B58600D8010A13

Pressure sensors C28 series Series/Type: Ordering code: Absolute pressure sensor die Date: Version: 2009-08-03 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Pressure sensors Identification/Classification 2 (header 2 + bottom left header bar): C28 series Ordering code: (top right header bar) Series/Type: (top right header bar) Absolute pressure sensor die Preliminary data (optional): (if necessary) AS SEN PD  EPCOS AG 2015. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited. EPCOS AG is a TDK Group Company. Pressure sensors C28 series Absolute pressure sensor die Applications
Medical devices
Automotive
Automation Features Piezoresistive MEMS technology Small dimensions: 2.05 × 2.05 mm Square diaphragm Measured media (front side): Dry non-aggressive gases. Unsuitable for substances which react with glass, silicon or aluminum.
Whetstone bridge with mV output, ratiometric to supply voltage
Rated pressure ranges 1.6 up to 400 bar



Options
Temperature sensing diode Delivery mode
Tray Dimensional drawings 2050 560 390 800 560 Note1 X5 640 X8 700 allowable edge disruptions 80 µm max. 810 660 235 X9 B Note1 2050 95 660 X4 X4 X5 X1 X2 X10 280 560 840 X5 280 560 850 Si 100 all dimensions in µm glass BOROFLOATTM Note1: geometry of diaphragm depend on specification checked bond area (typ. 100µm x 100µm) AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. p electrical diagram: X3 R1 R2 X4 R3 R4 X3 X2 X9 X8 X1 X1 : X2 : X3 : X4 : X5 : X8 : X9 : X10: Vout+ VDD– VDD– Vout– VDD+ Diode (N) Diode (P) Substrate 2009-08-03 Page 2 of 8 Pressure sensors C28 series Absolute pressure sensor die Technical data Absolute maximum ratings Parameter Symbol Conditions VDD Without damage Min. Typ. Max. Unit 10 V Supply voltage Maximum supply voltage 1) Temperature ranges Operating temperature range Storage temperature range 2) –40 135 °C For t