B58601C5010A7

Pressure sensors C27 series Series/Type: Ordering code: Gauge pressure sensor die Date: Version: 2009-08-03 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Pressure sensors Identification/Classification 2 (header 2 + bottom left header bar): C27 series Ordering code: (top right header bar) Series/Type: (top right header bar) Gauge pressure sensor die Preliminary data (optional): (if necessary) AS SEN PD  EPCOS AG 2015. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited. EPCOS AG is a TDK Group Company. Pressure sensors C27 series Gauge pressure sensor die Applications
Medical devices
Automotive
Automation Features Piezoresistive MEMS technology Dimensions: 3.05 × 3.05 mm Square diaphragm Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon.
Whetstone bridge with mV output, ratiometric to supply voltage
Rated pressure ranges 0.1 up to 1.0 bar



Options
Temperature sensing diode Delivery mode
Tray Dimensional drawings Note1 allowable edge disruptions 100 µm max. allowable edge disruptions 100 µm max. electrical diagram Si 100 glass checked bond pads all dimensions in µm X1 R1 R2 X5 Note1: geometry of diaphragm depend on specification R3 R4 X4 X3 AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. X9 X1 : X2 : X8 X3 : X2 X4 : X5 : X8 : X9 : VDD+ Vout+ VDD– VDD– Vout– Diode (N) Diode (P) 2009-08-03 Page 2 of 8 Pressure sensors C27 series Gauge pressure sensor die Technical data Absolute maximum ratings Parameter Symbol Conditions VDD Without damage Min. Typ. Max. Unit 10 V Supply voltage Maximum supply voltage 1) Temperature ranges Operating temperature range Storage temperature range 2) –40 135 °C For t