M18-LD0035-A-M-PN-J

SHORT FORM SENSORS 04/2011 A new performance class of innovative sensor technology ◾ The delivery program: Innovative and extensive. Besides through-beam and retroreflective types, reflective sensors and optical fiber photoelectric sensors, we also offer laser and eddy current analog sensors that provide precise measurement results even in the most complicated of applications. Our delivery program also includes safety sensors, photoelectric sensors for special applications, inductive proximity switches and miniature pressure sensors for relative or differential pressure measurement, and ionizers for Electro Static Discharge applications. ◾ Service has priority. We are constantly striving to optimize our service sector to enable us to react quickly to customer requests. Whether you have specific application requests or you simply want technical information, we are always ready to advise and assist you; you only have to call. Our current delivery program is assembled for you in this sensor overview. Besides the most important technical data, you will find numerous illustrations of possible applications. Of course, detailed data sheets are available on our homepage www.panasonic-electric-works.com. Our product managers, sales and application engineers will be happy to advise you. www.panasonic-electric-works.com 2 04/2011 Contents Page Page Fiber Optic Sensors ............................. 4 Trigonometric Sensors ...................... 88 FX-100 ................................................................... 4 FX-301 ................................................................... 6 FX-311 ................................................................... 8 FX-500 ................................................................... 9 EQ-500 ................................................................ 88 EQ-30 .................................................................. 90 MQ-W .................................................................. 91 Fiber Sensors Communication Units 24 ST4 ...................................................................... 92 SF2B.................................................................... 94 SF4B ........................................................... 95 SF4C ................................................................... 97 SD3-A1 .............................................................. 101 SF-C10 .............................................................. 103 Safety Sensors.................................... 92 FX-CH2................................................................ 24 SC-GU1-485 ........................................................ 26 Optical Fiber Heads ............................ 28 FT/FD-W .............................................................. 28 FT-WA30/A30, FT-WA8/A8, FD-A15 ................... 28 FD-H30-L32 / FD-H18-L31 .................................. 29 FD-H20-21 / FD-H35-20S.................................... 29 FR-KZ21/KZ21E .................................................. 30 FR-WKZ11 ........................................................... 30 FD-G6 .................................................................. 31 FD-WKZ1............................................................. 31 Pressure & Flow Sensors ................ 104 FM-200 .............................................................. 104 DP-100 .............................................................. 106 DPH-100/ DPC-100 ........................................... 108 DP2.................................................................... 110 DP4.................................................................... 112 DP5/DPH ........................................................... 114 Pressure & Flow Sensors .................................. 116 DP-M ................................................................. 116 Standard Fibers .................................. 32 Sensors for Semiconductor / FPD Industry ....................................... 46 CC Link Network Solutions ............. 118 FD-L40................................................................. 46 FT/FD-V ............................................................... 47 EX-F70/F60 ......................................................... 48 FR-KV1 ................................................................ 49 CC Link .............................................................. 118 Inductive Proximity Sensors ........... 120 GX-F/H .............................................................. 120 GX-S .................................................................. 122 Fiber Heads ......................................... 50 Measurement Sensors ..................... 124 FD-F705 .............................................................. 50 FT-F902 ............................................................... 51 GP-X .................................................................. 124 HL-G1 ................................................................ 125 LM-10 ................................................................ 127 HL-C1 ................................................................ 129 HL-C135C-BK10................................................ 131 HL-C1C-M-WL ................................................... 131 HL-C2 ................................................................ 132 HL-T1................................................................. 