CPW2870B10-47

COMPACT SERIES DC SPUTTERING CPW2870B10-47 & STD Z 36kW – 460/480 VAC POWER SUPPLY WITH INTEGRATED ACTIVE ARC SUPPRESSION DESCRIPTION In the 1980s, CPI Canada pioneered Resonant Power Conversion Technology for high power processing. This method offers unique advantages in sputtering systems in the areas of wide load range (without tap changing), reliability (using an inherently shortcircuit proof, rugged power chain), and wide control range (from < 1% to full power). CPI has continued to evolve this technology into higher powers with 36 kW now available in a 8.75” high chassis. When it comes to Watts/inch3 (size), Watts/lbs (weight), Watts/$ (price), and proven field reliability, CPI is unmatched in the industry. SPECIFICATIONS Input power requirements: 414V - 528VAC at 58 amps max 50/60Hz, 4 wire 3 phase + gnd > 90% 36kW Monitors o/p power, voltage and current Cooling: Forced air: T ambient = 35°C max. at full power Weight: approx. 110 lbs User Interface: Digital Interface: Remote Analog Sensing RS-232, 422, 485 Remote control via digital ports Input/ Output Power connectors for easy installation. Dimensions: 8.75” H x 23.2” DP - 19” rack mount Interlocks for safe operation Efficiency: Output power: Front panel Digital Meter: Protection: Over temperature Over-current, over-voltage, over-power Input undervoltage B10 Ignition voltage: Output voltage: Output Current: 1000V 550V max 120A max STD Z 1500V 800V max 80A max OPTIONS Higher Power Configurations: Can be configured with two more units to give 108 kW output power without any changes to the units or the Host interfaces PRODUCT ADVANTAGES Delivery time: Typically 2 to 4 weeks for unforecasted units JIT for scheduled production Built in to act upon arcs and extinguish them within 10 µsecs. Integrated Active Arc Suppression: Highest output power in a 8.75” chassis: 36 kW over a wide process range Wide load range: STD Z = 800V max & 80A and Low Z = 550V & 120A to cover many different processes running at different powers, different materials and argon pressures. We can adjust load range for specific customer requests! Optional Interfaces Others available upon request. Product certification: IEC 950, UL 1950, CSA 950, CE Product compliant: Reliability designed in: NEC, NFPA 79, S2-93 Extensive worst case analysis design reviews Based on continuous duty cycle Uses established technology with proven reliability record of >280,000 hours MTBF. E.S.S. (Environmental Stress Screening) on 100% production • Random frequency vibration along 3 axis (20 grms) • Rapid temperature change (25°C/ min) Reliability built in and tested: ISO 9001 Communications & Power Industries Canada Inc. 45 River Drive Georgetown, Ontario, Canada L7G 2J4 Tel: (905) 877-0161 Fax: (905) 877-5327 Email: marketing @ cmp.cpii.com Website: www.cpii.com/cmp