769
FIBER
SENSORS
Integrated Display Type Digital Flow Sensor
FM-200 SERIES
Related Information
■■General terms and conditions.............. F-3
■■Glossary of terms........................ P.1569~
For Gas
■■Selection guide.............................. P.699~
■■General precautions.................... P.1571~
LASER
SENSORS
PHOTOELECTRIC
SENSORS
MICRO
PHOTOELECTRIC
SENSORS
AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY COMPONENTS
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE SENSORS
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
WIRE-SAVING
SYSTEMS
MEASUREMENT
SENSORS
panasonic.net/id/pidsx/global
Digital
STATIC
CONTROL
DEVICES
LASER
MARKERS
PLC
HUMAN MACHINE
INTERFACES
ENERGY
MANAGEMENT
SOLUTIONS
FA COMPONENTS
With analog
output
Dual color with sub display at a glance
Easy-to-see dual color with sub display!
The setting conditions are displayed on the sub display, making it much easier to keep track of operations.
In addition, the digital display which switches between 2 colors lets you check the status of sensor operation at a
glance.
MACHINE VISION
SYSTEMS
Sub display
UV CURING
SYSTEMS
Main display
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
Flow
FM-200
Easy to see with the sub display!
Setting values and setting items can be checked at the same time.
Main display
Sub display
Setting value Setting item
Dual color display at a glance
The display color changes in accordance
with output ON/OFF operations.
Main display
Linked to output 1
Sub display
Linked to output 2
Integrated Display Type Digital Flow Sensor
FM-200 SERIES
APPLICATIONS
FIBER
SENSORS
Controlling purge gas and air blowing
By controlling purge gas and air blowing,
performance and quality of the products
can be maintained, while contributing to
cost reduction.
Checking seating
Flow sensors can be used for stable detection of
transparent objects which were difficult to detect
using photoelectric sensors. The nozzle can be
extended for detection even in places where oil
spatter occurs.
Checking suction
Detection of objects is possible even on
conveyors with low suction pressures
where air is flowing constantly (such as
collet conveyors and network conveyors).
Collet
Lead frame
Flexible printed circuit board
One sensor for both intake and exhaust
A new rectification mechanism and Micro Electro
Mechanical System (MEMS) technology allow the sensor to
be mounted on a Si sensor chip (3 × 3.5 mm 0.118 × 0.138
in). This provides an extremely small heat capacity, high
precision of ±3 % F.S. and high-speed response. The two
temperature sensors on each side of the heater detect the
heat distribution to make bidirectional detection possible.
A single sensor can detect flows bidirectionally. In
addition, it can be set to detect flows in either the
forward or reverse direction only, making it suitable for a
variety of applications.
Principle of Si sensor chip
When there is no flow
One sensor detects both directions
For example, using a single sensor to check chip suction
Suction
When there is flow
Vacuum breakdown
Flow
Temperature distribution
Temperature sensor 1 Heater Temperature sensor 22
LASER
SENSORS
PHOTOELECTRIC
SENSORS
MICRO
PHOTOELECTRIC
SENSORS
AREA
SENSORS
High precision of ±3 % F.S.
SAFETY LIGHT
CURTAINS /
SAFETY COMPONENTS
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE SENSORS
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
WIRE-SAVING
SYSTEMS
MEASUREMENT
SENSORS
STATIC
CONTROL
DEVICES
LASER
MARKERS
Low
High
Si substrate
New rectification mechanism
770
PLC
Chip
Si sensor chip
Suction nozzle
Forward direction
Chip
Reverse direction
HUMAN MACHINE
INTERFACES
ENERGY
MANAGEMENT
SOLUTIONS
FA COMPONENTS
No straight pipes needed
Flexible installation direction
The rectification method
used by the new
mechanism makes straight
pipes unnecessary at both
the intake and exhaust
sides.
Other than the ability to carry out bidirectional detection,
there are no limitations on the installation direction,
making the installation very flexible.
Quick connection is
possible with a coverattached connector.
Flow
FM-200
Equipped with a wide variety of functions for greater ease of use
• Analog voltage output
1 to 5 V analog voltage output is incorporated.
• Key lock function
Key operation can be disabled to prevent misoperation.
• Rattle prevention function (Response time setting)
The response time can be set to one of seven steps
from 50 ms to approximately 1,500 ms. This prevents
rattling from rapid changes in flow or from noise.
UV CURING
SYSTEMS
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
Connection
• Integrated value reset function
During integrated mode, external input allows reset of
the integrated value.
MACHINE VISION
SYSTEMS
• Display rate setting
The display update period for the digital display can
be changed to 250 ms, 500 ms or 1,000 ms in order to
eliminate display flickering.
• ECO mode
After approx. one minute of no operation, sensor will
be switched to ECO mode.
Backlight will be turned off to reduce power
consumption.
LASER
SENSORS
PHOTOELECTRIC
SENSORS
MICRO
PHOTOELECTRIC
SENSORS
AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY COMPONENTS
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
FM-200 SERIES
Suitable for cost and quality control! Integrated output mode incorporated
The FM-200 series can control and manage flows in a wide variety of output modes such as integrated output mode,
depending on the required application.
INTEGRATED FLOW RATE DISPLAY
Integrated flow rate can be
displayed with 7 digits
• Integrated output mode
Quality control
When the volume of flow of the gas being measured reaches the set integrated value,
output switches to ON or OFF.
• Controls N2 charging volumes for electronic components
Integrated flow rate
FIBER
SENSORS
Integrated Display Type Digital Flow Sensor
• Controls air blowing volumes, etc.
