MASW-010647-13950G

20 W HMIC Silicon PIN Diode Terminated SPDT Switch 8.0 - 10.5 GHz MASW-010647 Rev. V3 Features • • • • • • • • • Functional Diagram Low Insertion Loss High Isolation Low Parasitic Capacitance and Inductance Fully Monolithic Die, Integrated Bias Network Glass Encapsulated Construction Greater than 20 W CW Power Handling @ +85°C Silicon Nitride Passivation Polymer Scratch Protection RoHS* Compliant B3 J1 R R C C L L SW2 J3 Applications B2 C SW1 C C J2 C • Aerospace & Defense Rterm2 (50 Ω) Description The MASW-010647 is a monolithic, terminated Silicon PIN diode SPDT switch die designed for X-Band high power, high performance applications. The switch handles greater than 20 W of CW power over the 8.0 - 10.5 GHz frequency band. Rterm1 (50 Ω) Pin Configuration2 The device is fabricated using MACOM’s patented HMIC process, which allows for the integration of silicon pedestals that embed series and shunt diodes in low loss, low dispersion glass. The switch offers low insertion loss of 0.8 dB as well as high isolation performance of 37 dB. The device integrates a bias network to allow for simplified bias application and switch control. Pin Function J1 RFCOMMON J2 RFOUT J3 RFOUT The topside is fully encapsulated with silicon nitride passivation and an additional polymer layer for scratch and impact protection. These protective coatings prevent damage to the semiconductor junctions and metal air bridges during handling and assembly. B2 Bias of J2 B3 Bias of J3 2. The exposed metallization on the chip bottom must be connected to RF, DC and thermal ground. Ordering Information1 MASW-010647-13950G Die in Gel Pack MASW-010647-13950W Die in Waffle Pack 1. Die quantity varies. 1 * Restrictions on Hazardous Substances, compliant to current RoHS EU directive. MACOM Technology Solutions Inc. (MACOM) and its affiliates reserve the right to make changes to the product(s) or information contained herein without notice. Visit www.macom.com for additional data sheets and product information. For further information and support please visit: https://www.macom.com/support DC-0003614 20 W HMIC Silicon PIN Diode Terminated SPDT Switch 8.0 - 10.5 GHz MASW-010647 Rev. V3 Electrical Specifications: TA = +25°C, Z0 = 50 Ω, PIN = 0 dBm (unless otherwise noted) Parameter Test Conditions Insertion Loss (-5 V3 / 0 mA Bias) 8.0 GHz 8.5 GHz 9.5 GHz 10.5 GHz Input to Output Isolation (+5 V / 55 mA Bias) Units Min. Typ. Max. dB — 0.70 0.70 0.75 0.85 — 0.9 1.0 1.1 8.0 GHz 8.5 GHz 9.5 GHz 10.5 GHz dB — 32 34 35 33 35 37 39 — Input Return Loss 8.0 GHz 8.5 GHz 9.5 GHz 10.5 GHz dB — 19 17 13 25 28 24 18 — Return Loss (Termination) (+5 V / 55 mA Bias) 8.0 GHz 8.5 GHz 9.5 GHz 10.5 GHz dB — 12 12 — 14 18 31 14 — Input IP3 10 GHz, +20 dBm, 10 & 100 MHz spacing dBm — >60 — Switching Speed4 10 GHz, +/- 4 V, PW 500 ns, 50% duty cycle ns — 130 — 3. R. Caverly and G. Hiller, “Establishing the Minimum Reverse Bias for a P-I-N Diode in a High Power Switch,” IEEE Transactions on Microwave Theory and Techniques, Vol.38, No.12, December 1990 4. Typical switching speed measured from 10% to 90 % of detected RF signal driven by TTL compatible drivers. Bias Control3 Optimal operation is achieved by simultaneous application of negative DC voltage to the low loss switch path and positive DC voltage to the isolating switch path. In the low loss path, the diodes are reverse biased. In the isolating path, the diodes are forward biased. The switch incorporates internal current limiting resistors. Driver Connections DC Control Voltages (DC Currents) Condition of RF Output B2 B3 J1-J2 J1-J3 -5 V3 (0 mA) +5 V (55 mA typ.) Low Loss Isolation +5 V (55 mA typ.) -5 V3 (0 mA) Isolation Low Loss Minimum Reverse Bias Required: At X-Band, with a 1:1 match, 5 V of reverse bias is required. With a 4:1 match, 10 V of reverse bias is required. However MACOM recommends 30 V of reverse bias to achieve optimal operating conditions. 2 MACOM Technology Solutions Inc. (MACOM) and its affiliates reserve the right to make changes to the product(s) or information contained herein without notice. Visit www.macom.com for additional data sheets and product information. For further information and support please visit: https://www.macom.com/support DC-0003614 20 W HMIC Silicon PIN Diode Terminated SPDT Switch 8.0 - 10.5 GHz MASW-010647 Rev. V3 Absolute Maximum Ratings5,6 Handling Procedures Please observe the following precautions to avoid damage: DC Reverse Voltage 50 V Bias Current 100 mA @ +85°C RF CW Incident Power (Transmission) (Termination) 20 W @ +85°C 2 W @ +85°C Junction Temperature +175°C Operating Temperature -40°C to +85°C Storage Temperature -65°C to +150°C Static Sensitivity These electronic devices are sensitive to electrostatic discharge (ESD) and can be damaged by static electricity. Proper ESD control techniques should be used when handling these devices. 