SCA103T Series
Data Sheet
THE SCA103T DIFFERENTIAL INCLINOMETER SERIES
The SCA103T Series is a 3D-MEMS-based single axis inclinometer family that uses the differential measurement
principle. The high calibration accuracy combines extremely low temperature dependency, high resolution and low
noise together with a robust sensing element design, to make the SCA103T an ideal choice for high accuracy
leveling instruments. The Murata inclinometers are insensitive to vibration due to having over damped sensing
elements plus they can withstand mechanical shocks of 20000 g.
Features
Measuring ranges ±15° SCA103T-D04 and
± 30° SCA103T-D05
0.001° resolution (10 Hz BW, analog output)
Sensing element controlled over damped
frequency response (-3dB 18Hz)
Robust design, high shock durability (20000g)
Excellent stability over temperature and time
Common mode error and noise reduction
using the differential measurement principle
Single +5 V supply
Ratiometric analog voltage outputs
Digital SPI inclination and temperature output
Comprehensive failure detection features
o
True self test by deflecting the sensing
elements’ proof mass by electrostatic force.
o
Continuous sensing element interconnection
failure check.
o
Continuous memory parity check.
RoHS compliant
Compatible with Pb-free reflow solder process
Applications
Platform leveling and stabilization
Rotating laser levels
Leveling instruments
Construction levels
12 VDD
Sensing
element 1
Signal conditioning
and filtering
11 OUT_1
A/D conversion
10 ST_1
9 ST_2
Self test 1
Self test 2
EEPROM
calibration
memory
Temperature
Sensor
1 SCK
SPI interface
3 MISO
4 MOSI
7 CSB
Sensing
element 2
Signal conditioning
and filtering
5 OUT_2
6 GND
Figure 1.
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Functional block diagram
Subject to changes
Doc.Nr. 8261700
1/17
Rev.A3
SCA103T Series
TABLE OF CONTENTS
The SCA103T Differential Inclinometer Series .......................................................................1
Features............................................................................................................................................. 1
Applications ...................................................................................................................................... 1
Table of Contents......................................................................................................................2
1 Electrical Specifications .....................................................................................................3
1.1
Absolute Maximum Ratings ................................................................................................... 3
1.2
Performance Characteristics.................................................................................................. 3
1.3
Electrical Characteristics ....................................................................................................... 4
1.4
SPI Interface DC Characteristics............................................................................................ 4
1.5
SPI Interface AC Characteristics............................................................................................ 4
1.6
SPI Interface Timing Specifications ....................................................................................... 5
1.7
Electrical Connection.............................................................................................................. 6
1.8 Typical Performance Characteristics .................................................................................... 6
1.8.1 Additional External Compensation ...................................................................................... 7
2 Functional Description .......................................................................................................8
2.1
Differential Measurement ....................................................................................................... 8
2.2
Voltage to Angle Conversion ................................................................................................. 9
2.3
Ratiometric Output ................................................................................................................ 10
2.4
SPI Serial Interface................................................................................................................ 10
2.5
Digital Output to Angle Conversion ..................................................................................... 12
2.6
Self Test and Failure Detection Modes ................................................................................ 13
2.7
Temperature Measurement .................................................................................................. 14
3 Application Information ....................................................................................................15
3.1
Recommended Circuit Diagrams and Printed Circuit Board Layouts ............................... 15
3.2
Recommended Printed Circuit Board Footprint ................................................................. 16
4 Mechanical Specifications and Reflow Soldering ..........................................................16
4.1
Mechanical Specifications (Reference only) ....................................................................... 16
4.2
Reflow Soldering ................................................................................................................... 17
Murata Electronics Oy
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Doc.Nr. 8261700
2/17
Rev.A3
SCA103T Series
1
Electrical Specifications
The SCA103T product family consists of two versions, the SCA103T-D04 and the SCA103T-D05,
that differ in measurement range. The specific performance specifications related to each version
are listed in the table “SCA103T performance characteristics” below. All other specifications are
common to both versions.
