Freescale Semiconductor Technical Data
MMA6700EG Rev 0, 09/2008
High Accuracy Low g Inertial Sensor
MEMS Sensing, State Machine ASIC
The MMA6700EG series is a dual axis, Low g, XY-axis sensor based on Freescale’s HARMEMS technology with an embedded DSP ASIC allowing for additional processing of the digital or analog signals. Features • • • XY-axis of sensitivity in one device 10- or 11-bit digital data output ±3.5 g or ±5 g full-scale range per axis - MMA6700EG: ±3.5 g (11-bit data sensitivity = 3.43 mg/digit typical at 25º C) - MMA6701EG: ±5 g (11-bit data sensitivity = 4.91 mg/digit typical at 25ºC) SPI-compatible serial interface Bidirectional internal self-test On-chip temperature sensor and voltage regulator Support for signed or unsigned output data Selection of integrated signal conditioning low-pass filters Capture/hold input for system-wide synchronization support 3.3 V or 5 V single supply operation Ratiometric analog voltage output Traceability through programmable registers, 3 8-bit. Customer-assigned one-time-programmable Registers (2 8-bit Registration) Minimal external component requirements Wide operating temperature range from -40ºC to +125ºC 20-pin SOIC wide-body RoHS-compliant package Minimum external components, 4 capacitors
MMA6700EG MMA6701EG
DUAL AXIS LOW g INERTIAL SENSOR
IMI
Package SOIC-20, Tape and Reel SOIC-20, Tape and Reel SOIC-20, Tape and Reel SOIC-20, Tape and Reel
• • • • • • • • • • • • • •
NA
RY
N/C N/C XOUT VSSA YOUT CAP/HOLD DIN VPP/TEST CREG CS/RESET 1 2 3 4 5 6 7 8 9
X = -1g Y = 0g
EG SUFFIX (Pb-free) 20-LEAD SOIC CASE 475A-02
PIN CONNECTIONS
20 19 18 17 16 15 14 13 12 11 N/C N/C CREGA CREGA CREF CREF VCC VSS DOUT SCLK
Typical Applications •
EL
Case No. 475A-02 475A-02 475A-02 475A-02
•
With a +3.5 g or +5 g full scale range, the newly designed, high accuracy sensor enables electronic stability control (ESC) designers to accommodate higher original signal noise level without sacrificing resolution. Tilt Measurement
10
20-PIN SOIC PACKAGE N/C: NO INTERNAL CONNECTION
ORDERING INFORMATION
Device MMA6700EGR2 MMA6700AEGR2 MMA6701EGR2 MMA6701AEGR2 Temp. Range
X = 0g Y = 1g
– 40 to +125°C – 40 to +125°C – 40 to +125°C – 40 to +125°C
PR
X = 1g Y = 0g
X = 0g Y = -1g
This document contains a product under development. Freescale Semiconductor reserves the right to change or discontinue this product without notice.
© Freescale Semiconductor, Inc., 2008. All rights reserved.
BLOCK DIAGRAM
V /TEST PP V CC CREG CREGA CREGA CREF CREF V SS V SSA Voltage Regulator
Unit Programmable Data Array
Oscillator Reference Primary Internal Clock Clock Monitor
RY
SPI IN 1 TEMP
DIN /ST DOUT /STATUS SCLK CS CAP/HOLD
Control Logic
SELF-TEST INTERFACE
GCELL (Y)
SIGNAL CONVERTER
TEMP SENSOR GCELL (X)
IMI
IN 2
NA
CONTROL IN DSP BLOCK Y OUT X OUT
STATUS OUT DIGITAL OUT DAC DAC YOUT XOUT
SIGNAL CONVERTER
MMA6700EG Preliminary 2 Sensors Freescale Semiconductor
PR
EL
Figure 1. Block Diagram
MAXIMUM RATINGS
Rating Supply Voltage CREG, CREGA , VREF VPP/TEST SCLK, CS, DIN/ST,CAP/HOLD DOUT/STATUS (high impedance state) XOUT,YOUT (DACEN=0) Current Drain Per Pin Excluding VCC and VSS Powered Shock (six sides, 0.5 ms duration) Unpowered Shock (six sides, 0.5 ms duration) Drop Shock (to concrete surface Electrostatic Discharge Human Body Model (HBM) Charge Device Model (CDM) Machine Model (MM Storage Temperature Range Symbol VCC VREG VPP VIN VOUT VDAC I Value -0.3 to 7.0 -0.3 to 3.0 -0.3 to 11.0 -0.3 to VCC + 0.3 -0.3 to VCC + 0.3 -0.3 to VCC + 0.3 10 +1500 +2000 1.2 +2000 +500 +200 Unit Vdc Vdc Vdc Vdc Vdc Vdc mAmps g g m V V V °C