5. Exceeding any one or combination of these limits may cause permanent damage to this device. 6. MACOM does not recommend sustained operation near these survivability limits. MASW-010647 with MADR-011020 Driver Application Schematic7 VCC VEEA VSEQ C1 DS EN MADR011020 C2 C1 C2 A To B2 B To B3 C3 VEEB 7. VCC = +5 V and VEEB = -30 V Switch Minimum Reverse Bias Voltage3,8 Frequency (GHz) DC Voltage (V) B2 & B3 8.0 -6 9.0 -6 10.0 -5 10.5 -5 8. Calculated (see note 3) minimum DC bias voltage to maintain low loss under 20 W of power with 1.5:1 VSWR. 3 MACOM Technology Solutions Inc. (MACOM) and its affiliates reserve the right to make changes to the product(s) or information contained herein without notice. Visit www.macom.com for additional data sheets and product information. For further information and support please visit: https://www.macom.com/support DC-0003614 20 W HMIC Silicon PIN Diode Terminated SPDT Switch 8.0 - 10.5 GHz MASW-010647 Rev. V3 Typical Performance: TA = +25°C Insertion Loss, -5 V Isolation, +5 V 0.0 -10 -0.5 -20 -1.0 -30 -1.5 -40 -2.0 7 8 9 10 11 12 -50 7 8 Frequency (GHz) 0 0 -10 -10 -20 -20 -30 -30 -40 7 8 9 10 10 11 12 11 12 Output Return Loss, Termination, +5 V Input Return Loss, Transmission, +/-5 V -40 9 Frequency (GHz) 11 12 7 8 9 10 Frequency (GHz) Frequency (GHz) Typical Measured Large Signal Performance Insertion Loss vs. Bias Voltage, 9.5 GHz, 43 dBm CW Insertion Loss vs. CW Power , 9.5 GHz, -30 V -0.5 -0.6 +25°C +85°C -0.8 -0.6 -1.0 -0.8 -1.2 -0.9 -1.4 4 0 5 10 15 20 Bias Voltage (V) 25 30 -1.0 +25°C +85°C 35 36 37 38 39 40 41 42 43 44 Input Power (dBm) MACOM Technology Solutions Inc. (MACOM) and its affiliates reserve the right to make changes to the product(s) or information contained herein without notice. Visit www.macom.com for additional data sheets and product information. For further information and support please visit: https://www.macom.com/support DC-0003614 20 W HMIC Silicon PIN Diode Terminated SPDT Switch 8.0 - 10.5 GHz MASW-010647 Rev. V3 Outline Drawing Alignment Marks7 All dimensions shown in microns (µm). Thickness is 125 + 10 µm. 9. Most switches will not have the alignment marks pictured above. Switches with alignment marks have the same quality and reliability rating as switches without the alignment marks and cannot be returned as defective. 5 MACOM Technology Solutions Inc. (MACOM) and its affiliates reserve the right to make changes to the product(s) or information contained herein without notice. Visit www.macom.com for additional data sheets and product information. For further information and support please visit: https://www.macom.com/support DC-0003614 20 W HMIC Silicon PIN Diode Terminated SPDT Switch 8.0 - 10.5 GHz MASW-010647 Rev. V3 MACOM Technology Solutions Inc. (“MACOM”). All rights reserved. These materials are provided in connection with MACOM’s products as a service to its customers and may be used for informational purposes only. Except as provided in its Terms and Conditions of Sale or any separate agreement, MACOM assumes no liability or responsibility whatsoever, including for (i) errors or omissions in these materials; (ii) failure to update these materials; or (iii) conflicts or incompatibilities arising from future changes to specifications and product descriptions, which MACOM may make at any time, without notice. These materials grant no license, express or implied, to any intellectual property rights. THESE MATERIALS ARE PROVIDED "AS IS" WITH NO WARRANTY OR LIABILITY, EXPRESS OR IMPLIED, RELATING TO SALE AND/OR USE OF MACOM PRODUCTS INCLUDING FITNESS FOR A PARTICULAR PURPOSE, MERCHANTABILITY, INFRINGEMENT OF INTELLECTUAL PROPERTY RIGHT, ACCURACY OR COMPLETENESS, OR SPECIAL, INDIRECT, INCIDENTAL, OR CONSEQUENTIAL DAMAGES WHICH MAY RESULT FROM USE OF THESE MATERIALS. MACOM products are not intended for use in medical, lifesaving or life sustaining applications. MACOM customers using or selling MACOM products for use in such applications do so at their own risk and agree to fully indemnify MACOM for any damages resulting from such improper use or sale. 6 MACOM Technology Solutions Inc. (MACOM) and its affiliates reserve the right to make changes to the product(s) or information contained herein without notice. Visit www.macom.com for additional data sheets and product information. For further information and support please visit: https://www.macom.com/support DC-0003614