B58600E410A20

Pressure sensors C29 series Series/Type: Ordering code: Absolute pressure sensor die for wet media Date: Version: 2009-08-03 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Pressure sensors Identification/Classification 2 (header 2 + bottom left header bar): C29 series Ordering code: (top right header bar) Series/Type: (top right header bar) Absolute pressure sensor die for wet media Preliminary data (optional): (if necessary) AS SEN PD  EPCOS AG 2015. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited. EPCOS AG is a TDK Group Company. Pressure sensors C29 series Absolute pressure sensor die for wet media Applications
Medical devices
Automotive
Automation Features Piezoresistive MEMS technology Small dimensions: 2.2 × 2.7 mm Square diaphragm Reference pressure chamber on topside Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon.
Whetstone bridge with mV output, ratiometric to supply voltage
Rated pressure ranges 1.0 up to 10 bar
Outstanding long-term stability




Options
Temperature sensing diode Delivery mode
Tray Dimensional drawings ELECTRICAL DIAGRAM: X1 X9 X8 X5 X2 X1 : X2 : X3 : X5 : X8 : X9 : VDD+ Vout+ VDD– Vout– Diode (N) Diode (P) p X3 note 1: geometrie of diaphragm according costumer specification note 2: the quality of structured glass angles is influenced by machining technologies and is idealised plotted note 2 note 2 X1 X9 X8 X5 X3 X2 checked bond area (typ. 100µm x 100µm) all dimensions in µm AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. 2009-08-03 Page 2 of 8 Pressure sensors C29 series Absolute pressure sensor die for wet media Technical data Absolute maximum ratings Parameter Symbol Conditions VDD Without damage Min. Typ. Max. Units 10 V Supply voltage Maximum supply voltage 1) Temperature ranges Operating temperature range Storage temperature range 2) –40 135 °C For t