L10366-10

HIGH BRIGHTNESS NEW VUV LIGHT SOURCE UNIT L10366 SERIES OVERVIEW The L10366 series are newly developed VUV (vacuum UV) light source units. This product uses a "high-brightness deuterium lamp with MgF2 window" that produces a high radiant intensity 4 times higher than conventional model. This product is now a lot easier to handle due to use of an air-cooled structure and vacuum flange mount. Left: Power supply, Right: Light source TLSOF0184 FEATURES GHigh Radiant Intensity: 4 Times (compared to conventional model) APPLICATIONS GSpectrophotometer, Fluorophotometer GElectrostatic Removal of Semiconductor Wafer, LCD Panel, etc. GPhotoionization Detector (PID) GUV Resistance Testing of Various Material GOptical Chemical Vapor Deposition (optical CVD) GExcitation Light Source Conventional type GHigh VUV Intensity Down to 115 nm GAir Cooling (needs no cooling water) GExternal Control (lamp ON/OFF, lamp ON status signal) GNo Optical Axis Alignment Required ARC DISTRIBUTION (at 230 nm) L10366 series (Aperture size: 0.5 mm) High Radiant Intensity x4 (compared to conventional model) (Aperture size: 1 mm) PACKAGE CONTENTS Type No. L10366 L10366-10 L10366-11 L10366-12 Light Source Vacuum Flange 1 — (E3444) (E3444-01) (E3444-02) Power Supply Light Source to Power Supply Cable AC Cable 1 The vacuum flange E3444 series can be sold separately from the unit L10366 series. SPECIFICATIONS GGENERAL RATINGS Parameter Spectral Distribution Window Material Aperture Size (Arc Point) Cooling Method Operating Temperature Range Operating Humidity Range Description/Value 115 to 400 MgF2 0.5 Air-cooled +10 to +35 Below 80 % (No Condensation) Unit nm — mm — °C — GRECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C) Parameter Warm-up Time Output Stability Light Source Life 2 Input Voltage (AC) Power Consumption Fluctuation (p-p) Drift (Max.) at 230 nm at 160 nm Description/Value 25 ± 5 0.05 ±0.3 2000 (Guaranteed) 500 (Expected) 100 V to 240 V (100 V / 200 V Auto Switching), Single Phase 50 Hz to 60 Hz 140 Unit s % %/h h — VA 2 The life end is defined as the time when the radiant output falls to 50 % of its initial value. Operating life depends on environmental conditions (vacuum atmosphere). GVACUUM FLANGE Parameter Seeling Method Flange Mount Flange Seeling Force Retention E3444 Regular — 1.33 × 10-4 E3444-01 E3444-02 O-Ring JIS VF50 ICF114 JIS VG50 ICF114 Pa L/s or Less (1 × 10-6 Torr L/s) SPECTRAL DISTRIBUTION (VUV region; for reference only) 100 TLSOB0079EB REPLACE LAMP SOURCE Type No. L10388 L10388-10 L10388-11 L10388-12 Light Source Vacuum Flange — (E3444) (E3444-01) (E3444-02) RELATIVE OUTPUT (%) 80 60 40 20 0 100 120 140 160 180 200 220 240 400 WAVELENGTH (nm) DIMENSIONAL OUTLINES (Unit: mm) LIGHT SOURCE (Weight: Approx. 1 kg) 122 77 COOLING FAN TOP VIEW ARC POINT 0.3 A VACUUM FLANGE MOUNT * A 48 h7 81.5 ± 0.5 30 ARC POINT 62 77 94 FRONT VIEW METAL CONNECTOR (CONNECTION TO POWER SUPPLY) METAL CONNECTOR (CONNECTION TO POWER SUPPLY) SIDE VIEW TLSOA0094EB * Sealing Force Retention 1.33 × 10-4 Pa L/S or Less (1 × 10-6 Torr L/S) POWER SUPPLY (Weight: Approx. 2.8 kg) 115 TOP VIEW EXTERNAL CONTROL TERMINALS (D-SUB CONNECTOR) LAMP STATUS SIGNAL + LAMP STATUS SIGNAL – +5 V dc(+) +5 V dc RETURN(–) CONT POWER 145 LINE INPUT OUTPUT 110 FRONT VIEW 310 SIDE VIEW METAL CONNECTOR (CONNECTION TO LIGHT SOURCE) REAR VIEW CABLE LENGTH: 2000 ± 50 TLSOA0095EB DIMENSIONAL OUTLINES (Unit: mm) VACUUM FLANGE E3444 40 4- 8.4 10 7 O-RING P.C.D. 106 20 70.0 ± 0.3 120 40 TLSOA0097EA E3444-01 40 4- 10 10 7 O-RING P.C.D. 100 20 70.0 ± 0.3 120 40 TLSOA0098EA E3444-02 8- 8.4 17.5 47.5 7 O-RING P.C.D. 92.2 20 70 ± 0.3 114 40 TLSOA0053EB Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2006 Hamamatsu Photonics K.K. WEB SITE www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P. O. Box 6910, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: usa@hamamatsu.com Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: info@hamamatsu.de France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: infos@hamamatsu.fr United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: info@hamamatsu.co.uk North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 SOLNA, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: info@hamamatsu.se TLSO1060E02 Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: info@hamamatsu.it NOV. 2006 IP