±250°/sec Yaw Rate Gyroscope
ADXRS622
FEATURES
GENERAL DESCRIPTION
Complete rate gyroscope on a single chip
Z-axis (yaw rate) response
High vibration rejection over wide frequency
2000 g powered shock survivability
Ratiometric to referenced supply
5 V single-supply operation
105°C operation
Self-test on digital command
Ultrasmall and light: 1000 for all typical performance plots, unless otherwise noted.
35
20
18
PERCENT OF POPULATION
PERCENT OF POPULATION
30
16
14
12
10
8
6
4
25
20
15
10
5
2
10
07754-007
8
6
4
2
0
–2
–4
PERCENT CHANGE FROM 25°C
Figure 7. Sensitivity Drift over Temperature
Figure 4. Null Output at 25°C (VRATIO = 5 V)
40
70
35
15
–375
–400
–425
–450
–475
–500
–675
(mV)
Figure 5. Null Drift over Temperature (VRATIO = 5 V)
07754-008
mV DRIFT FROM 25°C
07754-005
400
350
300
250
200
150
100
0
50
–50
–100
–150
–200
–250
0
–300
0
–350
5
–400
10
–525
10
–550
20
20
–575
30
25
–600
40
30
–625
50
–650
PERCENT OF POPULATION
60
PERCENT OF POPULATION
–6
–10
2.80
07754-004
2.75
2.70
2.60
2.65
2.50
2.55
2.45
2.40
2.35
2.30
2.25
2.20
(V)
–8
0
0
Figure 8. ST1 Output Change at 25°C (VRATIO = 5 V)
30
40
35
PERCENT OF POPULATION
20
15
10
30
25
20
15
10
5
5
0
(mV)
Figure 6. Sensitivity at 25°C (VRATIO = 5 V)
Figure 9. ST2 Output Change at 25°C (VRATIO = 5 V)
Rev. C | Page 6 of 12
675
07754-009
650
625
600
575
550
525
500
475
450
425
400
375
7.8
7.7
07754-006
(mV/°/sec)
7.6
7.5
7.4
7.3
7.2
7.1
7.0
6.9
6.8
6.7
6.6
6.5
6.4
0
6.3
PERCENT OF POPULATION
25
ADXRS622
30
70
25
PERCENT OF POPULATION
50
40
30
20
20
15
10
5
10
0
2.55
(V)
07754-013
2.53
2.51
2.49
2.47
2.45
2.43
2.41
2.39
2.35
5
PERCENT MISMATCH
07754-010
4
3
2
1
0
–1
–2
–3
–4
–5
0
2.37
PERCENT OF POPULATION
60
Figure 13. VTEMP Output at 25°C (VRATIO = 5 V)
Figure 10. Self-Test Mismatch at 25°C (VRATIO = 5 V)
3.3
600
3.1
400
2.9
ST2
2.7
200
(V)
(mV)
2.5
0
2.3
2.1
200
ST1
1.9
400
–30
–10
10
30
50
TEMPERATURE (°C)
70
90
110
1.5
–50
07754-011
600
–50
Figure 11. Typical Self-Test Change over Temperature
–25
0
25
50
TEMPERATURE (°C)
75
100
07754-114
1.7
Figure 14. VTEMP Output over Temperature, 256 Parts (VRATIO = 5 V)
30
60
REF
50
Y
X
40
+45°
20
g OR °/sec
–45°
15
30
20
10
10
0
5
(mA)
4.5
–20
750
07754-012
4.3
4.1
3.9
3.7
3.5
3.3
3.1
2.9
2.7
0
770
790
810
830
TIME (ms)
Figure 12. Current Consumption at 25°C (VRATIO = 5 V)
Figure 15. g and g × g Sensitivity for a 50 g, 10 ms Pulse
Rev. C | Page 7 of 12
850
07754-014
–10
2.5
PERCENT OF POPULATION
25
ADXRS622
0.10
2.0
LAT
LONG
RATE
1.8
1.6
1.2
(°/sec)
PEAK RATEOUT (°/s)
0.05
1.4
1.0
0
0.8
0.6
–0.05
0.4
1k
FREQUENCY (Hz)
10k
–0.10
07754-116
0
100
0
20
40
60
80
100
120
140
TIME (Hours)
Figure 16. Typical Response to 10 g Sinusoidal Vibration
(Sensor Bandwidth = 40 Hz)
07754-018
0.2
Figure 19. Typical Shift in 90 sec Null Averages Accumulated
over 140 Hours
400
0.10
300
DUT1 OFFSET BY +200°/sec
200
0.05
(°/sec)
(°/sec)
100
0
0
–100
DUT2 OFFSET BY –200°/sec
–200
–0.05
0
50
100
150
200
250
TIME (ms)
–0.10
07754-016
–400
0
1200
1800
2400
3000
3600
TIME (Seconds)
Figure 17. Typical High g (2500 g) Shock Response
(Sensor Bandwidth = 40 Hz)
Figure 20. Typical Shift in Short Term Null (Bandwidth = 1 Hz)
1
0.1
(°/sec rms)
(°/sec/ Hz rms)
0.1
0.01
0.01
0.1
1
10
100
1k
10k
100k
AVERAGING TIME (Seconds)
0.0001
10
100
1k
10k
100k
(Hz)
Figure 21. Typical Noise Spectral Density (Bandwidth = 40 Hz)
Figure 18. Typical Root Allan Deviation at 25°C vs. Averaging Time
Rev. C | Page 8 of 12
07754-020
0.001
07754-017
0.001
0.01
600
07754-019
–300
ADXRS622
THEORY OF OPERATION
SETTING BANDWIDTH
External Capacitor COUT is used in combination with the onchip ROUT resistor to create a low-pass filter to limit the bandwidth
of the ADXRS622 rate response. The −3 dB frequency set by
ROUT and COUT is
fOUT = 1/(2 × π × ROUT × COUT )
0.01
0.0001
0.000001
10
100
1k
10k
100k
(Hz)
07754-021
0.00001
Figure 22. Noise Spectral Density with Additional 250 Hz Filter
TEMPERATURE OUTPUT AND CALIBRATION
It is common practice to temperature-calibrate gyros to improve
their overall accuracy. The ADXRS622 has a temperature proportional voltage output that provides input to such a calibration
method. The temperature sensor structure is shown in Figure 23.