The supply voltage is Vdd=5.00V and ambient temperature unless otherwise specified. Parameters
marked as D are valid when measured in differential mode using an external differential amplifier.
Parameters marked with S are for a single measurement channel. The performance of the selected
amplifier may have an effect on some parameters. The differential signal is determined as Out_diff
= Out1 – Out2.
1.1
Absolute Maximum Ratings
Supply voltage (VDD)
Voltage at input / output pins
Storage temperature
Operating temperature
Mechanical shock
1.2
-0.3 V to +5.5V
-0.3V to (VDD + 0.3V)
-55°C to +125°C
-40°C to +125°C
Drop from 1 meter onto a concrete surface
(20000g). Powered or non-powered
Performance Characteristics
Parameter
D/S
Condition
Measuring range
D
Nominal
Frequency response
Offset (Output at 0g)
Offset calibration error
Offset Digital Output
Sensitivity
S
S
S
S
D
–3dB LP
Ratiometric output
(1
between 0…1°
Sensitivity calibration error
Sensitivity Digital Output
Offset temperature
dependency
S
D
D
Sensitivity temperature
dependency
D
Typical non-linearity
Digital output resolution
D
D
(2
-25…85°C (typical)
-40…125°C (max)
-25...85°C (typical)
-40…125°C (max)
Measuring range
(2
Output noise density
D
between 0…1°
From DC...100Hz
Analog output resolution
Cross-axis sensitivity
Ratiometric error
D
S
S
Bandwidth 10 Hz
Max.
Vdd = 4.75...5.25V
Note 1.
Note 2.
Note 3.
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(3
SCA103T
-D04
±15
±0.26
8-28
Vdd/2
±0.057
1024
16
280
±0.5
6554
±0.002
±0.29
±0.013
-2.5...+1
±0.057
12
0.009
0.0004
SCA103T
-D05
±30
±0.5
8-28
Vdd/2
±0.11
1024
8
140
±0.5
3277
±0.002
±0.29
±0.013
-2.5...+1
±0.11
12
0.017
0.0004
Units
/ Hz
0.0013
4
±1
0.0013
4
±1
°
%
%
°
g
Hz
V
°
LSB
V/g
mV/°
%
LSB / g
°/°C
°
%/°C
%
°
Bits
° / LSB
The frequency response is determined by the sensing element’s internal gas damping.
The angle output has SIN curve relationship to voltage output - refer to chapter 2.2
Resolution = Noise density * √(bandwidth)
Subject to changes
Doc.Nr. 8261700
3/17
Rev.A3
SCA103T Series
1.3
Electrical Characteristics
Parameter
Supply voltage Vdd
Current
consumption
Operating
temperature
Analog resistive
output load
Analog capacitive
output load
Start-up delay
1.4
Min.
Typ
Max.
Units
4.75
5.0
4
5.25
5
V
mA
+125
°C
Vdd = 5 V; No load
-40
Vout to Vdd or GND
10
kOhm
Vout to Vdd or GND
20
nF
Reset and parity check
10
ms
SPI Interface DC Characteristics
Parameter
Conditions
Symbol
Min
Typ
Max
VIN = 0 V
IPU
VIH
VIL
VHYST
CIN
13
4
-0.3
22
35
Vdd+0.3
1
A
V
V
V
pF
Input terminal MOSI, SCK
Pull down current
VIN = 5 V
Input high voltage
Input low voltage
Hysteresis
IPD
VIH
VIL
VHYST
9
4
-0.3
29
Vdd+0.3
1
0.23*Vdd
A
V
V
V
Input capacitance
CIN
2
pF
Output terminal MISO
Output high voltage
I > -1mA
VOH
Output low voltage
Tristate leakage
VOL
ILEAK
Input terminal CSB
Pull up current
Input high voltage
Input low voltage
Hysteresis
Input capacitance
1.5
Condition
I < 1 mA
0 < VMISO <
Vdd
0.23*Vdd
2
17
Vdd0.5
Unit
V
5
0.5
100
V
pA
SPI Interface AC Characteristics
Parameter
Condition
Output load
SPI clock frequency
Internal A/D conversion time
Data transfer time
@500kHz
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@500kHz
Subject to changes
Doc.Nr. 8261700
Min.
