CPW2870B15

DC SPUTTERING POWER SUPPLY WITH ACTIVE ARC SUPPRESSION DESCRIPTION In the 1990s, CPI Canada pioneered reliability using Resonant Power Conversion Technology for high power processing. This method offers unique advantages in sputtering systems in the areas of wide load range, reliability (using an inherently shortcircuit proof, rugged power chain), and wide control range (from < 1% to full power). With proven reliability, CPI has continued to evolve this technology into higher powers with 36 kW available in an 8.75” high chassis. When it comes to Watts/inch3 (size), Watts/lbs (weight), Watts/$ (price), and proven field reliability, CPI is unmatched in the industry. CPW2870B15 36kW – 440/460/480VAC SPECIFICATIONS Input power requirements: 396V - 528VAC at 61 amps max 50/60Hz, 4 wire 3 phase + gnd > 90% 36kW Monitors o/p voltage, power and current Cooling: Forced air: T ambient = 35°C max. at full power Weight: approx. 115 lbs User Interface: Digital Interface: Remote Analog Sensing RS-232, 422, 485 Remote control via digital ports Input/ Output Power terminals for easy installation. Dimensions: 8.72” H x 26.2” DP - 19” rack mount Interlocks for safe operation Efficiency: Output power: Front panel Digital Meter: Protection: Over temperature Over-current, over-voltage, over-power Input under voltage Ignition voltage: Output voltage: Output Current: 1000V 575V max 120A max PRODUCT ADVANTAGES Delivery time: Typically 4 to 6 weeks for un-forecasted units JIT for scheduled production Built in to act upon arcs within 400 nSec and suppress them within 10 µSecs. Active Arc Suppression: Highest output power in an 8.75” chassis: 36 kW over a wide process range Wide load range: 575V & 120A covers many different processes running at different powers, different materials and argon pressures. We can adjust load range for specific customer requests! Optional Interfaces: Others available upon request. Product certification: IEC 60950, UL 60950, CSA 60950, CE Product compliant: Reliability designed in: NEC, NFPA 79, SEMI-S2, SEMI-F47 Extensive worst-case analysis design reviews Based on continuous duty cycle Uses established technology with proven reliability record of > 300,000 hours MTBF. E.S.S. (Environmental Stress Screening) on 100% production • Random frequency vibration along 3 axis (20 grms) • Rapid temperature change (25°C/ min) Reliability built in and tested: ISO 9001 OPTIONS Higher Power Configurations: Can be configured with two more units to give 108 kW output power without any changes to the units or the Host interfaces Communications & Power Industries Inc., 45 River Drive, Georgetown, Ontario, Canada L7G 2J4 Tel: (905) 877-0161 Fax: (905) 877-5327 Email: marketing @ cmp.cpii.com Website: www.cpii.com/cmp