HAFBLF0750CAAX5

Honeywell ZephyrTM Analog Airflow Sensors HAF Series–High Accuracy ±50 SCCM to ±750 SCCM Datasheet Honeywell ZephyrTM Analog Airflow Sensors HAF Series - High Accuracy Honeywell Zephyr™ HAF Series sensors provide an analog interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow. Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are available at ±50, ±100, ±200, ±400 or ±750 SCCM. Custom flow ranges are also available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC). The HAF Series is compensated over the temperature range of 0 °C to 50 °C [32 °F to 122 °F] and operates across a temperature range of -20 °C to 70 °C [-4 °F to 158 °F]. The state-of-the-art ASIC-based compensation provides analog outputs with a response time of 1 ms. These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow. Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards What makes our sensors better? Fast response time Wide range of airflows Customizable flow ranges and configurable package styles Linear output High stability Low pressure drop TIGHT TOTAL ERROR BAND • fast response TIME • Wide Range of Airflows 2 sensing.honeywell.com Features and Benefits FAST RESPONSE TIME* Allows a customer’s application to respond quickly to airflow change, important in critical medical (e.g., anesthesia) and industrial (e.g., fume hood) applications. Wide range of airflows* Zephyr measures mass flow at standard flow ranges of ±50, ±100 ±200, ±400 or ±750 SCCM, or custom flow ranges, increasing the options for integrating the sensor into the application. Customizable flow ranges and configurable package styles* Meet specific end-user needs. FULL CALIBRATION AND TEMPERATURE COMPENSATION Typically allow customer to remove additional components associated with signal conditioning from the PCB, reducing PCB size as well as costs often associated with those components (e.g., acquisition, inventory, assembly). LINEAR OUTPUT* Provides more intuitive sensor signal than the raw output of basic airflow sensors, which can help reduce production costs, design, and implementation time. Low pressure drop* Typically improves patient comfort in medical applications, and reduces noise and system wear on other components such as motors and pumps. 0.049 %FS resolution Increases ability to sense small airflow changes, allowing customers to more precisely control their application. Low 3.3 Vdc operating voltage option and low power consumption Allow for use in battery-driven and other portable applications. Small size Occupies less space on PCB, allowing easier fit and potentially reducing production costs; PCB size may also be reduced for easier fit into space-constrained applications. RoHS-compliant materials Meet Directive 2002/95/EC. *Competitive Differentiator sensing.honeywell.com 3 Potential Applications MEDICAl Anesthesia Delivery machines Ventricular Assist Devices (Heart Pumps) Nebulizers Oxygen concentrators Patient monitoring systems (respiratory monitoring) Sleep apnea machines Spirometers Ventilators LAPAROSCOPY INDUSTRIAL AIR-TO-FUEL RATIO FUEL CELLS GAS LEAK DETECTION VAV SYSTEM ON HVAC SYSTEMS GAS METERS HVAC FILTERS 4 sensing.honeywell.com ±50 SCCM to ±750 SCCM Table 1. Absolute Maximum Ratings1 Characteristic Parameter Supply voltage -0.3 Vdc to 6.0 Vdc Voltage on I/O output pin -0.3 Vdc to Vsupply Storage temperature range -40 °C to 125 °C [-40 °F to 257 °F] Maximum flow change 5.0 SLPM/s Maximum common mode pressure 25 psi at 25 °C [77 °F] Maximum flow 10 SLPM Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical characteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at absolute maximum ratings. 