumination on received light surface: 2000 lx or less (incandescent light) Illumination on received light surface: 3000 lx or less (incandescent light) Illumination on received light surface: 3000 lx or less (incandescent light) Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation) Operating and storage: 35% to 85% (with no condensation) Cable length 0.5 m: IP66, cable length 2 m: IP67 Case: Aluminum die-cast, Front cover: Glass Cable length 0.5 m, 2 m Weight Approx. 350g Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet Accessories ∗1. Defined as 1/e (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam. ∗2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode. Linearity may change according to the workpiece. ∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode. ∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig. ∗5. Protection structure of connector area is IP40. 2 25 Ratings and Specifications ZS-MDC@1 Multi-Controllers Controller Link Units Basic specifications are the same as those for the ZS-LDC@1 Sensor Controllers. The following points, however, are different. 1. Sensor Heads cannot be connected. 2. Control Link Units are required to connect up to 9 Controllers. Control Link Units are required to connect Controllers. 3. Processing functions between Controllers: Arithmetic functions Connection Using the ZS-XCN Controller Link Units Data Storage Unit Multi-Controller Sensor Controllers ZS-DSU@1 Data Storage Unit Model Item Number of connectable Controllers 10 max. (ZS-MDC: 1, ZS-HLDC/LDC: 9 max.) ∗1 ZS-HLDC@@, ZS-LDC@@, ZS-MDC@@ Serial I/O: connector, Other: pre-wired (standard cable length: 2 m) Connection method External interface Ratings and Specifications ZS-DSU41 Cannot be connected Connectable Controllers Serial I/O USB 2.0 RS-232C Functions 1 port, 115,200 bps max. 3 outputs: HIGH, PASS, and LOW; NPN open-collector, 30 VDC, 50 mA max., residual voltage: 1.2 V max. 3 outputs: HIGH, PASS, and LOW; PNP open-collector, 50 mA max., residual voltage: 1.2 V max. Inputs ON: Short-circuited with 0 V terminal or 1.5 V or less; OFF: Open (leakage current: 0.1 mA max.) ON: Short-circuited to supply voltage or within 1.5 V of supply voltage; OFF: Open (leakage current: 0.1 mA max.) 32 bits Logging trigger functions Start and stop triggers can be set separately; external triggers, data triggers (self-triggers), and time triggers External banks, alarm outputs, saved data format customization, and clock Other functions OUT (orange), PWR (green), ACCESS (orange), and ERR (red) Status indicators 8-segment green LEDs, 6 digits Segment display 16 digits x 2 rows, Color of characters: green, Resolution per character: 5 × 8 pixel matrix LCD Setting inputs 1 port, Full Speed (12 Mbps max.), MINI-B Output Data resolution Setting keys Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4) Slide switch Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN) Power supply voltage 21.6 V to 26.4 VDC (including ripple) Current consumption 0.5 A max. Ambient temperature Operating: 0 to 50°C, Storage: 0 to 60°C (with no icing or condensation) Ambient humidity Degree of protection Materials Weight Accessories ∗1. Control Link Units are required to connect Controllers. 26 ZS-DSU11 Number of mounted Sensor Heads Operating and storage: 35% to 85% (with no condensation) IP20 (IEC60529) Case: Polycarbonate (PC) Approx. 280 g (excluding packing materials and accessories) Ferrite core (1), instruction sheet for Data Storage Unit: CSV File Converter for Data Storage Unit/Smart Analyzer Macro Edition Sm ar t S ens or Advanced technology is carried Dimensions Multi-Controllers Data Storage Units ZS-HLDC@1/LDC@1 ZS-MDC@1 ZS-DSU@1 23.20 Sensor Controllers 60 5.2 52.50 59.85 52.50 4.7 60 4.8 .7 11 18 32.90 24.20 18 32.90 a. .7 11 10.80 Heat-resistive vinyl chloride, 5.2 mm dia. Standard length: 2 m 13 10 di Ratings and Specifications 3.90 4.30 10.80 Heat-resistive vinyl chloride, 5.2 mm dia. Standard length: 2 m 13 10 24.20 a. di 3.90 90 Heat-resistive vinyl chloride, 5.2 mm dia. Standard length: 2 m 18 32.90 24.20 .7 10.80 4.30 3.90 90 4.30 13 10 11 90 11 4.61 60 52.50 a. di 27 Dimensions Sensor Heads ZS-HLDS5T/HLDS10 Reference surface 18 Sensor Heads ZS-HLDS2T Two, 4.5 mm dia. mounting holes 92.1 46 6.5 65 20 Receiver (15) 8 Reception axis A° (See note.) Reference surface Three, 4.5 mm dia. mounting holes 20 16.9 Ratings and Specifications 42 Note: L = 50 and A = 30° for the ZS-HLDS5T. L = 100 and A = 25° for the ZS-HLDS10. 