GEN 2.5 SERIES DC SPUTTERING POWER SUPPLY
DESCRIPTION
CPW2870L5-01, M5-01, P5-01
6kW, 12kW, 24 kW 200/208 VAC
In the 1980s, CPI Canada pioneered Resonant Power Conversion Technology (Resmode) for high power processing. This method offers unique advantages in sputtering systems in the areas of wide load range (without tap changing), reliability (using an inherently short-circuit proof, rugged power chain), highest efficiency with zero switching losses and wide control range (from < 1% to full power). CPI has continued to evolve this technology into many different models. When it comes to Watts/lbs (weight), Watts/$ (price), and proven field reliability, CPI is unmatched in the industry.
6kW & 12kW – 200/208 VAC (shown)
SPECIFICATIONS
Input power requirements: 180 - 229 VAC 50/60Hz, 4 wire 3 phase + gnd > 90% Input/ Output interlocks for safe operation Protection: Over temperature Over-current, over-voltage, over-power Input undervoltage Input/ Output Power connections are hard wired cable strain reliefs.
Efficiency:
Cooling: Forced air: T ambient = 45C max. at full power through
MODELS
Power setting: Ignition voltage: Output voltage: Output Current: Weight (approx): User Interface:
CPW2870L5-01
CPW2870M5-01 CPW2870P5-01
24kW/12kW/6kW 1500V 900V max 50A max 134 lbs (master & slave)
6kW/2.5kW/600W 12kW/6kW/3kW 1500V 1500V 1000V max 900V max 10A max 25A max 50 lbs 67 lbs Remote analog control and sensing
OPTIONS
Arc Suppression Device: Arc Counter: Can accommodate a 25A (or 50A) single arc suppression unit. Reads output signal from Arc Suppression Device.
PRODUCT ADVANTAGES
Fast Delivery time: Typically 2 to 4 weeks for unforecasted units JIT for scheduled production 1000V & 10A, 900V & 25A, 900V & 50A to cover many different processes running at different powers, different materials and argon pressures without tap changes. IEC 950, UL 1950, CSA 950 Designed to meet NEC, NFPA 79, S2-93 Extensive worst case analysis design reviews Based on continuous duty cycle Uses established technology with proven reliability record of >400,000 hours MTBF. E.S.S. (Environmental Stress Screening) on 100% production • Random frequency vibration along 3 axis (20 grms) • Rapid temperature change (25°C/ min)
Wide load range:
Product Complaint:
Reliability designed in:
Reliability built in and tested:
ISO 9001
Communications & Power Industries Canada Inc. 45 River Drive Georgetown, Ontario, Canada L7G 2J4 Tel: (905) 877-0161 Fax: (905) 877-5327 Email: marketing @ cmp.cpii.com www.cpii.com/cmp
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