1 CAUTION CAUTION IMPROPER USE Do not use these products to sense liquid flow Failure to comply with these instructions may result in product damage. PRODUCT DAMAGE Do not disassemble these products. Failure to comply with these instructions may result in product damage. Table 2. Operating Specifications Characteristic Supply voltage 3.3 Vdc 5.0 Vdc Power: 3.3 Vdc 5.0 Vdc Compensated temperature range Operating temperature range Parameter Note 3.3 Vdc ±10% 5.0 Vdc ±10% – 40 mW max. 65 mW max. 1 0 °C to 50 °C [32 °F to 122 °F] 2 -20 °C to 70 °C [-4 °F to 158 °F] Accuracy See Table 3. 3, 4 Total Error Band (TEB) See Table 3. 4, 5 ±0.1 %FSS 4, 6 Null accuracy Response time Resolution Warm-up time Calibration media Null stability Reverse polarity protection 1 ms typ. 7 12 bit – 15 ms 8 gaseous nitrogen 9 ±0.06 %FSS max. deviation from null output after 1000 hrs at 25 °C – no – Maximum power: Is measured under the conditions of the highest supply voltage, Vsupply + 10%, 70 °C, full scale flow and with the minimum load specified for that supply voltage. 2 Custom and extended compensated temperature ranges are possible. Contact Honeywell for details. 3 Accuracy: The maximum deviation from the nominal output over the compensated flow range at a reference temperature of 25 °C. Errors include offset, span, non-linearity, hysteresis and non-repeatability. 4 Full Scale Span (FSS): The algebraic difference between the output at the forward Full Scale (FS) flow and the output at the reverse FS flow. Forward flow is defined as flow from P1 to P2 as shown in Figure 9. The references to mass flow (SCCM) refer to gas flows at the standard conditions of 0 °C and atmospheric pressure 760 (101.3 kPa). 5 Total Error Band: The maximum deviation in output from the ideal transfer function over the entire compensated temperature and flow range. Includes all errors due to offset, full scale span, flow hysteresis, flow repeatability, thermal effect on offset, thermal effect on span and thermal hysteresis. 6 Null accuracy: The maximum deviation in output at 0 SCCM from the ideal transfer function over the compensated temperature range. This includes offset errors, thermal airflow hysteresis and repeatability errors. 7 Response time: The time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may be affected by the pneumatic interface). 8 Warm-up time: The time to the first valid flow measurement after power is applied. 9 Default calibration media is dry nitrogen gas. Please contact Honeywell for other calibration options. 1 sensing.honeywell.com 5 Honeywell ZephyrTM Analog Airflow Sensors HAF Series–High Accuracy Table 3. Bidirectional Forward Flow Optimization Accuracy Error Band Total Error Band Error (%FSS) Error (%FSS) See table below for null accuracy. See table below for null accuracy. Sensor Range (SCCM) ±50 ±100 ±200 1 ±400 ±750 Airflow (SCCM) Applied Flow (SCCM) Error (%FSS) Applied Flow (SCCM) Error (%FSS) -50 to -14.3 ±7% reading -50 to -11.3 ±9% reading -14.3 to 0 ±1 -11.1 to 0 ±1 00 ±0.32 00 ±0.32 0 to 20 ±1 0 to 11.1 ±1 20 to 50 ±5% reading 11.1 to 50 ±9% reading -100 to -11.1 ±9% reading -100 to -8.3 ±12% reading -11.1 to 0 ±0.5 -8.3 to 0 ±0.5 00 ±0.16 00 ±0.16 0 to 16.7 ±0.5 0 to 16.7 ±0.5 16.7 to 100 ±6% reading 16.7 to 100 ±6% reading -200 to -6.7 ±15% reading -200 to -6.7 ±15% reading -6.7 to -0 ±0.25 -6.7 to -0 ±0.25 00 ±0.1 00 ±0.1 0 to 40 ±0.25 0 to 22.2 ±0.25 40 to 200 ±2.5% reading 22.2 to 200 ±4.5% reading -400 to -32 ±10% reading -400 to -32 ±12% reading -32 to -0 ±0.4 -32 to -0 ±0.45 00 ±0.1 00 ±0.1 0 to 80 ±0.4 0 to 60 ±0.45 80 to 400 ±4.0% reading 60 to 400 ±6% reading -750 to -25 ±15% reading -750 to -25 ±15% reading -25 to -0 ±0.25 -25 to -0 ±0.25 00 ±0.1 00 ±0.1 0 to 37.5 ±0.25 0 to 37.5 ±0.25 37.5 to 750 ±10% reading 37.5 to 750 ±10% reading The short port sensors are only specified down to -100 SCCM. 1 6 Airflow (SCCM) sensing.honeywell.com ±50 SCCM to ±750 SCCM Table 4. Suggested Load Characteristic Parameter Minimum suggested resistance: 3.3 Vdc 5.0 Vdc 3.3 kOhm 5 kOhm Maximum suggested capacitance: 3.3 Vdc 5.0 Vdc 10 nF 10 nF Parameter Humidity Characteristic 0% to 95% RH, non-condensing Shock Vibration ESD LARGE PARTICULATE DAMAGE Use a 5-micron filter upstream of the sensor to keep media flow through the sensor free of condensing moisture and particulates. Large, high-velocity particles or conductive particles may damage the sensing element. Failure to comply with these insturctions may result in product damage. Table 6. Wetted Materials Table 5. Environmental Characteristics Characteristic CAUTION Parameter Covers high temperature polymer 100 g, 11 ms Substrate PCB 15 g at 20 Hz to 2000 Hz Adhesives epoxy Class 3B per MIL-STD 883G Electronic components silicon, gold Compliance RoHS, WEEE Table 7. Recommended Mounting and Implementation Characteristic Parameter Mounting screw: size torque 5-40 0,68 N m [6 in-lb] Silicon tubing for long port style 70 durometer; size 0.125 in inside diameter, 0.250 in outside diameter silicone tubing O-ring: for short port style for long port style AS568A, Size 7, Silicone, Shore A 70 AS568A, Size 10, Silicone, Shore A 70 Filter 5-micron filter upstream of the sensor Figure 2. Nominal Analog Output Analog Output (%Vsupply) 120.00% 100.00% 80.00% 60.00% 40.00% 20.00% 0.00% -150.00% -100.00% -50.00% 0.00% 50.00% 100.00% 150.00% Flow (%FS) sensing.honeywell.com 7 Honeywell ZephyrTM Analog Airflow Sensors HAF Series–High Accuracy Figure 3. Ideal Transfer Function  F  Vo = Vs 0.5 + 0.4 A  FFS   Where: VO= output voltage of the device VS= supply voltage measured at the device FA = flow applied across the device FFS = full scale flow specified for the device F ( V /V -0.5 ) FA = FS o s 0.4 Honeywell ZephyrTM Analog Airflow Sensors, HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM, Product Nomenclature Figure 4. Nomenclature and Order Guide For example, a HAFBLF0200CAAX5 part number defines a Honeywell ZephyrTM Analog Airflow Sensor, bidirectional forward flow optimized, long port, fastener mount, 200 SCCM, analog output, 10% to 90% transfer function, 5.0 Vdc supply voltage. HAF B Flow Product Series Direction HAF Series Bidirectional High Accuracy B forward flow optimized Airflow Sensor S Bidirectional symmetric L F 0200 C A A X 5 Port Style Housing Style Flow Range2 Unit Output Format Transfer Function Reserved for Future Use Supply Voltage L Long port1 F Fastener mount S Short port Snap S mount1 50 long port 0050 style only 10% to 90% of Full C SCCM A Analog A Scale Output (FSO) X XXXXX 100 long port 5 5.0 Vdc 0100 style only 0200 0400 0750 3 3.3 Vdc 200 long or short port 400 long port style only 750 long port style only The Long Port Port Style with the Snap Mount Housing Style is not a valid configuration. The 200 SCCM Flow Range is available in the Long and Short Port Styles. 