InvenSense Inc.
1745 Technology Drive, San Jose, CA 95110 U.S.A.
Tel: +1 (408) 988-7339 Fax: +1 (408) 988-8104
Website: www.invensense.com
Document Number: PS-ITG-1010A-00
Revision: 1.1
Release Date: 03/02/2015
ITG-1010
Product Specification
Revision 1.1
Confidential & Proprietary
1 of 46
ITG-1010 Product Specification
Document Number: PS-ITG-1010A-00
Revision: 1.1
Release Date: 03/02/2015
CONTENTS
1
DOCUMENT INFORMATION ..................................................................................................................... 4
1.1
1.2
1.3
1.4
2
FEATURES ................................................................................................................................................. 6
2.1
2.2
2.3
2.4
2.5
2.6
3
2
I C SERIAL INTERFACE .........................................................................................................................17
SERIAL INTERFACE CONSIDERATIONS ..............................................................................................22
7.1
7.2
8
BLOCK DIAGRAM ..................................................................................................................................15
OVERVIEW ...........................................................................................................................................15
THREE-AXIS MEMS GYROSCOPE WITH 16-BIT ADCS AND SIGNAL CONDITIONING ..................................15
2
I C AND SPI SERIAL COMMUNICATIONS INTERFACE ...............................................................................15
INTERNAL CLOCK GENERATION .............................................................................................................16
SENSOR DATA REGISTERS ...................................................................................................................16
FIFO ...................................................................................................................................................16
INTERRUPTS.........................................................................................................................................16
DIGITAL-OUTPUT TEMPERATURE SENSOR .............................................................................................16
BIAS AND LDO .....................................................................................................................................16
DIGITAL INTERFACE...............................................................................................................................17
6.1
7
PIN OUT AND SIGNAL DESCRIPTION.......................................................................................................13
TYPICAL OPERATING CIRCUIT ...............................................................................................................14
BILL OF MATERIALS FOR EXTERNAL COMPONENTS.................................................................................14
FUNCTIONAL OVERVIEW .......................................................................................................................15
5.1
5.2
5.3
5.4
5.5
5.6
5.7
5.8
5.9
5.10
6
SENSOR SPECIFICATIONS ....................................................................................................................... 7
ELECTRICAL SPECIFICATIONS.................................................................................................................. 8
ELECTRICAL SPECIFICATIONS, CONTINUED .............................................................................................. 9
2
I C TIMING CHARACTERIZATION ............................................................................................................10
SPI TIMING CHARACTERIZATION ...........................................................................................................11
ABSOLUTE MAXIMUM RATINGS ..............................................................................................................12
APPLICATIONS INFORMATION .............................................................................................................13
4.1
4.2
4.3
5
SENSORS ............................................................................................................................................... 6
DIGITAL OUTPUT .................................................................................................................................... 6
DATA PROCESSING ................................................................................................................................ 6
CLOCKING .............................................................................................................................................. 6
POWER .................................................................................................................................................. 6
PACKAGE ............................................................................................................................................... 6
ELECTRICAL CHARACTERISTICS .......................................................................................................... 7
3.1
3.2
3.3
3.4
3.5
3.6
4
REVISION HISTORY ................................................................................................................................. 4
PURPOSE AND SCOPE ............................................................................................................................ 5
PRODUCT OVERVIEW.............................................................................................................................. 5
APPLICATIONS ........................................................................................................................................ 5
SUPPORTED INTERFACES .....................................................................................................................22
LOGIC LEVELS ......................................................................................................................................22
ASSEMBLY ...............................................................................................................................................23
8.1
8.2
8.3
ORIENTATION OF AXES .........................................................................................................................23
PACKAGE DIMENSIONS .........................................................................................................................24
