T2060001050-000

4 THIS DRAWING IS UNPUBLISHED. C COPYRIGHT 20 2 3 1 20 RELEASED FOR PUBLICATION REVISIONS ALL RIGHTS RESERVED. BY - P DESCRIPTION LTR A A1 D APVD INITIAL 11MAY2015 DW CW ECR-17-018349 14DEC2017 DW CW 9.5 : 1. C 18 17 DWN : : : : : : : >=2µm =2µm CONTACT RESISTANCE: