MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
General Description
The MAX11164 16-bit, 500ksps, SAR ADC offers excellent
AC and DC performance with unipolar input range, small
size, and internal reference. The MAX11164 integrates an
optional internal reference and buffer, saving additional
cost and space.
This ADC achieves 92.2dB SNR and -104dB THD. The device
guarantees 16-bit no-missing codes and ±0.5 LSB (typ).
The MAX11164 communicates using an SPI-compatible
serial interface at 2.5V, 3V, 3.3V, or 5V logic. The serial
interface can be used to daisy-chain multiple ADCs for
multichannel applications and provides a busy indicator
option for simplified system synchronization and timing.
The MAX11164 is offered in a 12-pin, 3mm x 3mm,
TDFN package and is specified over the -40NC to +85NC
temperature range.
Applications
●●
●●
●●
●●
Benefits and Features
●● High DC/AC Accuracy Improves Measurement
Quality
• 16-Bit Resolution with No Missing Codes
• 500ksps Throughput Rates Without Pipeline Delay/
Latency
• 92.2dB SNR and -104dB THD at 10kHz
• 0.5 LSBRMS Transition Noise
• ±0.2LSB DNL (typ) and ±0.5LSB INL (typ)
●● Highly Integrated ADC Saves Cost and Space
• ±6ppm/°C Internal Reference
• Internal Reference Buffer
●● Wide Supply Range and Low Power Simplify
Power-Supply Design
• 5V Analog Supply
• 2.3V to 5V Digital Supply
• 23.7mW Power Consumption at 500ksps
• 10μA in Shutdown Mode
●● Multi-Industry Standard Serial Interface and Small
Package Reduces Size
• SPI/QSPI™/MICROWIRE®/DSP-Compatible Serial
Interface
• 3mm x 3mm Tiny 12-Pin TDFN Package
Data Acquisition Systems
Industrial Control Systems/Process Control
Medical Instrumentation
Automatic Test Equipment
Selector Guide and Ordering Information appear at end of
data sheet.
QSPI is a trademark of Motorola, Inc.
Typical Operating Circuit
14-Bit to 18-Bit SAR ADC Family
1µF
MAX9632
1µF
OVDD
(2.3V TO 5V)
SCLK
10Ω
0 to +5V
VDD
(5V)
AIN+
AIN-
4.7nF
C0G
Ceramic
INTERFACE
AND CONTROL
16-BIT ADC
MAX11164
REF
10µF
REF
BUF
AGNDS
DIN
DOUT
CNVST
HOST
CONTROLLER
CONFIGURATION REGISTER
INTERNAL
REFERENCE
REFIO
GND
0.1µF
MICROWIRE is a registered trademark of National
Semiconductor Corporation.
14-BIT
500KSPS
16-BIT
250KSPS
16-BIT
500KSPS
±5V Input
Internal
Reference
—
MAX11167
MAX11169
MAX11166 MAX11156
MAX11168 MAX11158
0 to 5V Input
Internal
Reference
—
MAX11161
MAX11165
MAX11160 MAX11150
MAX11164 MAX11154
MAX11163
MAX11162 MAX11152
0 to 5V Input
MAX11262
External
Reference
19-6723; Rev 2; 11/15
18-BIT
500KSPS
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Absolute Maximum Ratings
VDD to GND.............................................................-0.3V to +6V
OVDD to GND........ -0.3V to the lower of (VDD + 0.3V) and +6V
AIN+ to GND............................................................-0.3V to +6V
AIN-, REF, REFIO, AGNDS
to GND................ -0.3V to the lower of (VDD + 0.3V) and +6V
SCLK, DIN, DOUT, CNVST
to GND................ -0.3V to the lower of (VDD + 0.3V) and +6V
Maximum Current into Any Pin...........................................50mA
Continuous Power Dissipation (TA = +70NC)
TDFN (derate 18.2mW/NC above +70NC)...................1349mW
Operating Temperature Range............................ -40NC to +85NC
Junction Temperature.......................................................+150NC
Storage Temperature Range............................. -65NC to +150NC
Lead Temperature (soldering, 10s).................................. +300NC
Soldering Temperature (reflow)........................................+260NC
Stresses beyond those listed under “Absolute Maximum Ratings” may cause permanent damage to the device. These are stress ratings only, and functional operation
of the device at these or any other conditions beyond those indicated in the operational sections of the specifications is not implied. Exposure to absolute maximum
rating conditions for extended periods may affect device reliability.
Package Thermal Characteristics (Note 1)
TDFN
Junction-to-Ambient Thermal Resistance (qJA).......59.3NC/W
Junction-to-Case Thermal Resistance (qJC)............22.5NC/W
Note 1: Package thermal resistances were obtained using the method described in JEDEC specification JESD51-7, using a four-layer
board. For detailed information on package thermal considerations, refer to www.maximintegrated.com/thermal-tutorial.
Electrical Characteristics
(VDD = 4.75V to 5.25V, VOVDD = 2.3V to 5.25V, fSAMPLE = 500ksps, Reference Mode 3, VREF = 4.096V; TA = TMIN to TMAX, unless
otherwise noted. Typical values are at TA = +25NC.) (Note 2)
PARAMETER
SYMBOL
CONDITIONS
MIN
TYP
MAX
UNITS
0
+K x
VREF
V
AIN+ to GND
-0.1
+(VDD
+ 0.1)
AIN- to GND
-0.1
+0.1
Acquisition phase
-10
ANALOG INPUT (Note 3)
Input Voltage Range
AIN+ to AIN-, K =
Absolute Input Voltage Range
Input Leakage Current
5.000
4.096
Input Capacitance
+0.001
+10
32
Input-Clamp Protection Current
Both inputs
-20
V
µA
pF
+20
mA
STATIC PERFORMANCE (Note 4)
Resolution
N
No Missing Codes
Offset Error
16
Bits
16
Bits
-4.0
Offset Error Temperature
Coefficient
-3.9
Gain Error Temperature
Coefficient
±1.4
INL
Differential Nonlinearity
DNL
Positive Full-Scale Error
Guaranteed by design
+3.9
LSB
LSB/°C
-1.5
±0.5
+1.5
LSB
-0.5
±0.2
+0.5
LSB
-5.5
CMRR
mV
LSB/°C
±0.008
Integral Nonlinearity
www.maximintegrated.com
+4.0
±0.006
Gain Error
Analog Input CMRR
±1
+5.5
-1.96
LSB
LSB/V
Maxim Integrated │ 2
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Electrical Characteristics (continued)
(VDD = 4.75V to 5.25V, VOVDD = 2.3V to 5.25V, fSAMPLE = 500ksps, Reference Mode 3, VREF = 4.096V; TA = TMIN to TMAX, unless
otherwise noted. Typical values are at TA = +25NC.) (Note 2)
PARAMETER
SYMBOL
Power-Supply Rejection (Note 5)
PSR
CONDITIONS
MIN
Transition Noise
TYP
MAX
UNITS
-5.7
LSB/V
0.5
LSBRMS
REFERENCE (Note 7)
REF Output Initial Accuracy
VREF
Reference mode 0
4.092
4.096
4.100
V
REF Output Temperature
Coefficient
TCREF
Reference mode 0
-17
±9
+17
ppm/°C
REFIO Output Initial Accuracy
VREFIO
Reference modes 0 and 2
4.092
4.096
4.100
V
TCREFIO
Reference modes 0 and 2
-15
±6
+15
ppm/°C
3
4.096
REFIO Output Temperature
Coefficient
REFIO Output Impedance
