MLX90809LXG-EAD-000-RE 数据手册
MLX90809
Relative Pressure Sensor
1. Features and Benefits
2. Application Examples
▪
High accuracy relative pressure sensor
(+/-1.5%FSO)
▪
Ratiometric analog output or digital SENT
output
▪
Fully integrated IC: MEMS, analog front
end circuitry, 16 bit microcontroller,
analog back end circuitry, voltage
regulators
▪
▪
▪
▪
Large automotive temperature range
(-40°C to 150°C)
Automotive qualified and automotive
diagnostic features (clamping levels,
broken track diagnostics, multiple internal
fault diagnostics)
▪
Factory calibrated and/or fully
programmable through the connector for
customized calibration curves
▪
Back side exposed relative pressure sensor
for higher resistance to common
automotive media
▪
Assembled in a robust easy to seal package
▪
Automotive applications
▪
Vacuum measurement
▪
Clogged filter detection
▪
Seat lumbar cushion sensor
Industrial applications
▪
Vacuum sensor
▪
Process monitoring
▪
Fluid pressure (low pressure/high
accuracy)
Consumer/Home appliance applications
▪
Filter monitoring
▪
Dispensing/metering systems
▪
White goods
3. Ordering information
Part No.
Temperature Code
Package Code
Option Code
Packing Form Code
MLX90809
L (-40°C to 150°C)
XG
EAD-000
RE
MLX90809
L (-40°C to 150°C)
XG
EAD-003
RE
MLX90809
L (-40°C to 150°C)
XG
EAD-007
RE
MLX90809
L (-40°C to 150°C)
XG
EAD-100
RE
Option code legend:
EAD-000 = 0.05 to -1.05 bar relative pressure / 0.5 to 4.5 V analog output
EAD-003 = 0 to 1 bar relative pressure / 0.5 to 4.5 V analog output
EAD-007 = 0 to -1 bar relative pressure / 0.5 to 4.5 V analog output
EAD-100 = 0.05 to -1.2 bar relative pressure / 193 to 3896 LSB SENT output
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Relative Pressure Sensor
4. Functional Diagram
Broken wire
detection
Test
Temperature
sensor
Piezoresistive
sensing element
OPA
Micro controller
M
U
X
ADC
16 bits
Analog driver
Gain & Offset temperature
compensation
Pressure Linearization
DAC
Gain
12 bits
Analog
Output
Programmable filter
Diagnostics Logic
Diagnostic signals
Vext
Analog & Digital
Regulator and
POR
DSP
Gain & Offset
compensation
Overvoltage &
reverse voltage
protection
Rom
FW
EE
PROM
SENT driver
Ram
Slew
rate
control
SENT
Output
Ground
5. General Description
The MLX90809 is a packaged, factory calibrated, integrated relative pressure sensor delivering a ratiometric
analog or digital (using the SENT protocol) signal.
Use of an optimized architecture and a high density CMOS technology imparts the MLX90809 with best in class
automotive EMC performance. A DSP based architecture using a 16bit microcontroller provides outstanding
performance.
A smart package and die assembly concept suits applications with stringent automotive temperature and stress
conditions needing small drift over life.
6. Glossary of Terms
Bar: Pressure unit (1bar = 100kPa)
ADC: Analog to Digital Converter
DAC: Digital to Analog Converter
DSP: Digital Signal Processor
EMC: Electro Magnetic Compatibility
SENT: Single Edge Nibble Transmission
FSO: Full Span Output
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Relative Pressure Sensor
Contents
1. Features and Benefits ....................................................................................................................... 1
2. Application Examples ........................................................................................................................ 1
3. Ordering information ........................................................................................................................ 1
4. Functional Diagram ........................................................................................................................... 2
5. General Description .......................................................................................................................... 2
6. Glossary of Terms ............................................................................................................................. 2
7. Absolute Maximum Ratings .............................................................................................................. 4
8. Pin Definitions and Descriptions........................................................................................................ 4
9. General Electrical Specifications........................................................................................................ 6
10. Detailed General Description .......................................................................................................... 8
11. Programmed Settings ..................................................................................................................... 8
11.1. MLX90809LXG-EAD-000 .............................................................................................................. 9
11.2. MLX90809LXG-EAD-003 .............................................................................................................. 9
11.3. MLX90809LXG-EAD-007 ............................................................................................................ 10
11.4. MLX90809LXG-EAD-100 ............................................................................................................ 10
12. Application Information ................................................................................................................ 12
13. Standard information regarding manufacturability of Melexis products with different soldering
processes ....................................................................................................................................... 13
14. ESD Precautions ............................................................................................................................ 13
15. Package Information ..................................................................................................................... 14
16. Contact ......................................................................................................................................... 15
17. Disclaimer ..................................................................................................................................... 15
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Relative Pressure Sensor
7. Absolute Maximum Ratings
Exceeding the absolute maximum ratings may cause permanent damage. Exposure to absolute-maximum-rated
conditions for extended periods may affect device reliability.