PACKAGE MARKING SPECIFICATION ......................................................................................................25
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ITG-1010 Product Specification
8.4
8.5
9
Document Number: PS-ITG-1010A-00
Revision: 1.1
Release Date: 03/02/2015
TAPE & REEL SPECIFICATION ................................................................................................................25
PCB DESIGN GUIDELINES.....................................................................................................................27
REGISTER MAP .......................................................................................................................................28
10
REGISTER DESCRIPTIONS ................................................................................................................30
10.1
10.2
10.3
10.4
10.5
10.6
10.7
10.8
10.9
10.10
10.11
10.12
10.13
10.14
10.15
10.16
10.17
11
REGISTERS 04-05, 07-08, 10-11- G YROSCOPE OFFSET TEMPERATURE COMPENSATION (TC)....................30
REGISTERS 19 TO 24 – GYROSCOPE OFFSET ADJUSTMENT ....................................................................30
REGISTER 25 – SAMPLE RATE DIVIDER .................................................................................................31
REGISTER 26 – CONFIGURATION ...........................................................................................................31
REGISTER 27 – GYROSCOPE CONFIGURATION.......................................................................................32
REGISTER 35 – FIFO ENABLE...............................................................................................................34
REGISTER 55 – INT PIN / BYPASS ENABLE CONFIGURATION...................................................................35
REGISTER 56 – INTERRUPT ENABLE ......................................................................................................36
REGISTER 58 – INTERRUPT STATUS ......................................................................................................37
REGISTERS 65 AND 66 – TEMPERATURE MEASUREMENT........................................................................38
REGISTERS 67 TO 72 – GYROSCOPE MEASUREMENTS ...........................................................................39
REGISTER 106 – USER CONTROL .........................................................................................................40
REGISTER 107 – POWER MANAGEMENT 1 .............................................................................................41
REGISTER 108 – POWER MANAGEMENT 2 .............................................................................................42
REGISTER 114 AND 115 – FIFO COUNT REGISTERS ..............................................................................43
REGISTER 116 – FIFO READ W RITE .....................................................................................................44
REGISTER 117 – W HO AM I ..................................................................................................................45
ENVIRONMENTAL COMPLIANCE ......................................................................................................46
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ITG-1010 Product Specification
1
Document Number: PS-ITG-1010A-00
Revision: 1.1
Release Date: 03/02/2015
Document Information
1.1
Revision
Date
Revision History
Revision Description
12/24/2013
1.0
Initial Release
03/02/2015
1.1
Changed the top mark specification from IT10 to T36D C
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ITG-1010 Product Specification
1.2
Document Number: PS-ITG-1010A-00
Revision: 1.1
Release Date: 03/02/2015
Purpose and Scope
This document is a preliminary product specification, providing a description, specifications, and design
related information for the three axis ITG-1010™ gyroscope. The device is housed in a small 3x3x0.9mm
QFN package.
1.3
Product Overview
The ITG-1010 is a single-chip, digital output, 3 Axis MEMS gyroscope IC which features a 512-byte FIFO.
The FIFO can lower the traffic on the serial bus interface, and reduce power consumption by allowing the
system processor to burst read sensor data and then go into a low-power mode.
The gyroscope includes a programmable full-scale range of ±250, ±500, ±1000, and ±2000 degrees/sec,
very low Rate noise at 0.01 dps/√Hz and extremely low power consumption at 3.2mA. Factory-calibrated
initial sensitivity reduces production-line calibration requirements.
Other industry-leading features include on-chip 16-bit ADCs, programmable digital filters, a precision clock
with 1% drift from -40°C to 85°C, an embedded temperature sensor, and programmable interrupts. The
2
device features I C and SPI serial interfaces, a VDD operating range of 1.71 to 3.6V, and a separate digital
IO supply, VDDIO from 1.71V to 3.6V.
By leveraging its patented and volume-proven CMOS-MEMS fabrication platform, which integrates MEMS
wafers with companion CMOS electronics through wafer-level bonding, InvenSense has driven the gyro
package size down to a footprint and thickness of 3x3x0.9mm (16-pin QFN), to provide a very small yet high
performance low cost package. The device provides high robustness by supporting 10,000g shock
reliability.
1.4
Applications
•
•
•
•
•
Motion UI
Handset gaming
Location based services, points of interest, and dead reckoning
Health and sports monitoring
Power management
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ITG-1010 Product Specification
2
Document Number: PS-ITG-1010A-00
Revision: 1.1
Release Date: 03/02/2015
Features
The ITG-1010 MEMS gyroscope includes a wide range of features:
2.1
Sensors
•
•
•
•
•
•
2.2
Monolithic X-, Y-, Z-Axis angular rate sensor (gyros) integrated circuit
Digital-output temperature sensor
External sync signal connected to the FSYNC pin supports image, video and GPS
synchronization
Factory calibrated scale factor
High cross-axis isolation via proprietary MEMS design
10,000g shock tolerant
Digital Output
•
•
•
•
•
2.3
2
Fast Mode (400kHz) I C serial interface
1 MHz SPI serial interface for full read/write capability
20 MHz SPI to read gyro sensor & temp sensor data.
16-bit ADCs for digitizing sensor outputs
User-programmable full-scale-range of ±250, ±500, ±1000, and ±2000 °/sec
Data Processing
•
•
•
•
•
2.4
The total data set obtained by the device includes gyroscope data, temperature data, and the one
bit external sync signal connected to the FSYNC pin.
FIFO allows burst read, reduces serial bus traffic and saves power on the system processor.