135 Laser Sensors ..................................... 52 M18-L .................................................................. 52 LC-100 ................................................................. 54 LC-120 ................................................................. 56 EX-L200............................................................... 58 LS ........................................................................ 60 Mark Sensors ...................................... 62 Ionizers .............................................. 136 LX-100 ................................................................. 62 ER-F Series ....................................................... 136 ER-TF ................................................................ 138 ER-VW............................................................... 140 ER-V .................................................................. 142 EC-G.................................................................. 144 Photoelectronic Sensors ................... 64 CX-400 ................................................................ 64 NX5...................................................................... 68 CY........................................................................ 70 M18...................................................................... 72 EX-10................................................................... 73 EX-20................................................................... 75 EX-30................................................................... 77 PM ....................................................................... 79 PM2 ..................................................................... 83 NA1-11................................................................. 85 NA1-PK5 / NA1-PK3 ............................................ 86 Electrostatic Sensors ....................... 146 EF-S1 ................................................................ 146 04/2011 3 FX-100 Fiber Optic Sensors FX-100 Excellent price / performance ratio Features ◾ Easy to read ◾ Designed in a 3-layer structure to accommodate basic settings through to advanced settings. The digital dual-display allows you to check both the threshold value and incident light intensity at the same time, and it also makes the procedures for setting the various values much easier. Setting details are divided into three levels for clearer operation, so that setting for normal operation are made in ‘RUN mode’, basic settings are made in ‘SET mode’, and advanced functions are set in ‘PRO mode’. This makes setting operations much easier to understand and carry out. ◾ Multipurpose, M8 connector type The connectors used are commercially-available M8 connectors, so that processing costs and lead time required for carrying out processing after purchase of the sensors can be greatly reduced. Typical Applications ◾ Wafer detection ◾ Wafer detection FD-WKZ + FX 10□ FT-L80Y + FX10□ Sensing possible in corrosive environment. Lenses at the ends of the fiber heads expand the sensing range. Detects wafer carrier cases through vacuum chamber´s view port. Thru-beam type chemicalresistant fiber FT-L8Y FT-L8Y FD-WKZ1 Wafer carrier case 4 04/2011 Wafer Detection over long ranges FV-SV2 + FX10□ Detection of glass substrate in vacuum chamber FT-LE1 + FX10□ Detection of glass substrate on robot hand FD-H30-KZ1V + FX10□ FD-H30-L32V + FX10□ FT-H30-M1V-S FV-SV2 Technical Specifications Standard type Long sensing range type Type Connector type Cable set Connector type Cable set NPN output FX-101 (-Z) (Note 2) FX-101-CC2 FX-102 (-Z) (Note 2) FX-102-CC2 PNP output FX-101P (-Z) (Note 2) FX-101P-CC2 FX-102P (-Z) (Note 2) FX-102P-CC2 Model no. Supply voltage 12 to 24VDC±10%, Ripple P-P 10% or less Normal operation: 720mW or less (Current consumption 30mA or less at 24V supply voltage) ECO mode: 600mW or less (Current consumption 25mA or less at 24V supply voltage) Power consumption Output NPN open-collector transistor PNP open-collector transistor Output operation Selectable either Light-ON or Dark-ON, at SET mode Short-circuit protection Response time Incorporated Response time 0: Response time 1: Response time 2: Response time 3: Sensitivity setting 250μs or less 450μs or less 500μs or less 600μs or less Response time 1: Response time 2: Response time 3: Response time 4: 2.5ms or less 2.8ms or less 3.2ms or less 5.0ms or less 2-level teaching / Limit teaching / Full-auto teaching Digital display 4 digit green + 4 digit red LCD display Timer function ON-delay / OFF-delay timer, switchable either effective or ineffective. [Timer period:1ms, 5ms, 10ms, 20ms, 40ms, 50ms, 100ms, 500ms, 1000ms] Interference prevention function Incorporated Selectable response time method (Note 1) (Functions at response time 1, 2 or 3) −10 to +55°C (if 4 to 7 units are mounted close together: −10 to +50°C; if 8 to 16 units are mounted close together: −10 to +45°C (no dew condensation or icing allowed); Storage: −20 to +70°C Ambient temperature Emitting element (modulated) Red LED (Peak emission wavelength : 632nm) Material Enclosure: polycarbonate; key switch: polycarbonate; fiber lock lever: PBT Connecting method Connector (Note 2) Cable extension Weight Accessory Incorporated Selectable response time method (Note 1) (Functions at response time 1, 2 , 3 or 4) Extension up to total 100m is possible with 0.3mm², or more, cable. Net weight: 15g approx. Gross weight: 35g approx. — Net weight: 15g approx. Gross weight: 75g approx. CN-14A-C2 (connector attached cable, 2m long): 1pc Net weight: 15g approx. Gross weight: 35g approx. — Net weight: 15g approx. Gross weight: 75g approx. CN-14A-C2 (connector attached cable, 2m long): 1pc Notes: 1) When using the interference prevention function, set the response time for the amplifiers to be covered by the interference prevention function to different response time values. However, the interference prevention function does not operate at response time 0 (factory default setting) for the FX-101(P)(-Z) / FX-101(P)-CC2. 