Pressure sensors
C28 series
Series/Type: Ordering code: Date: Version:
Gauge pressure sensor die for front side pressure applications 2009-08-03 3
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Identification/Classification 1 (header 1 + top left bar): Identification/Classification 2 (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Preliminary data (optional): (if necessary) Department: Date: Version: AS SEN PD 2009-08-03 3 Gauge pressure sensor die for front side pressure applications Pressure sensors C28 series
EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited
Pressure sensors C28 series
Gauge pressure sensor die for front side pressure applications
Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Small dimensions: 2.05 × 2.05 mm Square diaphragm Measured media (front side): Dry non-aggressive gases. Unsuitable for substances which react with glass, silicon or aluminum. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 1.6 up to 40 bar Options Temperature sensing diode Delivery mode Tray
Dimensional drawings
150 A B
2050 560 560 Note1
390
800
B
X5
X4
660
95
B Note1
A
2050
235
640
400
X9
allowable edge disruptions 80 µm max. allowable edge disruptions 50 µm max. electrical diagram:
p
660
X4 X5 X1 X2 X3 X10
810
X8
700
X5 R1 R2 X4 R3 R4 X3 X2
X9 X8 X1
280 560 840
280 560 850
Si 100
glass BOROFLOATTM
all dimensions in µm
Note1: geometry of diaphragm depend on specification
checked bond area (typ. 100µm x 100µm)
X1 : X2 : X3 : X4 : X5 : X8 : X9 : X10:
Vout+ VDD– VDD– Vout– VDD+ Diode (N) Diode (P) Substrate
AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. Page 2 of 8
2009-08-03
Pressure sensors C28 series
Gauge pressure sensor die for front side pressure applications
Technical data Absolute maximum ratings
Parameter Supply voltage Maximum supply voltage Temperature ranges
2)
Symbol
Conditions
Min.
Typ.
Max.
Unit
VDD
Without damage
1)
10
V
Operating temperature range Storage temperature range Pressure ranges Operating pressure ranges Over pressure Burst pressure
Ta Tst
–40 –40 –40
135 140 150
° C ° C ° C
For t
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