2
FIFO can be accessed through both I C and SPI interfaces.
Programmable interrupt
Programmable low-pass filters
Clocking
•
2.5
On-chip timing generator clock frequency ±1% drift over full temperature range
Power
•
•
•
•
•
2.6
VDD supply voltage range of 1.71V to 3.6V
2
Flexible VDDIO reference voltage allows for multiple I C and SPI interface voltage levels
Power consumption with three axes active: 3.2mA
Sleep mode: 8μA
Each axis can be individually powered down
Package
•
•
•
3x3x0.9mm footprint and maximum thickness 16-pin QFN plastic package
MEMS structure hermetically sealed at wafer level
RoHS and Green compliant
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Document Number: PS-ITG-1010A-00
Revision: 1.1
Release Date: 03/02/2015
ITG-1010 Product Specification
3
Electrical Characteristics
3.1
Sensor Specifications
Typical Operating Circuit of Section 4.2, VDD = 2.5V, VDDIO = 1.8V, TA=25°C.
Parameter
GYRO SENSITIVITY
Full-Scale Range
Conditions
FS_SEL=0
FS_SEL=1
FS_SEL=2
FS_SEL=3
±250
±500
±1000
±2000
º/s
º/s
º/s
º/s
Sensitivity Scale Factor
FS_SEL=0
FS_SEL=1
FS_SEL=2
FS_SEL=3
131
65.5
32.8
16.4
16
±4.5
±4
LSB/(º/s)
LSB/(º/s)
LSB/(º/s)
LSB/(º/s)
bits
%
%
Best fit straight line; 25°C
±0.2
±2
%
%
25°C
-10°C to +75°C
±15
±15
º/s
º/s
GYRO NOISE PERFORMANCE
Total RMS Noise
Rate Noise Spectral Density
GYRO MECHANICAL
Mechanical Frequency
FS_SEL=0
DLPFCFG=2 (92 Hz)
At 10Hz
0.1
0.01
º/s-r m s
º/s/√Hz
GYRO START-UP TIME
ZRO Settling
DLPFCFG=0, to ±1º/s of Final
From Sleep Mode to ready
From Power On to ready
Gyro ADC Word Length
Sensitivity Scale Factor Tolerance
Sensitivity Scale Factor Variation Over
Temperature
Nonlinearity
Cross-Axis Sensitivity
GYRO ZERO-RATE OUTPUT (ZRO)
Initial ZRO Tolerance
ZRO Variation Over Temperature
TEMPERATURE SENSOR
Range
Sensitivity
Room-Temperature Offset
Linearity
Min
25°C
-10°C to +75°
25
Untrimmed
21°C
TEMPERATURE RANGE
Specification Temperature Range
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-10
7 of 46
Typical
27
Max
29
Unit
kHz
35
50
ms
ms
-10 to +75
321.4
0
±0.2
ºC
LSB/ºC
LSB
°C
+75
ºC
Notes
ITG-1010 Product Specification
3.2
Document Number: PS-ITG-1010A-00
Revision: 1.1
Release Date: 03/02/2015
Electrical Specifications
Typical Operating Circuit of Section 4.2, VDD = 2.5V, VDDIO = 1.8V, TA = 25°C.
Parameters
Conditions
Min
VDD POWER SUPPLY
Operating Voltage Range
Power-Supply Ramp Rate
Normal Operating Current
Sleep Mode Current
VDDIO REFERENCE VOLTAGE
(must be regulated)
Voltage Range
Power-Supply Ramp Rate
Normal Operating Current
Monotonic ramp. Ramp
rate is 10% to 90% of the
final value
Three Axes Active
Monotonic ramp. Ramp
rate is 10% to 90% of the
final value
10pF load, 5MHz data rate.
Does not include pull up
resistor current draw as
that is system dependent
Max
Units
1.71
3.6
V
1
100
ms
3.2
8
3.6
V
0.1
100
ms
AD0 = 0
AD0 = 1
Output Leakage Current
tINT, INT Pulse Width
300
µA
12
ms
1101000
1101001
DIGITAL INPUTS (FSYNC, AD0,
SCLK, SDI, /CS)
VIH, High Level Input Voltage
VIL, Low Level Input Voltage
CI, Input Capacitance
DIGITAL OUTPUT (INT, SDO)
VOH, High Level Output Voltage
VOL1, LOW-Level Output Voltage
VOL.INT1, INT Low-Level Output Voltage
Notes
mA
µA
1.71
START-UP TIME FOR REGISTER
READ/WRITE
I2C ADDRESS
Typical
0.7*VDDIO
0.3*VDDIO