B58600H8000A002

Pressure sensors C32 series Series/Type: Ordering code: Date: Version: Absolute pressure sensor die 2009-08-03 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Identification/Classification 2 (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Preliminary data (optional): (if necessary) Department: Date: Version: Absolute pressure sensor die Preliminary data AS SEN PD 2009-08-03 3 Pressure sensors C32 series  EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited Pressure sensors C32 series Preliminary data Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Small dimensions: 1.65 × 1.65 mm Square diaphragm Measured media (front side): Dry non-aggressive gases. Unsuitable for substances which react with glass, silicon or aluminum. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 1.6 up to 40 bar Outstanding long-term stability Delivery mode Tray / foil Dimensional drawings 1650±100 713 713 300±5 800±20 Absolute pressure sensor die Note1 125 125 X11 X1 X10 X10 X5 613 763 1650±100 1325 B Note1 713 X2 50±25 X10 X11 X4 p 423 X10 140 allowable edge disruptions 80 µm max. 760 260 electrical diagram: Si 100 all dimensions in µm Note1: geometry of diaphragm depend on specification X5 1425 glass BOROFLOATTM R1 X4 R3 R2 X1 R4 X2 X1 : X2 : X4 : X5 : X10 : X11 : Vout+ VDD– Vout– VDD+ Substrate Shield AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. Page 2 of 8 2009-08-03 Pressure sensors C32 series Preliminary data Technical data Absolute maximum ratings Parameter Supply voltage Maximum supply voltage Temperature ranges 2) Absolute pressure sensor die Symbol Conditions Min. Typ. Max. Unit VDD Without damage 1) 10 V Operating temperature range Storage temperature range Pressure ranges Operating pressure ranges Over pressure Burst pressure Ta Tst –40 –40 –40 135 140 150 ° C ° C ° C For t