PARTICULAR
USE SENSORS
Time
MEASUREMENT
SENSORS
STATIC
CONTROL
DEVICES
LASER
MARKERS
Comparative output
• Integrated pulse output mode
Cost management
The pulse output is generated once at every specified integrated value*.
This lets you know the amount of air consumed per unit of time easily.
Integrated flow rate
WIRE-SAVING
SYSTEMS
• Controls N2 purge volumes in reflow furnaces
• Controls overall volumes of air consumed by equipment, etc.
* Integrated values are specified by range and can vary.
For details, refer to “SPECIFICATIONS” (p.773).
HUMAN MACHINE
INTERFACES
FA COMPONENTS
MACHINE VISION
SYSTEMS
Air consumption measurement
CT
Equipment or facility
Power consumption measurement
0
ON
Comparative output
OFF
Time
40 ms approx.
(Fixed value)
To upper-level
communication
Air consumption
RS-485 communication
Power consumption
Dedicated current sensor
Convert the data
according to the
measurement range
with a data logger, etc.
Eco-Power Meter
KW2G (Note 2)
Notes: 1) Displayed value data is not outputted.
2) Refer to p.1372 for the Eco-Power Meter KW2G (AKW2010GB).
INSTANT FLOW RATE DISPLAY (FACTORY SETTING)
Hi
Lo
0
Comparative ON
output
OFF
Comparative ON
output
OFF
H: 1 % F.S.(Factory setting)
H (Hysteresis)
H (Hysteresis)
• Hysteresis mode
This mode is used for setting
comparative output hysteresis to
the desired level and for carrying
out ON/OFF control.
• Output OFF mode
Comparative output is forcibly
maintained at OFF regardless of
the setting value.
H: 1 digit or more
Flow rate
• Window comparator mode
This mode is used for setting
comparative output to ON or
OFF at flow rates within the
setting range.
Flow rate
FM-200
ℓ
Integrated pulse output
(The pulse output is generated
according to the volume of gas flow.)
(Note 1)
FM-200 series
Flow
2ℓ
Energy-saving and environmental-friendly
The pulse output from the flow sensor can be inputted to the pulse counter of an Eco-Power Meter so that air
consumption and power consumption can both be measured simultaneously.
UV CURING
SYSTEMS
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
3ℓ
ℓ: Specified integrated
value*
PLC
ENERGY
MANAGEMENT
SOLUTIONS
0
ON
OFF
ON
Comparative output
OFF
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
Integrated
flow value
Hi
Lo
0
Comparative ON
output
OFF
Comparative ON
output
OFF
H (Hysteresis)
Flow rate
771
Hi
Lo
0
Comparative ON
output
OFF
Output is turned off regardless
of whether the setting value is ON or OFF.
Integrated Display Type Digital Flow Sensor
FM-200 SERIES
772
ORDER GUIDE
Type
FIBER
SENSORS
Applicable
fluid
Appearance
LASER
SENSORS
Flow rate
range
Model No.
500 mℓ/min.
1,000 mℓ/min.
Resin body
5 ℓ/min.
10 ℓ/min.
Clean air (Note)
Compressed air
(Note)
Nitrogen gas
50 ℓ/min.
100 ℓ/min.
NPN Open-collector transistor
FM-252-4-P
PNP Open-collector transistor
FM-213-4
NPN Open-collector transistor
FM-213-4-P
FM-253-4
Aluminum body
PNP Open-collector transistor
ø4 ø0.157 push-in
NPN Open-collector transistor
FM-253-4-P
PNP Open-collector transistor
FM-214-4
NPN Open-collector transistor
FM-214-4-P
PNP Open-collector transistor
FM-254-8
NPN Open-collector transistor
FM-254-8-P
FM-215-8
PNP Open-collector transistor
ø8 ø0.315 push-in
NPN Open-collector transistor
FM-215-8-P
FM-255-AR2-P
FM-255-AG2-P
FM-216-AR2
1,000 ℓ/min.
Comparative output
FM-252-4
FM-255-AR2
500 ℓ/min.
Port size
FM-216-AR2-P
FM-216-AG2-P
PNP Open-collector transistor
NPN Open-collector transistor
Rc1/2 female thread
PNP Open-collector transistor
G1/2 female thread
PNP Open-collector transistor
NPN Open-collector transistor
Rc1/2 female thread
PNP Open-collector transistor
G1/2 female thread
PNP Open-collector transistor
PHOTOELECTRIC
SENSORS
MICRO
PHOTOELECTRIC
SENSORS
AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY
COMPONENTS
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE
SENSORS
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
WIRE-SAVING
SYSTEMS
MEASUREMENT
SENSORS
STATIC
CONTROL
DEVICES
LASER
MARKERS
Note: The clean air complies with JIS B 8392-1.1.1 to 5.6.2, and the compressed air complies with JIS B 8392-1.1.1 to 1.6.2.
PLC
Accessory
HUMAN
MACHINE
INTERFACES
• CN-F15-C1 (Connector attached cable 1 m 3.281 ft)
ENERGY
MANAGEMENT
SOLUTIONS
FA
COMPONENTS
MACHINE
VISION
SYSTEMS
OPTIONS
UV
CURING
SYSTEMS
Designation
Sensor
mounting
bracket
Model No.
Description
MS-FM2-1
Allows resin body type sensor to be installed on the flooring.
MS-FM2-2
Allows aluminum body type sensor to be installed on the
flooring.
Sensor mounting bracket
• MS-FM2-1
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
Recommended vacuum filter
• MS-FM2-2
Manufactured by Nihon Pisco Co., Ltd.