Reference modes 0 and 2
REFIO Input Voltage Range
Reference mode 1
10
Reference Buffer Initial Offset
Reference mode 0 and 1
-500
Reference Buffer Offset Drift
Reference mode 0 and 1
-12
External Compensation Capacitor
CEXT
Required for reference modes 0 and 1,
recommended for reference modes 2 and 3
10
REF Voltage Input Range
VREF
Reference modes 2 and 3
2.5
±5.6
kΩ
4.25
V
+500
µV
+12
µV/°C
µF
4.25
V
REF Input Capacitance
Reference modes 2 and 3
20
pF
REF Load Current
VREF = 4.096V,
reference modes 2 and 3
137
µA
IREF
DYNAMIC PERFORMANCE (Note 6)
Signal-to-Noise Ratio
Signal-to-Noise Plus Distortion
(Note 7)
Spurious-Free Dynamic Range
SNR
SINAD
SFDR
VREF = 4.096V, reference mode 3
VREF = 4.096V, reference mode 1
91
92.0
VREF = 2.5V, reference mode 3
Internal reference, reference mode 0
VREF = 4.096V, reference mode 3
VREF = 4.096V, reference mode 1
92.2
92.0
90.5
92.0
91.8
VREF = 2.5V, reference mode 3
Internal reference, reference mode 0
dB
89.0
91.9
99
106.8
Total Harmonic Distortion
THD
-104.0
Intermodulation Distortion
(Note 8)
IMD
-119.4
www.maximintegrated.com
dB
89.2
dB
-96.8
dB
dB
Maxim Integrated │ 3
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Electrical Characteristics (continued)
(VDD = 4.75V to 5.25V, VOVDD = 2.3V to 5.25V, fSAMPLE = 500ksps, Reference Mode 3, VREF = 4.096V; TA = TMIN to TMAX, unless
otherwise noted. Typical values are at TA = +25NC.) (Note 2)
PARAMETER
SYMBOL
CONDITIONS
MIN
TYP
MAX
UNITS
500
ksps
400
ns
SAMPLING DYNAMICS
Throughput Sample Rate
Transient Response
Full-scale step
-3dB point
Full-Power Bandwidth
6
-0.1dB point
MHz
> 0.2
Aperture Delay
2.5
ns
Aperture Jitter
< 50
psRMS
POWER SUPPLIES
Analog Supply Voltage
Interface Supply Voltage
Analog Supply Current
VDD
4.75
5.25
V
VOVDD
2.3
5.25
V
IVDD
Reference modes 0 and 1
5.0
5.7
6.75
Reference modes 2 and 3
2.9
3.2
3.5
VDD Shutdown Current
Interface Supply Current (Note 9)
IOVDD
0.01
10
VOVDD = 2.3V
1.5
2.0
VOVDD = 5.25V
4.0
5.0
0.08
10
OVDD Shutdown Current
Power Dissipation
VDD = 5V, VOVDD = 3.3V,
reference mode = 2, 3
23.7
VDD = 5V, VOVDD = 3.3V,
reference mode = 0, 1
33.3
mA
µA
mA
µA
mW
DIGITAL INPUTS (DIN, SCLK, CNVST)
Input Voltage High
VIH
Input Voltage Low
VIL
Input Hysteresis
0.7 x
VOVDD
0.3 x
VOVDD
VHYS
Input Capacitance
CIN
Input Current
IIN
V
±0.05 x VOVDD
V
10
VIN = 0V or VOVDD
-10
V
pF
+10
µA
DIGITAL OUTPUT (DOUT)
Output Voltage High
VOH
ISOURCE = 2mA
Output Voltage Low
VOL
ISINK = 2mA
Three-State Leakage Current
VOVDD 0.4
V
-10
Three-State Output Capacitance
0.4
V
+10
µA
15
pF
TIMING (Note 9)
Time Between Conversions
Conversion Time
Acquisition Time
CNVST Pulse Width
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tCYC
tCONV
tACQ
tCNVPW
2
µs
CNVST rising to data available
1.3
tACQ = tCYC - tCONV
0.5
µs
5
ns
CS mode
1.5
µs
Maxim Integrated │ 4
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Electrical Characteristics (continued)
(VDD = 4.75V to 5.25V, VOVDD = 2.3V to 5.25V, fSAMPLE = 500ksps, Reference Mode 3, VREF = 4.096V; TA = TMIN to TMAX, unless
otherwise noted. Typical values are at TA = +25NC.) (Note 2)
PARAMETER
SCLK Period (CS Mode)
SCLK Period (Daisy-Chain Mode)
SYMBOL
tSCLK
tSCLK
CONDITIONS
MIN
VOVDD > 4.5V
14
VOVDD > 2.7V
20
VOVDD > 2.3V
26
VOVDD > 4.5V
16
VOVDD > 2.7V
24
VOVDD > 2.3V
30
TYP
MAX
UNITS
ns
ns
SCLK Low Time
tSCLKL
5
ns
SCLK High Time
tSCLKH
5
ns
SCLK Falling Edge to Data Valid
Delay
tDDO
CNVST Low to DOUT D15 MSB
Valid (CS Mode)
tEN
CNVST High or Last SCLK Falling
Edge to DOUT High Impedance
tDIS
VOVDD > 4.5V
12
VOVDD > 2.7V
18
VOVDD > 2.3V
23
VOVDD > 2.7V
14
VOVDD < 2.7V
17
CS Mode
20
VOVDD > 4.5V
3
VOVDD > 2.7V
5
VOVDD > 2.3V
6
ns
ns
ns
DIN Valid Setup Time from SCLK
Falling Edge
tSDINSCK
DIN Valid Hold Time from SCLK
Falling Edge
tHDINSCK
0
ns
SCLK Valid Setup Time to CNVST
Falling Edge
tSSCKCNF
3
ns
SCLK Valid Hold Time to CNVST
Falling Edge
tHSCKCNF
6
ns
ns
Note 2: Maximum and minimum limits are fully production tested over specified supply voltage range and at a temperature of
+25°C. Limits over the operating temperature range are guaranteed by design and device characterization.
Note 3: See the Analog Inputs and Overvoltage Input Clamps sections.
Note 4: Static Performance limits are guaranteed by design and device characterization. For definitions, see the Definitions section.
Note 5: Defined as the change in positive full-scale code transition caused by a Q5% variation in the VDD supply voltage.
Note 6: 10kHz sine wave input, -0.1dB below full scale.
Note 7: See Table 4 for definition of the reference modes.
Note 8: fIN1 ~ 9.4kHz, fIN2 ~ 10.7kHz, Each tone at -6.1dB below full scale.
Note 9: CLOAD = 65pF on DOUT.
www.maximintegrated.com
Maxim Integrated │ 5
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Typical Operating Characteristics
(VDD = 5V, VOVDD = 3.3V, fSAMPLE = 500ksps, Reference Mode 3, VREF = 4.096V; TA = +25NC, unless otherwise noted.)
OFFSET AND GAIN ERROR
vs. TEMPERATURE
2.0
OFFSET ERROR
GAIN ERROR
AVERAGE OF 128 DEVICES
2
0.5
1
0.0
-0.5
-1.5
-3
-2.0
-4
60
85
AVERAGE OF 128 DEVICES
4.75
4.85
toc03
5.15
5.25
toc04
SINGLE DEVICE
1.5
0.3
1.0
0.2
0.5
INL (LSB)
0.1
0.0
-0.1
-0.2
0.0
-0.5
-1.0
-0.3
INL (LSB)
0.5
0.0
-0.5
-0.4
-1.0
-0.6
-1.5
TEMPERATURE (°C)
www.maximintegrated.com
60
85
toc06
AVERAGE OF 128 DEVICES
MIN INL
0.0
-0.2
35
65536
1.0
10
MAX INL
1.5
0.2
-15
INL vs. TEMPERATURE
2.0
0.4
-40
57344
toc05
AVERAGE OF 128 DEVICES
MIN DNL
49152
0.6
40960
MAX DNL
32768
OUTPUT CODE (DECIMAL)
DNL vs. TEMPERATURE
0.8
24576
16384
8192
0
65536
57344
49152
40960
32768
24576
-2.0
16384
-0.5
8192
-1.5
0
-0.4
OUTPUT CODE (DECIMAL)
DNL (LSB)
5.05
INTEGRAL NONLINEARITY vs. CODE
2.0
SINGLE DEVICE
0.4
-0.8
4.95
VDD (V)
DIFFERENTIAL NONLINEARITY vs. CODE
0.5
DNL (LSB)
-1
-2
10
35
TEMPERATURE (°C)
GAIN ERROR
0
-1.0
-15
toc02
OFFSET ERROR
3
1.0
-40
OFFSET AND GAIN ERROR
vs. VDD SUPPLY VOLTAGE
4
ERROR (LSB)
ERROR (LSB)
1.5
toc01
-2.0
-40
-15
10
35
TEMPERATURE (°C)
60
85
Maxim Integrated │ 6
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Typical Operating Characteristics (continued)
(VDD = 5V, VOVDD = 3.3V, fSAMPLE = 500ksps, Reference Mode 3, VREF = 4.096V; TA = +25NC, unless otherwise noted.)
