SPDT
DC to 40 GHz, RF – MEMS
FEATURES
Drain 1 Gate 1 Drain 2 Drain Source
■ ■ ■ ■ ■
High Isolation (20 dB typical @10 GHz) Low Insertion Loss (0.4 dB typical @10 GHz) Typical On Resistance < 3.0 Ω Hermetically Sealed
Gate 2
Long Life (>1011 cycles) Electrostatic Actuation, High Off Resistance (>1 GΩ), Fast Switching (5 µs), Current Handling (400 mA) ±100V Signal Range, Near Zero Harmonic Distortion, No Quiescent Power Dissipation RF Input Parameters
Frequency Insertion Loss Isolation Return Loss Input IP3 (Two-tone inputs 10 GHz and 10.001 GHz @ 27 dBm) RF Power Rating Active Life Cycle, (cold-Switched) 2 GHz < 0.3 dB > 32 dB < -20 dB 5 GHz
RMSW 220D™
DESCRIPTION
The RMSW220D™ is a Single Pole Double Throw (SPDT) Reflective RF Switch utilizing Radant MEMS Inc. recent breakthrough technology that delivers high-linearity, highisolation and low-insertion loss in a wafer-scale package. This device is ideally suited for use in many applications such as wireless (i.e. handsets, WLAN, broadband wireless access, GPS receivers), RF and Microwave Multi-throw switches, Radar Beam Steering Antennas, Phase shifters, and RF Test Equipment.
Functional Block Diagram
10 GHz < 0.5 dB > 20 dB < -19 dB > 65 dBm 30 dBm 1011
25 GHz < 0.6 dB > 17 dB < -18 dB
35 GHz < 0.8 dB > 13 dB < -16 dB
< 0.4 dB > 25 dB < -20 dB
Notes: Product performance specifications and switch operation are for cold switching only. Hot switching with RF input power greater than –10 dBm can degrade lifetime of switch.
DC Input Parameters
Actuation Voltage, typ. Actuation Power Consumption Switch Current, Max. (Cold)
90 2µW @ 1 kHz switching rate 250 mA 50 mA 5 µs - 40 ̊C to 85 ̊C - 55 ̊C to 150 ̊C
Source
Drain Gate Drain Gate
Switch Current, Max. (Hot) Switching Time, Max. (10kHz, Varies with Control Voltage) Operating Temperatures Storage Temperatures
255 Hudson Road, Stow, MA01775 ● Tel: 978-562-3866 ● Fax: 978-562-6277 ● Email: sales@radantmems.com
SPDT
DC to 40 GHz, RF – MEMS
Typical Performance
dB -10 -15 -20
2 4 3 5 6 7
S21 - rf1
S21 - rf2
S11 - rf1
S11 - rf2
8
dB 5 0 -5 -10
4 1 2 3
dB
S21 - rf1 0.2 0 -0.2 -0.4
1 2
S21 - rf2
S11 - rf1
S11 - rf2
dB 5 0
1 2 3 4 8
2 GHz -34.33 dB 5 GHz -26.69 dB 10 GHz -19.96 dB
Insertion Loss
2 GHz -0.29 dB 5 GHz -0.33 dB 10 GHz -0.36 dB 15 GHz -0.40 dB 20 GHz -0.39 dB 25 GHz -0.43 dB 30 GHz -0.65 dB 35 GHz -0.80 dB
3
4
5
6 7
-5 -10 Return Loss -15 -20 -25 -30 -35 -40 -45
-25 Isolation -30 -35 -40 -45 -50 -55 -60 Start: 50 MHz Stop: 40 GHz
1
Return Loss
-15 -20 -25 -30 -35 -40 -45
15 GHz -16.90 dB 20 GHz -17.20 dB 25 GHz -19.25 dB 30 GHz -16.62 dB 35 GHz -13.27 dB
-0.6 -0.8 -1 -1.2 -1.4 -1.6 -1.8 Start: 50 MHz
5 6 7 8
5 6 7 8
Stop: 40 GHz
Isolation
*Measurement results include the effects of two 1 mil diameter bond wires on each RF pad.
Insertion Loss
Handling Procedures
The following precautions should be observed to avoid damage:
Static sensitivity — RF MEMS switches integrated circuits are ESD sensitive and can be damaged by static electricity. Use proper ESD precautions when handling these devices. Maximum Rating — The absolute maximum input power is 2 watts.
Nominal Device Dimensions
100 µm
RMI
Bond Pad
650 µm
1.371.45 mm mm
300 300 µm
200 µm
250 µm
Gold metal on backside
300 µm
1.42 mm 1.45
100 µm
255 Hudson Road, Stow, MA01775 ● Tel: 978-562-3866 ● Fax: 978-562-6277 ● Email: sales@radantmems.com
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