VFU1-44-15P (Element length 15 mm 0.591 in)
VFU1-44-25P (Element length 25 mm 0.984 in)
VFE015B01 Filter element for refill,
length 15 mm 0.591 in
VFE025B01 Filter element for refill,
length 25 mm 0.984 in
(
(
)
)
M3 screw
(Purchase separately.)
M3 (length 6 mm 0.236 in) screw with washers
(Attached to MS-FM2-1)
M3 screw
(Purchase separately.)
M3 (length 6 mm 0.236 in) screw with washers
(Attached to MS-FM2-2)
Note: Contact the manufacturer for details of the
recommended products.
Flow
FM-200
773
Integrated Display Type Digital Flow Sensor
SPECIFICATIONS
FIBER
SENSORS
PHOTOELECTRIC
SENSORS
MICRO
PHOTOELECTRIC
SENSORS
AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY
COMPONENTS
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
Individual specifications
Item
Type
Model No.
Item
Type
Model No.
MEASUREMENT
SENSORS
Common specifications
STATIC
CONTROL
DEVICES
LASER
MARKERS
PLC
HUMAN
MACHINE
INTERFACES
ENERGY
MANAGEMENT
SOLUTIONS
FA
COMPONENTS
MACHINE
VISION
SYSTEMS
UV
CURING
SYSTEMS
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
Flow
FM-200
Item
Type
Model No.
CE marking directive compliance
Rated pressure range
Pressure withstandability
Applicable fluid
Supply voltage
Current consumption
Comparative outputs
output 1 /
( Comparative
Comparative output 2 )
Output modes
Short-circuit protection
Hysteresis
Response time
Analog voltage output
Repeatability
Accuracy assurance range (Note 4)
External input
Resin body type
FM-253-4(-P)
FM-214-4(-P)
FM-254-8(-P)
Aluminum body type
FM-255-AG2-P
FM-216-AR2(-P)
FM-255-AR2(-P)
500 ℓ/min.
–550 to +550 ℓ/min.
FM-215-8(-P)
50 ℓ/min.
100 ℓ/min.
–55 to +55 ℓ/min.
–110 to +110 ℓ/min.
0.1 ℓ/min.
±999999.9 ℓ
0.1 ℓ
0.5 ℓ
1ℓ
ø8 ø0.315 push-in
Net weight: 70 g approx., Gross weight: 135 g approx.
FM-216-AG2-P
1,000 ℓ/min.
–1,100 to +1,100 ℓ/min.
1 ℓ/min.
±9999999 ℓ
1ℓ
5ℓ
Rc1/2 female thread
10 ℓ
G1/2 female thread
Rc1/2 female thread
Net weight: 155 g approx., Gross weight: 220 g approx.
NPN output type
FM-2□
G1/2 female thread
PNP output type
FM-2□-P
EMC Directive, RoHS Directive
−0.09 to +0.7 MPa
1 MPa
Clean air (Note 3), compressed air (Note 3), nitrogen gas
12 to 24 V DC ±10 % Ripple P-P10 % or less
Normal mode: 60 mA or less, ECO mode: 40 mA or less
NPN open-collector transistor
PNP open-collector transistor
• Maximum sink current: 50 mA or less
• Maximum source current: 50 mA or less
• Applied voltage: 26.4 V DC or less
• Applied voltage: 26.4 V DC or less
(between comparative output and 0 V)
(between comparative output and +V)
• Residual voltage: 2.4 V or less (at 50 mA sink current)
• Residual voltage: 2.4 V or less (at 50 mA source current)
Output OFF mode, window comparator mode, hysteresis mode, integrated output mode, integrated pulse output mode
Incorporated
Window comparator mode: 1 to 8 % F.S. approx. (variable) (Factory settings: approx. 1 % F.S.), Hysteresis mode: Variable (minimum 1 digit)
50 ms, 80 ms, 120 ms, 200 ms, 400 ms, 800 ms, 1,500 ms, selectable by key operation
Output voltage: 1 to 5 V, Output impedance: 1 kΩ approx. [For details, refer to “Analog voltage output” (p.774)]
Within ±1 % F.S.
Bi-direction : -100 to -3 % F.S., +3 to +100 % F.S., One-side direction : +3 to +100 % F.S.
ON voltage: 0 to +0.4 V, OFF voltage: +5 V to +V, or open
Input time: 80 ms or more
ON voltage: +5 V to +V, OFF voltage: 0 to +0.6 V, or open
Input time: 80 ms or more
Linearity
Display
Protection
Ambient temperature
Ambient humidity
Voltage withstandability
Insulation resistance
Vibration resistance
Shock resistance
Temperature characteristics
Pressure characteristics
Enclosure earthing
Within ±3 % F.S. (Ambient temperature +25 °C +77 °F, flow rate range 3 to 100 % F.S., atmospheric criteria on secondary side)
4 digits + 4 digits 2-color LCD display (Display refresh rate: 250 ms, 500 ms, 1,000 ms, selectable by key operation)
IP40 (IEC)
0 to +50 °C +32 to +122 °F (No dew condensation allowed), Storage: -10 to +60 °C +14 to +140 °F
35 to 90 % RH, Storage: 35 to 90 % RH
1,000 V AC for one min. between all supply terminals connected together and enclosure (Excluding the aluminum body type)
10 MΩ, or more, with 500 V DC megger between all supply terminals connected together and enclosure (Excluding the aluminum body type)
10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude or 49 m/s2 max. acceleration, in X, Y and Z directions for two hours each
100 m/s2 acceleration (10 G approx.) in X, Y and Z directions three times each
Within ±0.2 % F.S./°C (+25 °C +77 °F criteria, +15 to +35 °C +59 to +95 °F ambient temperature range)
Within ±5 % F.S. (-0.09 to +0.7 MPa, +25 °C +77 °F, atmospheric criteria on secondary side)
Floating (Note 5)
Material
Enclosure: ABS, Body: Polyamide (Aluminum body type: Aluminum), Switch: EPDM, Display: Acrylic, Mounting screw part (Resin body type): Brass
Current plate / Port filter: Stainless steel (used for the gas contact area), Sensor chip: Silicon, Gasket: Fluorine rubber
Environmental resistance
SIMPLE
WIRE-SAVING
UNITS
Integrated Instant
flow rate flow rate
WIRE-SAVING
SYSTEMS
SENSOR
OPTIONS
FM-213-4(-P)
Full scale flow rate (Note 1)
500 mℓ/min.
