F6589

ULTRA THIN MCP ASSEMBLY WITH CENTER HOLE F6589 FEATURES q Ultra Thin Type: 2.5 mm (Max.) • Detection at closed distance from samples q Flexible Lead Out (polymide film) • Easy system design with a flexible wiring • Low outguessing for high vacuum operation q Light Weight APPLICATIONS q SEM q FIB System q Mask Aligner q Electron Beam Measuring System TMCPF0083 SPECIFICATIONS Parameter Value Unit GENERAL Assembly Outer Diameter Effective Diameter Maximum Height MCP Channel Diameter MCP Stage Number Centerpipe Inner Diameter Dead Area around Center Hole Electrical Potential MCP-in Anode 28.0 11.0 2.5 12 2 1 4 -0.4 to +0.4 +2.4 (Max.) mm mm mm µm stage mm mm kV MAXIMUM RATINGS MCP Supply Voltage (In-Out) MCP Out-Anode Voltage Anode-Substrate Voltage Operating Vacuum Condition Ambient Temperature Baking Temperature Baking Time Vacuum Condition for Baking • Not allowed to be baked. 2.0 0.4 2.4 Less than 6.7 × 10 -4 (5 × 10 -6) -50 to +70 200 8 Less than 6.7 × 10 -4 (5 × 10 -6) kV kV kV Pa (Torr) °C °C hours Pa (Torr) CHARACTERISTICS Gain at 1.8kV Plate Resistance Maximum Linear Output DC Dark Current at 2kV Dark Count at 2kV 1 × 10 6 Min. 50 to 200 7% of strip current under uniform input into whole MCP effective area 1 × 10 -10 3 – MΩ/MCP µA A cps Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. © 1997 Hamamatsu Photonics K. K. ULTRA THIN MCP ASSEMBLY WITH CENTER HOLE F6589 Figure 1: Merit of Ultra Thin MCP Assembly with Center Hole ULTRA THIN TYPE Electron CONVENTIONAL TYPE Electron MCP Secondary Electrons MCP Secondary Electrons Stage Sample Sample Stage Detection efficiency of secondary Electrons is improved with a closed distance from sample. TMCPC0039EA Figure 2: Dimensional Outline (Unit: mm) ANODE LEAD MCP-OUT LEAD 8 MCP-IN LEAD ø2.2 ø4 ø6 10 POLYIMIDE FILM (Less Than 0.1t) ELECTRODE : COPPER 63 SUBSTRATE (TITANIUM) 58 MCP (2 STAGE) H AMAMATSU PHOTONICS K.K., Electron Tube Center 314-5, Shimokanzo, Toyooka-village, Iwata-gun, Shizuoka-ken, 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 U.S.A.: H amamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: Lough Point, 2 Gladbeck Way, Windmill Hill, Enfield, Middlesex EN2 7JA, United Kingdom, Telephone: (44)181-367-3560, Fax: (44)181-367-6384 North Europe: Hamamatsu Photonics Norden AB: Färögatan 7, S-164-40 Kista, Sweden, Telephone: (46)8-703-29-50, Fax: (46)8-750-58-95 Italy: Hamamatsu Photonics Italia S.R.L.: Via Della Moia, 1/E 20020 Arese, (Milano), Italy, Telephone: (39)2-935 81 733, Fax: (39)2-935 81 741 TMCP1011E03   ø1 ø11 ø18 ø28 EFFECTIVE AREA PROTECTION ELECTRODE FOR CHARGING-UP (SAME POTENTIAL AS SUBSTRATE) 2.5 MAX. , SUBSTRATE ANODE (SUS-NM) , , , , TMCPA0031EA MAR. 1998. CR (9705) Printed in Japan