Pressure sensors
C32 series
Series/Type: Ordering code: Date: Version:
Gauge pressure sensor die 2009-08-03 3
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Identification/Classification 1 (header 1 + top left bar): Identification/Classification 2 (header 2 + bottom left header bar): Ordering code: (top right header bar) Series/Type: (top right header bar) Preliminary data (optional): (if necessary) Department: Date: Version: Gauge pressure sensor die Preliminary data AS SEN PD 2009-08-03 3 Pressure sensors C32 series
EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information contained therein without EPCOS' prior express consent is prohibited
Pressure sensors C32 series
Preliminary data Applications Medical devices Automotive Automation Features Piezoresistive MEMS technology Small dimensions: 1.65 × 1.65 mm Square diaphragm Measured media (back side): Non-aggressive gases and fluids. Unsuitable for substances which react with glass or silicon. Whetstone bridge with mV output, ratiometric to supply voltage Rated pressure ranges 1.6 up to 40 bar Outstanding long-term stability Delivery mode Tray / foil Dimensional drawings
Gauge pressure sensor die
150 A B 1650±100 713 713 300±5 800±20
Note1 125 125
B
X11 X1 X10
X10 X5
613
763
Note2
1650±100
A
1325
B Note1
400±100
140
allowable edge disruptions 80 µm max. allowable edge disruptions 50 µm max.
713
X2
50±25
X10
X11
X4
423
X10
760
260
electrical diagram: Si 100
all dimensions in µm Note1: geometry of diaphragm depend on specification X5 p R1 X4 R3 R4 R2 X1
1425
glass BOROFLOATTM
X2
X1 : X2 : X4 : X5 : X10 : X11 :
Vout+ VDD– Vout– VDD+ Substrate Shield
AS SEN PD Please read Cautions and warnings and Important notes at the end of this document. Page 2 of 8
2009-08-03
Pressure sensors C32 series
Preliminary data Technical data Absolute maximum ratings
Parameter Supply voltage Maximum supply soltage Temperature ranges
2)
Gauge pressure sensor die
Symbol
Conditions
Min.
Typ.
Max.
Unit
VDD
Without damage
1)
10
V
Operating temperature range Storage temperature range Pressure ranges Operating pressure ranges Over pressure Burst pressure
Ta Tst
–40 –40 –40
135 140 150
° C ° C ° C
For t
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