Pressure sensors
C41 series
Series/Type: Ordering code: Date: Version:
Gauge pressure sensor die 2009-08-03 3
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Identification/Classification 1 (header 1 + top left bar): Identification/Classification 2 (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Preliminary data (optional): (if necessary) Department: Date: Version: AS SEN PD 2009-08-03 3 Gauge pressure sensor die Pressure sensors C41 series
EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited
Pressure sensors C41 series
Gauge pressure sensor die
Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Dimensions: 5.05 × 5.05 mm Square diaphragm Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 25 up to 60 mbar Options Temperature sensing diode Delivery mode Tray Dimensional drawings
allowable edge disruptions 100 µm max. allowable edge disruptions 100 µm max.
electrical diagram X1 X9 Si 100 R1 R2 glass X5 R3 R4 checked bond pads all dimensions in µm Note1: geometry of diaphragm depend on specification X8 X2 X1 : X2 : X3 : X4 : X5 : X8 : X9 : X12: VDD+ Vout+ VDD– VDD– Vout+ Diode (N) Diode (P) Substrate
X4 X3
AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. Page 2 of 8
2009-08-03
Pressure sensors C41 series
Gauge pressure sensor die
Technical data Absolute maximum ratings
Parameter Supply voltage Maximum supply voltage Temperature ranges
2)
Symbol
Conditions
Min.
Typ.
Max.
Unit
VDD
Without damage
1)
10
V
Operating temperature range Storage temperature range Pressure ranges Operating pressure ranges Over pressure Burst pressure
Ta Tst
–40 –40 –40
135 140 150
° C ° C ° C
For t
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