1,000 mℓ/min.
5 ℓ/min.
10 ℓ/min.
Display range (Note 2)
–550 to +550 mℓ/min. –1,100 to +1,100 mℓ/min.
–5.5 to +5.5 ℓ/min.
–11 to +11 ℓ/min.
Setting and display resolution
1 mℓ/min.
0.01 ℓ/min.
Display range (Note 2)
±9999999 mℓ
±99999.99 ℓ
Setting and display resolution
1 mℓ
0.01 ℓ
Specified integrated value
5 mℓ
10 mℓ
0.05 ℓ
0.1 ℓ
Port size
ø4 ø0.157 push-in
Weight
Net weight: 50 g approx., Gross weight: 115 g approx.
Full scale flow rate (Note 1)
Display range (Note 2)
Setting and display resolution
Display range (Note 2)
Setting and display resolution
Specified integrated value
Port size
Weight
PARTICULAR
USE
SENSORS
FM-252-4(-P)
Integrated Instant
flow rate flow rate
LASER
SENSORS
FM-200 SERIES
Connecting method
Cable length
Accessory
Connector
Total length up to 10 m 32.808 ft is possible with 0.3 mm2, or more, cable.
CN-F15-C1 (Connector attached cable 1 m 3.281 ft): 1 pc.
Notes: 1) Converted to volumetric flow at +20 °C +68 °F and 1 atmospheric pressure (101 kPa).
2) The display flow rate range is the case when setting to bi-direction at the flow direction setting. When the flow direction is set to one-side forward
direction or one-side reverse direction, the negative side of the display flow rate range shows 10 % of the full-scale (F.S.).
3) The clean air complies with JIS B 8392-1.1.1 to 5.6.2, and the compressed air complies with JIS B 8392-1.1.1 to 1.6.2.
4) Take care that if fluid flows in the vicinity of zero-point which is out of the accuracy assurance range, the instant flow rate value may forcibly display “zero”,
or the integrated flow display value may not be counted up, or the integrated pulse output may not be outputted.
5) As a varistor (clamping voltage: approx. 40 V) is connected to the aluminum body type, do not apply voltage higher than the rated voltage of the sensor.
Integrated Display Type Digital Flow Sensor
FM-200 SERIES
I/O CIRCUIT AND WIRING DIAGRAMS
FIBER
SENSORS
FM-2□
NPN output type
I/O circuit diagram
Color code of connector attached cable
Main circuit
D1
D2
Tr1
1
2
D3
Tr3
D4
3
Tr2
(Brown) +V
(Black) CH1
(Comparative output 1) Load
50 mA max.
(Gray) Analog voltage output
(Note 2)
5
(Blue) 0 V
4
1 kΩ approx.
Varistor (Note 1)
Internal circuit
Black
Load
Load
50 mA max.
(White) CH2 (Comparative output 2 / External input)
+
-
MICRO
PHOTOELECTRIC
SENSORS
Brown
Load * 1
*1
+
White
12 to 24 V DC
±10 %
*2
Gray (Note 2)
*2
-
12 to 24 V DC
±10 %
* 1: When using CH2 as a comparative output 2
* 2: When using CH2 as an external input
Notes: 1) As for the aluminum body type, varistor (clamping voltage approx.
40 V) is connected between the internal power circuit and the
metal body to prevent breakdown of the sensor. Connect the metal
body to +V of power supply or to frame ground (F.G.) of a device
that is connected to 0 V. High potential and insulation resistance
tests between the internal power circuit and the metal body must
not be done.
2) Short-circuit protection is not incorporated into the analog voltage
output. Do not connect the power supply or capacitive load directly
to the analog voltage output.
Non-voltage contact or NPN open-collector transistor
PARTICULAR
USE
SENSORS
or
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
High (+5 V to +V, or Open): Invalid
Low (0 to +0.4 V): Valid
WIRE-SAVING
SYSTEMS
Output
voltage (V)
Output
voltage (V)
5
3
1
–F.S.
3
LASER
MARKERS
1
0
0
F.S.
Flow rate
(ℓ/min.)
Flow rate
(ℓ/min.)
F.S.
Wiring diagram
Color code of connector attached cable
D2
D3
1
2
(Brown) +V
(Black) CH1 (Comparative output 1)
50 mA max.
3
D4
Approx. 1 kΩ
Varistor (Note 1)
Internal circuit
Brown
*2
(White) CH2 (Comparative output 2 /
Load
External input)
Load * 1
(Gray) Analog
voltage output (Note 2)
5
(Blue) 0 V
*2
White
+
-
Notes: 1) As for the aluminum body type, varistor (clamping voltage approx.
40 V) is connected between the internal power circuit and the
metal body to prevent breakdown of the sensor. Connect the metal
body to +V of power supply or to frame ground (F.G.) of a device
that is connected to 0 V. High potential and insulation resistance
tests between the internal power circuit and the metal body must
not be done.