Typ.
150
38
Max.
Units
1
500
nF
kHz
s
s
4/17
Rev.A3
SCA103T Series
1.6
SPI Interface Timing Specifications
Parameter
Terminal CSB, SCK
Time from CSB (10%)
to SCK (90%)
Time from SCK (10%)
to CSB (90%)
Terminal SCK
SCK low time
Conditions
Symbol
Min.
TLS1
120
ns
TLS2
120
ns
TCL
1
s
TCH
1
s
TSET
30
ns
THOL
30
ns
Load
capacitance at
MISO < 15 pF
Load
capacitance at
MISO < 15 pF
TVAL1
10
100
ns
TLZ
10
100
ns
Load
capacitance at
MISO < 15 pF
TVAL2
100
ns
Load
capacitance at
MISO < 2 nF
Load
capacitance at
MISO < 2 nF
SCK high time
Terminal MOSI, SCK
Time from changing MOSI
(10%, 90%) to SCK (90%).
Data setup time
Time from SCK (90%) to
changing MOSI (10%,90%).
Data hold time
Terminal MISO, CSB
Time from CSB (10%) to stable
MISO (10%, 90%).
Time from CSB (90%) to high
impedance state of
MISO.
Terminal MISO, SCK
Time from SCK (10%) to stable
MISO (10%, 90%).
Typ.
Max.
Unit
Terminal CSB
Time between SPI cycles, CSB at high
level (90%)
When using SPI commands RDAX, RDAY,
RWTR: Time between SPI cycles, CSB at
high level (90%)
TLS1
TCH
TLH
15
s
TLH
150
s
TCL
TLS2
TLH
CSB
SCK
THOL
MOSI
TVAL1
MISO
Figure 2.
Murata Electronics Oy
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TSET
MSB in
DATA in
LSB in
TVAL2
MSB out
TLZ
DATA out
LSB out
Timing diagram for SPI communication
Subject to changes
Doc.Nr. 8261700
5/17
Rev.A3
SCA103T Series
1.7
Electrical Connection
If the SPI interface is not used SCK (pin1), MISO (pin3), MOSI (pin4) and CSB (pin7) must be left
floating. Self-test can be activated applying logic “1” (positive supply voltage level) to ST_1 or ST_2
pins (pins 10 or 9). Self-test must not be activated for both channels at the same time. If the ST
feature is not used, pins 9 and 10 must be left floating or connected to GND. Inclination signals are
provided from pins OUT_1 and OUT_2.
SCK
SCK 1
VDD
12 VDD
OUT_1
11 OUT_1
Ext_C_1 2
Figure 3.
No.
1
2
3
4
5
6
7
8
9
10
11
12
1.8
MISO 3
MISO
10 ST_1/Test_in
ST_1
MOSI 4
MOSI
9
ST_2
ST_2
OUT_2 5
OUT_2
8
Ext_C_2
VSS 6
GND
7
CSB
CSB
SCA103T electrical connection
Node
SCK
NC
MISO
MOSI
Out_2
GND
CSB
NC
ST_2
ST_1
Out_1
VDD
I/O
Input
Input
Output
Input
Output
Supply
Input
Input
Input
Input
Output
Supply
Description
Serial clock
No connect, left floating
Master in slave out; data output
Master out slave in; data input
Output 2 (Ch 2)
Ground
Chip select (active low)
No connect, left floating
Self test input for Ch 2
Self test input for Ch 1
Output 1(Ch 1)
Positive supply voltage (+5V DC)
Typical Performance Characteristics
Typical offset and sensitivity temperature dependencies of SCA103T are presented in following
diagrams. These results represent the typical performance of SCA103T components. The mean
value and 3 sigma limits (mean ± 3 standard deviation) and specification limits are presented in
following diagrams. The 3 sigma limits represents 99.73% of the SCA103T population.
