MICS-4514

MiCS-4514 0278 rev 16 Data Sheet The MiCS-4514 is a compact MOS sensor with two fully independent sensing elements on one package. The MiCS-4514 is a robust MEMS sensor for the detection of pollution from automobile exhausts. 10.00 10.00 Ethanol Features CO CO Hydrogen 1.00 1.00 Rs/R0 Rs/R0 • Smallest footprint for compact designs (5 x 7 x 1.55 mm) • Robust MEMS sensor for harsh environments • High-volume manufacturing for low-cost applications • Short lead-times H2S Methane Methane Ammonia Ammonia 0.10 0.10 Ethanol Propane Propane Hydrogen Iso-butane Iso-butane 0.01 0.01 0.1 0.1 1 10 10 1 100 1000 100 1000 Concentration [ppm] Concentration [ppm] 10000 10000 100000 100000 RED sensor, continuous power ON, 25°C, 50% RH 100.00 Detectable gases CO NO2 C2H5OH H2 NH3 CH4 1 – 1000ppm 0.05 – 10ppm 10 – 500ppm 1 – 1000ppm 1 – 500ppm >1000ppm 10.00 Hydrogen Rs/R0 • Carbon monoxide • Nitrogen dioxide • Ethanol • Hydrogen • Ammonia • Methane NO2 1.00 NO 0.10 0.01 0.01 0.1 1 10 Concentration [ppm] For more information please contact: OX sensor, continuous power ON, 25°C, 50% RH info.em@sgxsensortech.com SGX Sensortech, Courtils 1 CH-2035 Corcelles-Cormondrèche Switzerland www.sgxsensortech.com Page 1 of 5 100 MiCS-4514 0278 rev 16 Data Sheet Performance RED sensor Characteristic RED sensor Symbol Typ Min Max Unit Sensing resistance in air (see note 1) R0 - 100 1500 kΩ Typical CO detection range FS 1 1000 ppm Sensitivity factor (see note 2) S60 - 1.2 50 - Symbol Typ Min Max Unit Sensing resistance in air (see note 1) R0 - 0.8 20 kΩ Typical NO2 detection range FS 0.05 10 ppm Sensitivity factor (see note 3) SR 2 - - Performance OX sensor Characteristic OX sensor - Notes: 1. Sensing resistance in air R0 is measured under controlled ambient conditions, i.e. synthetic air at 23 ±5°C and 50 ± 10% RH for RED sensor and synthetic air at 23 ±5°C and ≤ 5% RH for OX sensor. Sampling test. 2. Sensitivity factor is defined as Rs in air divided by Rs at 60 ppm CO. Test conditions are 23 ± 5°C and 50 ± 10% RH. Indicative values only. Sampling test. 3. Sensitivity factor is defined as Rs at 0.25 ppm NO2, divided by Rs in air. Test conditions are 23 ± 5°C and ≤ 5% RH . Indicative values only. Sampling test. IMPORTANT PRECAUTIONS: Read the following instructions carefully before using the MiCS-4514 described here to avoid erroneous readings and to prevent the device from permanent damage. • The sensor must be reflow soldered in a neutral atmosphere, without soldering flux vapours. • The sensor must not be exposed to high concentrations of organic solvents, silicone vapours or cigarette-smoke in order to avoid poisoning the sensitive layer. • Heater voltage above the specified maximum rating will destroy the sensor due to overheating. • This sensor is to be placed in a filtered package that protects it against water and dust projections. • SGX sensortech strongly recommends using ESD protection equipment to handle the sensor. Page 2 of 5 MiCS-4514 0278 rev 16 Data Sheet MiCS-4514 with recommended supply circuit (top view) Power circuit and measurement circuit RDRED is a 82 Ω and RDOX is a 133Ω. These resistors are necessary to obtain the right temperatures on the two independant heaters while using a single 5V power supply. The resulting voltages are typically VHRED = 2.4V and VHOX= 1.7V. Parameter RED sensor/OX sensor MiCS-4514 with measurement circuit (top view) The two voltages measured on the load resistors are directly linked to the resistances of the RED and OX sensors respectively. RLOAD must be 820 Ω at the lowest in order not to damage the sensitive layer. Symbol Typ Min Max Unit Heating power PH 76/43 71/30 81/50 mW Heating voltage VH 2.4/1.7 - - V Heating current IH 32/26 - - mA Heating resistance at nominal power RH 74/66 66/59 82/73 Ω Rating Symbol Value / Range Unit Maximum heater power dissipation PH 88 (RED sensor)/50 (OX sensor) mW Maximum sensitive layer power dissipation Ps 8 mW Vsupply 4.9 – 5.1 V RH 5 – 95 %RH Ambient operating temperature Tamb -30 – 85 °C Storage temperature range Tsto -40 – 120 °C RHsto 5 - 95 %RH Voltage supplyHeating current Relative humidity range Storage humidity range Page 3 of 5 Data Sheet MiCS-4514 0278 rev 16 Package outline dimensions The package is compatible with SMD assembly process. Pin Connection A Rh1 OX B Rs1 OX C Rh1 RED Rs1 RED Operating Dconditions E NC The heating power is typically 80 mW and 43 F and Rh2OX RED mW for the RED sensor respectively. Heating voltage and 1.7 V. G is 2.35 Rs2 RED Heating current is 34 and 26 mA. H Rh2 OX Heating resistance at nominal power is 74 and J Rs2 OX 66 ohm. NC air is 100 – 1500 kohm for The resistanceKunder the RED sensor and 0.8 – 20 kohm for the OX sensor. MiCS-4514 configuration (bottom view) Sensor configuration The silicon gas sensor structure consists of an accurately micro machined diaphragm with an embedded heating resistor and the sensing layer on top. The MiCS-4514 includes two sensor chips with independent heaters and sensitive layers. One sensor chip detects oxidising gases (OX) and the other sensor detects reducing gases (RED). The internal connections are shown above. Page 4 of 5 Data Sheet MiCS-4514 0278 rev 16 Power circuit The two resistors (82 ohm for RED and 51+82 Packaging ohm for OX) are necessary to obtain the right The sensors are in a tape andheaters reel for temperatures onpackaged the two independent expedition. while using a 5V power supply. The sensors are placed in a carrier type. The dimensions of the cavity are 5.5 x 7.5 x 2.55 mm (the tolerance is +/- 0.2 mm). The outside dimension of the reel is either 178 +- mm (for a maximum of 700 sensors ) or 330 + 0.25 / -4 mm (for a maximum of 2000 sensors). For more information please contact: info.em@sgxsensortech.com SGX Sensortech, Courtils 1 CH-2035 Corcelles-Cormondrèche Switzerland www.sgxsensortech.com Whilst SGX sensortech has taken care to ensure the accuracy of the information contained herein it accepts no responsibility for the consequences of any use thereof and also reserves the right to change the specification of goods without notice. SGX sensortech accepts no liability beyond the set out in its standard conditions of sale in respect of infringement of third party patents arising from the use of tubes or other devices in accordance with information contained herein. Page 5 of 5