2) Short-circuit protection is not incorporated into the analog voltage
output. Do not connect the power supply or capacitive load directly
to the analog voltage output.
everse supply polarity protection diode
Symbols… D1 to D4 : R
Tr1,Tr2 : PNP output transistor
Tr3 : NPN input transistor
ENERGY
MANAGEMENT
SOLUTIONS
Load
-
12 to 24 V DC
±10 %
MACHINE
VISION
SYSTEMS
UV
CURING
SYSTEMS
Blue
4
Users’ circuit
+
Gray (Note 2) Load * 1
12 to 24 V DC
±10 %
HUMAN
MACHINE
INTERFACES
FA
COMPONENTS
Black
* 1: When using CH2 as a comparative output 2
* 2: When using CH2 as an external input
Non-voltage contact or PNP open-collector transistor
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
or
Flow
High (+5 V to +V): Valid
Low (0 to +0.6 V, or Open): Invalid
FM-200
Analog voltage output
5
Output
voltage (V)
Tr1
D1
Output
voltage (V)
Main circuit
PLC
PNP output type
Terminal No.
Tr3
STATIC
CONTROL
DEVICES
5
FM-2□-P
Tr2
MEASUREMENT
SENSORS
I/O circuit diagram
SAFETY LIGHT
CURTAINS /
SAFETY
COMPONENTS
INDUCTIVE
PROXIMITY
SENSORS
Analog voltage output
Symbols… D1 to D4 : R
everse supply polarity protection diode
Tr1,Tr2 : NPN output transistor
Tr3 : PNP input transistor
AREA
SENSORS
PRESSURE /
FLOW
SENSORS
Blue
Users’ circuit
LASER
SENSORS
PHOTOELECTRIC
SENSORS
Wiring diagram
Terminal No.
774
3
1
–F.S.
0
F.S.
Flow rate
(ℓ/min.)
5
3
1
0
Flow rate
(ℓ/min.)
F.S.
775
Integrated Display Type Digital Flow Sensor
PRESSURE LOSS CHARACTERISTICS (TYPICAL)
SENSOR
OPTIONS
STATIC
CONTROL
DEVICES
LASER
MARKERS
0.04
0.03
0.02
0.12
0.10
0.08
0.06
0.04
0.1
0.2
0.3
0.4
Flow rate (ℓ/min.)
0.5
0
0.2
0.4
0.6
0.8
Flow rate (ℓ/min.)
1.0
FM-215-8(-P)
5
4
3
2
1
20
30
40
Flow rate (ℓ/min.)
50
6
0.6
0.4
4
3
2
20
40
60
80
Flow rate (ℓ/min.)
100
3.0
2.5
2.0
1.5
1.0
0.5
1
2
3
4
Flow rate (ℓ/min.)
5
0
2
4
6
8
Flow rate (ℓ/min.)
10
FM-216-A□2(-P)
40
0.3 MPa
0.5 MPa
0.7 MPa
10
5
0
0.8
12
1
10
3.5
FM-255-A□2(-P)
0.1 MPa
0.3 MPa
0.5 MPa
7
0.1 MPa
0.3 MPa
0.5 MPa
4.0
1.0
0
8
0.1 MPa
0.3 MPa
0.5 MPa
1.2
0.2
0.02
6
0
0.14
4.5
0.1 MPa
0.3 MPa
0.5 MPa
1.4
Pressure loss (kPa)
0.05
FM-254-8(-P)
Pressure loss (kPa)
MEASUREMENT
SENSORS
0.06
0
SIMPLE
WIRE-SAVING
UNITS
WIRE-SAVING
SYSTEMS
0.16
0.01
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE
SENSORS
0.07
0.1 MPa
0.3 MPa
0.5 MPa
Pressure loss (kPa)
PRESSURE /
FLOW
SENSORS
0.08
FM-214-4(-P)
1.6
0.18
0.1 MPa
0.3 MPa
0.5 MPa
Pressure loss (kPa)
SAFETY LIGHT
CURTAINS /
SAFETY
COMPONENTS
FM-253-4(-P)
0.20
0.09
Pressure loss (kPa)
AREA
SENSORS
0.10
Pressure loss (kPa)
MICRO
PHOTOELECTRIC
SENSORS
FM-213-4(-P)
0.3 MPa
0.5 MPa
0.7 MPa
35
Pressure loss (kPa)
FM-252-4(-P)
PHOTOELECTRIC
SENSORS
Pressure loss (kPa)
FIBER
SENSORS
LASER
SENSORS
FM-200 SERIES
8
6
4
2
30
25
20
15
10
5
0
100
200
300
400
Flow rate (ℓ/min.)
500
0
200
400
600
800
Flow rate (ℓ/min.)
1,000
PLC
HUMAN
MACHINE
INTERFACES
ENERGY
MANAGEMENT
SOLUTIONS
FA
COMPONENTS
MACHINE
VISION
SYSTEMS
UV
CURING
SYSTEMS
Selection
Guide
Pressure/
Digital Display
PRECAUTIONS FOR PROPER USE
• Never use this product as a sensing device
for personnel protection.
• In case of using sensing devices for
personnel protection, use products which
meet laws and standards, such as OSHA,
ANSI or IEC etc., for personnel protection
applicable in each region or country.
• This product is for use in air and nitrogen
only. Do not use the product for other fluids
since the sensing accuracy cannot be
guaranteed.
• Take care that if foreign materials are mixed
in the sensing part, the product may break.