NA
Tstg
PR
EL
IMI
MMA6700EG Sensors Freescale Semiconductor Preliminary 3
RY
gpms gshock hdrop VESD VESD VESD
-40°C to +125°C
PERFORMANCE CHARACTERISTICS
Parameter Supply Voltage Standard Operating Voltage, 3.3 V Standard Operating Voltage, 5V Operating Temperature Range TA Supply Current Standard Operating Voltage, 5.0 V (Digital with Analog Enabled) Programming Voltage Applied to VPP/TEST Programming Current Applied to VPP/TEST Test Mode Activation Voltage Applied to VPP/TEST Measurement Range, XY axis Digital Sensitivity (DOUT) Analog Sensitivity (XOUT, YOUT) Ratiometric to VCC Sensitivity Error (DOUT) TA = +25°C -40°C < TA < +105°C +105°C < TA < +125°C Offset at 0g, SPI. 11-Bit unsigned data Analog Output Offset Error at 0g, SPI, 11-Bit Unsigned Data TA = +25°C -40°C < TA < +125°C Offset Error at 0g, analog output TA = +25°C -40°C < TA < +125°C DSP Low-Pass Filter (2nd or 4th Order Selectable) Filter Option $00, $13 Filter Option $01, $14 Filter Option $03, $16 Filter Option $02, $15 Filter Option $04, $17 Filter Option $06, $19 Filter Option $05, $18 Filter Option $07 Filter Option $1A Cross- Axis Sensitivity SPI Clock Rate Noise (1Hz – 1kHz) Idd VPP IPP Symbol VCC VCC Min VL +3.15 +4.75 TL -40 +7.5 Typ +3.3 +5.0 +8.0 MAX VH +3.45 +5.25 TH +125 +9.5 +8.5 160 +7.5 +3.5 UNITS V V °C mAmp V mAmp V g mg/digit mV/V/g
VTEST g
NA
SENS SENS SENS SENS DOUT AOUT DOUT DOUT AOUT AOUT -3.0 -4.0 -6.0 -
SENS
RY
+6.5 -3.5 +7.2
-
3.43 115
1024 0.5VCC 8.8 13.1 44.1 50.0 66.1 70.0 88.3 100 141 -
+3.0 +4.0 +6.0 -
% % % Digit V Digit Digit Digit Digit Hz Hz Hz Hz Hz Hz Hz Hz Hz % MHz µg/Hz k pF
IMI
fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) fC(LPF) tSCLK nSD ZOUT COUT
-15 -22 -3 -5
+15 +22 +3 +5 9.2 13.8 46.3 52.5 69.4 73.5 92.7 105 148 +4.0 140 35
EL
PR
8.4 12.4 41.9 47.5 62.8 66.5 83.9 95 134 -4.0 8.33 47 -
Output Loading (DOUT/STATUS) Load Resistance Load Capacitance
MMA6700EG Preliminary 4 Sensors Freescale Semiconductor
EXTERNAL COMPONENTS
The MMA6700EG requires minimum external components. Aside from a supply bypass capacitor, two 1 μF capacitors provide filtering for the internal analog and digital power supply rails, while a third, 100 nF filter capacitor is required for the internal voltage reference. This circuit configuration is illustrated in Figure 2. Redundant pins are provided for the internal voltage reference and analog supply rails. In safety critical applications, these pins may be connected to separate external capacitors to guard against circuit malfunction in the event of a fault such as an open filter capacitor connection. An internal monitor detects an open digital supply rail filter capacitor condition, which puts the device into reset should this fault occur.
MMA6700EG
0.1uF 1uF 1uF 1uF 0.1uF
Figure 2. Recommended External Component Configuration
PR
EL
IMI
MMA6700EG Sensors Freescale Semiconductor Preliminary 5
NA
V SSA V SS
RY
CREG CREGA CREGA CREF CREF 0.1uF
V CC
V CC
PACKAGE DIMENSIONS
PACKAGE DIMENSIONS
MMA62XXEG
Sensors Freescale Semiconductor
Preliminary 6
PACKAGE DIMENSIONS
MMA62XXEG
Preliminary 7
Sensors Freescale Semiconductor
How to Reach Us:
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RoHS-compliant and/or Pb-free versions of Freescale products have the functionality and electrical characteristics of their non-RoHS-compliant and/or non-Pb-free counterparts. For further information, see http:/www.freescale.com or contact your Freescale sales representative. For information on Freescale’s Environmental Products program, go to http://www.freescale.com/epp. MMA6700EG Rev. 0 09/2008