DNL vs. VDD SUPPLY VOLTAGE
0.8
MAX DNL
0.2
0.5
INL (LSB)
DNL (LSB)
1.0
0.0
-0.5
-0.4
-1.0
-0.6
-1.5
4.85
4.95
5.05
5.15
-2.0
5.25
VDD (V)
OUTPUT NOISE HISTOGRAM
NO AVERAGE
4.85
4.95
VDD (V)
5.05
16000
12000
8000
5.15
5.25
OUTPUT NOISE HISTOGRAM WITH
4 SAMPLE AVERAGE
toc10
SINGLE DEVICE
STDEV = 0.24LSBRMS
28000
20000
24000
20000
16000
12000
8000
4000
4000
32807
32806
32805
32804
32803
32802
32801
32800
32799
32798
32808
32807
32806
32805
32804
32803
32802
32801
32800
32799
32798
32797
32797
0
32796
0
4.75
32000
NUMBER OF OCCURRENCES
NUMBER OF OCCURRENCES
24000
MIN INL
toc09
SINGLE DEVICE
STDEV = 0.47LSBRMS
toc08
AVERAGE OF 128 DEVICES
0.0
-0.2
4.75
MAX INL
1.5
0.4
-0.8
INL vs. VDD SUPPLY VOLTAGE
2.0
AVERAGE OF 128 DEVICES
MIN DNL
0.6
toc07
OUTPUT CODE (DECIMAL)
OUTPUT CODE (DECIMAL)
INTERNAL REFERENCE VOLTAGE (REF PIN)
vs. TEMPERATURE
4.104
2
4.100
6
7
4.098
8
9
10
4.096
11
12
4.094
13
14
4.092
15
NUMBER OF OCCURRENCES
4
5
VREF (V)
50
3
40
30
20
10
4.0990
4.0985
4.0980
4.0975
4.0970
4.0965
4.0960
4.0955
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85
4.0950
TEMPERATURE (°C)
60
4.0945
35
4.0940
10
4.0935
-15
4.0930
0
-40
toc12
303 DEVICES
MEAN = 4096.0mV
STDEV = 1.2mV
STDEV = 282ppm
1
15 DEVICES
4.102
4.090
INITIAL ERROR VOLTAGE ON REF PIN
60
toc011
REF PIN VOLTAGE (V)
Maxim Integrated │ 7
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Typical Operating Characteristics (continued)
(VDD = 5V, VOVDD = 3.3V, fSAMPLE = 500ksps, Reference Mode 3, VREF = 4.096V; TA = +25NC, unless otherwise noted.)
REF PIN THERMAL DRIFT SLOPE
70
60
4.0965
REF
4.0963
50
40
30
4.0961
4.0959
20
4.0957
-16
-14
-12
-10
-8
-6 -4 -2
0
2
4
THERMAL DRIFT (ppm/°C)
6
8
10
4.0955
12
FFT PLOT
toc15
0
SNR = 92.6dB
SINAD = 92.3dB
SFDR = 107.2dB
THD = -104.7dB
-60
-40
-80
5.15
5.25
toc16
-60
-80
-120
-120
0
50
100
150
200
-140
250
6.0
7.0
8.0
9.0
FREQUENCY (kHz)
SINAD
toc17
90
14.5
88
SFDR AND -THD (dB)
15.0
10.0
14.0
100.0
toc18
THD
110
105
100
95
90
VIN = -0.1dBFS
AVERAGE OF 128 DEVICES
85
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14.0
115
ENOB (BITS)
92
FREQUENCY (kHz)
13.0
SFDR
120
94
1.0
12.0
SFDR and -THD vs. FREQUENCY
15.5
0.1
11.0
125
16.0
VIN = -0.1dBFS
AVERAGE OF 128 DEVICES
ENOB
96
10.0
FREQUENCY (kHz)
SINAD and ENOB vs. FREQUENCY
98
86
5.05
-100
-100
-140
4.95
NSAMPLE = 16384
fIN1 = 9368.9Hz
VIN1 = -6.1dBFS
fIN2 = 10651Hz
VIN2 = -6.1dBFS
SINGLE DEVICE
IMD = -119.7dBFS
-20
REF MODE = 3
-40
4.85
TWO TONES IMD
0
NSAMPLE = 4096
fIN = 10101 Hz
VIN = -0.1dBFS
-20
4.75
VDD (V)
MAGNITUDE (dB)
0
SINAD (dB)
toc14
AVERAGE OF 200 DEVICES
REFIO
10
MAGNITUDE (dB)
INTERNAL REFERENCE VOLTAGES
vs. VDD VOLTAGE
303 DEVICES
MEAN = 2.1ppm/°C
STDEV = 1.9ppm/°C
VREF (V)
NUMBER OF OCCURRENCES
25°C to -40°C
25°C to +85°C
303 DEVICES
MEAN = -7.3ppm/°C
STDEV = 1.9ppm/°C
toc13
80
0.1
1.0
10.0
100.0
FREQUENCY (kHz)
Maxim Integrated │ 8
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Typical Operating Characteristics (continued)
(VDD = 5V, VOVDD = 3.3V, fSAMPLE = 500ksps, Reference Mode 3, VREF = 4.096V; TA = +25NC, unless otherwise noted.)
SNR and SINAD vs. TEMPERATURE
98
toc19
SINAD
92
90
86
100
95
90
-40
-15
10
35
TEMPERATURE (°C)
60
SNR AND SINAD vs. VDD SUPPLY VOLTAGE
85
85
toc21
SINAD
SFDR AND -THD (dB)
92
90
-40
5.05
5.15
toc22
SFDR
100
95
85
5.25
fIN = 10kHz
VIN = -0.1dBFS
AVERAGE OF 128 DEVICES
4.75
4.85
4.95
5.05
5.15
5.25
VDD (V)
CMR vs. INPUT FREQUENCY
PSR vs. VDD SUPPLY FREQUENCY
toc23
-30
VAIN+ = VAIN- = ±100mV
SINGLE DEVICE
-40
toc24
VVDD = 5.0 ± 250mV
VOVDD = 3.3V
SINGLE DEVICE
-50
PSR (dB)
CMR (dB)
85
105
-50
-60
-60
-70
-70
-80
-80
-90
60
THD
VDD (V)
-30
35
THD AND SFDR vs. VDD SUPPLY VOLTAGE
90
4.95
10
110
fIN = 10kHz
VIN = -0.1dBFS
AVERAGE OF 128 DEVICES
4.85
-15
115
94
4.75
-40
120
SNR
88
fIN = 10kHz
VIN = -0.1dBFS
AVERAGE OF 128 DEVICES
TEMPERATURE (°C)
96
SNR AND SINAD (dB)
105
fIN = 10kHz
VIN = -0.1dBFS
AVERAGE OF 128 DEVICES
98
86
SFDR
110
94
88
toc20
THD
115
SFDR AND -THD (dB)
SNR AND SINAD (dB)
96
SFDR and THD vs. TEMPERATURE
120
SNR
0.1
1.0
10.0
FREQUENCY (kHz)
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100.0
1000.0
-90
0.1
1.0
10.0
100.0
1000.0
FREQUENCY (kHz)
Maxim Integrated │ 9
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Typical Operating Characteristics (continued)
(VDD = 5V, VOVDD = 3.3V, fSAMPLE = 500ksps, Reference Mode 3, VREF = 4.096V; TA = +25NC, unless otherwise noted.)
