MPX4250DP

MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MPX4250D/D MPX4250D Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPX4250D series piezoresistive transducer is a state–of–the–art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin–film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features • Differential and Gauge Applications Only • 1.4% Maximum Error Over 0° to 85°C • Ideally suited for Microprocessor Interfacing • Patented Silicon Shear Stress Strain Gauge • Temperature Compensated Over – 40° to +125°C • Offers Reduction in Weight and Volume Compared to Existing Hybrid Modules • Durable Epoxy Unibody Element VS 3 SERIES OPERATING OVERVIEW INTEGRATED PRESSURE SENSOR 0 to 250 kPa (0 to 36.3 psi) 0.2 to 4.91 Volts Output BASIC CHIP CARRIER ELEMENT CASE 867–08, STYLE 1 X–ducer SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 2 GND GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY 1 Vout PORT OPTION CASE 867B–04, STYLE 1 PIN NUMBER PINS 4, 5 AND 6 ARE NO CONNECTS 1 2 3 Vout Gnd VS 4 5 6 N/C N/C N/C Figure 1. Fully Integrated Pressure Sensor Schematic MAXIMUM RATINGS(1) Parametrics Overpressure(2) (P1 > P2) Burst Pressure(2) (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Pburst Tstg TA NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead. Value 400 1000 – 40° to +125° – 40° to +125° Unit kPa kPa °C °C 1. TC = 25°C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device. Senseon and X–ducer are trademarks of Motorola, Inc. REV 1 Motorola Sensor Device Data © Motorola, Inc. 1997 1 MPX4250D SERIES OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Minimum Pressure Offset(3) @ VS = 5.1 Volts Full Scale Output(4) @ VS = 5.1 Volts Full Scale Span(5) @ VS = 5.1 Volts Accuracy(6) Sensitivity Response Time(7) Output Source Current at Full Scale Output Warm–Up Time(8) Offset Stability(9) (0 to 85°C) (0 to 85°C) (0 to 85°C) (0 to 85°C) Symbol POP VS Io VOFF VFSO VFSS — ∆V/∆P tR lo+ — — Min 0 4.85 — 0.139 4.844 — — — — — — — Typ — 5.1 7.0 0.204 4.909 4.705 — 18.8 1.0 0.1 20 ± 0.5 Max 250 5.35 10 0.269 4.974 — ±1.4 — — — — — Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms mAdc mSec %VFSS MECHANICAL CHARACTERISTICS Characteristic Weight, Basic Element (Case 867) Common Mode Line Pressure(10) Symbol — — Min — — Typ 4.0 — Max — 690 Unit Grams kPa NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative to 25°C. • Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 10. Common mode pressures beyond what is specified may result in leakage at the case–to–lead interface. 2 Motorola Sensor Device Data MPX4250D SERIES FLUORO SILICONE DIE COAT DIE WIRE BOND P1 STAINLESS STEEL METAL COVER MPX4250D OUPUT (PIN 1) 50 pF 51 k A/D LEAD FRAME Figure 2 illustrates the Differential/Gauge Pressure Sensing Chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX4250D series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long–term reliability. Contact the factory for information OUTPUT (Volts) 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 200 210 PRESSURE in kPa Figure 4. Output versus Differential Pressure Motorola Sensor Device Data 250 260 ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ P2 EPOXY CASE µ PROCESSOR RTV DIE BOND Figure 2. Cross–Sectional Diagram (Not to Scale) Figure 3. Typical Decoupling Filter for Sensor to Microprocessor Interface regarding media compatibility in your application. Figure 3 shows a typical decoupling circuit for interfacing the integrated sensor to the A/D input of a microprocessor. Proper decoupling of the power supply is recommended. Figure 4 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit below. (The output will saturate outside of the specified pressure range.) 