B58600E0410A002

Pressure sensors C29 series Series/Type: Ordering code: Date: Version: Absolute pressure sensor die for wet media 2009-08-03 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Identification/Classification 2 (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Preliminary data (optional): (if necessary) Department: Date: Version: AS SEN PD 2009-08-03 3 Absolute pressure sensor die for wet media Pressure sensors C29 series  EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited Pressure sensors C29 series Absolute pressure sensor die for wet media Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Small dimensions: 2.2 × 2.7 mm Square diaphragm Reference pressure chamber on topside Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 1.0 up to 10 bar Outstanding long-term stability Options Temperature sensing diode Delivery mode Tray Dimensional drawings ELECTRICAL DIAGRAM: X1 X9 X2 X8 X5 X1 : X2 : X3 : X5 : X8 : X9 : VDD+ Vout+ VDD– Vout– Diode (N) Diode (P) p X3 note 1: geometrie of diaphragm according costumer specification note 2: the quality of structured glass angles is influenced by machining technologies and is idealised plotted note 2 note 2 X1 X9 X8 X5 X3 X2 checked bond area (typ. 100µm x 100µm) all dimensions in µm AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. Page 2 of 8 2009-08-03 Pressure sensors C29 series Absolute pressure sensor die for wet media Technical data Absolute maximum ratings Parameter Supply voltage Maximum supply voltage Temperature ranges 2) Symbol Conditions Min. Typ. Max. Units VDD Without damage 1) 10 V Operating temperature range Storage temperature range Pressure ranges Operating pressure ranges Over pressure Burst pressure Ta Tst –40 –40 –40 135 140 150 ° C ° C ° C For t