Parameter
Remarks
Value
Units
Supply Voltage (overvoltage)
Remark 1
18
V
Reverse Voltage Protection
Remark 2
-14
V
Positive output voltage
Remark 1
18
V
Reverse output voltage
Remark 1
-0.5
V
Operating Temperature Range
-40 to 150 C
Storage Temperature Range
-40 to 150 C
Burst pressure (Room Temperature)
(AEC Q100 002)
5
Bar
Table 1: Absolute maximum ratings
Remark 1: No time limit or temperature limit for these over voltage conditions.
Remark 2: Reverse Voltage Protection at -14V at 150C for maximum 1 hour. At Room Temperature that
condition can apply for maximum 24 hours.
8. Pin Definitions and Descriptions
ZZZZZZZZZZ
ZZZZZZZZZZ
Symbol
VVVVV-vvv
YYWW
YYWW
Function / Description
Device used- design revision
YY
Year of assembly
WW
Calendar week of assembly
ZZZZZZZZZZ
Wafer lot number
MLXVVVVV-vvv
MLXVVVVV-vvv
Figure 1: Package marking and pin out (Top view: left; Bottom view: right)
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Relative Pressure Sensor
Pin number
1
2
3
4
5
6
7
8
Description
SENT output
SENT output
Supply Input
Test pin
Not connected
Ground
Analog output
Analog output
Pin number
16
15
14
13
12
11
10
9
Description
SENT output
SENT output
Supply Input
Test pin
Not connected
Ground
Analog output
Analog output
Table 2: Pin out definitions and descriptions
Only one of the application pins needs to be connected: one of the Supply Input pins (3 or 14), one of the Ground
pins (6 or 11) and one of the selected (either analog (7,8,9,10) or SENT(1,2,15,16)) output pins. See section 9 for
the detailed information on the application pins connections.
Symbol
Function / Description
VVVVV-vvv
Device used- design revision
YY
Year of assembly
WW
Calendar week of assembly
ZZZZZZZZZZ
Wafer lot number
Table 3: Package label definition
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Relative Pressure Sensor
9. General Electrical Specifications
DC Operating Parameters TA = -40°C to 150°C, VDD = 5V (unless otherwise specified).
Parameter
Nominal supply voltage
Nominal supply current
Analog Output Load
(Resistive)
Analog Output Load
(Capacitive)
SENT Output Load
(Capacitive)
SENT Output Load
(C-R-C)
Symbol
Vdd
Idd
Rload
Remarks
Diagnostic limits
Diag low Pull-up ≥ 4.7kΩ
Min
4.5
No output load connected
Pull up or Pull down
Cload
Typ Max
5
5.5
7
8
4.7
2.2
470
nF
Cload
2.2
nF
CRCload
1.1nF +
220Ohm
+ 1.1nF
3
3
Pull-down ≥ 4.7kΩ
Diag high Pull-up ≥ 4.7kΩ
Pull-down ≥ 8kΩ
Clamping levels
Analog saturation
output level
Clamp
low
Clamp
high
Programmable range with 8 bit
resolution for the low clamping level, 9
for the high (for the default programmed
levels see section 8), +/-10mV accuracy
on the programmed clamping level
Vsat high Pull-up ≥ 4.7kΩ
Pull-down ≥ 4.7kΩ
Pull-down ≥ 10kΩ
Vsat low Pull-up ≥ 4.7kΩ
Pull-down ≥ 4.7kΩ
Power up time
Response time Analog
Output
Response time SENT
Output
Programmable pressure
spans (Positive pressure
on package top side, see
remark 3, 5)
Programmable pressure
spans (vacuum on
package top side, see
remark 3,5)
Overall accuracy
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Units
V
mA
kOhm
%Vdd
96
96
0
%Vdd
25
%Vdd
50
100
%Vdd
97
96
97
0
0
100
100
100
3
3
5.5
%Vdd
1
msec
4
frames
Time from reaching minimum allowed
supply voltage of 4.5V till having the
output within specification
Time needed for the output to react to a
pressure change from 10% to 90% of its
final value (pressure change
corresponding to maximum a 4V output
change). Using default filter settings SSF
= 1, PFLT = 0.