VDD SUPPLY CURRENT
vs. TEMPERATURE
8
REF MODE 0 & 1
5
500ksps
3
IOVDD (mA)
5
toc26
CDOUT = 65pF
AVERAGE OF 128 DEVICES
10ksps
4
6
IVDD (mA)
OVDD SUPPLY CURRENT
vs. TEMPERATURE
AVERAGE OF 128 DEVICES
REF MODE 2 & 3
7
toc25
2
4
1
3
2
-40
-15
10
35
TEMPERATURE (°C)
60
VDD SUPPLY CURRENT
vs. VDD SUPPLY VOLTAGE
8
REF MODE 0 & 1
-15
10
35
60
85
TEMPERATURE (°C)
toc27
OVDD SUPPLY CURRENT
vs. OVDD SUPPLY VOLTAGE
5.0
toc28
CDOUT = 65pF
AVERAGE OF 128 DEVICES
500ksps
10ksps
4.0
IOVDD (mA)
6
IVDD (mA)
-40
AVERAGE OF 128 DEVICES
REF MODE 2 & 3
7
0
85
5
3.0
2.0
4
1.0
3
2
4.75
4.85
4.95
VDD (V)
5.05
5.15
2.25
toc29
SHUTDOWN CURRENT (µA)
SHUTDOWN CURRENT (µA)
0.2
0.1
www.maximintegrated.com
10
35
TEMPERATURE (°C)
4.25
4.75
5.25
60
toc30
IOVDD
0.3
-15
3.75
AVERAGE OF 128 DEVICES
IVDD
IOVDD
-40
3.25
VDD AND OVDD SHUTDOWN
CURRENT vs. SUPPLY VOLTAGE
2.0
IVDD
AVERAGE OF 128 DEVICES
0.0
2.75
VOVDD (V)
VDD AND OVDD SHUTDOWN
CURRENT vs. TEMPERATURE
0.4
0.0
5.25
85
1.5
1.0
0.5
0.0
2.25
2.75
3.25
3.75
4.25
VDD or VOVDD (V)
4.75
5.25
Maxim Integrated │ 10
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Pin Configuration
TOP VIEW
REF
2
VDD
3
AIN+
4
AIN-
5
GND
6
12 AGNDS
+
REFIO 1
MAX11164
EP
11
OVDD
10
DIN
9
SCLK
8
DOUT
7
CNVST
TDFN
Pin Description
PIN
NAME
I/O
FUNCTION
1
REFIO
I/O
External Reference Input/Internal Reference Output. Place a 0.1µF capacitor from REFIO to
AGNDS.
2
REF
I/O
External Reference Input/Reference Buffer Decoupling. Bypass to AGNDS in close proximity with a
X5R or X7R 10µF 16V capacitor. See the Layout, Grounding, and Bypassing section.
3
VDD
I
Analog Power Supply. Bypass to GND with a 0.1µF capacitor for each device and one 10µF
capacitor per PCB.
4
AIN+
I
Positive Analog Input
5
AIN-
I
Negative Analog Input. Connect AIN- to the analog ground plane or to a remote-sense ground.
6
GND
I
Power-Supply Ground
7
CNVST
I
Convert Start Input. The rising edge of CNVST initiates conversions. The falling edge of CNVST
with SCLK high enables the serial interface.
8
DOUT
O
Serial Data Output. DOUT will change stated on the falling edge of SCLK.
9
SCLK
I
Serial Clock Input. Clocks data out of the serial interface when the device is selected.
10
DIN
I
Serial Data Input. DIN data is latched into the serial interface on the rising edge of SCLK.
11
OVDD
I
Digital Power Supply. Bypass to GND with a 0.1µF capacitor for each device and one 10µF
capacitor per PCB.
12
AGNDS
I
Analog Ground Sense. Zero current reference for the on-board DAC and reference source.
Reference for REFIO and REF.
—
EP
—
Exposed Pad. Connect to PCB GND.
www.maximintegrated.com
Maxim Integrated │ 11
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Functional Diagram
DIN
AIN+
AIN-
INTERFACE
AND CONTROL
16-BIT ADC
MAX11164
AGNDS
SCLK
DOUT
CNVST
CONFIGURATION
REGISTER
CONFIGURATION REGISTER
VDD
OVDD
SW2
SW1
INTERNAL
REFERENCE
REF
BUF
GND
REF
B5
0
0
1
1
B4
0
1
0
1
REFERENCE
MODE
0
1
2
3
REFERENCE SWITCH
STATE
SW2
CLOSED
CLOSED
OPEN
OPEN
SW1
CLOSED
OPEN
CLOSED
OPEN
REFIO
Detailed Description
Analog Inputs
The MAX11164 inputs are protected for up to Q20mA of
overrange current. This ADC is powered from a 4.75V to
5.25V analog supply (VDD) and a separate 2.3V to 5.25V
digital supply (OVDD). The MAX11164 requires 500ns to
acquire the input sample on an internal track-and-hold
and then convert the sampled signal to 16 bits of accuracy
using an internally clocked converter.
The MAX11164 can thus convert input signals on AIN+
in the range of 0V to +(K O VREF + AIN-) where K =
5.000/4.096. AIN+ should also be limited to -0.1V to (VDD
+ 0.1V) for accurate conversions. AIN- has an input range
of -0.1V to +0.1V and should be connected to the ground
reference of the input signal source. The MAX11164
performs a true differential sampling on inputs between
AIN+ and AIN- with good common-mode rejection (see
the Typical Operating Circuit). This allows for improved
sampling of remote transducer inputs.
The MAX11164 is a 16-bit single-channel, pseudo-differential ADC with maximum throughput rates of 500ksps.
This ADC includes a precision internal reference that
allows for measuring an input voltage interval from 0 to
5V. Input ranges of 0 to 3.05V and 0 to 5.19V can be
obtained by applying external reference. Both inputs
(AIN+ and AIN-) are sampled with a pseudo-differential
on-chip track-and-hold.
www.maximintegrated.com
The MAX11164 ADC consists of a true sampling pseudodifferential input stage with high-impedance, capacitive
inputs. The internal T/H circuitry feature a small-signal
bandwidth of about 6MHz to provide 16-bit accurate
sampling in 500ns. This allows for accurate sampling of
a number of scanned channels through an external multiplexer.
Maxim Integrated │ 12
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Overvoltage Input Clamps
Internal/External Reference
(REFIO) Configuration
The MAX11164 includes an input clamping circuit that
activates when the input voltage at AIN+ is above (VDD
+ 300mV) or below -300mV. The clamp circuit remains
high impedance while the input signal is within the range
of -100mV to (VDD + 100mV) and draws little to no current. However, when the input signal exceeds this range
the clamps begin to turn on. Consequently, to obtain the
highest accuracy, ensure that the input voltage does not
exceed the range of -100mV to (VDD + 100mV).
To make use of the input clamps, connect a resistor (RS)
between the AIN+ input and the voltage source to limit the
voltage at the analog input and to ensure the fault current
into the devices does not exceed Q20mA. Note that the
voltage at the AIN+ input pin limits to approximately 7V
during a fault condition so the following equation can be
used to calculate the value of RS:
RS =
VFAULT MAX − 7V
20mA
where VFAULTMAX is the maximum voltage that the
source produces during a fault condition.
Figure 1 and Figure 2 illustrate the clamp circuit voltage current characteristics for a source impedance
RS = 1170I. While the input voltage is within the -300mV
to (VDD + 300mV) range, no current flows in the input
clamps. Once the input voltage goes beyond this voltage
range, the clamps turn on and limit the voltage at the
input pin.
Reference Mode 01: ADC reference is provided externally and feeds into the REFIO pin, buffered with the
internal reference buffer and decoupled with an external
capacitor on the REF pin. This mode is typically used
when a common reference source is needed for more
than one MAX11164.
Reference Mode 10: The internal bandgap is used as
a reference source output and feed out the REFIO pin.
However, the internal reference buffer is in a shutdown
state and the REF pin is high impedance. This state
would typically be used to provide a common reference
source to a set of external reference buffers for several
MAX11164.
25
INPUT SOURCE
AIN+ PIN
RS = 1170I
VDD = 5.0V
15
CURRENT INTO PIN (mA)
CURRENT INTO PIN (mA)
Reference Mode 00: ADC reference is provided by the
internal bandgap feed out the REFIO pin, noise filtered
with an external capacitor on the REFIO pin, then buffered by the internal reference buffer and decoupled with
an external capacitor on the REF pin. In this mode, the
ADC requires no external reference source.
MAX11164 INPUT CLAMP
CHARACTERISTICS
25
5
-5
-15
-25
The MAX11164 includes a standard SPI interface that
selects internal or external reference modes of operation through an input configuration register (see the
Input Configuration Interface section). The MAX11164
features an internal bandgap reference circuit (VREFIO =
4.096V) that is buffered with an internal reference buffer
that drives the REF pin. The MAX11164 configures register allows four combinations of reference configuration.
