Pressure sensors
C27 series
Series/Type: Ordering code: Date: Version:
Absolute pressure sensor die 2009-08-03 3
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Identification/Classification 1 (header 1 + top left bar): Identification/Classification 2 (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Preliminary data (optional): (if necessary) Department: Date: Version: AS SEN PD 2009-08-03 3 Absolute pressure sensor die Pressure sensors C27 series
EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited
Pressure sensors C27 series
Absolute pressure sensor die
Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Dimensions: 3.05 × 3.05 mm Square diaphragm Measured media (front side): Dry non-aggressive gases. Unsuitable for substances which react with glass, silicon or aluminum. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 0.25 up to 1.0 bar Options Temperature sensing diode Delivery mode Tray Dimensional drawings
Note1
allowable edge disruptions 100 µm max.
electrical diagram X1
Si 100
R1 R2 checked bond pads glass Note1: geometry of diaphragm depend on specification X5 R3 R4 X4 X3
all dimensions in µm
X9 X1 : X2 : X8 X3 : X2 X4 : X5 : X8 : X9 :
VDD+ Vout– VDD– VDD– Vout+ Diode (N) Diode (P)
AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. Page 2 of 8
2009-08-03
Pressure sensors C27 series
Absolute pressure sensor die
Technical data Absolute maximum ratings
Parameter Supply voltage Maximum supply voltage Temperature ranges
2)
Symbol
Conditions
Min.
Typ.
Max.
Units
VDD
Without damage
1)
10
V
Operating temperature range Storage temperature range Pressure ranges Operating pressure ranges Over pressure Burst pressure
Ta Tst
–40 –40 –40
135 140 150
° C ° C ° C
For t
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