Pressure sensors
C33 series
Series/Type: Ordering code: Date: Version:
Barometric pressure sensor die 2009-08-03 3
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Identification/Classification 1 (header 1 + top left bar): Identification/Classification 2 (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Preliminary data (optional): (if necessary) Department: Date: Version: Barometric pressure sensor die Preliminary data AS SEN PD 2009-08-03 3 Pressure sensors C33 series
EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited
Pressure sensors C33 series
Preliminary data Applications Medical devices Weather stations Handheld devices (Handy, Navigation,…) Automation Features Piezoresistive MEMS technology Small dimensions: 1.00 × 1.00 mm Square diaphragm Measured media (front side): Dry non-aggressive gases. Unsuitable for substances which react with silicon or aluminum. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure range is 1.2 bar abs Outstanding long-term stability Delivery mode Tray / foil Dimensional drawings
1000 720
Barometric pressure sensor die
electrical diagram:
X5
130
p
X1 X10
720
X5
1000
R1 X4 R3
R2 X1 R4
X1 : Vout+ X2 : VDDX4 : VoutX5 : VDD+ X10: Substrate
X10 X2 X4
X2
130
allowable edge disruptions 50 µm max.
400
Si 100
all dimensions in µm
AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. Page 2 of 8
2009-08-03
Pressure sensors C33 series
Preliminary data Technical data Absolute maximum ratings
Parameter Supply voltage Maximum supply voltage Temperature ranges
2)
Barometric pressure sensor die
Symbol
Conditions
Min.
Typ.
Max.
Unit
VDD
Without damage
1)
10
V
Operating temperature range Storage temperature range Pressure ranges Operating pressure ranges Over pressure Burst pressure
Ta Tst
–40 –40 –40
135 140 150
° C ° C ° C
For t
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