2) Connector attached cable CN-14A-C2 is not attached to the models that have no ‘-CC2’ at the end of the model names. Make sure to use the optional cable with connector CN-14A-CM. Model nos. having the suffix ‘-Z’ are M8 plug-in connector type. Make sure to use the optional M8 plug-in connector cable, UZZ808xx. 04/2011 5 FX-100 Detection of break / crack of glass FX-301 Fiber Optic Sensors FX-301 Enhanced functions and performance but still easy to use Features ◾ FX-301(P) (red LED type) version upgrade ◾ Sensing range has been greatly increased We improved the standard model by enhancing its sensing stability and equipping it with handy functions such as the lightemitting amount selection function. All models use a double coupling lens that enables a much wider sensing range and maximization in the light emission efficiency. Sensing ranges with small diameter fibers and ultra small diameter fibers, which have become very popular due to the miniaturization of chip components, have been increased by 50% over previous values achieved with other amplifiers. ◾ Super short response time of 35μs The FX-301(P)-HS model is the digital type fiber sensor realizing a super short response time of 35μs rendering it capable of sensing minute objects moving at high speeds. ◾ Stable sensing over long and short periods In addition to a light emitting element for fiber optic sensors a new APC (Auto Power Control) circuit has also been adopted. Both support a stable level of light emission over long periods. Because fluctuations over short periods of time have also been suppressed, stable sensing is possible very quickly once the power is turned back on after setup changes. # Stable sensing comparison Light-emitting amount Short-term stability Deviation FX-301(P)(-HS) Three-chemical emitting element, No APC Long-term stability Time 6 04/2011 FX-301 Typical Applications Red LED type – FX-301(P)(-HS) Workpiece detection Blue LED type – FX-301B(P) Green LED type – FX-301G(P) Infrared LED type – FX-301H(P) Sensing translucent stickers Sensing register marks Sensing film meandering The blue LED type greatly reduces the damping rate, making it ideal for delicate sensing. The green LED type greatly reduces the damping rate, making it ideal for delicate sensing. Infrared LED type is ideal for sensing environments with light restrictions, such as places where light-sensitive film is being handled. Object sensing during the painting process Engine block passage confirmation Wire breakage detection Due to a sensing range of 19.5m (FX301 long range mode) and a 10m fiber length, it can be lead through explosive atmospheres freely. FD-WKZ1 has realized a sensing range of 480mm (FX-301 long range mode). In addition, due to its powerful beam, it can even work in adverse environments such as in areas prone to dust. The blue LED type greatly reduces the damping rate, making it ideal for delicate sensing. This standard type of FX-301(P)(-HS) using red light has a four-chemical emitting element for stable sensing over long periods. Engine block FT-WA8 FD-WKZ1 Technical Specifications Type NPN output Standard type 1) High speed FX-301□ FX-301-HS Model. no. Type NPN output Standard type 1) High speed FX-301□ FX-301-HS FX-301□P FX-301P-HS Model. no. PNP output Sensing range (Red LED type) FX-301□P FX-301P-HS Thru-beam type (FT-B8): 1100mm (LONG), 530mm (STD), 400mm (FAST), 200mm (H-SP), 180mm (S-D) Reflective type (FD-B8): 480mm (LONG), 220mm (STD), 160mm (FAST), 85mm (H-SP), 75mm (S-D) Thru-beam type (FT-B8): 1100mm (LONG), 530mm (STD), 400mm(FAST), 160mm (H-SP), 180mm (S-D) Reflective type (FD-B8): 480mm (LONG), 220mm (STD), 160mm (FAST), 60mm (H-SP), 75mm (S-D) 12 to 24VDC ±10% Supply voltage Output Output operation PNP output Sensitivity setting Automatic interference prevention function Response time (Red LED type only)]; 2ms or less (LONG) selectable with jog switch 2ms or less (LONG) selectable with jog switch (If 4 to 7 units are connected in cascade: −10 to +50°C, if 8 to 16 units are connected in cascade: −10 to +45°C) FX-301(P): Red LED, Emitting element (modulated) 65μs or less 35μs or less (H-SP); 150μs or less (FAST); 250μs or less (STD / S-D); Incorporated [(Up to 4 sets of fiber heads can be mounted close together.) (However, H-SP mode is 2 sets.)] −10 to +55°C Ambient temperature PNP output type: PNP open-collector transistor [H-SP (Red LED type only)]; 150μs or less (FAST); 250μs or less [STD / S-D 4-digit red LED display Digital display NPN output type: NPN open-collector transistor Selectable either Light-ON or Dark-ON, with jog switch 2-level teaching / Limit teaching / Manual adjustment / Full-auto teaching FX-301B(P): Blue LED, FX-301G(P): Green LED, Red LED FX-301H(P): Infrared LED Dimensions (W×H×D) Note: 1) The cable for amplifier connection is not supplied as an accessory. Make sure to use the optional quick-connection cable given below. Main cable (3-core): CN-73-C1 (cable length 