B58600C5010A4

Pressure sensors C27 series Series/Type: Ordering code: Absolute pressure sensor die Date: Version: 2009-08-03 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Pressure sensors Identification/Classification 2 (header 2 + bottom left header bar): C27 series Ordering code: (top right header bar) Series/Type: (top right header bar) Absolute pressure sensor die Preliminary data (optional): (if necessary) AS SEN PD  EPCOS AG 2015. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited. EPCOS AG is a TDK Group Company. Pressure sensors C27 series Absolute pressure sensor die Applications
Medical devices
Automotive
Automation Features Piezoresistive MEMS technology Dimensions: 3.05 × 3.05 mm Square diaphragm Measured media (front side): Dry non-aggressive gases. Unsuitable for substances which react with glass, silicon or aluminum.
Whetstone bridge with mV output, ratiometric to supply voltage
Rated pressure ranges 0.25 up to 1.0 bar



Options
Temperature sensing diode Delivery mode
Tray Dimensional drawings Note1 allowable edge disruptions 100 µm max. electrical diagram X1 Si 100 R1 R2 glass checked bond pads all dimensions in µm Note1: geometry of diaphragm depend on specification AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. X5 R3 R4 X4 X3 X9 X1 : X2 : X8 X3 : X2 X4 : X5 : X8 : X9 : VDD+ Vout– VDD– VDD– Vout+ Diode (N) Diode (P) 2009-08-03 Page 2 of 8 Pressure sensors C27 series Absolute pressure sensor die Technical data Absolute maximum ratings Parameter Symbol Conditions VDD Without damage Min. Typ. Max. Units 10 V Supply voltage Maximum supply voltage 1) Temperature ranges Operating temperature range Storage temperature range 2) –40 135 °C For t