MPXM2010

Freescale Semiconductor Technical Data MPXM2010 Rev 4, 09/2005 10 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors The MPXM2010 device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output – directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Features • • • • Temperature Compensated Over 0°C to +85°C Available in Easy-to-Use Tape & Reel Ratiometric to Supply Voltage Gauge Ported & Non Ported Options MPXM2010 SERIES FREESCALE PREFERRED DEVICE 0 to 10 kPa (0 to 1.45 psi) 25 mV FULL SCALE SPAN (TYPICAL) Application Examples • Respiratory Diagnostics • Air Movement Control • Controllers • Pressure Switching Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip. ORDERING INFORMATION Device Type/Order No. MPXM2010D MPXM2010DT1 MPXM2010GS MPXM2010GST1 Non-ported Non-ported, Tape and Reel Ported Ported, Tape and Reel Options Case No. 1320 1320 1320A 1320A 1 2 MPXM2010D/DT1 CASE 1320-02 MPXM2010GS/GST1 CASE 1320A-02 PIN NUMBERS GND +Vout 3 4 VS –Vout VS 3 Thin Film Temperature Compensation and Calibration Circuitry 1 GND Sensing Element 2 4 +Vout –Vout Figure 1. Fully Integrated Pressure Sensor Schematic © Freescale Semiconductor, Inc., 2005. All rights reserved. VOLTAGE OUTPUT VERSUS APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage Table 1. Maximum Ratings(1) Rating Maximum Pressure Storage Temperature Operating Temperature Symbol PMAX TSTG TA Value 75 –40° to +125° –40° to +125° Unit kPa °C °C increases as increasing vacuum is applied to the vacuum side relative to the pressure side. NOTE: Preferred devices are Freescale recommended choices for future use and best overall value. 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. MPXM2010 2 Sensors Freescale Semiconductor Table 2. Operating Characteristics (VS = 10 Vdc, TA = 25°C.) Characteristic Pressure Range(1) Supply Voltage Supply Current Full Scale Span Offset(4) Sensitivity Linearity(5) Pressure Hysteresis (5) (3) (2) Symbol POP VS Io VFSS Voff ∆V/∆P — Min 0 — — 24 –1.0 — –1.0 — — –1.0 –1.0 1000 1400 — — — Typ — 10 6.0 25 — 2.5 — ± 0.1 ± 0.5 — — — — 1.0 20 ± 0.5 Max 10 16 — 26 1.0 — 1.0 — — 1.0 1.0 2550 3000 — — — Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV Ω Ω ms ms %VFSS (0 to 10 kPa) — — TCVFSS TCVoff Zin Zout Temperature Hysteresis5 (–40°C to +125°C) Temperature Effect on Full Scale Span Temperature Effect on Offset(5) Input Impedance Output Impedance Response Time Warm-Up Offset Stability(7) (6) (5) (10% to 90%) tR — — 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Freescale's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. MPXM2010 Sensors Freescale Semiconductor 3 Least Squares Fit Exaggerated Performance Curve Least Square Deviation Straight Line Deviation Relative Voltage Output End Point Straight Line Fit Offset 0 50 Pressure (% Full Scale) 100 Figure 2. Linearity Specification Comparison ON-CHIP TEMPERATURE COMPENSATION AND CALIBRATION Figure 3 shows the minimum, maximum and typical output characteristics of the MPXM2010 series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. 30 25 Output (mVdc) 20 15 10 5 0 -5 kPa PSI VS = 10 Vdc TA = 25°C TYP MAX Span Range (Typical) MIN Offset (Typical) 2.5 0.362 5 0.725 7.5 1.09 10 1.45 Figure 3. Output versus Pressure Differential MPXM2010 4 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 1320-02 ISSUE B MPXM2010 Sensors Freescale Semiconductor 5 PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1320-02 ISSUE B MPXM2010 6 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PIN 4 PIN 1 PAGE 1 OF 2 CASE 1320A-02 ISSUE A MPXM2010 Sensors Freescale Semiconductor 7 PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1320A-02 ISSUE A MPXM2010 8 Sensors Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com E-mail: support@freescale.com USA/Europe or Locations Not Listed: Freescale Semiconductor Technical Information Center, CH370 1300 N. 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Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2005. All rights reserved. MPXM2010 Rev. 4 09/2005