1m), CN-73-C2 (cable length 2m), CN-73-C5 (cable length 5m) Sub cable (1-core): CN-71-C1 (cable length 1m), CN-71-C2 (cable length 2m), CN-71-C5 (cable length 5m) 04/2011 10×30.5×64.5mm 7 FX-311 Fiber Optic Sensors FX-311 Remarkably easy to use, yet employs the latest in technology Features Typical Applications ◾ 12-turn potentiometer with visible indicator Detecting transparent PET bottles Register mark detection The green LED type is ideal for stably sensing objects such as transparent bottles which yield only small amounts of light fluctuation. The blue LED type can accurately sense yellow marks on white backgrounds that are difficult to sense using the red LED type. 12-turn potentiometer has been incorporated for fine adjustments. It enables very fine differences to be detected. Since the potentiometer is illuminated, you can even make adjustments easily in dark areas. ◾ Three light source types (red, green, blue) are made available for expanding applications Rapid blinking ‘assist function’ eases adjustment for optimum sensitivity. FX-311G Technical Specifications NPN output FX-311 PNP output FX-311P Model no. Supply voltage Power consumption 12 to 24VDC±10%, Ripple P-P 10% or less 840mW or less (Current consumption 35mA or less at 24V supply voltage) Output NPN open-collector transistor (FX-311) PNP open-collector transistor (FX-311P) Output operation Selectable either Light-ON or Dark-ON, with selection switch Short-circuit protection Response time Operation indicator Timer function Automatic interference prevention function Ambient temperature Incorporated 250μs or less (STD / S-D), 2ms or less (LONG) selectable with selection switch Orange LED (lights up when the output is ON) Incorporated with OFF-delay timer, selectable either effective (approx. 10ms or 40ms) or ineffective Incorporated (Up to 4 sets of fiber heads can be mounted closely.) (Note 1) −10 to +55°C (if 4 to 7 units are mounted close together: −10 to +50°C; if 8 to 16 units are mounted close together: −10 to +45°C (no dew condensation or icing allowed); Storage: −20 to +70°C Emitting element (modulated) Material Red LED Enclosure: Heat-resistant ABS, Case cover: Polycarbonate Connecting method Cable extension Connector (Note 2) Extension up to total 100m is possible with 0.3mm², or more, cable Weight 15g approx. Notes: 1) When the power supply is switched on, the emission timing are automatically set for interference prevention. 2) The cable for amplifier connection is not supplied as an accessory. Make sure to use the optional quick-connectioncable given below. Main cable (3-core): CN-73-C1 (cable length 1m), CN-73-C2 (cable length 2m), CN-73-C5 (cable length 5m). Sub cable (1-core): CN-71-C1 (cable length 1m), CN-71-C2 (cable length 2m), CN-71-C5 (cable length 5m). 8 04/2011 FX-500 FX-500 New The highest performance available Features A different stability High performance HYPER mode incorporated A new accuracy! When used with the super quality fiber as a set, the incident light intensity variation among units is decreased to only 1/4 of that of conventional models. FX-500 with its ultra short response time improves productivity. FX-500 in combination with the small diameter fiber can handle challenging detections over a super long sensing range. FX-500 with its accurate detection catches fractional difference in light intensity, fulfilling high precision and low-hysteresis applications. FT-WA8 ◾ No PLC necessary saving material and programming costs Calculation of two neighboring amplifiers Lower side Output 1 Calculation result output Logical calculation functions Upper side Output 1 Normal operation Communication direction Detection fiber Three logical calculations (AND, OR, XOR), are selectable using Output 1 of multiple FX-500 series amplifiers. A PLC is not required which helps to reduce material and programming and costs. Synchronization fiber Calculation of two outputs in one amplifier FX-502(P) / 505(P)-C2 Output 1 Calculation result output Output 2 Normal output operation Calculation of one amplifier and external input FX-502(P) / 505(P)-C2 External input (sensor, contact, PLC, etc.) Output 1 Calculation result output ◾ Analog output cable type FX505 Edge tracking of film or sheet Actual position Drift position Ouput current (mA) 20 4 0 Incident light intensity (digit) 4,000/8,000 Drifting path can be tracked as the light intensity changes. 04/2011 9 FX-500 Fiber Optic Sensors Technical Specifications NPN output PNP output Standard type Two outputs type Analoge output type FX-501 FX-501P FX-502 FX-502P FX-505-C2 FX-505P-C2 Type of amplifier Digital Timer function Adjustable: 0.1ms to 999.9ms in 0.1ms steps, 1 to 9999ms in 1 ms steps, 1 to 32s in 1s steps Interference prevention function Auto interference prevention function for up to 12 units or selectable response time method Sensing range Depends on fiber type used Response time 25+s / 60+s / 250+s / 2ms / 4ms / 24ms or less Analogue output 4 to 20mA Output transistor Max. 100mA Emitting element Red LED (Peak emission wavelength: 650nm) Material Enclosure: ABS; switch TPEE Rated current consumption Normal operation: 40mA or less at 24V supply voltage Eco mode: 30mA or less at 24V supply voltage Protection IP40 Physical size (HxWxL) 34x10x75mm Connection method Connector attached cable (note) Operating voltage cable, 2m 12-24V DC (±10%) Usable ambient temp. -10°C to +55°C Weight approx. 