Pressure/
Head-separated
Flow
FM-200
Part description
MODE key
Main display
(Green / Red)
Sub display (Green / Red)
Connector area for
connector attached cable
Connector area
for piping
(Note 2)
Comparative output 1 indicator (Green)
Comparative output 2 indicator (Green)
UP key
DOWN key
Forward direction display
(Note 1)
Connector area
for piping
(Note 2)
Notes: 1) Direction of the arrow indicates the forward direction of flow rate
when setting the flow direction to bi-direction or one-side forward
direction. When setting the flow direction to one-side reverse
direction, a direction opposite to the forward direction display will
be the forward direction of the flow rate.
2) ø4 mm ø0.157 in push-in joint / ø8 mm ø0.315 in push-in joint is
incorporated in FM-2□-4(-P) / FM-2□-8(-P), respectively.
The push-in joint is not incorporated in the aluminum body type.
Refer to p.1571~ for general precautions.
Terminal arrangement diagram
Terminal arrangement of the connectors of this product
(sensor body)
1
2
3 4
5
Connector
pin No.
Color code of the
connector attached
cable
Terminal
1
Brown
+V
2
Black
CH1 (comparative output 1)
3
White
CH2 (comparative output 2 / external input)
4
Gray
Analog voltage output
5
Blue
0V
Integrated Display Type Digital Flow Sensor
PRECAUTIONS FOR PROPER USE
Mounting
• This product can be installed facing up or down or to the
left or right.
Horizontal mounting
• Use M3 screws, and the tightening torque should be 0.5
N·m.
FM-200 SERIES
776
Refer to p.1571~ for general precautions.
• Install a filter, an air dryer and an oil mist filter (microalescer) onto the primary side (upstream) of this product
since the compressed air from the compressor contains
drain (water, oil oxide and foreign materials, etc.). Mesh
(wire net) in this product is used to rectify the flow rate in
the pipe. Always install a filter to the primary side of this
product since this mesh is not a filter to remove foreign
materials.
M3 screw
(Purchase separately.)
Pneumatics Air dryer
pressure
source
Vertical mounting
• Use M3 screws, and the tightening torque should be 0.5
N·m.
M3 screw
(Purchase separately.)
M3 screw
(Purchase separately.)
When using sensor mounting bracket
• When mounting the product on the sensor mounting
bracket MS-FM2-1 (optional) or MS-FM2-2 (optional), use
the M3 screws (length 6 mm 0.236 in) attached to the
sensor mounting bracket. The tightening torque should be
0.5 N·m. Use M3 screws to mount the sensor mounting
bracket on a sensing surface.
Use MS-FM2-1
Use MS-FM2-2
M3 screw
(Purchase separately.)
M3 (length 6 mm 0.236 in)
screw with washers
(Attached to MS-FM2-1)
M3 screw
(Purchase separately.)
M3 (length 6 mm 0.236 in)
screw with washers
(Attached to MS-FM2-2)
Piping
• The following specified tube should be used to insert to
the push-in joint type product.
Material of tube
Tube diameter
(mm in)
Allowable diameter
Polyamide
ø4 ø0.157, ø8 ø0.315
Within ±0.1 mm ±0.004 in
ø4 ø0.157
Within ±0.1 mm ±0.004 in
ø8 ø0.315
Within +0.1 / -0.15 mm ±0.004 in / -0.006 in
Polyurethane
LASER
SENSORS
PHOTOELECTRIC
SENSORS
MICRO
PHOTOELECTRIC
SENSORS
AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY
COMPONENTS
PRESSURE /
FLOW
SENSORS
17 mm
0.669 in
FIBER
SENSORS
• Before using this product, make sure to check that the
tube is firmly inserted.
Filter
Regulator Oil mist filter Flow sensor
(Micro-alescer) FM-200
• When using a valve on the primary side of the product,
only use an oil-prohibit specification valve. This product
may malfunction or break if subject to splattering grease
or oil, etc.
• When using this product for suction verification, etc.,
always install an air filter whose filtration property is
10 µm 0.394 mil or less onto the suction side to prevent
suction of foreign materials and water. Furthermore,
consider atmospheric dew point and ambient temperature
of the product, use the product under the conditions that
dew condensations will not be formed in the inside of
pipe.
• In case of mounting commercial joint to the aluminum
body type, apply a spanner on the metal part of this
product and tighten by the tightening torque of 16 to
18 N·m. If excessive torque is applied, the commercial
joint or the main body may break.
• When piping, take care that foreign materials such as
sealing tape and adhesive must not enter into the inside
of the pipe. If foreign materials are entered, the product
may malfunction or break.
• Make sure to mount the joint when using the product with
its secondary side (downstream) open to the air. If the
joint is not mounted, the port filter of the product may fall
off.
Wiring
• Make sure that the power supply is OFF during wiring.
• Take care that wrong wiring will damage this product.
• Take care if applying voltage exceeding the rated range,
or connecting to AC power supply, this product may break
or burn.
• If power is supplied from a commercial switching
regulator, ensure that the frame ground (F.G.) terminal of
the power supply is connected to an actual ground.
• In case noise generating equipment (switching regulator,
inverter motor, etc.) is used in the vicinity of this
sensor, connect the frame ground (F.G.) terminal of the
equipment to an actual ground.
• Do not run the wires together with high-voltage lines or
power lines or put them in the same raceway. This can
cause malfunction due to induction.
• Extension up to total 10 m 32.808 ft is possible with
0.3 mm2, or more, cable.
• Make sure that stress by forcible bend or pulling is not
applied directly to the sensor cable joint.