3
%Vdd
msec
The pressure spans defined correspond
to an analog output span of 4V or to the
12 bit pressure information on the SENT
output
0.5
1
bar
Relative
The pressure spans defined correspond
to an analog output span of 4V or to the
12 bit pressure information on the SENT
output
Remark
4
-0.5
bar
Relative
1.5
%FSO
Taking into account the drifts over
temperature and over life
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MLX90809
Relative Pressure Sensor
Ratiometricity error
Output noise analog
output
Output noise SENT
output
Internal Temperature
Error on SENT Output
BW limited to 50kHz. Using default filter
settings SSF = 1, PFLT = 0.
BW limited to 50kHz. Using default filter
settings SSF = 1, PFLT = 0.
Tptat
0 hours
Over life
-5
-10
0.2
2
%Vdd
mVrms
1.8
LSBrms
5
10
°C
Table 4: Electrical specifications
Remark 3: The top side of the package is defined as the side with the small hole and readable marking.
Remark 4: There are no limitations on the vacuum level that the MLX90809 can measure.
Remark 5: The pressure span is defined as being equal to UPL-LPL (upper pressure limit minus lower pressure
limit like described for the default calibrated curve in paragraph 8). The atmospheric pressure should always
belong to the programmed transfer function.
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Relative Pressure Sensor
10. Detailed General Description
The pressure sensing element consists of a square diaphragm realized in the silicon chip by backside etching. The
diaphragm reacts to a pressure difference between the top and bottom side of the diaphragm. The internal strain
increases, in particular at the border of the diaphragm. Here, the piezo-resistive elements have been implanted
into the silicon diaphragm, which act as a transducer.
The electronics front end amplifies the signal from the bridge, performs a coarse offset compensation and an
ADC conversion. The DSP performs the compensations over temperature. Furthermore, the digital circuit
provides some filtering, the possibility to linearize the pressure signal and also implements the clamping function.
The analog back end consists of a 12 bit DAC and an output driver. This chip delivers an analog output
proportional to the pressure or a SENT output compliant with SAE J2716 spec dated January 2010.
A broken wire detection block allows actively driving the output to one of the rails in case of a broken supply or
ground connection. Extensive protection of the supply lines allows the MLX90809 to handle extreme overvoltage
conditions and is immune to severe external disturbances. Several diagnostic functions (over-voltage, undervoltage, overpressure, under pressure detections) have been implemented on the 90809 and can be enabled by
programming EEPROM settings. Figure 2 describes MLX90809 block diagram.
Broken wire
detection
Test
Temperature
sensor
Piezoresistive
sensing element
OPA
Micro controller
M
U
X
ADC
16 bits
Analog driver
Gain & Offset temperature
compensation
Pressure Linearization
DAC
Gain
12 bits
Analog
Output
Programmable filter
Diagnostics Logic
Rom
FW
Diagnostic signals
Vext
Analog & Digital
Regulator and
POR
DSP
Gain & Offset
compensation
Overvoltage &
reverse voltage
protection
EE
PROM
SENT driver
Ram
Slew
rate
control
SENT
Output
Ground
Figure 2: MLX90809 block diagram
11. Programmed Settings
The MLX90809 is calibrated at the final manufacturing test step. During the calibration, settings are stored in the
on chip (16x32bit) EEPROM to define the pressure transfer curve as well as the output clamping levels. Together
with the transfer functions, the IC filter values are set. The default programmed filter settings lead to the noise
level and response times described in paragraph 6. The transfer functions calibrated in the different
MLX90809LXG-EAD-xxx products with its corresponding performance level maintained over the full temperature
range and over life is described for each specific option code below.
The MLX90809 can be programmed for pressure spans like those described in paragraph 6 with the atmospheric
pressure always inside of the application range.
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Relative Pressure Sensor
Contact Melexis for information on the expected accuracy for other ranges or transfer functions than the default
programmed ones.
Melexis can support customers delivering parts calibrated with other settings or can support customers by
delivering the necessary programming hardware, software and documentation to be able to program the transfer
function on the customers manufacturing line. To learn how to use the Melexis hardware and software to
program the MLX90809 read the application note “MLX90809 PTC04 Software Description”.
11.1. MLX90809LXG-EAD-000
DC Operating Parameters TA = -40°C to 150°C, VDD = 5V.
Parameter
Symbol Remarks
Transfer curve: Figure 3
Pressure 1
P1
Pressure 2
P2
Output 1
O1
Output 2
O2
Parameter
Symbol Remarks
Low clamping
LCL
level
High clamping
HCL
level
Overall accuracy expressed as output value
Output accuracy εo
Overall accuracy expressed as pressure value
Pressure accuracy εp
Min
0.49
Value
0.05
-1.05
0.5
4.5
Typ
Max
0.5
0.51
Unit
Bar
Bar
V
V
Unit
V
4.49
4.5
4.51
V
60
16.5
mV
mBar
-60
-16.5
11.2. MLX90809LXG-EAD-003
DC Operating Parameters TA = -40°C to 150°C, VDD = 5V.
