MPXM2053

Freescale Semiconductor Technical Data MPXM2053 Rev. 2, 10/2004 50 kPa On- Chip Temperature Compensated & Calibrated Silicon Pressure Sensors The MPXM2053 device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output — directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin--film resistor network integrated on--chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Features • Temperature Compensated Over 0°C to +85°C • Available in Easy--to--Use Tape & Reel • Ratiometric to Supply Voltage • Gauge Ported & Non Ported Options Application Examples • Pump/Motor Controllers • Robotics • Level Indicators • Medical Diagnostics • Pressure Switching • Non--Invasive Blood Pressure Measurement Figure 1 shows a block diagram of the internal circuitry on the stand--alone pressure sensor chip. VS 3 THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY 1 GND MPXM2053 SERIES Freescale Semiconductor Preferred Device 0 to 50 kPa (0 to 7.25 psi) 40 mV FULL SCALE SPAN (TYPICAL) MPAK PACKAGE SCALE 1:1 MPXM2053D/DT1 CASE 1320 SCALE 1:1 2 4 X--ducer SENSING ELEMENT Vout+ Vout-- MPXM2053GS/GST1 CASE 1320A PIN NUMBER 1 2 Gnd +Vout 3 4 VS --Vout Figure 1. Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side (P1). Preferred devices are Freescale Semiconductor recommended choices for future use and best overall value. © Freescale Semiconductor, Inc., 2004. All rights reserved. MPXM2053 SERIES 1 Sensor Device Data Freescale Semiconductor MAXIMUM RATINGS(NOTE) Rating Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Tstg TA Value 200 --40 to +125 --40 to +125 Unit kPa °C °C NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device. OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Characteristic Pressure Supply Range(1) Voltage(2) Symbol POP VS Io VFSS Voff ∆V/∆P — (0 to 50 kPa) — — TCVFSS TCVoff Zin Zout (10% to 90%) tR — — Min 0 — — 38.5 --1.0 — --0.6 — — --2.0 --1.0 1000 1400 — — — Typ — 10 6.0 40 — 0.8 — ±0.1 ±0.5 — — — — 1.0 20 ±0.5 Max 50 16 — 41.5 1.0 — 0.4 — — 2.0 1.0 2500 3000 — — — Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV Ω Ω ms ms %VFSS Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity(5) Pressure Hysteresis(5) Temperature Hysteresis(5) (--40°C to +125°C) Temperature Effect on Full Scale Span(5) Temperature Effect on Input Impedance Output Impedance Response Warm--Up Offset Stability(7) Time(6) Offset(5) NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self--heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. MPXM2053 SERIES 2 Sensor Device Data Freescale Semiconductor LINEARITY Linearity refers to how well a transducer’s output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Freescale Semiconductor’s specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. LEAST SQUARES FIT RELATIVE VOLTAGE OUTPUT EXAGGERATED PERFORMANCE CURVE LEAST SQUARE DEVIATION STRAIGHT LINE DEVIATION END POINT STRAIGHT LINE FIT OFFSET 0 50 PRESSURE (% FULLSCALE) 100 Figure 2. Linearity Specification Comparison ON-CHIP TEMPERATURE COMPENSATION and CALIBRATION Figure 3 shows the minimum, maximum and typical output characteristics of the MPXM2053 series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. 40 35 OUTPUT (mVdc) 30 25 20 15 10 5 kPa PSI 0 --5 0 VS = 10 Vdc TA = 25°C P1 > P2 MAX TYP SPAN RANGE (TYP) MIN 12.5 1.8 25 3.6 37.5 5.4 50 7.25 OFFSET (TYP) Figure 3. Output versus Pressure Differential ORDERING INFORMATION De ice Type Device Type MPXM2053D MPXM2053DT1 MPXM2053GS MPXM2053GST1 Options Options Non--ported Non--ported, Tape and Reel Ported Ported, Tape and Reel Case No ase o. 1320 1320 1320A 1320A MPXM2053 SERIES Sensor Device Data Freescale Semiconductor 3 PACKAGE DIMENSIONS 2X 0.006 C A B E e PIN 4 NOTES: 1. DIMENSIONS ARE IN INCHES. 2. INTERPRET DIMENSIONS AND TOLERANCES PER ASME Y14.5M--1994. 3. DIMENSIONS ”D” AND ”E1” DO NOT INCLUDE MOLD FLASH OR PROTRUSION. MOLD FLASH OR PROTRUSION SHALL NOT EXCEED .006” PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5° MAXIMUM. 5. DIMENSIONS ”b” DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE .008 MAXIMUM. INCHES MIN MAX .155 .165 .002 .010 .014 .018 .120 .130 .245 .255 .475 .485 .325 .335 .050 BSC .025 BSC .038 .048 0° 7° STYLE 1: PIN 1. 2. 3. 4. e/2 b1 0.004 M PIN 1 CAB 4X b CAB 0.004 M E1 B A D DIM A A1 b b1 D E E1 e e/2 L θ GND +Vout Vs --Vout A 0.004 DETAIL E C SEATING PLANE .014 GAGE PLANE A1 L DETAIL E θ CASE 1320-02 ISSUE A MPAK, STYLE 1 MPXM2053 SERIES 4 Sensor Device Data Freescale Semiconductor PACKAGE DIMENSIONS 2X 0.006 C A B E e e/2 A1 L DETAIL E 4X .014 GAGE PLANE θ b CAB b1 0.004 M N CAB 0.004 M P NOTES: 1. DIMENSIONS ARE IN INCHES. 2. INTERPRET DIMENSIONS AND TOLERANCES PER ASME Y14.5M--1994. 3. DIMENSIONS ”D” AND ”E1” DO NOT INCLUDE MOLD FLASH OR PROTRUSION. MOLD FLASH OR PROTRUSION SHALL NOT EXCEED .006” PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5° MAXIMUM. 5. DIMENSIONS ”b” DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE .008 MAXIMUM. INCHES MIN MAX .377 .397 .002 .010 .014 .018 .120 .130 .245 .255 .475 .485 .325 .335 .050 BSC .025 BSC .013 .023 .283 .293 .363 .373 .107 .117 .192 .202 0° 7° S A DETAIL E 0.004 E1 C SEATING PLANE B A D DIM A A1 b b1 D E E1 e e/2 L M N P S θ CASE 1320A-02 ISSUE O MPAK, STYLE 1 MPXM2053 SERIES Sensor Device Data Freescale Semiconductor 5 NOTES MPXM2053 SERIES 6 Sensor Device Data Freescale Semiconductor NOTES MPXM2053 SERIES Sensor Device Data Freescale Semiconductor 7 How to Reach Us: Home Page: www.freescale.com E-mail: support@freescale.com USA/Europe or Locations Not Listed: Freescale Semiconductor Technical Information Center, CH370 1300 N. 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Freescalet and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2004. All rights reserved. MPXM2053 Rev. 2 10/2004 MPXM2053 SERIES 8 Sensor Device Data Freescale Semiconductor