B58601C5010A006

Pressure sensors C27 series Series/Type: Ordering code: Date: Version: Gauge pressure sensor die 2009-08-03 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Identification/Classification 2 (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Preliminary data (optional): (if necessary) Department: Date: Version: AS SEN PD 2009-08-03 3 Gauge pressure sensor die Pressure sensors C27 series  EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited Pressure sensors C27 series Gauge pressure sensor die Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Dimensions: 3.05 × 3.05 mm Square diaphragm Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 0.1 up to 1.0 bar Options Temperature sensing diode Delivery mode Tray Dimensional drawings Note1 allowable edge disruptions 100 µm max. allowable edge disruptions 100 µm max. electrical diagram Si 100 X1 glass X5 R1 R2 R3 R4 X4 X3 checked bond pads all dimensions in µm Note1: geometry of diaphragm depend on specification X9 X1 : X2 : X8 X3 : X2 X4 : X5 : X8 : X9 : VDD+ Vout+ VDD– VDD– Vout– Diode (N) Diode (P) AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. Page 2 of 8 2009-08-03 Pressure sensors C27 series Gauge pressure sensor die Technical data Absolute maximum ratings Parameter Supply voltage Maximum supply voltage Temperature ranges 2) Symbol Conditions Min. Typ. Max. Unit VDD Without damage 1) 10 V Operating temperature range Storage temperature range Pressure ranges Operating pressure ranges Over pressure Burst pressure Ta Tst –40 –40 –40 135 140 150 ° C ° C ° C For t