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE
SENSORS
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
WIRE-SAVING
SYSTEMS
MEASUREMENT
SENSORS
STATIC
CONTROL
DEVICES
LASER
MARKERS
PLC
HUMAN
MACHINE
INTERFACES
ENERGY
MANAGEMENT
SOLUTIONS
FA
COMPONENTS
MACHINE
VISION
SYSTEMS
UV
CURING
SYSTEMS
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
Flow
FM-200
777
PRECAUTIONS FOR PROPER USE
FIBER
SENSORS
LASER
SENSORS
PHOTOELECTRIC
SENSORS
MICRO
PHOTOELECTRIC
SENSORS
AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY
COMPONENTS
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE
SENSORS
WIRE-SAVING
SYSTEMS
MEASUREMENT
SENSORS
STATIC
CONTROL
DEVICES
LASER
MARKERS
PLC
HUMAN
MACHINE
INTERFACES
ENERGY
MANAGEMENT
SOLUTIONS
FA
COMPONENTS
• Do not use this product for commercial purposes since
the product does not comply with International System of
Units (SI).
• Do not apply pressure that exceed resistant-pressure.
• Do not use during the initial transient time (approx.
5 sec.) after the power supply is switched ON.
• The specifications may not be satisfied in a strong
magnetic field.
• Accuracy of the display and the analog voltage output is
influenced by self-heating by applying current other than
the temperature characteristics. Standby time (5 min. or
more after applying current) should be taken when using
the product.
• These sensors are only for indoor use.
• If using a flow sensor for tasks such as checking suction and release from suction nozzles and sensing leaks, use the flow
rate range setting table as a guide. The effective cross-section area of the nozzle (pinhole) and the difference in pressure
inside and outside the nozzle can be used to calculate the flow rate.
● For P1 < 1.89 × P2 (sub-acoustic velocity)
Q=226.4 × S × P2(P1–P2)
Flow
FM-200
P1 : Pressurized
P1 : Atmosphere
pressure
Q : Flow rate ℓ/min.
P1 : Absolute pressure at primary side (MPa)
P2 : Absolute pressure at secondary side (MPa)
S≥ : Effective cross-section area of nozzle (pinhole) mm2
Suction P2 : Atmosphere
pressure
nozzle
P1 : Pressurized
P2 : Atmosphere
pressure
Pinhole
The flow rate calculation value for a nozzle diameter of ø0.1 to ø2.0 mm ø0.004 to ø0.079 in when P2 is varied is shown in the table below.
Calculated flow rate value (ℓ/min)
P1(MPa) P1(MPa) P2(MPa) P2(MPa) Acoustic velocity /
Absolute pressure Gauge pressure Absolute pressure Gauge pressure Sub-acoustic velocity ø0.1 mm ø0.2 mm ø0.3 mm ø0.4mm ø0.5mm ø0.7 mm ø1.0 mm ø1.5 mm ø2.0 mm
Suction
Blow (leakage detection)
Pressure/
Head-separated
P2 : Vacuum
● For P1 ≥ 1.89 × P2 (acoustic velocity)
Q=113.2 × S × P1
Selection
Guide
Pressure/
Digital Display
• Do not use this product in places having excessive vapor,
dust, etc., or where it may come in contact with corrosive
gas, etc.
• Take care that the product does not come in contact with
water, oil, grease, or organic solvents such as thinner,
etc., strong acid or alkaline.
• Do not drop the product or apply hard shock. This can
cause product breakage.
FLOW SENSOR SELECTION
MACHINE
VISION
SYSTEMS
UV
CURING
SYSTEMS
Refer to p.1571~ for general precautions.
Others
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
FM-200 SERIES
Integrated Display Type Digital Flow Sensor
0.1013
0.1013
0.1013
0.1013
0.1013
0.1013
0.1013
0.1113
0.1213
0.1413
0.1613
0.1813
0.2013
0.3013
0.4013
0.5013
0.6013
0
0
0
0
0
0
0
0.01
0.02
0.04
0.06
0.08
0.1
0.2
0.3
0.4
0.5
0.0313
0.0413
0.0513
0.0613
0.0713
0.0813
0.0913
0.1013
0.1013
0.1013
0.1013
0.1013
0.1013
0.1013
0.1013
0.1013
0.1013
–0.07
–0.06
–0.05
–0.04
–0.03
–0.02
–0.01
0
0
0
0
0
0
0
0
0
0
Acoustic velocity
Acoustic velocity
Acoustic velocity
Sub-acoustic velocity
Sub-acoustic velocity
Sub-acoustic velocity
Sub-acoustic velocity
Sub-acoustic velocity
Sub-acoustic velocity
Sub-acoustic velocity
Sub-acoustic velocity
Sub-acoustic velocity
Acoustic velocity
Acoustic velocity
Acoustic velocity
Acoustic velocity
Acoustic velocity
ø0.004 in ø0.008 in ø0.012 in ø0.016 in ø0.020 in ø0.027 in ø0.039 in ø0.059 in
0.090
0.360
0.810
1.440
2.250
4.411
9.002
20.254
0.090
0.360
0.810
1.440
2.250
4.411
9.002
20.254
0.090
0.360
0.810
1.440
2.250
4.411
9.002
20.254
0.088
0.352
0.792
1.408
2.200
4.312
8.800
19.801
0.082
0.329
0.740
1.315
2.055
4.028
8.220
18.494
0.072
0.287
0.645
1.147
1.792
3.512
7.166
16.125
0.054
0.215
0.483
0.859
1.343
2.631
5.370
12.083
0.057
0.226
0.509
0.905
1.414
2.772
5.657
12.727
0.080
0.320
0.720
1.280
2.000
3.920
8.000
17.999
0.113
0.453
1.018
1.810
2.828
5.543 11.313
25.454
0.139
0.554
1.247
2.217
3.464
6.789 13.856
31.175
0.160
0.640
1.440
2.560
4.000
7.840 15.999
35.998
0.179
0.716
1.610
2.862
4.472
8.765 17.888
40.248
0.268
1.071
2.410
4.284
6.694 13.119 26.774
60.242
0.357
1.426
3.209
5.706
8.915 17.474 35.660
80.236
0.445
1.782
4.009
7.127
11.137 21.828 44.547 100.230
0.534
2.137
4.809
8.549
13.358 26.182 53.433 120.224
ø0.079 in
36.007
36.007
36.007
35.202
32.878
28.666
21.480
22.626
31.998
45.252
55.423
63.996
71.552
107.096
142.641
178.186
213.731
Notes: 1) In case of any leakage from tubes, etc., actual values will differ greatly from calculated values. When measuring flows, make sure that there is no
leakage from any tubes.