42 Sensor Heads ZS-HLDS60/HLDS150 Optical axis 19 38 (Unit: mm) Reference surface L (See note.) 75 22.7 Operation indicators 65 5 8 47 9.5 28 65±0.1 88.75 120 45 115.06 Measuring center Emission axis Vinyl insulated round cable, 6.8 mm dia. Standard length: 0.5 m and 2 m Note: L = 600 and A = 7° for the ZS-HLDS60. L = 1500 and A = 3° for the ZS-HLDS150. 28 Mounting hole dimensions 2 30.1 57 (5) 16.4 A° (See note.) 25 Reference surface Emitter Three, M4 102 46 Reception axis 42 45±0.1 Receiver Mounting hole dimensions Vinyl insulated round cable, 6.8 mm dia. Standard length: 0.5 m and 2 m 30.1 Vinyl insulated round cable, 6.8 mm dia. Standard length: 0.5 m and 2 m 45.1 30.1 18.1 Reference surface 13 dia. Three, M4 (5) Emission axis Emitter 70±0.1 9.5±0.1 69±0.1 20 32 25° Emitter Operation indicators 9.5 Measuring center 13 dia. Mounting hole dimensions 70 4 Emission axis 22.7 9.5 Two, M4 25 57±0.1 4 25° 56.5 80 72 4 Measuring center L (See note.) Operation indicators 57 100 4 82 65 (Unit: mm) 69 20 25 Reception axis 12 Optical axis 16.4 26.4 Reference surface 36 (Unit: mm) Receiver Smart Sensor Advanced technology is carried Dimensions 105±0.3 115 ZS-LD15GT 8.5 (Unit: mm) Connector 30 Vinyl insulated round cable, 6.2 mm dia. Standard length: 0.5 m and 2 m 16.5 24 29 5 11.5 24 11.5 16.5 15 4. ur Emitter 8 Mounting hole dimensions Ratings and Specifications 40 Fo 30 20 Receiver Four, 4.5 mm dia. mounting holes Four, 8 mm dia. countersunk, depth: 4 ,M 29±0.1 36±0.3 16 4 4 M 26±0.3 e, re Emitter Reception axis 45 Measuring center 20±0.1 Mounting hole dimensions 90° Emission axis 50 40±0.25 4 30±0.1 C1 Reference surface Reception axis 44 84 74 55 44 12.50 17.50 25 55±0.3 45 25 17.50 12.50 10 10 Three, 4.5 mm dia. mounting holes 90° Th 46±0.1 76±0.1 Reference surface Emission axis Measuring center o, 26±0.1 Connector Tw 96±0.1 (Unit: mm) 45 35 30 56 85±0.3 Vinyl insulated round cable, 6.2 mm dia. Standard length: 0.5 m and 2 m 42 30 15 8.5 48 40 30 25 20 12 42 Sensor Heads ZS-LD10GT Receiver Sensor Heads 56±0.1 8 Measuring center Reference surface 8 Reception axis Receiver 8 4.5 A° (See note.) 30.1 42 Connector Range indicator 56±0.1 Emission axis 4 Mounting hole dimensions 56 Note: L = 50 and A = 30° for the ZS-LD50/50S. L = 80 and A = 15° for the ZS-LD80. L = 130 and A = 12° for the ZS-LD130. L = 200 and A = 8° for the ZS-LD200. L = 350 and A = 5° for the ZS-LD350S. 56±0.1 56 65 Emitter M o, Tw 8.5 30.1 (Unit: mm) 45 30 Two, 4.5 mm dia. mounting holes 4 65 4 M o, Tw Mounting hole dimensions 56 8.5 8 8 4.5 56±0.1 56 65 Range indicator Reception axis Receiver A (See note.) L (See note.) 45 Emitter Emission axis 35 15.30 27.1 Reference surface (Unit: mm) 27.1 8 8 Measuring center ZS-HLDS2VT/LD20T/LD20ST/LD40T Two, 4.5 mm dia. mounting holes 4 65 4.5 L (See note.) 4.5 35 11 15.3 8 ZS-LD50/LD50S/LD80/LD130/LD200/LD350S 42 Connector Vinyl insulated round cable, 6.2 mm dia. Standard length: 0.5 m and 2 m Note: L = 25 and A = 34.5° for the ZS-HLDS2VT. L = 20 and A = 45° for the ZS-LD20T/20ST. L = 40 and A = 32° for the ZS-LD40T. Vinyl insulated round cable, 6.2 mm dia. Standard length: 0.5 m and 2 m 29 Dimensions Realtime Parallel Output Unit Panel Mount Adapter ZG-RPD@1-N ZS-XPM1/XPM2 (Dimensions for Panel Mounting) Two, mounting holes (Unit: mm) 13 (60 × n) + 12 21 (Unit: mm) Panel cutout dimensions 3 60 × n Panel 80 DIN Track 89 116±1 (140) Vinyl-insulated round cable 3.8 dia., 10 cores (conductor cross-sectional area: 0.013 mm2, insulator diameter: 0.38 mm), standard length: 150 mm 70 90 (2.85) 11.5 13 55 (14.15) 122 98 32.90 Panel (60 × n) + 8 (2) (37.5) 6 Panel Mount Adapter (See note.) 35.20 Ratings and Specifications 30 Digital Equalizer Mounting bracket ZS-XEQ 25.5 3 (Unit: mm) 22 4.5 37 33 +1° +1° 15° 0 15° 0 4.5 43 70 5.5 54 di 0 10 Tw .5 o, 3 M 4 a. 21 37 Three, R2.25 90 °± 1° 5.5 37 4.5 22 +1° +1° 15° 0 15° 0 11.50 16.50 33 43 4.5 30 n: Number of gang-mounted Controllers (1 to 11) Note: Dimensions are shown for a panel thickness of 2.0 mm. Sm ar t S ens or Advanced technology is carried Safety Precautions for Using Laser Equipment Laser Label Indications Attach the following warning label to the side of the ZS series Sensor Head. READ AND UNDERSTAND THIS DOCUMENT Please read and understand this document before using the products. Please consult your OMRON representative if you have any questions or comments. WARRANTY OMRON's exclusive warranty is that the products are free from defects in materials and workmanship for a period of one year (or other period if specified) from date of sale by OMRON. OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NON-INFRINGEMENT, MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED. LIMITATIONS OF LIABILITY OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY. In no event shall responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted. IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE PRODUCTS UNLESS OMRON's ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED, INSTALLED, AND MAINTAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE MODIFICATION OR REPAIR. SUITABILITY FOR USE THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR RATED FOR ENSURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPONENT OR PROTECTIVE DEVICE FOR SUCH PURPOSES. Please refer to separate catalogs for OMRON's safety rated products. OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of products in the customer's application or use of the product. At the customer's request, OMRON will provide applicable third party certification documents identifying ratings and limitations of use that apply to the products. This information by itself is not sufficient for a complete determination of the suitability of the products in combination with the end product, machine, system, or other application or use. Please know and observe all prohibitions of use applicable to the products. NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM. PERFORMANCE DATA Performance data given in this document is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of OMRON's test conditions, and the users must correlate it to actual application requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability. CHANGE IN SPECIFICATIONS Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice to change model numbers when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the product may be changed without any notice. When in doubt, special model numbers may be assigned to fix or establish key specifications for your application on your request. Please consult with your OMRON representative at any time to confirm actual specifications of purchased products. Ratings and Specifications WARNING Do not expose your eyes to the laser radiation either directly or indirectly (i.e., after reflection from a mirror or shiny surface). The laser radiation has a high power density and exposure may result in loss of sight. DIMENSIONS AND WEIGHTS Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown. ERRORS AND OMISSIONS The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical, or proofreading errors, or omissions. PROGRAMMABLE PRODUCTS OMRON shall not be responsible for the user's programming of a programmable product, or any consequence thereof. COPYRIGHT AND COPY PERMISSION This document shall not be copied for sales or promotions without permission. This document is protected by copyright and is intended solely for use in conjunction with the product. Please notify us before copying or reproducing this document in any manner, for any other purpose. If copying or transmitting this document to another, please copy or transmit it in its entirety. The following are some examples of applications for which particular attention must be given. This is not intended to be an exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the products: • Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in this document. • Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement machines, vehicles, safety equipment, and installations subject to separate industry or government regulations. • Systems, machines, and equipment that could present a risk to life or property. 31 This document provides information mainly for selecting suitable models. Please read the manual carefully for information that the user must understand and accept before purchase, including information on warranty, limitations of liability, and precautions. OMRON Corporation Industrial Automation Company Authorized Distributor: Tokyo, JAPAN Contact: www.ia.omron.com Regional Headquarters OMRON EUROPE B.V. Sensor Business Unit Carl-Benz-Str. 4, D-71154 Nufringen, Germany Tel: (49) 7032-811-0/Fax: (49) 7032-811-199 OMRON ELECTRONICS LLC One Commerce Drive Schaumburg, IL 60173-5302 U.S.A. Tel: (1) 847-843-7900/Fax: (1) 847-843-7787 OMRON ASIA PACIFIC PTE. LTD. No. 438A Alexandra Road # 05-05/08 (Lobby 2), Alexandra Technopark, Singapore 119967 Tel: (65) 6835-3011/Fax: (65) 6835-2711 OMRON (CHINA) CO., LTD. Room 2211, Bank of China Tower, 200 Yin Cheng Zhong Road, PuDong New Area, Shanghai, 200120, China Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200 © OMRON Corporation 2009-2021 All Rights Reserved. In the interest of product improvement, specifications are subject to change without notice. CSM_5_11 Printed in Japan Cat. No. E375-E1-06