These reference mode are:
15
MAX11164 INPUT CLAMP
CHARACTERISTICS
INPUT SOURCE
AIN+ PIN
RS = 1170I
VDD = 5.0V
5
-5
-15
-30
-20
-10
0
10
20
30
40
VOLTAGE AT AIN+ PIN AND INPUT SOURCE (V)
Figure 1. Input Clamp Characteristics
www.maximintegrated.com
-25
-4
-2
0
2
4
6
8
10
VOLTAGE AT AIN+ PIN AND INPUT SOURCE (V)
Figure 2. Input Clamp Characteristics (Zoom In)
Maxim Integrated │ 13
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Reference Mode 11: The internal bandgap reference
source as well as the internal reference buffer are both
in a shutdown state. The REF pin is in a high-impedance
state. This mode would typically be used when an external reference source and external reference buffer is used
to drive all MAX11164 parts in a system.
voltage is affected by the source resistance and the input
sampling capacitance. Sampling error can be estimated
by modeling the time constant of the total input capacitance and the driving source impedance.
Regardless of the reference mode used, the MAX11164
requires a low-impedance reference source on the REF
pin to support 16-bit accuracy. When using the internal
reference buffer, externally bypass the reference buffer
output using at least a 10FF, low-inductance, low-ESR
capacitor placed as close as possible to the REF pin, thus
minimizing additional PCB inductance. When using the
internal bandgap reference source, bypass the REFIO pin
with a 0.1FF capacitor to ground. If providing an external
reference and using the internal reference buffer, drive the
REFIO pin directly with an external reference source in
the range of 3.0V to 4.25V. Finally, if disabling the device
internal bandgap reference source and internal reference
buffer, drive the REF pin with a reference voltage in the
range of 2.5V to 4.25V and place at least a 10FF capacitor
as close as possible to the REF pin .
When using the MAX11164 in external reference mode,
it is recommended that an external reference buffer be
used. For bypass capacitors on the REF pin, X7R or X5R
ceramic capacitors in a 1210 case size or smaller have
been found to provide adequate bypass performance.
Y5U or Z5U ceramics capacitors are not recommended
due to their high voltage and temperature coefficients.
Maxim offers a wide range of precision references ideal
for 16-bit accuracy. Table 1 lists some of the options recommended.
Input Amplifier
The conversion results are accurate when the ADC
acquires the input signal for an interval longer than the
input signal's worst-case settling time. The ADC input
sampling capacitor charges during the acquisition period.
During this acquisition period, the settling of the sampled
Although the MAX11164 is easy to drive, an amplifier buffer is recommended if the source impedance is such that
when driving a switch capacitor of ~32pF a significant
settling error in the desired sampling period will occur. If
this is the case, it is recommended that a configuration
shown in the Typical Operating Circuit is used where at
least a 4.7nF capacitor is attached to the AIN+ pin. This
capacitance reduces the size of the transient at the start
of the acquisition period, which in some buffers will cause
an input signal dependent offsets.
Regardless of whether an external buffer amp is used or
not, the time constant, RSOURCE × CLOAD, of the input
should not exceed tACQ/12, where RSOURCE is the total
signal source impedance, CLOAD is the total capacitance
at the ADC input (external and internal) and tACQ is the
acquisition period. Thus to obtain accurate sampling in a
500ns acquisition time a source impedance of less than
2.6kΩ should be used if driving the ADC directly. When
driving the ADC from a buffer, it is recommended a series
resistance (5Ω to 15Ω typical) between the amplifier and
the external input capacitance as shown in the Typical
Operating Circuit.
These amplifier features help select the ADC driver:
1) Fast settling time: For multichannel multiplexed applications the driving operational amplifier must be able
to settle to 16-bit resolution when a full-scale step is
applied during the minimum acquisition time.
2) Low noise: It is important to ensure that the driver
amplifier has a low average noise density appropriate
for the desired bandwidth of the application. When the
MAX11164 is used with its full bandwidth of 6MHz, it
is preferable to use an amplifier that will produce an
output noise spectral density of less than 3nV/√Hz, to
ensure that the overall SNR is not degraded significantly. It is recommended to insert an external RC filter
Table 1. MAX11166 External Reference Recommendations
PART
VOUT (V)
TEMPERATURE
COEFFICIENT (MAX)
INITIAL
ACCURACY (%)
NOISE (0.1HZ TO
10HZ) (ΜVP-P)
PACKAGE
MAX6126
2.5, 3, 4.096, 5.0
3 (A), 5 (B)
0.06
1.35
µMAX-8
SO-8
MAX6325
MAX6341
MAX6350
2.5, 4.096, 5.0
1
0.04, 0.02
1.5, 2.4, 3.0
SO-8
www.maximintegrated.com
Maxim Integrated │ 14
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
at the MAX11164 AIN+ input to attenuate out-of-band
input noise and preserve the ADC's SNR. The effective RMS noise at the MAX11164 AIN+ input is 32FV,
thus additional noise from a buffer circuit should be
significantly lower in order to achieve the maximum
SNR performance.
FFFF
+FS =
+5 x VREF
4.096
LSB =
+FS
65536
OUTPUTCODE (HEX)
FFFE
3) THD performance: The input buffer amplifier used
should have a comparable THD performance with that
of the MAX11164 to ensure the THD of the digitized
signal is not degraded.
Table 2 summarizes the operational amplifiers that are
compatible with the MAX11164. The MAX9632 has sufficient bandwidth, low enough noise and distortion to support the full performance of the MAX11164. The MAX9633
is a dual amp and can support buffering for true pseudodifferential sampling.
8001
8000
+FS - 1LSB
TRANSITION
7FFF
7FFE
00001
00000
0
+FS
+FS - 1.5 × LSB
0.5 × LSB
INPUT VOLTAGE (LSB)
Transfer Function
The ideal transfer characteristic for the MAX11164 is
shown in Figure 3. The precise location of various points
on the transfer function are given in Table 3.
Figure 3. Unipolar Transfer Function
Table 2. List of Recommended ADC Driver Op Amps for MAX11164
INPUT-NOISE
DENSITY
(NV/√HZ)
SMALL-SIGNAL
BANDWIDTH
(MHZ)
SLEW RATE
(V/ΜS)
THD
(DB)
MAX9632
0.9
55
30
-128
3.9
Low noise, THD at 10kHz
MAX9633
3
27
18
-130
3.5/amp
Low noise, dual amp, THD at 10kHz
AMPLIFIER
ICC
(MA)
COMMENTS
Table 3. Transfer Function Example
CODE TRANSITION
BIPOLAR INPUT (V)
DIGITAL OUTPUT CODE (HEX)
+FS - 1.5 LSB
4.999886
FFFE - FFFF
Midscale + 0.5 LSB
2.500038
8000 - 8001
Midscale
2.500000
8000
Midscale - 0.5 LSB
2.499962
7FFF - 8000
-FS + 0.5 LSB
0.000038
0000 - 0001
www.maximintegrated.com
Maxim Integrated │ 15
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Input Configuration Interface
Configuring in CS Mode
An SPI interface clocked at up to 50MHz controls the
MAX11164. Input configuration data is clocked into the
configuration register on the falling edge of SCLK through
the DIN pin. The data on DIN is used to program the ADC
configuration register. The construct of this register is
illustrated in Table 4. The configuration register defines
the output interface mode, the reference mode, and the
power-down state of the MAX11164.
Figure 4 details the timing for loading the input configuration register when the MAX11164 is connected in CS mode
(see Figure 6 and Figure 8 for hardware connections).
The load process is enabled on the falling edge of CNVST
when SCLK is held high. The configuration data is clocked
into the configuration register through DIN on the next 8
SCLK falling edges. Pull CNVST high to complete the input
configuration register load process. DIN should idle high
outside an input configuration register read.
Table 4. ADC Configuration Register
BIT NAME
MODE
REF
BIT
7:6
5:4
DEFAULT
STATE
00
LOGIC
STATE
00
CS Mode, No-Busy Indicator
01
CS Mode, with Busy Indicator
10
Daisy-Chain Mode, No-Busy Indicator
11
Daisy-Chain Mode, with Busy Indicator
00
Reference Mode 0. Internal reference and reference buffer are both
powered on.