70g 100g Note: The cable for amplifier connection is not supplied as an accessor.Make sure to use the optional quick-connection cable given below. For FX-501(P) Main cable (3-core): CN-73-C1 (1m), Sub cable (1-core): CN-71-C1 (1m), CN-73-C2 (2m), CN-73-C5 (5 m) CN-71-C2 (2m), CN-71-C5 (5m) For FX-502(P) Main cable (4-core): CN-74-C1 (1m), Sub cable (2-core): CN-72-C1 (1m), CN-74-C2 (2m), CN-74-C5 (5m) CN-72-C2 (2m), CN-72-C5 (5m) Typical Applications Counting of IC pins Check crimping Detection of glass substrate FT-H20W-M1 ◾ A quality that surpassed standard fiber Stable emission intensity ±10% Integrated high-precision plug More flexible! More bendable! Variation in emission intensity of the fiber core is controlled down to less than ±10%, achieving a stable detection. The centering precision of the fiber core attached to the inserting plug is doubled. As the insertion precision is increased, the variation among units can be greatly suppressed. Bending radius = R4mm [Previous was R25mm] Bending durability = 10 million times [Previous was 1,000 times] 10 04/2011 FX-500 ◾ Super Quality Fibers LIST OF SUPER QUALITY FIBERS Thru-beam type (one pair set) Cylindrical Shape of fiber head (mm in) M4 15 0.591 190 7.480 3,600 (Note) 141.732 1,200 47.244 M3 ø3 ø0.118 10 0.394 190 7.480 1,350 53.150 ø1.5 ø0.059 10 0.394 400 15.748 75 2.953 U-LG: 2,200 86.614 LONG: 1,700 66.929 FAST: 530 20.866 U-LG: 810 31.890 LONG: 650 25.591 FAST: 210 8.268 U-LG: 2,200 86.614 LONG: 1,700 66.929 FAST: 530 20.866 U-LG: 810 31.890 LONG: 650 25.591 FAST: 210 8.268 1,350 53.150 400 15.748 75 2.953 U-LG LONG FAST (mm in) length 3,600 (Note) 141.732 1,200 47.244 M3 12 0.472 Beam Fiber cable axis dia. Sensing range (mm in) ■ : HYPR ■ : STD ■ : H-SP M4 ø1.5 ø0.059 ø3 ø0.118 Threaded Type Bending radius Ambient temperature Model No. ø1 ø0.039 FT-40 ø0.5 ø0.020 2m 6.562 ft ø1 ø0.039 R4 mm R0.157 in Allowable bending radius FT-30 -55 to +80 °C -67 to +176 °F FT-S30 ø0.5 ø0.020 FT-S20 Reflective type Type Shape of fiber head (mm in) Sensing range (mm in) ■ : HYPR ■ : STD ■ : H-SP 90 3.543 M4 U-LG: 330 12.992 LONG: 250 9 . 8 4 3 FAST: 80 3.150 600 23.622 160 6.299 25 0.984 14 0.551 U-LG: 330 12.992 LONG: 250 9 . 8 4 3 FAST: 80 3.150 600 23.622 M3 ø3 ø0.118 Cylindrical 17 0.669 160 6.299 25 0.984 12 0.472 ø3 Ambient temperature Model No. FD-60 2m 6.562 ft R4 mm R0.157 in Allowable bending radius -55 to +80 °C -67 to +176 °F U-LG: 330 12.992 LONG: 250 9 . 8 4 3 FAST: 80 3.150 600 23.622 160 6.299 25 0.984 10 0.394 Bending radius U-LG: 900 35.433 LONG: 740 29.134 FAST: 260 10.236 1,550 61.024 520 20.472 M4 M3 Threaded M6 M6 Fiber cable U-LG LONG FAST length FD-40 FD-30 FD-S30 SUPER QUALITY FIBER SPECIFICATIONS Type Item Model No. Thru-beam type Reflective type FT-40, FT-30, FT-S30, FT-S20 FD-60, FD-40, FD-30, FD-S30 Variation of fiber head Beam axis precision Allowable bending radius Bending durability Ambient temperature Ambient humidity Within ±10 % Beam axis position: Within ±150 μm, Inclination of beam axis: Within ±2 ° 10 million times or more -55 to +80 °C -67 to +176 °F (No dew condensation or icing allowed), Storage: -55 to +80 °C -67 to +176 °F 35 to 85 % RH, Storage: 35 to 85 % RH Material Fiber core Acrylic Sheath Fiber head Polyethylene Stainless steel (SUS303) Plug Accessories Beam axis position: Within ±150 μm, Inclination of beam axis: Within ±3 ° R4 mm R0.157 in or more ABS All fibers: FX-AT2 (fiber attachment) 1 pc. Threaded head fibers: Nuts 2 pcs. (Thru-beam type: 4 pcs.) and toothed lock washer 1 pc. (Thru-beam type: 2 pcs.) 04/2011 11 Fiber Optic Sensors FX-500 LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Thru-beam type (one pair set) Type Sensing range (mm in) Shape of fiber head (mm in) Lens mountable (FX-LE1/LE2/SV1) ■ : HYPR ■ : STD ■ : H-SP 3,600 ) 141.732 1,250 49.213 M4 15 0.591 180 7.087 Beam Fiber cable Bending axis dia. length radius U-LG LONG FAST (mm in) : Free-cut U-LG : LONG : FAST : 2,400 94.488 2,100 82.677 570 22.441 Ambient temperature ø1.5 ø0.059 Model No. FT-B8 Metal-free M4 R25 mm R0.984 in 15 0.591 Lens mountable (FX-LE1/LE2/SV1) -40 to +70 °C -40 to +158 °F M4 3,300 129.921 1,100 43.307 15 0.591 Sleeve 90 mm 3.543 in M4 ø1.48 ø0.058 150 5.906 U-LG : LONG : FAST : 2,000 78.740 1,550 61.024 445 17.520 12 0.472 ø1 ø0.039 M4 M4 Lens mountable (FX-LE1/LE2/SV1) Threaded type Lens mountable (FX-LE1/LE2/SV1) 3,300 129.921 FAST : 160 6.299 1,600 62.992 FAST : 1,200 47.244 60 2.362 FAST : 2,600 102.362 M4 FAST : 3,600 141.732 2,200 86.614 M4 Lens mountable (FX-LE1/SV1) 140 5.512 3,300 129.921 1,100 43.307 M3 150 5.906 12 U-LG : LONG : FAST : 1,220 48.031 M3 15 0.591 U-LG : FAST : M3 12.5 0.492 LONG : LONG : 780 30.709 M4 U-LG : FAST : 470 18.504 3,500 137.795 14 0.551 U-LG : LONG : 660 25.984 130 5.118 With lens Lens mountable (FX-LE1/LE2) U-LG : LONG : 350 13.780 W7 × H9 × D14.6 W0.276 × H0.354 × D0.575 U-LG : LONG : 880 34.646 M4 W7 × H9 × D13.9 W0.276 × H0.354 × D0.547 U-LG : LONG : 810 31.890 160 6.299 15 0.591 Elbow FAST : M4 20 0.787 U-LG : LONG : 790 31.102 140 5.512 M4 15 0.591 Square head type 3,300 129.921 M4 Lens mountable (FX-LE1/LE2/SV1) Tough flexible FT-FM2 FT-FM2S Sleeve R10 mm R0.394 in FT-FM2S4 12 0.472 15 0.591 Lens mountable (FX-LE1/LE2/SV1) Fiber R25 mm R0.984 in 2m 6.562 ft Sleeve 40 mm 1.575 in ø1.48 ø0.058 FT-41 310 12.205 U-LG : LONG : 63 2.480 FAST : 04/2011 1,800 70.866 1,400 55.118 420 16.535 2,000 78.740 1,500 59.055 470 18.504 1,600 62.992 1,600 62.992 530 20.866 ø1.4 ø0.055 640 25.197 560 22.047 210 8.268 ø0.7 ø0.028 1,300 51.181 1,100 43.307 410 16.142 ø1 ø0.039 3,600 