Parameter
Symbol Remarks
Transfer curve: Figure 4
Pressure 1
P1
Pressure 2
P2
Output 1
O1
Output 2
O2
Parameter
Symbol Remarks
Low clamping
LCL
level
High clamping
HCL
level
Overall accuracy expressed as output value
Output accuracy εo
Overall accuracy expressed as pressure value
Pressure accuracy εp
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Min
0.49
Value
0
1
0.5
4.5
Typ
Max
0.5
0.51
Unit
Bar
Bar
V
V
Unit
V
4.49
4.5
4.51
V
60
15
mV
mBar
-60
-15
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MLX90809
Relative Pressure Sensor
11.3. MLX90809LXG-EAD-007
DC Operating Parameters TA = -40°C to 150°C, VDD = 5V.
Parameter
Symbol Remarks
Transfer curve: Figure 3
Pressure 1
P1
Pressure 2
P2
Output 1
O1
Output 2
O2
Parameter
Symbol Remarks
Low clamping
LCL
level
High clamping
HCL
level
Overall accuracy expressed as output value
Output accuracy εo
Overall accuracy expressed as pressure value
Pressure accuracy εp
Min
0.25
Value
0
-1
0.5
4.5
Typ
Max
0.3
0.35
Unit
Bar
Bar
V
V
Unit
V
4.75
4.8
4.85
V
60
15
mV
mBar
-60
-15
11.4. MLX90809LXG-EAD-100
DC Operating Parameters TA = -40°C to 150°C, VDD = 5V.
Parameter
Symbol Remarks
Transfer curve: Figure 3
Pressure 1
P1
Pressure 2
P2
Output 1
O1
Output 2
O2
Low clamping
LCL
level
High clamping
HCL
level
Parameter
Symbol Remarks
Overall accuracy expressed as output value
Output accuracy εo
Overall accuracy expressed as pressure value
Pressure accuracy εp
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Min
-60
-20
Value
0.05
-1.20
193
3896
1
Unit
Bar
Bar
LSB
LSB
LSB
4088
LSB
Typ
Max
60
20
Unit
LSB
mBar
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MLX90809
Relative Pressure Sensor
Output
HCL
O2
εo
εp
LCL
Relative Pressure
in Bars
O1
P2
P1
Figure 3: Transfer function negative pressure curve
Output
HCL
O2
εo
εp
LCL
Relative Pressure
in Bars
O1
P1
P2
Figure 4: Transfer function positive pressure curve
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Relative Pressure Sensor
12. Application Information
The MLX90809 only needs 2 capacitors in the application, a 47nF decoupling capacitor on the supply line and a
47nF load on the analog output pin. When the SENT output is used a 2.2nF capacitor is recommended.
MLX90809 in analog mode
Vdd
47nF
Gnd
47nF
AnaOut
Figure 4: MLX90809 application schematic in analog mode
When using the analog output, Melexis recommends shorting one of the SENT output pins and the test pin to
GND.
MLX90809 in SENT mode
SENTOut
2.2nF
Vdd
47nF
Gnd
Figure 5: MLX90809 application schematic in SENT mode
When using the SENT output Melexis recommends shorting one of the analog output pins and the test pin to
GND.
These recommendations for external components are however only providing a basic protection. Depending on
the module design and the EMC speciation requirements different configurations can be needed.
Read the application note “System Integration Guidelines” for manufacturing handling as well as sealing
recommendations.
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Relative Pressure Sensor
13. Standard information regarding manufacturability of Melexis
products with different soldering processes
Our products are classified and qualified regarding soldering technology, solderability and moisture sensitivity
level according to following test methods:
Reflow Soldering SMD’s (Surface Mount Devices)
▪
▪
IPC/JEDEC J-STD-020
Moisture/Reflow Sensitivity Classification for Nonhermetic Solid State Surface Mount Devices
(classification reflow profiles according to table 5-2)
EIA/JEDEC JESD22-A113
Preconditioning of Nonhermetic Surface Mount Devices Prior to Reliability Testing
(reflow profiles according to table 2)
Wave Soldering SMD’s (Surface Mount Devices) and THD’s (Through Hole Devices)
▪
▪
EN60749-20
Resistance of plastic- encapsulated SMD’s to combined effect of moisture and soldering heat
EIA/JEDEC JESD22-B106 and EN60749-15
Resistance to soldering temperature for through-hole mounted devices
Iron Soldering THD’s (Through Hole Devices)
▪
EN60749-15
Resistance to soldering temperature for through-hole mounted devices
Solderability SMD’s (Surface Mount Devices) and THD’s (Through Hole Devices)
▪
EIA/JEDEC JESD22-B102 and EN60749-21
Solderability
For all soldering technologies deviating from above mentioned standard conditions (regarding peak temperature,
temperature gradient, temperature profile etc) additional classification and qualification tests have to be agreed
upon with Melexis.