01
Reference Mode 1. Internal reference is turned off, but internal reference
buffer powered on. Apply the external reference voltage at REFIO.
10
Reference Mode 2. Internal reference is powered on, but the internal
reference buffer is powered off. This mode allows for internal reference to
be used with an external reference buffer.
11
Reference Mode 3. Internal reference and reference buffer are both
powered off. Apply an external reference voltage at REF.
0
Normal Mode. All circuitry is fully powered up at all times.
1
Static Shutdown. All circuitry is powered down.
0
Reserved, Set to 0
00
SHDN
3
0
Reserved
2:0
0
FUNCTION
CNVST
tHSCKCNF
tSSCKCNF
SCLK
0
1
2
3
tHDINSCK
DIN
B7
4
5
6
7
B2
B1
B0
tSDINSCK
B6
B5
B4
B3
Figure 4. Input Configuration Timing in CS Mode
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Maxim Integrated │ 16
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
CNVST
tHSCKCNF
tSSCKCNF
SCLK
0
1
2
3
4
tSDINSCK
DIN
5
6
7
0
1
2
3
4
5
6
7
B0
B7
B6
B5
B4
B3
B2
B1
B0
tHDINSCK
B7
B6
B5
B4
B3
B2
DATA LOADED TO PART B
SHIFTED THROUGH PART A
B1
DATA LOADED TO PART A
Figure 5. Input Configuration Timing in Daisy-Chain Mode
Configuring in Daisy-Chain Mode
Figure 5 details the configuration register load process
when the MAX11164 is connected in a daisy-chain configuration (see Figure 12 and Figure 14 for hardware connections). The load process is enabled on the falling edge
of CNVST when SCLK is held high. In daisy-chain mode,
the input configuration registers are chained together
through DOUT to DIN. Device A’s DOUT will drive device
B’s DIN. The input configuration register is an 8-bit, firstin first-out shift register. The configuration data is clocked
in N times through 8 O N falling SCLK edges. After the
MAX11164 ADC in the chain is loaded with the configuration byte, pull CNVST high to complete the configuration
register loading process. Figure 5 illustrates a configuration sequence for loading two devices in a chain.
Data loaded into the configuration register alters the state of
the MAX11164 on the next conversion cycle after the register is loaded. However, powering up the internal reference
buffer or stabilizing the REFIO pin voltage will take several
milliseconds to settle to 16-bit accuracy.
Shutdown Mode
The SHDN bit in the configuration register forces the
MAX11164 into and out of shutdown. Set SHDN to 0 for
normal operation. Set SHDN to 1 to shut down all internal
circuitry and reset all registers to their default state.
www.maximintegrated.com
Output Interface
The MAX11164 can be programmed into one of four output modes; CS modes with and without busy indicator and
daisy-chain modes with and without busy indicator. When
operating without busy indication, the user must externally timeout the maximum ADC conversion time before
commencing readback. When operating in one of the two
busy indication modes, the user can connect the DOUT
output of the MAX11164 to an interrupt input on the digital
host and use this interrupt to trigger the output data read.
Regardless of the output interface mode used, digital
activity should be limited to the first half of the conversion
phase. Having SCLK or DIN transitions near the sampling
instance can also corrupt the input sample accuracy.
Therefore, keep the digital inputs quiet for approximately
25ns before and 10ns after the rising edge of CNVST.
These times are denoted as tSQ and tHQ in all subsequent timing diagrams.
In all interface modes, the data on DOUT is valid on
both SCLK edges. However, the input setup time into
the receiving digital host will be maximized when data is
clocked into that digital host on the falling SCLK edge.
Doing so will allow for higher data transfer rates between
the MAX11164 and the digital host and consequently
higher converter throughput.
Maxim Integrated │ 17
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
In all interface modes, it is recommended that the SCLK
be idled low to avoid triggering an input configuration write
on the falling edge of CNVST. If at anytime the device
detects a high SCLK state on a falling edge of CNVST, it
will enter the input configuration write mode and will write
the state of DIN on the next 8 falling SCLK edges to the
input configuration register.
Table 5. ADC Output Interface Mode
Selector Guide
In all interface modes, all data bits from a previous conversion must be read before reading bits from a new
conversion. When reading out conversion data, if too few
SCLK falling edges are provided and all data bits are
not read out, only the remaining unread data bits will be
outputted during the next readout cycle. In such an event,
the output data in every other readout cycle will appear
to have been truncated as only the leftover bits from the
previous readout cycle are outputted. This is an indication
to the user that there are insufficient SCLK falling edges
in a given readout cycle. Table 5 provides a guide to aid in
the selection of the appropriate output interface mode for a
given application.
MODE
TYPICAL APPLICATION AND BENEFITS
CS Mode,
No-Busy
Indicator
Single or multiple ADCs connected to SPIcompatible digital host. Ideally suited for
maximum throughput.
CS Mode,
With Busy
Indicator
Single ADC connected to SPI-compatible
digital host with interrupt input. Ideally suited
for maximum throughput.
Daisy-Chain
Mode,
No-Busy
Indicator
Multiple ADCs connected to a SPIcompatible digital host. Ideally suited for
multichannel simultaneous sampled isolated
applications.
Daisy-Chain
Mode,
With Busy
Indicator
Multiple ADCs connected to a SPIcompatible digital host with interrupt input.
Ideally suited for multichannel simultaneous
sampled isolated applications.
CS No-Busy Indicator Mode
The CS no-busy indicator mode is ideally suited for
maximum throughput when a single MAX11164 is connected to a SPI-compatible digital host. The connection
diagram is shown in Figure 6, and the corresponding
timing is provided in Figure 7.
A rising edge on CNVST completes the acquisition, initiates the conversion, and forces DOUT to high impedance.
The conversion continues to completion irrespective of
the state of CNVST allowing CNVST to be used as a
select line for other devices on the board. If CNVST is
brought low during a conversion and held low throughout
the maximum conversion time, the MSB will be output at
the end of the conversion.
When the conversion is complete, the MAX11164
enters the acquisition phase. Drive CNVST low to output the MSB onto DOUT. The remaining data bits are
then clocked by subsequent SCLK falling edges. DOUT
returns to high impedance after the 16th SCLK falling
edge, or when CNVST goes high.
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CONVERT
DIGITAL HOST
CNVST
DOUT
DATA IN
DIN
CONFIG
MAX11164
SCLK
CLK
Figure 6. CS No-Busy Indicator Mode Connection Diagram
Maxim Integrated │ 18
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
CS with Busy Indicator Mode
A rising edge on CNVST completes the acquisition, initiates the conversion and forces DOUT to high impedance.
The conversion continues to completion irrespective of
the state of CNVST allowing CNVST to be used as a
select line for other devices on the board.
The CS with busy indicator mode is shown in Figure 8
where a single ADC is connected to a SPI-compatible
digital host with interrupt input. The corresponding timing
is given in Figure 9.
tCNVPW
CNVST
tCYC
DIN
ACQUISITION
tCONV
tACQ
CONVERSION
ACQUISITION
tSSCKCNF
tSCLK
tSCLKL
tHSCKCNF
1
SCLK
2
3
14
DOUT
D15
D14
16
tSCLKH
tDDO
tEN
15
D13
tDIS
D1
D0
Figure 7. CS No Busy Indicator Mode Timing
CONVERT
OVDD
DIGITAL HOST
CNVST
MAX11164
SCLK
10kΩ
DOUT
DATA IN
IRQ
DIN
CONFIG
CLK
Figure 8. CS With Busy Indicator Mode Connection Diagram
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Maxim Integrated │ 19
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
tCNVPW
CNVST
tCYC
DIN
ACQUISITION
tCONV
tACQ
CONVERSION
ACQUISITION
tSCLK
tSSCKCNF
tSCLKL
tHSCKCNF
SCLK
1
2
3
4
15
tDDO
DOUT
BUSY BIT
D15
D14
D13
16
17
tSCLKH
tDIS
D1
D0
Figure 9. CS With Busy Indicator Mode Timing
When the conversion is complete, DOUT transitions from
high impedance to a low logic level, signaling to the digital
host through the interrupt input that data readback can
commence. The MAX11164 then enters the acquisition
phase. The data bits are then clocked out, MSB first, by
www.maximintegrated.com
subsequent SCLK falling edges. DOUT returns to high
impedance after the 17th SCLK falling edge or when
CNVST goes high, and is then pulled to OVDD through
the external pullup resistor.
