MPXM2051G_09

Pressure Freescale Semiconductor 50 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors The MPXM2051G device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output - directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. MPXM2051G Rev 2, 10/2009 MPXM2051G Series 0 to 50 kPa (0 to 7.25 psi) 40 mV Full Scale Span (Typical) Application Examples • • • • • • Pump/Motor Controllers Robotics Level Indicators Medical Diagnostics Pressure Switching Non-Invasive Blood Pressure Measurement Features • • • • Temperature Compensated Over 0°C to +85°C Available in Easy-to-Use Tape & Reel Ratiometric to Supply Voltage Gauge Ported ORDERING INFORMATION Case Device Name No. MPAK Package (MPXM2051 Series) MPXM2051GS 1320A MPXM2051GST1 1320A None # of Ports Single • • Dual Gauge • • Pressure Type Differential Absolute Device Marking MPXM2051GS MPXM2051GS MPAK PACKAGE MPXM2051GS/GST1 CASE 1320 © Freescale Semiconductor, Inc., 2005-2009. All rights reserved. Pressure Operating Characteristics Table 1. Operating Characteristics (VS = 10 Vdc, TA = 25°C.) Characteristic Pressure Range (1) Symbol POP VS Io VFSS Voff ΔV/ΔP — — — TCVFSS TCVoff Zin Zout tR — — Min 0 — — 38.5 -1.0 — -0.3 — — -1.0 -1.0 1000 1400 — — — Typ — 10 6.0 40 — 0.8 — ± 0.1 ± 0.5 — — — — 1.0 20 ± 0.5 Max 50 16 — 41.5 1.0 — 0.3 — — 1.0 1.0 2500 3000 — — — Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV Ω Ω ms ms %VFSS Supply Voltage(2) Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity Pressure Hysteresis(0 to 50 kPa) Temperature Hysteresis (-40°C to +125°C) Temperature Effect on Full Scale Span Temperature Effect on Offset Input Impedance Output Impedance Response Time(5) (10% to 90%) Warm-Up Offset Stability(6) 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 6. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. MPXM2051G 2 Sensors Freescale Semiconductor Pressure Maximum Ratings Table 2. Maximum Ratings(1) Rating Maximum Pressure Storage Temperature Operating Temperature Symbol Pmax Tstg TA Value 200 -40 to +125 -40 to +125 Unit kPa °C °C 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. VS 3 Thin Film Temperature Compensation and Calibration X-ducer Sensing Element 2 4 Vout+ Vout- 1 GND Figure 1. Temperature Compensated Pressure Sensor Schematic Voltage Output versus Applied Differential Pressure The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side. MPXM2051G Sensors Freescale Semiconductor 3 Pressure On-chip Temperature Compensation and Calibration Figure 2 shows the minimum, maximum and typical output characteristics of the MPXM2051G series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. 40 35 Output (mVdc) 30 25 20 15 10 5 0 -5 0 VS = 10 Vdc TA = 25°C TYP MAX SPAN RANGE (TYP) MIN kPa PSI 12.5 1.8 25 3.6 37.5 5.4 50 7.25 OFFSET (TYP) Figure 2. Output vs. Pressure Differential LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 3) or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. The specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. Least Squares Fit Exaggerated Performance Curve Relative Voltage Output Least Square Deviation Straight Line Deviation End Point Straight Line Fit OFFSET 0 50 Pressure (% Full scale) 100 Figure 3. Linearity Specification Comparison MPXM2051G 4 Sensors Freescale Semiconductor Pressure PACKAGE DIMENSIONS PIN 4 PIN 1 PAGE 1 OF 2 CASE 1320A-02 ISSUE A MPXM2051G Sensors Freescale Semiconductor 5 Pressure PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1320A-02 ISSUE A MPXM2051G 6 Sensors Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. 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Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2009. All rights reserved. MPXM2051G Rev. 2 10/2009