141.732 3,300 129.921 1,300 51.181 ø2 ø0.079 1,750 68.898 1,100 43.307 450 17.717 ø1 ø0.039 2,000 78.740 1,550 61.024 445 17.520 ø1 ø0.039 740 29.134 545 21.457 192 7.559 ø0.5 ø0.020 R1 mm R0.039 in -40 to +60 °C -40 to +140 °F FT-W8 R4 mm R0.157 in Flexible -40 to +70 °C -40 to +158 °F FT-P80 1m 3.281 ft R10 mm R0.394 in FT-P81X 2m 6.562 ft R4 mm R0.157 in Flexible FT-P60 -40 to +60 °C -40 to +140 °F FT-WR80 2m 6.562 ft R1 mm R0.039 in FT-WR80L 2m 6.562 ft R25 mm R0.984 in -40 to +70 °C -40 to +158 °F FT-R80 FT-T80 2m 6.562 ft R25 mm R0.984 in -40 to +70 °C -40 to +158 °F FT-NFM2 FX-500 LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Thru-beam type (one pair set) Type Sensing range (mm in) Shape of fiber head (mm in) ■ : HYPR ■ : STD ■ : H-SP Beam Fiber cable Bending axis dia. length radius U-LG LONG FAST (mm in) : Free-cut Ambient temperature Model No. Sleeve 90 mm 3.543 in M3 ø0.88 ø0.035 Sleeve 40 mm 1.575 in M3 LONG : 63 2.480 FAST : 15 0.591 Long sensing range 10 0.394 FAST : 53 2.087 LONG : 160 6.299 FAST : 30 1.181 19,600) 771.652 19,600 771.652 4,000 157.480 3,600) 141.732 3,300 129.921 ø3 ø0.118 ø3 ø0.118 8 0.315 3,300 129.921 ø3 ø0.118 3,600 141.732 2,600 102.362 ø2.5 ø0.098 Cylindrical type ø2.5 ø0.098 8 0.315 440 17.323 3,300 129.921 1,100 43.307 3,300 129.921 ø2.5 ø0.098 ø1.5 ø0.059 8 0.315 ø1 ø0.039 6 0.236 U-LG : LONG : U-LG : LONG : U-LG : LONG : 790 31.102 FAST : 140 5.512 1,220 48.031 U-LG : LONG : 310 12.205 FAST : 63 2.480 U-LG : 960 37.795 LONG : 250 9.843 53 2.087 FAST : 1,200 47.244 ø1.5 ø0.059 10 0.394 U-LG : FAST : 150 5.906 ø1.5 ø0.059 LONG : FAST : ø2.5 ø0.098 ø1.5 ø0.059 U-LG : FAST : 150 5.906 8 0.315 LONG : FAST : LONG : 790 31.102 8 0.315 U-LG : FAST : 640 25.197 15 0.591 ø1 ø0.039 U-LG : 650 25.591 M14 8 0.315 LONG : 250 9.843 23 0.906 
 


 
e U-LG : 960 37.795 M3 




 e 740 29.134 545 21.457 192 7.559 10 0.394 M3 With lens U-LG : 310 12.205 M3 Threaded type ø0.88 ø0.035 1,220 48.031 10 0.394 330 U-LG : LONG : 12.992 FAST : 70 2.756 350 13.780 90 3.543 19 0.748 U-LG : LONG : FAST : 04/2011 ø0.5 ø0.020 -40 to +70 °C -40 to +158 °F R1 mm R0.039 in -40 to +60 °C -40 to +140 °F R4 mm R0.157 in Flexible ø0.6 ø0.024 19,600 771.652 19,600 771.652 13,000 511.810 R25 mm ø10 10 m ø0.394 32.808 ft R0.984 in 3,600 141.732 3,500 137.795 1,700 66.929 ø2 ø0.079 1,900 74.803 1,400 55.118 460 18.110 ø1 ø0.039 3,600 141.732 3,500 137.795 1,400 55.118 ø2 ø0.079 2,000 78.740 1,550 61.024 445 17.520 FT-NFM2S4 2m 6.562 ft 590 23.228 440 17.323 150 5.906 360 14.173 270 10.630 95 3.740 FT-NFM2S Fiber R25 mm R0.984 in Sleeve R10 mm R0.394 in FT-P40 FT-FM10L FT-WS8L 2m 6.562 ft R1 mm R0.039 in -40 to +60 °C -40 to +140 °F FT-WS3 FT-SFM2L R25 mm R0.984 in ø1 ø0.039 -40 to +70 °C -40 to +158 °F FT-W4 -40 to +70 °C -40 to +158 °F FT-SFM2 2m 6.562 ft 1,800 70.866 1,400 55.118 420 16.535 R1 mm R0.039 in -40 to +60 °C -40 to +140 °F FT-WS8 740 29.134 545 21.457 192 7.559 R25 mm R0.984 in -40 to +70 °C -40 to +158 °F FT-SNFM2 R1 mm R0.039 in -40 to +60 °C -40 to +140 °F FT-WS4 -40 to +70 °C -40 to +158 °F FT-P2 -40 to +60 °C -40 to +140 °F FT-PS1 ø0.5 ø0.020 590 23.228 440 17.323 150 5.906 770 30.315 570 22.441 200 7.874 210 8.268 160 6.299 60 2.362 ø0.6 ø0.024 2m 6.562 ft 1m 3.281 ft R4 mm R0.157 in Flexible ø0.25 500 mm ø0.010 19.685 in 13 Fiber Optic Sensors FX-500 LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Thru-beam type (one pair set) Type Sensing range (mm in) Shape of fiber head (mm in) ■ : HYPR ■ : STD ■ : H-SP 3,600 141.732 3,500 137.795 ø4 ø0.157 3 0.118 25 0.984 Side-view Cylindrical type Sleeve part 20 15 cannot be bent. 0.787 0.591 2,200 86.614 FAST : 1,200 47.244 300 11.811 LONG : 200 7.874 FAST : 40 1.575 U-LG : 380 14.961 LONG : 100 3.937 20 0.787 FAST : %ASYMOUNTINGs4OP sensing 3,600 141.732 3,300 129.921 W3 × H8 × D12 W0.118 × H0.315 × D0.472 630 24.803 3,600 141.732 2,100 82.677 410 16.142 3,600 141.732 3,400 133.858 %ASYMOUNTINGs3IDE sensing 590 23.228 W3 × H12 × D8 W0.118 × H0.472 × D0.315 3,600 141.732 2,000 78.740 490 19.291 Compact Rectangular %ASYMOUNTINGs&RONT sensing 14 FAST : U-LG : LONG : FAST : U-LG : LONG : FAST : 1,600 62.992 U-LG : LONG : FAST : LONG : FAST : LONG : U-LG : 800 31.496 LONG : 210 8.268 FAST : 40 1.575 3,500 137.795 1,400 55.118 290 11.417 3,500 137.795 790 31.102 160 6.299 LONG : FAST : Fiber bending type W3.5 × H14 × D11 W0.138 × H0.551 × D0.433 U-LG : U-LG : 100 3.937 Front sensing W14 × H7 × D3.5 W0.551 × H0.276 × D0.138 FAST : 3,600 141.732 1,200 47.244 530 20.866 W2 × H10 × D10 W0.079 × H0.394 × D0.394 LONG : U-LG : 280 11.024 Front sensing U-LG : 3,600 141.732 1,300 51.181 250 9.843 W10 × H7 × D2 W0.394 × H0.276 × D0.079 Fiber bending type LONG : U-LG : 790 31.102 W8.5 × H12 × D3 W0.335 × H0.472 × D0.118 U-LG : FAST : 90 3.543 ø2 ø1 ø0.039 ø0.079 1 0.039 15 15 Sleeve part cannot be bent. 0.591 0.591 U-LG : 22.441 100 3.937 ø1 ø2.5 ø0.039 ø0.098 0.6 0.024 10 15 Sleeve part cannot be bent. 0.394 0.591 LONG : LONG : 570 ø1 ø2 ø0.039 ø0.079 0.6 0.024 20 15 Sleeve part cannot be bent. 0.787 0.591 U-LG : FAST : 850 33.465 ø1.5 ø2.5 ø0.059 ø0.098 0.8 0.031 Beam Fiber cable Bending axis dia. length radius U-LG LONG FAST (mm in) : Free-cut 04/2011 U-LG : LONG : FAST : U-LG : LONG : FAST : 3,600 141.732 3,600 141.732 2,400 94.488 1,300 51.181 1,000 39.370 360 14.173 600 23.622 490 19.291 200 7.874 450 17.717 360 14.173 130 5.118 220 8.661 170 6.693 60 2.362 3,600 141.732 3,500 137.795 1,800 70.866 3,600 141.732 3,300 129.921 1,300 51.181 3,600 