Maxim Integrated │ 20
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Multichannel CS Configuration,
Asynchronous or Simultaneous Sampling
The multichannel CS configuration is generally used
when multiple MAX11164 ADCs are connected to an SPIcompatible digital host. Figure 10 shows the connection
diagram example using two MAX11164 devices. Figure 11
shows the corresponding timing.
Asynchronous or simultaneous sampling is possible by
controlling the CS1 and CS2 edges. In Figure 10, the
DOUT bus is shared with the digital host limiting the
throughput rate. However, maximum throughput is possible if the host accommodates each ADC’s DOUT pin
independently.
A rising edge on CNVST completes the acquisition,
initiates the conversion and forces DOUT to high
impedance. The conversion continues to completion
irrespective of the state of CNVST allowing CNVST
to be used as a select line for other devices on the
board. However, CNVST must be returned high before
the minimum conversion time for proper operation so
that another conversion is not initiated with insufficient
acquisition time and data correctly read out of the
device.
When the conversion is complete, the MAX11164 enters
the acquisition phase. Each ADC result can be read by
bringing its CNVST input low, which consequently outputs
the MSB onto DOUT. The remaining data bits are then
clocked by subsequent SCLK falling edges. For each
device, its DOUT will return to a high-impedance state
after the 16th SCLK falling edge or when CNVST goes
high. This control allows multiple devices to share the
same DOUT bus.
CS2
CS1
CNVST
CNVST
DOUT
MAX11164
DEVICE A
DOUT
DIGITAL HOST
MAX11164
DIN
SCLK
DEVICE B
DIN
CONFIG
SCLK
DATA IN
CLK
Figure 10. Multichannel CS Configuration Diagram
www.maximintegrated.com
Maxim Integrated │ 21
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
tCNVPW
tCNVPW
CNVSTA(CS1)
tCYC
CNVSTB(CS2)
DIN
tACQ
tCONV
ACQUISITION
CONVERSION
tSSCKCNF
ACQUISITION
SCLK
1
2
tEN
DOUT
tSCLK
tSCLKL
tHSCKCNF
3
15
tDDO
D15
D14
16
tSCLKH
D13
17
18
19
31
tEN
tDIS
tDIS
D1
D0
D15
32
D14
D13
D1
D0
Figure 11. Multichannel CS Configuration Timing
Daisy-Chain, No-Busy Indicator Mode
The daisy-chain mode with no-busy indicator is ideally
suited for multichannel isolated applications that require
minimal wiring complexity. Simultaneous sampling of
multiple ADC channels is realized on the serial interface where data readback is analogous to clocking a
shift register. Figure 12 shows a connection diagram of
two MAX11164s configured in a daisy chain. The corresponding timing is given in Figure 13.
A rising edge on CNVST completes the acquisition and
initiates the conversion. Once a conversion is initiated,
it continues to completion irrespective of the state of
CNVST. When a conversion is complete, the MSB is
presented onto DOUT and the MAX11164 returns to the
acquisition phase. The remaining data bits are stored
within an internal shift register. To read these bits out,
CNVST is brought low and each bit is shifted out on subsequent SCLK falling edge. The DIN input of each ADC
in the chain is used to transfer conversion data from the
previous ADC into the internal shift register of the next
ADC, thus allowing for data to be clocked through the
www.maximintegrated.com
multichip chain on each SCLK falling edge. Each ADC
in the chain outputs its MSB data first requiring 16 × N
clocks to read back N ADCs.
In daisy-chain mode, the maximum conversion
is reduced due to the increased readback time.
instance, with a 6ns or less digital host setup time
3V interface, up to four MAX11164 devices running
conversion rate of 324ksps can be daisy-chained.
rate
For
and
at a
Daisy-Chain with Busy Indicator Mode
The daisy-chain mode with busy indicator is ideally suited
for multichannel isolated applications that require minimal
wiring complexity while providing a conversion complete
indication that can be used to interrupt a host processor
to read data.
Simultaneous sampling of multiple ADC channels is realized on the serial interface where data readback is analogous to clocking a shift register. The daisy-chain mode
with busy indicator is shown in Figure 14 where three
MAX11164s are connected to a SPI-compatible digital host
with corresponding timing given in Figure 15.
Maxim Integrated │ 22
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
A rising edge on CNVST completes the acquisition and
initiates the conversion. Once a conversion is initiated, it
continues to completion irrespective of the state of CNVST.
When a conversion is complete, the busy indicator is presented onto each DOUT and the MAX11164 returns to the
acquisition phase. The busy indicator for the last ADC in
the chain can be connected to an interrupt input on the
digital host. The digital host should insert a 50ns delay
from the receipt of this interrupt before reading out data
from all ADCs to ensure that all devices in the chain have
completed conversion.
The conversion data is stored within an internal shift register. To read these bits out, CNVST is brought low and
each bit is shifted out on subsequent SCLK falling edge.
The DIN input of each ADC in the chain is used to transfer
conversion data from the previous ADC into the internal
shift register of the next ADC, thus allowing for data to be
clocked through the multichip chain on each SCLK falling
edge. The total of number of falling SCLKs needed to read
back all data from N ADCs is 16 × N + 1 edges, the one
additional SCLK falling edge required to clock out the busy
mode bit from the host side ADC.
CONFIG
CONVERT
CNVST
CNVST
MAX11164
DIN
DA
DOUT
MAX11164
DIN
DEVICE A
DEVICE B
SCLK
SCLK
DIGITAL HOST
DB
DOUT
DATA IN
CLK
Figure 12. Daisy-Chain, No-Busy Indicator Mode Connection Diagram
tCNVPW
CNVST
tCYC
DIN
tCONV
ACQUISITION
tACQ
CONVERSION
ACQUISITION
SCLK
1
2
3
DB15
DB14
tHSCKCNF
14
15
16
17
18
DB1
DB0
DA15
DA14
30
31
32
DA1
DA0
tSCLKH
tDDO
DOUTB
tSSCKCNF
tSCLK
tSCLKL
DB13
Figure 13. Daisy-Chain, No-Busy Indicator Mode Timing
www.maximintegrated.com
Maxim Integrated │ 23
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
CONFIG
CONVERT
CNVST
DIN
MAX11164
CNVST
DA
DOUT
DIN
CNVST
MAX11164
DOUT
DB
DIN
MAX11164 DOUT
DEVICE A
DEVICE B
DEVICE C
SCLK
SCLK
SCLK
DC
DIGITAL HOST
DATA IN
IRQ
CLK
Figure 14. Daisy-Chain Mode with Busy Indicator Connection Diagram
tCNVPW
CNVST
tCYC
DIN
tCONV
ACQUISITION
tACQ
ACQUISITION
CONVERSION
tSCLKH
SCLK
1
2
3
4
tSSCKCNF
tSCLK
15
tDDO
16
17
18
19
31
32
33
34
35
47
tHSCKCNF
48
49
DA1
DA10
tSCLKL
DOUTA = DINB
BUSY DA15 DA14 DA13
BIT
DA1
DA0
DOUTB = DINC
BUSY DB15 DB14 DB13
BIT
DB1
DB0
DA15 DA14
DA1
DA0
DOUTC
BUSY DC15 DC14 DC13
BIT
DC1
DC0 DB15 DB14
DB1
DB0
DA15 DA14
Figure 15. Daisy-Chain Mode with Busy Indicator Timing
www.maximintegrated.com
Maxim Integrated │ 24
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
In daisy-chain mode, the maximum conversion rate is
reduced due to the increased readback time. For instance,
with a 6ns or less digital host setup time and 3V interface,
up to four MAX11164 devices running at a conversion rate of
322ksps can be daisy-chained on a 3-wire port.
Differential Nonlinearity
Layout, Grounding, and Bypassing
For best performance, use PCBs with ground planes.