2) In case of any points in the tubes which are narrower than the diameter of the suction nozzle, flow rate will be restricted and may turn out to be lower
than the calculated values.
In addition, suction verification may not be possible in such cases.
3) The effective cross-section area is a guide only. If the nozzle is long and narrow, the effective cross-section area may be smaller than the area at the tip
of the nozzle.
4) Response times are determined by the internal volume of the tube from the flow sensor to the suction nozzle (pinhole). If carrying out high-speed
sensing, reduce the internal volume of the tube as much as possible such as by locating the flow sensor as close as possible to the suction nozzle.
Integrated Display Type Digital Flow Sensor
DIMENSIONS (Unit:mm in)
FM-200 SERIES
The CAD data can be downloaded from our website.
FM-2□-4(-P)
Sensor
FM-2□-8(-P)
Sensor
17
0.669
15
0.591
(
24.2
0.953
ø4 ø0.157 push-in joint
15
0.591
3.6 37
0.142 1.457
(
30.2
1.189
27
64 1.063
2.520
(
2-ø3.4 ø0.134 thru-hole
2-M3, 5 0.197 deep
)
15.5
0.610
ø8 ø0.315 push-in joint
)
13
0.512
Sensor
80 3.150
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
9.5
0.374
15.5
0.616
PARTICULAR
USE
SENSORS
Connector attached cable (Accessory)
25
( 0.984
)
1,040
40.945
30 1.181
or less
1.5
0.059
SAFETY LIGHT
CURTAINS /
SAFETY
COMPONENTS
27 1.063
CN-F15-C1
30
1.181
AREA
SENSORS
70.6
(2.780
)
2-M3, 5 0.197 deep
LASER
SENSORS
MICRO
PHOTOELECTRIC
SENSORS
43
3.6 1.693
0.142
2-ø3.4 ø0.134 thru-hole
9.5
0.374
FM-2□-A□(-P)
1.5
0.059
55
2.165
FIBER
SENSORS
PHOTOELECTRIC
SENSORS
17
0.669
1.5
0.059
55
2.165
) 8.5 0.335
778
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
WIRE-SAVING
SYSTEMS
Connector cover
Material: EPDM
MEASUREMENT
SENSORS
37
(1.457
)15
Rc1/2
female thread
(Note)
50
1.969
30
1.181
0.591
Contact: 5-SSHL-002T-P0.2
manufactured by J.S.T. Mfg. Co., Ltd.
13
0.512
2-M3, 5 0.197 deep
STATIC
CONTROL
DEVICES
3.7
( 0.146
)
LASER
MARKERS
Housing: GHR-05V-S
manufactured by J.S.T. Mfg. Co., Ltd.
PLC
30
1.181
HUMAN
MACHINE
INTERFACES
Note: FM-2□-AG2-P has G1/2 female thread.
MS-FM2-1
R1.75 R0.069
4 0.157
Sensor mounting bracket (Optional)
55 0.217
30 1.181
6 0.236
3.5
0.138
8.4 0.331
27
1.063 17 0.609
9.5
0.374
ENERGY
MANAGEMENT
SOLUTIONS
18.5
0.278
2-ø3.5
2-ø0.138
Sensor mounting bracket (Optional)
65 2.559
30 1.181
t 1 t 0.039
40
13
1.575 0.512
2-ø3.5
2-ø0.138
5
0.197
Material: Cold rolled carbon steel (SPCC)(Nickel plated)
Two M3 (length 6 mm 0.236 in) screws with washers are attached.
UV
CURING
SYSTEMS
30 50
1.181 1.969
R1.75 R0.069
6
0.236
FA
COMPONENTS
MACHINE
VISION
SYSTEMS
t 1 t 0.039
14.5
0.571
15.5
0.610
MS-FM2-2
5
0.197
3.5
0.138
Selection
Guide
Material: Cold rolled carbon steel (SPCC)(Nickel plated)
Two M3 (length 6 mm 0.236 in) screws with washers are attached.
Pressure/
Digital Display
Pressure/
Head-separated
Flow
Assembly dimensions
Assembly dimensions
Mounting drawing with FM-252-4
Mounting drawing with FM-255-AR2
R1.75 R0.069
30
1.181
6 0.236
18.5
0.728
3.5
0.138
R1.75
R0.069
14.5
0.571
27 23
1.063 0.906 17
0.669
FM-200
65
2.559
30 1.181
6 0.236
25 20
0.984 0.787
30
40
50
1.181 1.575 1.969
1.5
0.059
t1
t 0.039
80
3.150
42
1.654
29.2
(1.150
) 13.5
0.531
5
0.197
27
1.063
8.6
0.339
t1
t 0.039
42
(1.654
)
20
0.787
5
0.197
1.5
0.059
55
2.165
35
1.378
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