The temperature output is characteristically nonlinear, and any
load resistance connected to the TEMP output results in decreasing
the TEMP output and its temperature coefficient. Therefore,
buffering the output is recommended.
The voltage at the TEMP pin (3F, 3G) is nominally 2.5 V at 25°C,
and VRATIO = 5 V. The temperature coefficient is ~9 mV/°C at
25°C. Although the TEMP output is highly repeatable, it has
only modest absolute accuracy.
VRATIO
and can be well controlled because ROUT has been trimmed
during manufacturing to be 180 kΩ ± 1%. Any external resistor
applied between the RATEOUT pin (1B, 2A) and SUMJ pin
(1C, 2C) results in
ROUT = (180 kΩ × REXT )/(180 kΩ + REXT )
0.001
RFIXED
VTEMP
RTEMP
07754-022
The electrostatic resonator requires 18 V to 20 V for operation.
Because only 5 V are typically available in most applications,
a charge pump is included onchip. If an external 18 V to 20 V
supply is available, the two capacitors on CP1 from CP4 can
be omitted, and this supply can be connected to the CP5 pin
(6D, 7D). Note that CP5 should not be grounded when power is
applied to the ADXRS622. Although no damage occurs, under
certain conditions the charge pump may fail to start up after the
ground is removed if power is not first removed from the
ADXRS622.
0.1
(°/sec/ Hz rms)
The ADXRS622 operates on the principle of a resonator gyro.
Two polysilicon sensing structures each contain a dither frame
that is electrostatically driven to resonance, producing the necessary velocity element to produce a Coriolis force during angular
rate. At two of the outer extremes of each frame, orthogonal to
the dither motion, are movable fingers that are placed between
fixed pickoff fingers to form a capacitive pickoff structure that
senses Coriolis motion. The resulting signal is fed to a series of
gain and demodulation stages that produce the electrical rate
signal output. The dual-sensor design rejects external g-forces and
vibration. Fabricating the sensor with the signal conditioning
electronics preserves signal integrity in noisy environments.
Figure 23. ADXRS622 Temperature Sensor Structure
CALIBRATED PERFORMANCE
In general, an additional hardware or software filter is added to
attenuate high frequency noise arising from demodulation spikes
at the 14 kHz resonant frequency of the gyro. The noise spikes
at 14 kHz can be clearly seen in the power spectral density
curve, shown in Figure 21. Typically, this additional filter corner
frequency is set to greater than 5× the required bandwidth to
preserve good phase response.
Using a three-point calibration technique, it is possible to
calibrate the ADXRS622 null and sensitivity drift to an overall
accuracy of nearly 200°/hour. An overall accuracy of 40°/hour
or better is possible using more points.
Limiting the bandwidth of the device reduces the flat-band noise
during the calibration process, improving the measurement
accuracy at each calibration point.
Figure 22 shows the effect of adding a 250 Hz filter to the
output of an ADXRS622 set to 40 Hz bandwidth (as shown
in Figure 21). High frequency demodulation artifacts are
attenuated by approximately 18 dB.
Rev. C | Page 9 of 12
ADXRS622
ADXRS622 AND SUPPLY RATIOMETRICITY
NULL ADJUSTMENT
The ADXRS622 RATEOUT and TEMP signals are ratiometric
to the VRATIO voltage, that is, the null voltage, rate sensitivity, and
temperature outputs are proportional to VRATIO. Therefore, the
ADXRS622 is most easily used with a supply-ratiometric analogto-digital converter (ADC) that results in self-cancellation of errors
due to minor supply variations.
