MPXV2202DP

MOTOROLA Freescale Semiconductor, Inc. SEMICONDUCTOR TECHNICAL DATA Order this document by MPX2202/D 200 kPa On-Chip Temperature Compensated & Calibrated Pressure Sensors The MPX2202/MPXV2202G device series is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output — directly proportional to the applied pressure. The sensor is a single monolithic silicon diaphragm with the strain gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. They are designed for use in applications such as pump/motor controllers, robotics, level indicators, medical diagnostics, pressure switching, barometers, altimeters, etc. Features UNIBODY PACKAGE • Temperature Compensated Over 0°C to +85°C • Easy–to–Use Chip Carrier Package Options • Available in Absolute, Differential and Gauge Configurations Application Examples • Pump/Motor Controllers • Robotics MPX2202A/D CASE 344 • Level Indicators • Medical Diagnostics • Pressure Switching • Barometers • Altimeters Figure 1 illustrates a block diagram of the internal circuitry on the stand–alone pressure sensor chip. VS 3 THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY 1 GND MPX2202 MPXV2202G SERIES Motorola Preferred Device 0 to 200 kPa (0 to 29 psi) 40 mV FULL SCALE SPAN (TYPICAL) Freescale Semiconductor, Inc... SMALL OUTLINE PACKAGE SURFACE MOUNT MPXV2202GP CASE 1369 2 4 SENSING ELEMENT Vout+ Vout- MPX2202AP/GP CASE 344B MPXV2202DP CASE 1351 PIN NUMBER 1 2 MPX2202DP CASE 344C 3 4 Gnd +Vout VS –Vout 5 6 7 8 N/C N/C N/C N/C Figure 1. Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. The absolute sensor has a built–in reference vacuum. The output voltage will decrease as vacuum, relative to ambient, is drawn on the pressure (P1) side. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum (P2) side relative to the pressure (P1) side. Preferred devices are Motorola recommended choices for future use and best overall value. NOTE: Pin 1 is noted by the notch in the lead. MPX2202ASX/GSX CASE 344F PIN NUMBER 1 2 Gnd +Vout 3 4 VS –Vout MPX2202GVP CASE 344D Replaces MPX2200/D REV 2 NOTE: Pin 1 is noted by the notch in the lead. Motorola Sensor Device Data © Motorola, Inc. 2002 For More Information On This Product, Go to: www.freescale.com 1 Freescale MPX2202 MPXV2202G SERIES MAXIMUM RATINGS(NOTE) Rating Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Semiconductor, Inc. Symbol Pmax Tstg TA Value 800 –40 to +125 –40 to +125 Unit kPa °C °C NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device. OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Characteristics Pressure Range(1) Supply Voltage Supply Current Full Scale Span(3) Offset(4) Symbol POP VS Io VFSS Voff ∆V/∆P MPX2202D Series MPX2202A Series Hysteresis(5) (–40°C to +125°C) — — — TCVFSS TCVoff Zin Zout tR — — Min 0 — — 38.5 –1.0 — –0.6 –1.0 — — –2.0 –1.0 1000 1400 — — — Typ — 10 6.0 40 — 0.2 — — ± 0.1 ± 0.5 — — — — 1.0 20 ±0.5 Max 200 16 — 41.5 1.0 — 0.4 1.0 — — 2.0 1.0 2500 3000 — — — Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV Ω Ω ms ms %VFSS Freescale Semiconductor, Inc... Sensitivity Linearity(5) Pressure Hysteresis(5) (0 to 200 kPa) Temperature Temperature Effect on Full Scale Span(5) Temperature Effect on Input Impedance Output Impedance Response Time(6) (10% to 90%) Warm–Up Offset Stability(7) Offset(5) NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self–heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 2 For More Information On This Product, Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, MPX2202 MPXV2202G SERIES Inc. LINEARITY Linearity refers to how well a transducer’s output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola’s specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. LEAST SQUARES FIT RELATIVE VOLTAGE OUTPUT EXAGGERATED PERFORMANCE CURVE LEAST SQUARE DEVIATION STRAIGHT LINE DEVIATION END POINT STRAIGHT LINE FIT OFFSET 0 50 PRESSURE (% FULLSCALE) 100 Freescale Semiconductor, Inc... Figure 2. Linearity Specification Comparison ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION Figure 3 shows the output characteristics of the MPX2202/MPXV2202G series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line. The effects of temperature on Full Scale Span and Offset are very small and are shown under Operating Characteristics. 