Ensure that digital and analog signal lines are separated
from each other. Do not run analog and digital lines parallel
to one another (especially clock lines), and avoid running
digital lines underneath the ADC package. A single solid
GND plane configuration with digital signals routed from
one direction and analog signals from the other provides
the best performance. Connect the GND and AGNDS pins
on the MAX11164 to this ground plane. Keep the ground
return to the power-supply low impedance and as short as
possible for noise-free operation.
A 4.7nF C0G (or NPO) ceramic capacitor should be
placed between AIN+ and the ground plane as close as
possible to the MAX11164. This capacitor reduces the
inductance seen by the sampling circuitry and reduces
the voltage transient seen by the input source circuit.
For best performance, connect the REF output to the
ground plane with a 16V, 10FF ceramic capacitor with
a X5R or X7R dielectric in a 1210 or smaller case size.
Ensure that all bypass capacitors are connected directly
into the ground plane with an independent via.
Bypass VDD and OVDD to the ground plane with 0.1FF
ceramic capacitors on each pin as close as possible to
the device to minimize parasitic inductance. Add at least
one bulk 10FF decoupling capacitor to VDD and OVDD
per PCB. For best performance, bring a VDD power plane
in from on the analog interface side of the MAX11164 and
a OVDD power plane from the digital interface side of the
device.
Definitions
Integral Nonlinearity
Integral nonlinearity (INL) is the deviation of the values on
an actual transfer function from a straight line. For these
devices, this straight line is a line drawn between the end
points of the transfer function, once offset and gain errors
have been nullified.
www.maximintegrated.com
Differential nonlinearity (DNL) is the difference between
an actual step width and the ideal value of 1 LSB. For
these devices, the DNL of each digital output code is
measured and the worst-case value is reported in the
Electrical Characteristics table. A DNL error specification
of less than ±1 LSB guarantees no missing codes and a
monotonic transfer function.
Offset Error
For the MAX11164, the offset error is defined at the code
center 0x0000. The code center should occur at 0V input
between AIN+ and AIN-. The offset error is the actual voltage
required to produce code center 0x0000, expressed in
LSB.
Gain Error
Gain error is defined as the diference between the actual
change in analog input voltage required to produce a top
code transition minus a bottom code transition, and the
ideal change in analog input voltage range to produce the
same code transitions. It is expressed in LSB.
Signal-to-Noise Ratio
For a waveform perfectly reconstructed from digital
samples, signal-to-noise ratio (SNR) is the ratio of the fullscale analog input power to the RMS quantization error
(residual error). The ideal, theoretical minimum analogto-digital noise is caused by quantization noise error only
and results directly from the ADC’s resolution (N bits):
SNR = (6.02 x N + 1.76)dB
In reality, there are other noise sources besides quantization
noise: thermal noise, reference noise, clock jitter, etc.
SNR is computed by taking the ratio of the power signal to
the power noise, which includes all spectral components
not including the fundamental, the first five harmonics,
and the DC offset.
Signal-to-Noise Plus Distortion
Signal-to-noise plus distortion (SINAD) is the ratio of the
fundamental input frequency’s RMS amplitude to the
RMS equivalent of all the other ADC output signals:
SINAD(dB) = 20 × log
SignalRMS
(Noise + Distortion)RMS
Maxim Integrated │ 25
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Effective Number of Bits
Aperture Delay
The effective number of bits (ENOB) indicates the global
accuracy of an ADC at a specific input frequency and
sampling rate. An ideal ADC’s error consists of quantization noise only. With an input range equal to the full-scale
range of the ADC, calculate the ENOB as follows:
SINAD − 1.76
ENOB =
6.02
Aperture delay (tAD) is the time delay from the sampling
clock edge to the instant when an actual sample is taken.
Total Harmonic Distortion
A small -20dBFS analog input signal is applied to an ADC
in a manner that ensures that the signal’s slew rate does
not limit the ADC’s performance. The input frequency is
then swept up to the point where the amplitude of the
digitized conversion result has decreased 3dB.
Total harmonic distortion (THD) is the ratio of the power
contained in the first five harmonics of the converted data
to the power of the fundamental. This is expressed as:
P + P +P +P
2
3
4
5
THD = 10 × log
P1
where P1 is the fundamental power and P2 through P5 is
the power of the 2nd- through 5th-order harmonics.
Aperture Jitter
Aperture jitter (tAJ) is the sample-to-sample variation in
aperture delay.
Small-Signal Bandwidth
Full-Power Bandwidth
A large -0.5dBFS analog input signal is applied to an
ADC, and the input frequency is swept up to the point
where the amplitude of the digitized conversion result
has decreased by 3dB. This point is defined as full-power
input bandwidth frequency.
Spurious-Free Dynamic Range
Spurious-free dynamic range (SFDR) is the ratio of the
power of the fundamental (maximum signal component)
to the power of the next-largest frequency component.
www.maximintegrated.com
Maxim Integrated │ 26
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Selector Guide
PART
BITS
INPUT RANGE (V)
REFERENCE
PACKAGE
SPEED (KSPS)
MAX11262
14
0 to 5
External
3mm x 5mm µMAX-10
500
MAX11160
16
0 to 5
Internal
3mm x 5mm µMAX-10
500
MAX11161
16
0 to 5
Internal
3mm x 5mm µMAX-10
250
MAX11162
16
0 to 5
External
3mm x 5mm µMAX-10
500
MAX11163
16
0 to 5
External
3mm x 5mm µMAX-10
250
MAX11164
16
0 to 5
Internal/External
3mm x 3mm TDFN-12
500
MAX11165
16
0 to 5
Internal/External
3mm x 3mm TDFN-12
250
MAX11166
16
±5
Internal/External
3mm x 3mm TDFN-12
500
MAX11167
16
±5
Internal/External
3mm x 3mm TDFN-12
250
MAX11168
16
±5
Internal
3mm x 5mm µMAX-10
500
MAX11169
16
±5
Internal
3mm x 5mm µMAX-10
250
MAX11150
18
0 to 5
Internal
3mm x 5mm µMAX-10
500
MAX11152
18
0 to 5
External
3mm x 5mm µMAX-10
500
MAX11154
18
0 to 5
Internal/External
3mm x 3mm TDFN-12
500
MAX11156
18
±5
Internal/External
3mm x 3mm TDFN-12
500
MAX11158
18
±5
Internal
3mm x 5mm µMAX-10
500
Ordering Information
Package Information
PART
TEMP RANGE
PIN-PACKAGE
MAX11164ETC+T
-40°C to +85°C
12 TDFN-EP*
+Denotes a lead(Pb)-free/RoHS-compliant package.
T = Tape and reel.
*EP = Exposed pad.
www.maximintegrated.com
For the latest package outline information and land patterns
(footprints), go to www.maximintegrated.com/packages. Note
that a “+”, “#”, or “-” in the package code indicates RoHS status
only. Package drawings may show a different suffix character, but
the drawing pertains to the package regardless of RoHS status.
PACKAGE
TYPE
PACKAGE
CODE
OUTLINE
NO.
LAND
PATTERN NO.
12 TDFN-EP
TD1233+1
21-0664
90-0397
Maxim Integrated │ 27
MAX11164
16-Bit, 500ksps, 0 to 5V SAR ADC with
Internal Reference in TDFN
Revision History
REVISION
NUMBER
REVISION
DATE
0
6/13
Initial release
1
1/15
Updated Benefits and Features section
2
11/15
PAGES
CHANGED
DESCRIPTION
—
1
Updated Electrical Characteristics table and various text updates
1–12, 14, 15,
25, 27
For pricing, delivery, and ordering information, please contact Maxim Direct at 1-888-629-4642, or visit Maxim’s website at www.maximintegrated.com.
Maxim Integrated cannot assume responsibility for use of any circuitry other than circuitry entirely embodied in a Maxim Integrated product. No circuit patent licenses
are implied. Maxim Integrated reserves the right to change the circuitry and specifications without notice at any time. The parametric values (min and max limits)
shown in the Electrical Characteristics table are guaranteed. Other parametric values quoted in this data sheet are provided for guidance.
Maxim Integrated and the Maxim Integrated logo are trademarks of Maxim Integrated Products, Inc.
© 2015 Maxim Integrated Products, Inc. │ 28
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