The nominal 2.5 V null is for a symmetrical swing range at
RATEOUT (1B, 2A). However, a nonsymmetric output swing
may be suitable in some applications. Null adjustment is possible
by injecting a suitable current to SUMJ (1C, 2C). Note that supply
disturbances may reflect some null instability. Digital supply noise
should be avoided, particularly in this case.
There is some small error due to nonratiometric behavior. Typical
ratiometricity error for null, sensitivity, self-test, and temperature
output is outlined in Table 4.
SELF-TEST FUNCTION
Note that VRATIO must never be greater than AVCC.
Table 4. Ratiometricity Error for Various Parameters
Parameter
ST1
Mean
Sigma
ST2
Mean
Sigma
Null
Mean
Sigma
Sensitivity
Mean
Sigma
VTEMP
Mean
Sigma
VS = VRATIO = 4.85 V
VS = VRATIO = 5.15 V
0.3%
0.21%
0.09%
0.19%
−0.15%
0.22%
−0.2%
0.2%
−0.3%
0.2%
−0.05%
0.08%
0.003%
0.06%
−0.25%
0.06%
−0.2%
0.05%
−0.04%
0.06%
The ADXRS622 includes a self-test feature that actuates each of
the sensing structures and associated electronics as if subjected
to angular rate. It is activated by standard logic high levels applied
to Input ST1 (5F, 5G), Input ST2 (4F, 4G), or both. ST1 causes
the voltage at RATEOUT to change about 0.5
− V, and ST2 causes
an opposite change of +0.5 V. The self-test response follows the
viscosity temperature dependence of the package atmosphere,
approximately 0.25%/°C.
Activating both ST1 and ST2 simultaneously is not damaging.
ST1 and ST2 are fairly closely matched (±5%), but actuating
both simultaneously may result in a small apparent null bias
shift proportional to the degree of self-test mismatch.
ST1 and ST2 are activated by applying a voltage equal to VRATIO
to the ST1 pin and the ST2 pin. The voltage applied to ST1 and
ST2 must never be greater than AVCC.
CONTINUOUS SELF-TEST
The on-chip integration of the ADXRS622 gives it higher reliability
than is obtainable with any other high volume manufacturing
method. In addition, it is manufactured under a mature BIMOS
process that has field-proven reliability. As an additional failure
detection measure, power-on self-test can be performed.
However, some applications may warrant continuous self-test
while sensing rate. Details outlining continuous self-test
techniques are also available in the AN-768 Application Note.
Rev. C | Page 10 of 12
ADXRS622
OUTLINE DIMENSIONS
A1 BALL
CORNER
7.05
6.85 SQ
6.70
*A1 CORNER
INDEX AREA
7
6
5
4
3
2
1
A
B
4.80
BSC SQ
0.80
BSC
C
D
E
F
G
TOP VIEW
BOTTOM VIEW
DETAIL A
3.80 MAX
0.60
0.55
0.50
SEATING
PLANE
3.20 MAX
2.50 MIN
COPLANARITY
0.15
BALL DIAMETER
*BALL A1 IDENTIFIER IS GOLD PLATED AND CONNECTED
TO THE D/A PAD INTERNALLY VIA HOLES.
10-26-2009-B
DETAIL A
0.60 MAX
0.25 MIN
Figure 24. 32-Lead Ceramic Ball Grid Array [CBGA]
(BG-32-3)
Dimensions shown in millimeters
ORDERING GUIDE
Model1, 2
ADXRS622BBGZ
ADXRS622BBGZ-RL
ADXRS622WBBGZA
ADXRS622WBBGZA-RL
EVAL-ADXRS622Z
1
2
Temperature Range
−40°C to +105°C
−40°C to +105°C
−40°C to +105°C
−40°C to +105°C
Package Description
32-Lead Ceramic Ball Grid Array [CBGA]
32-Lead Ceramic Ball Grid Array [CBGA]
32-Lead Ceramic Ball Grid Array [CBGA]
32-Lead Ceramic Ball Grid Array [CBGA]
Evaluation Board
Package Option
BG-32-3
BG-32-3
BG-32-3
BG-32-3
Z = RoHS Compliant Part.
W = Qualified for Automotive Applications.
AUTOMOTIVE PRODUCTS
The ADXRS622W models are available with controlled manufacturing to support the quality and reliability requirements of automotive
applications. Note that these automotive models may have specifications that differ from the commercial models; therefore, designers
should review the Specifications section of this data sheet carefully. Only the automotive grade products shown are available for use in
automotive applications. Contact your local Analog Devices account representative for specific product ordering information and to
obtain the specific Automotive Reliability reports for these models.
Rev. C | Page 11 of 12
ADXRS622
NOTES
©2009–2010 Analog Devices, Inc. All rights reserved. Trademarks and
registered trademarks are the property of their respective owners.
D07754-0-9/10(C)
Rev. C | Page 12 of 12