Airflow Sensors
Microbridge Mass Airflow/Unamplified
AWM 2000 Series
Figure 1
Heater Control Circuit
FEATURES
1 Bidirectional sensing capability
1 Actual mass air flow sensing
1 Low differential pressure sensing
The AWM2000 Series microbridge mass
airflow sensor is a passive device comprised of two Wheatstone bridges. The
heater control circuit in Figure 1 is required for operation per specifications.
The sensing bridge supply circuit in Figure 2 is also required for operation per
specifications. These two circuits are not
on board the package and must be supplied in the application. The differential
amplifier in Figure 3 is a useful interface
for the sensing bridge. It can be used to
introduce the gain and to introduce voltage offsets to the sensor output as referenced in Equation 1.
Figure 2
Sensing Bridge Supply Circuit
Figure 3
Differential Instrumentation Amplifier Circuit
Note: For applications sensing hydrogen
or helium, see Application Note 3, page
131.
Equation 1:
VoJ
( )( )( )
2R2+R1
R1
where V offsetJVS
68
R4
R3
V2-V1
+V offset
( )
R6
R6+R5
Honeywell 1 Sensing and Control 1 1-800-537-6945 USA 1 F1-815-235-6847 International 1 1-800-737-3360 Canada
Airflow Sensors
Microbridge Mass Airflow/Unamplified
AWM2000 Series
AWM2000 SERIES ORDER GUIDE (Performance Characteristics @ 10.01 ±0.01 VDC, 25°C)
Catalog Listings
AWM2100V
AWM2150V
Flow Range (Full Scale)
±200 sccm
±30 sccm
Pressure Range
(See Application Note #1)
AWM2200V
AWM2300V
±1000 sccm
±4.0N H2O (10 mBar)
Output Voltage @ Trim Point
30 mV @ 100 sccm
11.8 mV @ 25 sccm
20 mV @ 2N H2O
50 mV @ 650 sccm
Null Voltage Shift, Typ.
+25° to −25°C, +25° to 85°C
±0.20 mV
±0.20 mV
±0.20 mV
±0.20 mV
Output Voltage Shift, Max.
+25° to −25°C
+25° to +85°C
+2.5% Reading
−2.5% Reading
+5% Reading
−5% Reading
+22% Reading (Note 2)
−22% Reading
+5% Reading
−5% Reading
Repeatability & Hysteresis, Max.
±0.35% Reading
±0.35% Reading
±0.35% Reading
±1% Reading
Min.
Typ.
Max.
Excitation (VDC) (Note 1)
8.0
10±0.01
15
Power Consumption (mW)
—
30
50
Null Voltage (mV)
−1.0
0.0
+1.0
Response Time (msec)
—
1.0
3.0
Common Mode Pressure (psi)
—
—
25
Sensor Resistance (kΩ)
Pin 2-Pin 1, Pin 6-Pin 1
—
5
—
Sensor Current (mA)
Pin 2-Pin 1, Pin 6-Pin 1
—
—
0.6
Temperature Range
Operating: −25° to +85°C (−13° to +185°F); Storage: −40° to +90°C (−40° to +194°F)
Termination
2,54 mm (.100N) centers, 0,635 mm (0.025N) square
Weight (grams)
10.8
Shock Rating
100 g peak (5 drops, 6 axes)
Airflow
Notes:
1. Output Voltage is ratiometric to supply voltage.
2. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature.
See Application Note 1.
3. Maximum allowable rate of flow change to prevent damage: 5.0 SLPM/1.0 sec.
MOUNTING DIMENSIONS (for reference only)
Honeywell 1 Sensing and Control 1 1-800-537-6945 USA 1 F1-815-235-6847 International 1 1-800-737-3360 Canada
69
Airflow Sensors
Microbridge Mass Airflow/Unamplified
OUTPUT FLOW VS INTERCHANGEABILITY (Note 1)
AWM2100V
AWM2000 Series
Performance Characteristics @ 10.0 ±0.01 VDC, 25°C
AWM2150V
AWM2200V
(Note 2)
AWM2300V
Press. Flow Nom.
mBar sccm mV
Tol.
±mV
Press. Flow Nom.
mBar sccm mV
Tol.
±mV
Flow Press. Nom.
sccm N H2O mV
Tol.
±mV
Press. Flow Nom.
mBar sccm mV
Tol.
±mV
0.49
200
44.50
4.25
53
30
14.0
2.5
120
4.00
31.75
3.50
3.4
1000
55.50
3.70
0.35
150
38.75
3.00
36
20
9.5
1.5
90
3.00
26.75
2.50
2.4
800
52.90
3.50
0.21
100
30.00
1.50
17
10
5.0
1.5
60
2.00
20.00
1.20
1.8
650
50.00
2.50
0.09
50
16.50
2.50
9.8
5
2.5
1.0
30
1.00
11.20
1.80
0.83
400
42.50
3.00
0.00
0
0.00
3.20
0.00
1.00
7.4
4
2.0
1.0
0
0.00
1.00
0.31
200
29.20
−0.09 −50
−16.50
4.50
6.2
3
1.5
1.0
−30
−1.00 −11.20
3.00
0
0
0.00
1.00
−0.21 −100
−30.00
5.00
5
2
1.0
1.0
−60
−2.00 −20.00
3.30
−0.31 −200
−28.90
15.00
−0.35 −150
−38.80
7.65
2.5
1
0.5
0.8
−90
−3.00 −26.75
5.30
−0.83 −400
−41.20
26.00
−0.49 −200
−44.50
9.75
0
0
0.0
0.6
−120
−4.00 −31.75
7.00
−1.6
−600
−48.20
29.50
−9.8
−5
−2.5
2.0
−2.4
−800
−52.20
32.50
−53
−30
−14.0
5.0
−3.4
−1000 −55.00
36.00
Notes:
1. Numbers in BOLD type indicate calibration type, mass flow or differential pressure.
Tolerance values apply to calibration type only.
2. Differential pressure calibrated devices are not recommended for flow measurement.
Use flow calibrated devices for flow measurement.
OUTPUT CURVES
70
Honeywell 1 Sensing and Control 1 1-800-537-6945 USA 1 F1-815-235-6847 International 1 1-800-737-3360 Canada
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