The application of Wave Soldering for SMD’s is allowed only after consulting Melexis regarding assurance of
adhesive strength between device and board.
Melexis is contributing to global environmental conservation by promoting lead free solutions. For more
information on qualifications of RoHS compliant products (RoHS = European directive on the Restriction Of the
use of certain Hazardous Substances) please visit the quality page on our website:
http://www.melexis.com/quality.aspx
14. ESD Precautions
Electronic semiconductor products are sensitive to Electro Static Discharge (ESD).
Always observe Electro Static Discharge control procedures whenever handling semiconductor products.
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Relative Pressure Sensor
15. Package Information
Figure 6: MLX90809 package drawing
Table in
mm
A
A1
A2
D
D1
D2
E
E1
E2
min
2.28
-0.025
10.19
7.7
3.7
7.45
4.8
1.9
max
2.45
0.075
2.34
REF
10.33
8.1
4.1
7.59
5.2
2.3
B
0.326
0.486
L
0.74
0.99
G1
1.5
1.7
G2
0.56
0.96
A: total package thickness (body thickness + stand off)
A1: package stand off
Table in
mm
min
max
α
0o
8o
c
0.2
0.33
H
10.11
10.51
e
1.27
BSC
Table 5: Detailed package dimensions
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Relative Pressure Sensor
16. Contact
For the latest version of this document, go to our website at www.melexis.com.
For additional information, please contact our Direct Sales team and get help for your specific needs:
Europe, Africa
Telephone: +32 13 67 04 95
Email : sales_europe@melexis.com
Americas
Telephone: +1 603 223 2362
Email : sales_usa@melexis.com
Asia
Email : sales_asia@melexis.com
17. Disclaimer
The information furnished by Melexis herein (“Information”) is believed to be correct and accurate. Melexis disclaims (i) any and all liability in connection with or arising out of the
furnishing, performance or use of the technical data or use of the product(s) as described herein (“Product”) (ii) any and all liability, including without limitation, special,
consequential or incidental damages, and (iii) any and all warranties, express, statutory, implied, or by description, including warranties of fitness for particular purpose, noninfringement and merchantability. No obligation or liability shall arise or flow out of Melexis’ rendering of technical or other services.
The Information is provided "as is” and Melexis reserves the right to change the Information at any time and without notice. Therefore, before placing orders and/or prior to
designing the Product into a system, users or any third party should obtain the latest version of the relevant information to verify that the information being relied upon is current.
Users or any third party must further determine the suitability of the Product for its application, including the level of re liability required and determine whether it is fit for a
particular purpose.
The Information is proprietary and/or confidential information of Melexis and the use thereof or anything described by the Information does not grant, explicitly or implicitly, to
any party any patent rights, licenses, or any other intellectual property rights.
This document as well as the Product(s) may be subject to export control regulations. Please be aware that export might require a prior authorization from competent authorities.
The Product(s) are intended for use in normal commercial applications. Unless otherwise agreed upon in writing, the Product(s) are not designed, authorized or warranted to be
suitable in applications requiring extended temperature range and/or unusual environmental requirements. High reliability applications, such as medical life-support or lifesustaining equipment are specifically not recommended by Melexis.
The Product(s) may not be used for the following applications subject to export control regulations: the development, product ion, processing, operation, maintenance, storage,
recognition or proliferation of 1) chemical, biological or nuclear weapons, or for the development, production, maintenance or storage of missiles for such weapons: 2) civil
firearms, including spare parts or ammunition for such arms; 3) defense related products, or other material for military use or for law enforcement; 4) any applications that, alone
or in combination with other goods, substances or organisms could cause serious harm to persons or goods and that can be used as a means of violence in an armed conflict or any
similar violent situation.
The Products sold by Melexis are subject to the terms and conditions as specified in the Terms of Sale, which can be found at https://www.melexis.com/en/legal/terms-andconditions.
This document supersedes and replaces all prior information regarding the Product(s) and/or previous versions of this document.
Melexis NV © - No part of this document may be reproduced without the prior written consent of Melexis. (2016)
ISO/TS 16949 and ISO14001 Certified
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