1 2 Apart from the general configuration required, other customer-specific requirements are also possible. Please contact Honeywell. Figure 5. All Available Standard Configurations LF: Long port, fastener mount SF: Short port, fastener mount SS: Short port, snap mount Notes: 1. The long port style with the snap mount housing style is not a valid configu 2. The 200 SCCM flow range is available in the long and short port styles. 3. Apart from the general configuration required, other customer-specific requ Please contact Honeywell. 8 sensing.honeywell.com ±50 SCCM to ±750 SCCM Figure 6. Wave Solder Profile 300 Max. temp. = 243 °C Max. temp. = 205 °C Temperature (°C) 250 200 Housing temp. (top of device) Pin temp. (bottom of device) 150 100 50 0 0 20 40 60 80 100 Time (s) Figure 7. Long Port Style Flow vs Pressure mbar inH2O Pa -750 -0.2517 -0.1011 -25.17 -550 -0.1499 -0.0602 -14.99 -400 -0.0891 -0.0358 -8.91 -300 -0.0578 -0.0232 -5.78 -200 -0.0321 -0.0129 -3.21 -100 -0.0114 -0.0046 -1.14 -50 -0.0035 -0.0014 -0.35 0 -20 -0.0007 -0.0003 -0.07 0 0.0000 0.0000 0.0000 -0.06 20 0.0007 0.0003 0.07 Pressure Drop (inH2O) N Typical Pressure Drop Flow (SCCM) 0.12 0.06 -0.12 -750 -600 -450 -300 -150 0 150 300 450 600 750 Flow (SCCM) 50 0.0035 0.0014 0.35 100 0.0014 0.0046 0.14 200 0.0321 0.0129 3.21 300 0.0578 0.0232 5.78 400 0.0891 0.0358 8.91 550 0.1499 0.0602 14.99 750 0.2517 0.1011 25.17 Flow (SCCM) mbar Figure 8. Short Port Style Flow vs Pressure N Pressure Drop (inH2O) 0.6 Typical Pressure Drop inH2O Pa -200 -1.1707 -0.470 -117.07 -150 -0.7074 -0.284 -70.74 0.2 -100 -0.3562 -0.143 -35.62 0 -50 -0.1120 -0.045 -11.20 0.4 -0.2 -0.4 -0.6 -200 -150 -100 -50 0 Flow (SCCM) 50 100 150 200 0 0.0000 0.000 0.0000 50 0.1196 0.048 11.96 100 0.3462 0.139 34.62 150 0.7149 0.287 71.49 200 1.2589 0.452 125.89 sensing.honeywell.com 9 Honeywell ZephyrTM Analog Airflow Sensors HAF Series–High Accuracy Figure 9. Mounting Dimensions (For reference only: mm [in].) LF: Long port, fastener mount MODEL NUMBER LOT CODE Honeywell Zephyr™ HAFBLFXXXXXXXXX 0x123456789 Mounting Footprint 7(50,1$/6,'( 3,0 [0.12] 2,00 TYP. [0.079] 1,00 [0.04]     3,50 [0.14] 7,20 [0.28] 36,00 [1.42] 18,00 [0.71] 10,3 [0.40]  10,00 [0.39] 2X DIA. 5,35 [0.21] 6,50 [0.26]    7,20 [0.28] 4X DIA. 0,812 [0.032] ;32576 6(1625)22735,17 9,(:(')5207(50,1$/6,'( 2X DIA. 3,40 [0.134] 19,90 [0.78] 7,20 [0.28] 2X DIA. 3,40 [0.13] 6,35 [0.25] 12,70 [0.50] 28,80 [1.13] 36,00 [1.42] AIRFLOW DIRECTION, PORT SIDE SF: Short port, fastener mount MODEL NUMBER LOT CODE Honeywell Zephyr™ HAFBSFXXXXXXXXX 0x123456789 7(50,1$/6,'( 3,0 [0.12] 2,00 TYP. [0.079] 1 2 3 4 1,00 [0.04] Mounting Footprint 3,50 [0.14] 7,20 [0.28] 10,3 [0.40] 2,50 [0.10] 6,50 [0.26] 19,90 [0.78] 7,20 [0.28] 2X DIA. 3,40 [0.13] 6,35 [0.25] 36,00 [1.42] 12,70 [0.50] 28,80 [1.13] AIRFLOW DIRECTION, PORT SIDE 10 sensing.honeywell.com 36,00 [1.42] 18,00 [0.71]  2X DIA. 4,00 [0.16]    7,20 [0.28] 4X DIA. 0,812 [0.032] ;32576 6(1625)22735,17 9,(:(')5207(50,1$/6,'( 2X DIA. 3,40 [0.134] ±50 SCCM to ±750 SCCM Figure 9. Mounting Dimensions (For