40 35 OUTPUT (mVdc) 30 25 20 15 10 5 0 -5 kPa 0 PSI VS = 10 Vdc TA = 25°C P1 > P2 MAX TYP SPAN RANGE (TYP) MIN 25 50 7.25 75 100 14.5 PRESSURE 125 150 21.75 175 200 29 OFFSET Figure 3. Output versus Pressure Differential SILICONE GEL DIE COAT WIRE BOND WIRE BOND LEAD FRAME DIFFERENTIAL/GAUGE ELEMENT P2 DIE BOND LEAD FRAME Figure 4. Cross–Sectional Diagrams (Not to Scale) Figure 4 illustrates an absolute sensing die (right) and the differential or gauge die in the basic chip carrier (Case 344). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPX2202/MPXV2202G series pressure sensor oper- ating characteristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application. Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ABSOLUTE ELEMENT P2 DIFFERENTIAL/GAUGE STAINLESS STEEL DIE METAL COVER P1 EPOXY CASE SILICONE GEL ABSOLUTE DIE COAT DIE P1 STAINLESS STEEL METAL COVER EPOXY CASE ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉÉ DIE BOND 3 Freescale MPX2202 MPXV2202G SERIES Semiconductor, Inc. tial pressure applied, P1 > P2. The absolute sensor is designed for vacuum applied to P1 side. The Pressure (P1) side may be identified by using the table below: PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing the silicone gel which isolates the die from the environment. The differential or gauge sensor is designed to operate with positive differenPart Number MPX2202A MPX2202DP MPX2202AP MPX2202GVP MPX2202ASX MPXV2202GP MPX2202GSX MPX2202GP MPX2202D Case Type 344 344C 344B 344D 344F 1369 1351 Pressure (P1) Side Identifier Stainless Steel Cap Side with Part Marking Side with Port Attached Stainless Steel Cap Side with Port Attached Side with Port Attached Side with Part Marking Freescale Semiconductor, Inc... MPXV2202DP ORDERING INFORMATION — UNIBODY PACKAGE (MPX2202 SERIES) MPX Series Device Type Basic Element Ported Elements Options Absolute, Differential Differential, Dual Port Absolute, Gauge Absolute, Gauge Axial Gauge, Vacuum Case Type 344 344C 344B 344F 344D Order Number MPX2202A MPX2202D MPX2202DP MPX2202AP MPX2202GP MPX2202ASX MPX2202GSX MPX2202GVP Device Marking MPX2202A MPX2202D MPX2202DP MPX2202AP MPX2202GP MPX2202A MPX2202D MPX2202GVP ORDERING INFORMATION — SMALL OUTLINE PACKAGE (MPXV2202G SERIES) Device Type Ported Elements Options Gauge, Side Port, SMT Differential, Dual Port, SMT Case No. 1369 1351 MPX Series Order No. MPXV2202GP MPXV2202DP Packing Options Trays Trays Marking MPXV2202G MPXV2202G 4 For More Information On This Product, Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, MPX2202 MPXV2202G SERIES Inc. SMALL OUTLINE PACKAGE DIMENSIONS 2 PLACES 4 TIPS 0.008 (0.20) C A B A E e 5 4 GAGE PLANE e/2 .014 (0.35) θ L DETAIL G A1 D 8 1 8X F b 0.004 (0.1) M CAB Freescale Semiconductor, Inc... B E1 NOTES: 1. CONTROLLING DIMENSION: INCH. 2. INTERPRET DIMENSIONS AND TOLERANCES PER ASME Y14.5M-1994. 3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR PROTRUSIONS SHALL NOT EXCEED 0.006 (0.152) PER SIDE. 4. DIMENSION "b" DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE 0.008 (0.203) MAXIMUM. DIM A A1 b D E E1 e F K L M N P T θ INCHES MIN MAX 0.300 0.330 0.002 0.010 0.038 0.042 0.465 0.485 0.717 BSC 0.465 0.485 0.100 BSC 0.245 0.255 0.120 0.130 0.061 0.071 0.270 0.290 0.080 0.090 0.009 0.011 0.115 0.125 0° 7° MILLIMETERS MIN MAX 7.11 7.62 0.05 0.25 0.96 1.07 11.81 12.32 18.21 BSC 11.81 12.32 2.54 BSC 6.22 6.47 3.05 3.30 1.55 1.80 6.86 7.36 2.03 2.28 0.23 0.28 2.92 3.17 0° 7° ∅T N K A 8X M P 0.004 (0.1) SEATING PLANE DETAIL G C CASE 1369–01 ISSUE O Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com 5 Freescale MPX2202 MPXV2202G SERIES Semiconductor, Inc. SMALL OUTLINE PACKAGE DIMENSIONS—CONTINUED 2 PLACES 4 TIPS 0.006 (0.15) C A B A E e 5 4 GAGE PLANE e/2 .014 (0.35) θ L DETAIL G A1 D 8 1 8X F b 0.004 (0.1) M CAB Freescale Semiconductor, Inc... B E1 STYLE 1: PIN 1. 2. 3. 4. 5. 6. 7. 8. GND +Vout Vs -Vout N/C N/C N/C N/C STYLE 2: PIN 1. 2. 3. 4. 5. 6. 7. 8. N/C Vs GND Vout N/C N/C N/C N/C NOTES: 1. CONTROLLING DIMENSION: INCH. 2. INTERPRET DIMENSIONS AND TOLERANCES PER ASME Y14.5M-1994. 