MPXM2053GST1

Freescale Semiconductor Technical Data Document Number: MPXM2053 Rev 5.0, 05/2006 50 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors The MPXM2053 device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output - directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Features • • • • Temperature Compensated Over 0°C to +85°C Available in Easy-to-Use Tape & Reel Ratiometric to Supply Voltage Gauge Ported and Non Ported Options MPXM2053 SERIES COMPENSATED AND CALIBRATED PRESSURE SENSOR 0 TO 50 kPA (0 TO 7.25 psi) 40 mV FULL SCALE SPAN (TYPICAL) MPAK PACKAGES Typical Applications • • • • • • Pump/Motor Controllers Robotics Level Indicators Medical Diagnostics Pressure Switching Non-Invasive Blood Pressure Measurement ORDERING INFORMATION Device Type Options Case No. MPX Series Order No. Packing Options Rails Device Marking MPXM2053D 1 2 MPXM2053D/DT CASE 1320-02 MPXM2053GS/GST1 CASE 1320A-02 Pin Number Gnd +Vout 3 4 VS -Vout Non-ported Absolute, Element Only Absolute, Axial Port Ported 1320 MPXM2053D 1320 MPXM2053DT1 Tape & Reel MPXM2053D Rails MPXM2053G Absolute, Axial 1320A MPXM2053GS Port Absolute, Element Only 1320A MPXM2053GST1 Tape & Reel MPXM2053G © Freescale Semiconductor, Inc., 2006. All rights reserved. Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip. VS 3 Thin Film Temperature Compensation and Calibration X-ducer Sensing Element 2 4 Vout+ Vout- 1 GND Figure 1. Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT VERSUS APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. Table 1. Maximum Ratings(1) Rating Maximum Pressure Storage Temperature Operating Temperature The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side. Symbol Pmax Tstg TA Value 200 -40 to +125 -40 to +125 Unit kPa °C °C 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. MPXM2053 2 Sensors Freescale Semiconductor Table 2. Operating Characteristics (VS = 10 Vdc, TA = 25°C) Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity(5) Pressure Hysteresis(5) (0 to 50 kPa) Temperature Hysteresis(5) (-40°C to +125°C) Temperature Effect on Full Scale Span(5) Temperature Effect on Offset(5) Input Impedance Output Impedance Response Time(6) (10% to 90%) Warm-Up Offset Stability(7) 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: • • • • Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C. TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. Symbol POP VS Io VFSS Voff ∆V/∆P — — — TCVFSS TCVoff Zin Zout tR — — Min 0 — — 38.5 -1.0 — -0.6 — — -2.0 -1.0 1000 1400 — — — Typ — 10 6.0 40 — 0.8 — ± 0.1 ± 0.5 — — — — 1.0 20 ± 0.5 Max 50 16 — 41.5 1.0 — 0.4 — — 2.0 1.0 2500 3000 — — — Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV Ω Ω ms ms %VFSS 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. MPXM2053 Sensors Freescale Semiconductor 3 LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. The specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. Least Squares Fit Exaggerated Performance Curve Relative Voltage Output Least Square Deviation Straight Line Deviation End Point Straight Line Fit OFFSET 0 50 Pressure (% Fullscale) 100 Figure 2. Linearity Specification Comparison ON-CHIP TEMPERATURE COMPENSATION AND CALIBRATION Figure 3 shows the minimum, maximum and typical output characteristics of the MPXM2053 series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. 40 35 Output (mVdc) 30 25 20 15 10 5 0 -5 0 VS = 10 Vdc TA = 25°C TYP MAX SPAN RANGE (TYP) MIN kPa PSI 12.5 1.8 25 3.6 37.5 5.4 50 7.25 OFFSET (TYP) Figure 3. Output versus Pressure Differential MPXM2053 4 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 1320-02 ISSUE B MPXM2053 Sensors Freescale Semiconductor 5 PACKAGE DIMENSIONS PAGE 2 OF 2 MPXM2053 6 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PIN 4 PIN 1 PAGE 1 OF 2 CASE 1320A-02 ISSUE A MPXM2053 Sensors Freescale Semiconductor 7 PACKAGE DIMENSIONS PAGE 2 OF 2 MPXM2053 8 Sensors Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. 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Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007. All rights reserved. MPXM2053 Rev. 5.0 05/2006