reference only: mm [in], continued.) SS: Short port, snap mount 22,00 [0.87] MODEL NUMBER LOT CODE DIA. 2,30 [0.09] Honeywell Zephyr™ HAFBSSXXXXXXXXX 0x123456789 7(50,1$/6,'( 3,3 [0.13] 2,00 TYP. [0.079] 6,50 [0.26] 26,00 [1.02] 1,00 [0.04] 10,40 [0.41] 7,20 [0.28] Mounting Footprint 4,60 [0.18] 4,80 [0.19] 3,00 [0.12] 1,80 [0.071] 10,3 [0.40] 12,8 [0.50]     4X DIA. 0,812 [0.032] 2X DIA. 2,2 [0.086] THRU HOLES FOR MOUNTING 22,0 [0.866] 3,80 [0.150] 0,65 [0.026]    4,00 [0.157]  2X 7,20 [0.28] 2X 2,50 [0.098] ;32576 2,50 [0.10] 26,00 [1.024] 6(1625)22735,17 9,(:(')5207(50,1$/6,'( 19,90 [0.78] 6,35 [0.25] 12,70 [0.50] 28,80 [1.13] AIRFLOW DIRECTION, PORT SIDE 10 Table 8. Pinout Pin 1 Pin 2 Pin 3 Pin 4 Vout Vsupply grground NC sensing.honeywell.com 11 ADDITIONAL INFORMATION The following associated literature is available at sensing.honeywell.com: • Product line guide • Product part listing/nomenclature tree • Product range guide • Technical Information: – Gas Media Compatibility and Correction Factors WARNING PERSONAL INJURY DO NOT USE these products as safety or emergency stop devices or in any other application where failure of the product could result in personal injury. Failure to comply with these instructions could result in death or serious injury. • Installation Instructions • Application specific information WARNING MISUSE OF DOCUMENTATION • • The information presented in this product sheet is for reference only. Do not use this document as a product installation guide. Complete installation, operation, and maintenance information is provided in the instructions supplied with each product. Failure to comply with these instructions could result in death or serious injury. WARRANTY/REMEDY Find out more Honeywell serves its customers through a worldwide network of sales offices, representatives and distributors. For application assistance, current specifications, pricing or name of the nearest Authorized Distributor, contact your local sales office. To learn more about Honeywell’s Honeywell warrants goods of its manufacture as being free of defective materials and faulty workmanship. Honeywell’s standard product warranty applies unless agreed to otherwise by Honeywell in writing; please refer to your order acknowledgement or consult your local sales office for specific warranty details. If warranted goods are returned to Honeywell during the period of coverage, Honeywell will repair or replace, at its option, without charge those items it finds defective. The foregoing is buyer’s sole remedy and is in lieu of all other warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. In no event shall Honeywell be liable for consequential, special, or indirect damages. While we provide application assistance personally, through our literature and the Honeywell website, it is up to the customer to determine the suitability of the product in the application. Specifications may change without notice. The information we supply is believed to be accurate and reliable as of this issue; however, we assume no responsibility for its use. sensing and control products, call +1-815-235-6847 or 1-800-537-6945, visit sensing.honeywell.com, or e-mail inquiries to info.sc@honeywell.com Sensing and Control Honeywell 1985 Douglas Drive North Golden Valley, MN 55422 honeywell.com 32308685-A-EN IL50 June 2015 2015 Honeywell International Inc. All rights reserved.