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Doc.Nr. 8261700
6/17
Rev.A3
SCA103T Series
temperature dependency of SCA103T offset (differential output)
0.3
specification limit
Differential offset error [degrees]
0.2
0.1
average
0
+3 Sigma
-3 Sigma
-0.1
-0.2
-0.3
-40
specification limit
-20
0
20
40
60
80
100
120
Tem p [°C]
Figure 4.
Typical temperature dependency of SCA103T offset
Tem perature dependency of SCA103T sensitivity [%] (differential output)
1.5
Differential sensitivity error [%]
1
0.5
specification
limit
0
average
-0.5
+3 Sigma
-1
-3 Sigma
-1.5
-2
-2.5
-3
-40
specification
limit
-20
0
20
40
60
80
100
120
Tem p [°C]
Figure 5.
1.8.1
Typical temperature dependency of SCA103T sensitivity
Additional External Compensation
To achieve the best possible accuracy, the temperature measurement information and typical
temperature dependency curve can be used for SCA103T sensitivity temperature dependency
compensation. The offset temperature dependency curves do not have any significant tendency so
there is no need for any additional external compensation for offset.
By using an additional 3rd order polynome compensation curve based on average sensitivity
temperature dependency curve and temperature measurement information, it is possible to reduce
sensitivity temperature dependency from 0.013%/°C down to 0.005%/°C.
rd
The equation for the fitted 3 order polynome curve is:
Scorr 0.0000005 *T 3 0.00005 *T 2 0.0032 *T 0.031
Where:
Scorr:
T
Murata Electronics Oy
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rd
3 order polynome fitted to average sensitivity temperature dependency curve
temperature in °C (Refer to paragraph 2.7- Temperature Measurement)
Subject to changes
Doc.Nr. 8261700
7/17
Rev.A3
SCA103T Series
The calculated compensation curve can be used to compensate for the temperature dependency of
the SCA103T sensitivity by using following equation:
SENScomp SENS * (1 Scorr / 100)
Where:
SENScomp
SENS
temperature compensated sensitivity
Nominal sensitivity (16V/g SCA103T-D04, 8V/g SCA103T-D05)
The typical sensitivity temperature dependency after 3rd order compensation is shown in the figure
below.
The temperature dependency of 3rd order compensated SCA103T sensitivity [%]
(differential output)
1
0.8
Differential sensitivity error [%]
0.6
0.4
compensated
average
+3 Sigma limit
0.2
0
-3 Sigma limit
-0.2
-0.4
-0.6
-0.8
-1
-40
-20
0
20
40
60
80
Tem p [°C]
Figure 6.
2
2.1
rd
The temperature dependency of 3 order compensated SCA103T sensitivity
Functional Description
Differential Measurement
The measuring axis of SCA103T sensing elements are mutually opposite in direction, thus
providing two inclination signals which can be differentiated externally, either by using a differential
amplifier or a microcontroller.
The differential measurement principle removes all common mode measurement errors. Most of
the error sources have similar effects on both sensing elements. These errors are removed from
measurement result during signal differentiation. The differential measurement principle gives very
efficient noise reduction, improved long term stability and extremely low temperature dependency.
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Subject to changes
Doc.Nr. 8261700
8/17
Rev.A3
SCA103T Series
Typical output characteristics (Channels 1, 2 and differential output: OUT1-OUT2) are presented in
the figure below. For differential amplifier connection refer to the recommended circuit diagram.
SCA103T-D04 outputs and differential amplifier output
6.0
5.0
4.0
3.0
Output [V]
2.0
SCA103T OUT_1
1.0
SCA103T OUT_2
0.0
Differential output
-1.0
-2.0
-3.0
-4.0
-5.0
-6.0
-20
-15
-10
-5
Figure 7.
2.2
0
5
10
15
20
Tilt angle [ ° ]
2
Differential output characteristics
Voltage to Angle Conversion
1
The analog
output behavior of the SCA103T is described in the figure below. The arrow represents
the measuring axis direction marking on the top of SCA103T package.
D
Earth's gravity
OUT1 <
OUT2 >
DIFF <
OUT1 =2.5V
OUT2 =2.5V
DIFF =0 V
Figure 8.
< OUT1
> OUT2
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