TPS31

TPS31 Series Silicon Pressure Sensors THALER CORPORATION • 2015 N. FORBES BOULEVARD • TUCSON, AZ 85745 • 520-882-4000 FEATURES • High stability, low cost • Backside pressurized for harsh environments • 15, 30, 60 and 100 psi pressure ranges • Absolute or Gage • Uncompensated, millivolt output • Constant current or voltage excitation APPLICATIONS • Industrial Controls and Monitoring • Appliances • Altimeters • Digital pressure gauges DESCRIPTION The TPS31 is a high performance, harsh environment micromachined silicon pressure sensor. The TPS31 series utilizes pressure sensors whose pressure ports are on the bottom of the pressure sensor. This makes the TPS31 series highly resistant to chemicals that will destroy most sensors. The alumina ceramic (Al2O3) packaging is very mechanically stable and by isolating mechanical stresses from the sensor element, contributes greatly to the stability of the device. The alumina ceramic package also has excellent chemical resistance. Custom pressures are available for large orders. TPS31 015A 0306 1 USA 1234 1 V+ 2 S+ 3 V4 S- PIN CONFIGURATION FIGURE 1 SELECTOR GUIDE TPS31 [pressure] [type] 15 psi 30 psi 60 psi 100 psi [port] A absolute F face seal G gage T tube port example part numbers: TPS31 15 G T – 15psig tube port TPS31 100 A F – 100psia face seal TPS31 Rev. B March 2007 MAXIMUM RATINGS (all types) Operating Temp ……………………... -40°C to 85°C Storage Temperature Range ………..-55°C to 150°C Maximum Soldering Temperature …………...260°C Proof pressure ……….…………....3x full scale pressure Burst pressure ……….…………....5x full scale pressure TPS31 GAGE PRESSURE OPERATING CHARACTERISTICS V+ = 5V, V- = 0V, Temperature = 25°C PARAMETER Excitation Voltage (Note 1) Excitation Current Span (FS Range) 15 psig 30 psig 60 psig 100 psig Offset (Note 2) Linearity (Note 3) TC Span (Note 4) TC Offset TC Resistance Bridge Impedance Response time SYMBOL VEX IEX MIN TYP 5 1.5 MAX 10 3 175 195 220 250 50 0.3 UNITS V mA mV mV mV mV mV %FS %FS/100°C %FS/100°C %/100°C kΩ ms VOUT 115 130 130 130 -50 -0.3 -24 -7 24 2.70 145 165 180 200 0 VOS -19 -1 27.5 3.15 1 -15.5 7 33 4.00 tR TPS31 ABSOLUTE PRESSURE OPERATING CHARACTERISTICS V+ = 5V, V- = 0V, Temperature = 25°C PARAMETER Excitation Voltage (Note 1) Excitation Current Span (FS Range) 15 psia 30 psia 60 psia 100 psia Offset (Note 2) Linearity (Note 3) TC Span (Note 4) TC Offset TC Resistance Bridge Impedance Response time Notes: 1. 2. 3. 4. SYMBOL VEX IEX MIN TYP 5 1.5 MAX 10 3 150 150 150 150 50 0.3 UNITS V mA mV mV mV mV mV %FS %FS/100°C %FS/100°C %/100°C kΩ ms VOUT 75 85 85 85 -50 -0.3 -24 -15 17 4.0 125 125 125 125 0 VOS -19 2 26 5.0 1 -15.5 15 31 6.0 tR Sensor must be driven with positive voltage resulting in positive output for positive pressure. Measured at zero pressure differential. Defined as best straight line. Measured from 0°C to 70°C TPS31 Rev. B March 2007 Application Information Package: The package body is made of alumina (Al2O3) ceramic, an extremely rigid and stable material that is highly impervious to chemicals. This results in extremely high stability. The sensor package is not sealed. This is necessary for operation of the sensor. Media: The bottom pressure port is tolerant of harsh environments and many different media. Wetted parts: F (face seal) port option wetted surfaces are composed of alumina ceramic, silicone die attach, pyrex glass and silicon. T (tube) port option adds 305 stainless steel. Stability: The small difference in coefficient of thermal expansion between sensor and package sets the TPS31 series apart from other pressure sensors. The micromachined pressure sensor has a pyrex base and is mounted with a flexible, chemical resistant material into the ceramic package. Flexible die attach allows for some tolerance of small changes and helps isolate the sensor die from other changes due to temperature, sensor mounting and package mounting. Additional stability is gained from factory stabilization of all sensors. Pressure ranges: Standard pressure ranges are 15, 30, 60 and 100 psi in both gage and absolute types. Custom pressure ranges are available for large orders. Soldering and contamination: The TPS31 series packaging is not sealed due to the need to provide an atmospheric port in gage pressure application. This means that the TPS31 series are not suitable for application where flux residue is to be cleaned from the finished circuit assembly. Foreign materials and contamination should be prevented from entering the sensor package cavity. Pressure port: The F (face seal) port option is a highly reliable connection method that allows direct mounting to a measurement point with methods such as an o-ring or epoxy. An o-ring provides for a leak resistant seal and very robust connection. Designs for o-ring seals may be found in the “Parker O-Ring Handbook”. The T (tube) port option is also a reliable connection method if the user finds a tube connection more effective for their design. Pressure ports with tubing barbs are designed for 1/8” OD, flexible tubing. NOTE: DO NOT apply clamping pressure on the package cover. It is possible to damage the package if excessive pressure is applied. Proper care should be exercised when mounting. TPS31 Rev. B March 2007 MECHANICAL DIMENSIONS (in inches) F (face seal) port type 5.13" 1.00” T (tube fitting) port type 5.13" 1.00” SVS+ V+ SVS+ V+ 0.012” 0.012” 0.165” 0.165” 0.42” 0.20” 0.102” 0.287” 0.102” 0.617” 0.23" 0.050” 0.42” 0.20” 0.16” 0.089” 0.617” 0.23" 0.050” 0.175” 0.016” 0.175” Thaler Corporation 2015 N Forbes Blvd Tucson AZ 85745-1416 520-882-4000 www.thaler.com Notices: Thaler Corporation reserves the right to make changes to the product contained in this publication. Thaler Corporation assumes no responsibility for the use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies. Thaler Corporation does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications. TPS31 Rev. B March 2007