5.0 4.5 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 0 MIN TRANSFER FUNCTION: Vout = VS* (0.00369*P + 0.04) ± Error VS = 5.1 Vdc TEMP = 0 to 85°C MAX TYP 3 MPX4250D SERIES Transfer Function (MPX4250D) Nominal Transfer Value: Vout = VS x (0.00369 x P + 0.04) Nominal Transfer Value: (Pressure Error x Temp. Factor x 0.00369 x VS) Nominal Transfer Value: VS = 5.1 0.25 Vdc " " Temperature Error Band MPX4250D Series 4.0 3.0 Temperature Error Factor 2.0 1.0 0.0 –40 –20 0 20 40 60 80 100 120 140 Temperature in °C NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C. Temp – 40 0 to 85 +125 Multiplier 3 1 3 Pressure Error Band 5.0 4.0 3.0 2.0 1.0 0 –1.0 –2.0 –3.0 –4.0 –5.0 Pressure Error (kPa) 0 25 50 75 100 125 150 175 200 225 250 Pressure (kPa) MPX4250D Series Pressure 0 to 250 kPa Error (max) ± 3.45 kPa ORDERING INFORMATION The MPX4250D series silicon pressure sensors are available in the basic element package or with pressure port fittings that provide mounting ease and barbed hose connections. Device Type Basic Element Options Differential/Gauge, Element Differential/Gauge, Ported Ported Elements Differential/Gauge, Stove Pipe Port Differential/Gauge, Axial Port Case No. Case 867–08 Case 867B–04 Case 867E–03 Case 867F–03 MPX Series Order No. MPX4250D MPX4250DP MPX4250GS MPX4250GSX Marking MPX4250D MPX4250DP MPX4250D MPX4250D 4 Motorola Sensor Device Data MPX4250D SERIES PACKAGE DIMENSIONS C R M B –A– N PIN 1 SEATING PLANE 1 2 3 4 5 6 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION –A– IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66 L –T– G F D 6 PL 0.136 (0.005) M J S TA M DIM A B C D F G J L M N R S CASE 867–08 ISSUE N BASIC ELEMENT (D) STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX –T– R SEATING PLANE A U L V PORT #1 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K L N P Q R S U V S INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC 0.182 0.194 MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC 4.62 4.93 N –Q– B K 1 2 3 4 5 6 PIN 1 S G D 6 PL 0.13 (0.005) C J –P– 0.25 (0.010) M TQ M F M TP Q S CASE 867B–04 ISSUE E PRESSURE SIDE PORTED (AP) STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX Motorola Sensor Device Data 5 MPX4250D SERIES PACKAGE DIMENSIONS – CONTINUED C A NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.027 0.033 0.178 0.186 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.220 0.240 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.69 0.84 4.52 4.72 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 5.59 6.10 4.62 4.93 –B– V PIN 1 PORT #1 POSITIVE PRESSURE (P1) 6 5 4 3 2 1 K S G F D 6 PL M J N E –T– DIM A B C D E F G J K N S V 0.13 (0.005) TB M CASE 867E–03 ISSUE D PRESSURE SIDE PORTED (AS) VOUT GROUND VCC V1 V2 VEX –T– C E A U –Q– NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N P Q R S U V INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.027 0.033 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.68 0.84 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.93 V N B R PIN 1 PORT #1 POSITIVE PRESSURE (P1) –P– 0.25 (0.010) M TQ M 6 5 4 3 2 1 S K J 0.13 (0.005) M TP S D 6 PL QS F G STYLE 1: PIN 1. 2. 3. 4. 5. 6. CASE 867F–03 ISSUE D PRESSURE SIDE PORTED (ASX) VOUT GROUND VCC V1 V2 VEX 6 Motorola Sensor Device Data MPX4250D SERIES Motorola reserves the right to make changes without further notice to any products herein. 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Motorola Sensor Device Data 7 MPX4250D SERIES Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 303–675–2140 or 1–800–441–2447 JAPAN: Nippon Motorola Ltd.; Tatsumi–SPD–JLDC, 6F Seibu–Butsuryu–Center, 3–14–2 Tatsumi Koto–Ku, Tokyo 135, Japan. 81–3–3521–8315 Mfax™: RMFAX0@email.sps.mot.com – TOUCHTONE 602–244–6609 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, – US & Canada ONLY 1–800–774–1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852–26629298 INTERNET: http://motorola.com/sps 8 ◊ MPX4250D/D Motorola Sensor Device Data