B58601D8010A016

Pressure sensors C28 series Series/Type: Ordering code: Date: Version: Gauge pressure sensor die for back side pressure applications 2009-08-03 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color to "white". This ensures that the table disappears (invisible) for the customer PDF. Don't change formatting when entering or pasting text in the table and don't add any cell or line in and to it! Identification/Classification 1 (header 1 + top left bar): Identification/Classification 2 (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Preliminary data (optional): (if necessary) Department: Date: Version: AS SEN PD 2009-08-03 3 Gauge pressure sensor die for back side pressure applications Pressure sensors C28 series  EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited Pressure sensors C28 series Gauge pressure sensor die for back side pressure applications Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Small dimensions: 2.05 × 2.05 mm Square diaphragm Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 1.6 up to 40 bar Options Temperature sensing diode Delivery mode Tray Dimensional drawings 2050 560 560 Note1 390 800 150 A B B X5 X4 660 95 B Note1 A 2050 235 640 400 X9 allowable edge disruptions 80 µm max. allowable edge disruptions 50 µm max. electrical diagram: 660 X4 X5 X1 X2 X3 X10 810 X8 700 X5 R1 R2 X4 R3 R4 X3 X2 X9 X8 X1 p 280 560 840 280 560 850 Si 100 glass BOROFLOATTM all dimensions in µm Note1: geometry of diaphragm depend on specification checked bond area (typ. 100µm x 100µm) X1 : X2 : X3 : X4 : X5 : X8 : X9 : X10: Vout– VDD– VDD– Vout+ VDD+ Diode (N) Diode (P) Substrate AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. Page 2 of 8 2009-08-03 Pressure sensors C28 series Gauge pressure sensor die for back side pressure applications Technical data Absolute maximum ratings Parameter Supply voltage Maximum supply voltage Temperature ranges 2) Symbol Conditions Min. Typ. Max. Unit VDD Without damage 1) 10 V Operating temperature range Storage temperature range Pressure ranges Operating pressure ranges Over pressure Burst pressure Ta Tst –40 –40 –40 135 140 150 ° C ° C ° C For t