3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR PROTRUSIONS SHALL NOT EXCEED 0.006 (0.152) PER SIDE. 4. DIMENSION "b" DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE 0.008 (0.203) MAXIMUM. DIM A A1 b D E E1 e F K L M N P T θ INCHES MIN MAX 0.370 0.390 0.002 0.010 0.038 0.042 0.465 0.485 0.680 0.700 0.465 0.485 0.100 BSC 0.240 0.260 0.115 0.135 0.040 0.060 0.270 0.290 0.160 0.180 0.009 0.011 0.110 0.130 0° 7° MILLIMETERS MIN MAX 9.39 9.91 0.05 0.25 0.96 1.07 11.81 12.32 17.27 17.78 11.81 12.32 2.54 BSC 6.10 6.60 2.92 3.43 1.02 1.52 6.86 7.37 4.06 4.57 0.23 0.28 2.79 3.30 0° 7° N ∅T A M P 8X 0.004 (0.1) SEATING PLANE DETAIL G C K CASE 1351–01 ISSUE O 6 For More Information On This Product, Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, MPX2202 MPXV2202G SERIES Inc. UNIBODY PACKAGE DIMENSIONS NOTES: 1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.016 0.020 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _ NOM 0.475 0.495 0.430 0.450 0.048 0.052 0.106 0.118 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.41 0.51 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _ NOM 12.07 12.57 10.92 11.43 1.22 1.32 2.68 3.00 C R M 1 B –A– N PIN 1 1 2 3 4 2 3 4 Z L –T– J SEATING PLANE G F 4 PL F Y D 0.136 (0.005) M TA M DAMBAR TRIM ZONE: THIS IS INCLUDED WITHIN DIM. “F” 8 PL DIM A B C D F G J L M N R Y Z Freescale Semiconductor, Inc... STYLE 1: PIN 1. 2. 3. 4. GROUND + OUTPUT + SUPPLY - OUTPUT STYLE 2: PIN 1. 2. 3. 4. VCC - SUPPLY + SUPPLY GROUND STYLE 3: PIN 1. 2. 3. 4. GND -VOUT VS +VOUT CASE 344–15 ISSUE Z SEATING PLANE –T– R H N PORT #1 POSITIVE PRESSURE (P1) –A– U L NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G H J K L N P Q R S U INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC –Q– B PIN 1 12 34 K S F G D 4 PL 0.13 (0.005) –P– 0.25 (0.010) J C M TQ S M TS S Q S STYLE 1: PIN 1. 2. 3. 4. GROUND + OUTPUT + SUPPLY - OUTPUT CASE 344B–01 ISSUE B Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com 7 Freescale MPX2202 MPXV2202G SERIES Semiconductor, Inc. UNIBODY PACKAGE DIMENSIONS — CONTINUED V R PORT #2 PORT #1 –A– U W H PORT #2 VACUUM (P2) L PORT #1 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G H J K L N P Q R S U V W INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.248 0.278 0.310 0.330 MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 6.30 7.06 7.87 8.38 N –Q– SEATING PLANE B SEATING PLANE PIN 1 1234 –P– –T– J –T– C 0.13 (0.005) M K S 0.25 (0.010) M TQ S G D 4 PL F Freescale Semiconductor, Inc... TS S Q S STYLE 1: PIN 1. 2. 3. 4. GROUND + OUTPUT + SUPPLY - OUTPUT CASE 344C–01 ISSUE B –A– –T– R N –Q– SEATING PLANE PORT #2 VACUUM (P2) U L H POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G H J K L N P Q R S U INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.016 0.020 0.048 0.064 0.100 BSC 0.182 0.194 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.158 0.230 0.250 0.220 0.240 0.910 BSC MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.41 0.51 1.22 1.63 2.54 BSC 4.62 4.93 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC B 12 34 K S PIN 1 C J –P– 0.25 (0.010) M F TQ S G D 4 PL 0.13 (0.005) M TS S Q S STYLE 1: PIN 1. 2. 3. 4. GROUND + OUTPUT + SUPPLY - OUTPUT CASE 344D–01 ISSUE B 8 For More Information On This Product, Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, MPX2202 MPXV2202G SERIES Inc. UNIBODY PACKAGE DIMENSIONS — CONTINUED –T– C E A U –Q– NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N P Q R S U V INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.016 0.020 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.41 0.51 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.92 V N R PORT #1 POSITIVE PRESSURE (P1) B –P– 0.25 (0.010) M PIN 1 TQ M 4 3 2 1 S K Freescale Semiconductor, Inc... J F D 4 PL 0.13 (0.005) G TP Q STYLE 1: PIN 1. 2. 3. 4. GROUND V (+) OUT V SUPPLY V (-) OUT M S S CASE 344F–01 ISSUE B Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com 9 Freescale MPX2202 MPXV2202G SERIES Semiconductor, Inc. NOTES Freescale Semiconductor, Inc... 10 For More Information On This Product, Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, MPX2202 MPXV2202G SERIES Inc. NOTES Freescale Semiconductor, Inc... Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com 11 Freescale MPX2202 MPXV2202G SERIES Semiconductor, Inc. Freescale Semiconductor, Inc... Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different applications and actual performance may vary over time. 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