N9201A

Agilent N9201A Array Structure Parametric Test Option Technical Overview Introduction The decreasing size of features on integrated circuits (45 nm and smaller) is driving the need for new parametric test capabilities. These capabilities must accommodate the advanced test structures developed for fast yield ramp up in process integration as well as process monitoring in semiconductor manufacturing. High-throughput measurement of highvolume parametric data is required to shorten the time for ramping up the process yield. This is accomplished by statistically analyzing and correcting the cause of wide range of process performance variations across a 300 mm wafer. Advanced test structures, addressable array test structures that contain address decoder circuitry, and a large number of test array elements with fewer probing pads and silicon area have been developed by major semiconductor manufacturers for this purpose. The Agilent N9201A Parametric Test Option offers high throughput parametric measurement capability for a variety of addressable array test structures (e.g. passive array, active array and clocked latched active array) with synchronized mixed operation of DC SMUs and digital outputs. Digital outputs (parallel, serial, or clock signals) are used for the address decoder that is built into addressable array test structures. This allows the selection of the specific array element to be measured. DC SMUs measure the DC voltage and current parameters of selected array elements. The DC power source is used for applying the power supply voltage (Vdd) to the address decoder logic circuitry that is built-in the addressable array test structures. The N9201A is able to provide a maximum of 48 signal lines using the extended path ports of the 4070/4080 test head. This can be any combination of available SMUs, digital outputs, and DC power source outputs. The signals pass through the 4070/4080 test head down to the probe card. The N9201A is controlled by SPECS (Semiconductor Process Evaluation Core Software), a test shell environment for the 4070 Series and 4080 Series. The N9201A can be provided as an upgrade for existing 4070 Series and 4080 Series users. Measurement functions DC current, DC voltage, and digital output DC measurement Spot and sweep Measurement unit:* High speed medium power SMU (MPSMU); 8 SMU minimum configuration; SMUs may be added in increments of one up to a maximum of 40 SMUs *Note: High Speed MPSMU specification is specified at the connectors of the equipment’s front panel Range of operation: -42 V to 42 V; -200 mA to 200 mA Minimum resolution: 100 µV; 5 pA Maximum voltage between common and ground: ± 42 V Ground unit (GNDU) specification Output voltage: 0 V ± 100 µV Maximum sink current: 0.5 A Output terminal/connection: Triaxial connector, Kelvin (remote sensing) Voltage range, resolution and accuracy Voltage range ±2 V ±20 V ±40 V ±100 V 1 Force resolution 100 µV 1 mV 2 mV 5 mV Measure resolution 100 µV 1 mV 2 mV 5 mV Force accuracy 1 ±(0.03% ±(0.03% ±(0.03% ±(0.04% + 900 µV) + 4 mV) + 7 mV) + 15 mV) Measure accuracy 2 ±(0.03% ±(0.03% ±(0.03% ±(0.03% + 700 µV) + 4 mV) + 8 mV) + 20 mV) Maximum current 200 mA 200 mA 2 3 ± (% of output/measurement value + offset voltage) 2 200 mA (Vout ≤ 20 V), 50 mA (20 V