141.732 3,600 141.732 1,850 72.835 3,600 141.732 3,300 129.921 1,300 51.181 3,100 122.047 2,300 90.551 830 32.677 2,700 106.299 2,100 82.677 750 29.528 1,100 43.307 900 35.433 330 12.992 460 18.110 370 14.567 130 5.118 3,300 129.921 2,300 90.551 890 35.039 1,700 66.929 1,300 51.181 490 19.291 ø2.5 ø0.098 2m 6.562 ft ø1.1 ø0.043 R25 mm R0.984 in ø0.8 ø0.031 1m 3.281 ft ø0.55 ø0.022 Model No. -40 to +60 °C -40 to +140 °F FT-V10 -20 to +70 °C -4 to +158 °F FT-SFM2SV2 -20 to +60 °C -4 to +140 °F -40 to +60 °C -40 to +140 °F 2m 6.562 ft ø0.5 ø0.020 Ambient temperature FT-V22 FT-V41 R1 mm R0.039 in FT-WV42 R1 mm R0.039 in FT-WZ8H R4 mm R0.157 in Flexible FT-Z8H R1 mm R0.039 in FT-WZ8E R4 mm R0.157 in Flexible FT-Z8E 2.2 × 3 0.087 × 0.118 2m 6.562 ft R1 mm R0.039 in R4 mm R0.157 in Flexible ø1.5 ø0.059 FT-WZ8 -40 to +60 °C -40 to +140 °F FT-Z8 FT-WZ4 1m 3.281 ft ø0.5 ø0.020 FT-WZ4HB R1 mm R0.039 in ø1.5 ø0.059 FT-WZ7 2m 6.562 ft ø1 ø0.039 FT-WZ7HB FX-500 LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Thru-beam type (one pair set) Type Shape of fiber head (mm in) Sensing range (mm in) ■ : HYPR ■ : STD ■ : H-SP 3,600 141.732 3,600 141.732 ø3.5 ø3.7 ø0.138 ø0.146 20 0.787 750 29.528 3,600 141.732 3,600 141.732 Narrow beam Side-view type with small light dispersion ø4 ø0.157 760 29.921 3 0.118 3,600 141.732 3,600 141.732 25 0.984 750 29.528 2,400 94.488 W2 × H1.5 × D20 W0.079 × H0.059 × D0.787 2 0.079 540 21.260 20 0.787 160 6.299 Beam Fiber cable axis dia. length U-LG LONG FAST (mm in) : Free-cut U-LG : 3,600 141.732 ø2.2 LONG : 3,600 141.732 ø0.087 FAST : 2,700 106.299 U-LG : 3,600 141.732 LONG : 3,600 141.732 FAST : 2,400 ø2.5 94.488 2m U-LG : 3,600 ø0.098 6.562 ft 141.732 LONG : 3,600 141.732 FAST : 2,700 106.299 U-LG : 1,100 43.307 ø1 LONG : 850 33.465 ø0.039 FAST : 430 16.929 Bending radius R25 mm R0.984 in R1 mm R0.039 in 3,600 141.732 3,600 141.732 3,300 129.921 Wide beam Sensing width 32 mm 1.260 in W5 × H69 × D20 W0.197 × H2.717 × D0.787 Wide area sensing 3,600 141.732 3,600 141.732 980 38.583 3,600 141.732 3,500 137.795 1,200 47.244 Special Sensing width 11 mm 0.433in W4.2 × H31 × D13.5 W0.165 × H1.220 × D0.531 Top sensing Array 3,600 141.732 3.2 × 32 LONG : 3,600 141.732 0.126 × FAST : 3,600 1.260 141.732 3,500 137.795 W5 × H15 × D15 W0.197 × H0.591 × D0.591 Side sensing 860 33.858 160 6.299 2m 3,600 6.562 ft 141.732 LONG : 3,600 141.732 2.2 × 11 FAST : 3,300 0.087 129.921 × U-LG : 3,600 0.433 141.732 LONG : 3,600 141.732 FAST : 3,300 129.921 2,000 78.740 LONG : 1,500 59.055 FAST : 490 19.291 0.265 × 5.5 0.010 × 0.217 FT-K8 -40 to +60 °C -40 to +140 °F FT-WKV8 FT-KV8 R10 mm R0.394 in FT-KV1 R1 mm R0.039 in -40 to +55 °C FT-WA30 -40 to +131 °F R10 mm R0.394 in -40 to +60 °C FT-A30 -40 to +140 °F R1 mm R0.039 in -40 to +55 °C FT-WA8 -40 to +131 °F R10 mm R0.394 in -40 to +70 °C FT-A8 -40 to +158 °F U-LG : U-LG : Model No. R25 mm R0.984 in Wide area sensing U-LG : Ambient temperature FT-AFM2 2m 6.562 ft R25 mm R0.984 in -40 to +70 °C -40 to +158 °F FT-AFM2E W5 × H15 × D15 W0.197 × H0.591 × D0.591 350 °C 662 °F Lens mountable (FX-LE1/LE2/SV1) M4 1,200 47.244 30 1.181 350 °C 662 °F Sleeve 60 mm 2.362 in 430 16.929 M4 80 3.150 880 34.646 LONG : 670 26.378 FAST : 250 9.843 R25 mm R0.984 in U-LG : ø1.2 ø0.047 Heat-resistant ø2.1 ø0.083 27 1.063 Allows flexible wiring 200 °C 392 °F Lens mountable (FX-LE1/LE2/SV1) M4 23 0.906 1,600 62.992 470 18.504 90 3.543 1,600 62.992 200 °C 392 °F Lens mountable (FX-LE1/LE2/SV1) M4 23 0.906 540 21.260 110 4.331 3,300 129.921 130 °C 266 °F Lens mountable (FX-LE2 only) M4 16 0.630 700 27.559 140 5.512 1,000 39.370 840 33.071 300 FAST : 11.811 U-LG : 1,300 51.181 LONG : 960 37.795 FAST : 330 12.992 U-LG : 1,900 74.803 LONG : 1,300 51.181 410 FAST : 16.142 FT-H35-M2 -60 to +350 °C 2m 6.562 ft -76 to Fiber R25 mm R0.984 in +662 °F Sleeve FT-H35-M2S6 R10 mm R0.394 in U-LG : LONG : 04/2011 ø0.8 ø0.031 R10 mm R0.394 in 1m 3.281 ft ø1.2 ø0.047 FT-H20-M1 R25 mm R0.984 in ø1.5 ø0.059 FT-H20W-M1 -60 to +200 °C -76 to +392 °F 2m 6.562 ft -60 to +130 °C FT-H13-FM2 -76 to +266 °F 15 FX-500 Fiber Optic Sensors LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Thru-beam type (one pair set) Type Sensing range (mm in) Shape of fiber head (mm in) ■ : HYPR ■ : STD ■ : H-SP Beam Fiber cable Bending axis dia. length radius U-LG LONG FAST (mm in) : Free-cut Lens mountable (FX-LE1/LE2/SV1) 200 mm 7.874 in 1,600 62.992 (EAT RESISTANTs*OINT M4 23 0.906 470 18.504 90 3.543 ø3.8 ø0.150 ø4 ø0.157 2,100 82.677 600 23.622 120 4.724 Special Easy mounting · Rectangular head SEMI S2 compliant W7 × H15 × D13 W0.276 × H0.591 × D0.512 Chemical-resistant 115 °C 239 °F ø5.5 ø0.217 (25) (0.984) Side-view U-LG : 920 36.220 3,600 141.732 1,300 51.181 ø5.5 ø0.217 Vacuumresistant (25) (0.984) 240 9.449 300 °C 572 °F Lens mountable (FV-LE1/SV2 only) M4 30 1.181 1,300 51.181 980 38.583 390 FAST : 15.354 3,600 141.732 3,600 141.732 3,600 141.732 3,600 141.732 ø5.5 ø0.217 1,000 39.370 270 10.630 55 2.165 04/2011 FT-H20-J30-S Heatresistant ø1.2 500 mm 19.685 in fiber ø0.047 R18 mm R0.709 in -60 to +200 °C -76 to FT-H20-J50-S +392 °F 500 mm 19.685 in FT-H20-VJ50-S LONG : 3,600 141.732 LONG : 3,600 141.732 FAST : 1,900 74.803 740 29.134 FT-H20-J20-S 300 mm 11.811 in U-LG : 3,600 141.732 3,100 122.047 470 18.504 (25) (0.984) 16 1,000 39.370 LONG : 790 31.102 FAST : 300 11.811 Model No. U-LG : Side-view 24 0.945 Ambient temperature 800 mm 31.496 in FT-H20-VJ80-S U-LG : 3,600 141.732 LONG : 3,600 141.732 FAST : 2,300 90.551 U-LG : 3,600 141.732 LONG : 3,600 141.732 FAST : 2,800 110.236 U-LG : 2,800 110.236 LONG : 2,200 86.614 FAST : 800 31.496 U-LG : 590 23.228 LONG : 470 18.504 FAST : 160 6.299 2m 6.562 ft R25 mm R0.984 in ø3.7 ø0.146 -40 to +115 °C FT-HL80Y -40 to +239 °F 2m 6.562 ft R30 mm R1.181 in ø2.8 ø0.110 ø1.2 ø0.047 0 to +60 °C FT-Z802Y 32 to +140 °F FT-L80Y -40 to +70 °C -40 to +158 °F FT-V80Y 1m 3.281 ft R18 mm R0.709 in -30 to +300 °C -22 to FT-H30-M1V-S +572 °F FX-500 LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Retroreflective type polarizing Side sensing Top sensing With filters Wafer mapping Narrow beam Sharp bending Type Shape of fiber head (mm in) W9.5 × H5.2 × D15 W0.374 × H0.205 × D0.591 W30 × H30 × D0.5 W1.181 × H1.181 × D0.020 Fiber cable length U-LG LONG FAST ■ : HYPR ■ : STD ■ : H-SP : Free-cut 100 to 1,900 U-LG : 100 to 1,400 3.937 to 74.803 3.937 to 55.118 LONG :100 to 1,200 100 to 990 2m 3.937 to 38.976 3.937 to 47.244 6.562 ft 100 to 490 FAST : 100 to 780 3.9370 to 19.291 3.937 to 30.709 Sensing range (mm in) Bending radius Ambient temperature Model No. R1 mm R0.039 in -25 to +55 °C -13 to +131 °F FR-WKZ11 W9.5 × H5.2 × D21 W0.374 × H0.205 × D0.827 W10.6 × H28 × D10.1 W0.417 × H1.102 × D0.398 W9.5 × H25× D5.2 W0.374 × H0.984 × D0.205 200 7.874 200 7.874 200 7.874 U-LG : LONG : FAST : 200 7.874 200 7.874 200 7.874 FR-KZ21 2m 6.562 ft R10 mm R0.394 in -40 to +60 °C -40 to +140 °F FR-KZ21E W10.6 × H28 × D10.1 W0.417 × H1.102 × D0.398 W7.5 × H2.2 × D11.2 W0.295 × H0.087 × D0.441 W4 × H2 × D21.5 W0.157 × H0.079 × D0.846 20 to 530 0.787 to 20.866 20 to 310 0.787 to 12.205 20 to 100 0.787 to 3.937 U-LG : 20 to 460 0.787 to 18.110 LONG : 20 to 410 0.787 to 16.142 FAST : 20 to 220 0.787 to 8.661 04/2011 2m 6.562 ft R10 mm R0.394 in -40 to +60 °C -40 to +140 °F FR-KV1 17 Fiber Optic Sensors FX-500 LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Reflective type Type Shape of fiber head (mm in) Sensing range (mm in) ■ : HYPR ■ : STD ■ : H-SP 1,450 57.087 M6 490 19.291 100 3.937 15 0.591 Metal-free s#OAXIAL 1,000 39.370 M6 420 16.535 60 2.362 20 0.787 Coaxial M6 60 2.362 M6 M6 ø2.5 ø0.098 20 0.787 Sleeve 40 mm 1.575 in 70 2.756 560 22.047 LONG : 420 250 16.535 9.843 FAST : 140 45 1.772 5.512 U-LG : 610 820 24.016 32.283 LONG : 480 280 18.898 11.024 FAST : 160 55 2.165 6.299 U-LG : 370 450 14.567 17.717 LONG : 330 270 12.992 10.630 FAST : 160 50 1.969 6.299 U-LG : 500 890 19.685 35.039 LONG : 370 220 14.567 8.661 40 FAST : 130 1.575 5.118 700 1,100 U-LG : 27.559 43.307 LONG : 540 380 21.260 14.961 FAST : 220 70 2.756 8.661 870 34.252 M6 15 0.591 M6 15 0.591 Tough flexible M6 15 0.591 Elbow Ambient temperature FD-B8 R25 mm R0.984 in FD-G60 -40 to +70 °C -40 to +158 °F 2m 6.562 ft Model No. Fiber R25 mm R0.984 in Sleeve R10 mm R0.394 in FD-FM2 FD-FM2S FD-FM2S4 ø2.5 ø0.098 20 0.787 Threaded type 700 1,100 U-LG : 27.559 43.307 LONG : 540 21.260 FAST : 220 8.661 380 14.961 M6 Bending radius 800 1,400 U-LG : 31.496 55.118 LONG : 650 25.591 FAST : 200 7.874 420 16.535 20 0.787 Sleeve 90 mm 3.543 in Fiber cable length U-LG LONG FAST : Free-cut U-LG : 960 37.795 LONG : 860 33.858 FAST : 330 12.992 U-LG : 680 26.772 LONG : 600 23.622 FAST : 200 7.874 15 0.591 M6 M4 12 0.472 U-LG : R1 mm R0.039 in -40 to +60 °C -40 to +140 °F R4 mm R0.157 in Flexible 1m 3.281 ft R10 mm R0.394 in 2m 6.562 ft R25 mm R0.984 in FD-W8 FD-P80 -40 to +70 °C -40 to +158 °F FD-P81X FD-R80 FD-T80 R25 mm R0.984 in M4 FD-NFM2 17 0.669 510 20.079 Sleeve 90 mm 3.543 in M4 M4 ø1.48 ø0.058 12 0.472 Sleeve 40 mm 1.575 in M4 120 4.724 22 0.866 280 11.024 LONG : 215 8.465 FAST : 70 2.756 U-LG : 12 ø1.48 ø0.058 0.472 Sleeve 40 mm 1.575 in 330 12.992 M4 12 0.472 ø1.48 ø0.058 80 3.150 12 0.472 -40 to +70 °C -40 to +158 °F U-LG : 180 7.087 LONG : 140 5.512 FAST : 45 1.772 12 0.472 18 250 9.843 45 1.772 FD-NFM2S FD-NFM2S4 Fiber R1 mm R0.039 in Sleeve R10 mm R0.394 in U-LG : M4 560 870 22.047 34.252 LONG : 420 16.535 FAST : 140 5.512 04/2011 2m 6.562 ft Fiber R25 mm R0.984 in Sleeve R10 mm R0.394 in R1 mm R0.039 in FD-W44 -40 to +60 °C -40 to +140 °F FD-WT8 FX-500 LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Reflective type Type Shape of fiber head (mm in) Minute objects can be detected due to the small spot beam. #OAXIALs,ENSMOUNTABLE (FX-MR1/MR2/MR3/MR5/MR6) Fiber cable length U-LG LONG FAST : Free-cut U-LG : 340 13.386 LONG : 280 11.024 FAST : 90 3.543 Sensing range (mm in) (Note 1) ■ : HYPR ■ : STD ■ : H-SP 590 23.228 150 5.906 25 0.984 Bending radius Ambient temperature R2 mm R0.079 in -40 to +60 °C -40 to +140 °F Model No. FD-WG4 M4 550 21.654 M4 25 0.984 Metal-frees#OAXIAL M4 140 5.512 27 1.063 330 12.992 LONG : 270 10.630 80 FAST : 3.150 FD-G4 U-LG : 2m 6.562 ft R25 mm -40 to +70 °C R0.984 in -40 to +158 °F FD-G40 25 0.984 490 19.291 15 0.591 120 4.724 M4 22 0.866 Small diameter M3 12 0.472 M3 Threaded type 12 0.472 M3 12 0.472 Lens mountable (FX-MR3, FX-MR6) Coaxial M3 M3 17 0.669 Tough flexible Lens mountable (FX-MR3, FX-MR6) Coaxial M3 18 0.709 High precision Lens mountable (FX-MR3, FX-MR6) Coaxial M3 17 0.669 High precision Lens mountable (FX-MR3, FX-MR6) Coaxial M3 17 0.669 Light emitting fiber element ø0.175 ø0.007 High precision Lens mountable (FX-MR3, FX-MR6) Coaxial M3 17 0.669 Light emitting fiber element ø0.125 ø0.005 Coaxial M3 ø0.8 ø0.031 15 15 0.591 0.591 Sleeve part cannot be bent. ø3 ø0.118 Cylindrical type ø3 ø0.118 15 0.591 ø3 ø0.118 15 0.591 U-LG : 250 9.843 LONG : 190 7.480 FAST : 75 2.953 280 11.024 LONG : 215 120 8.465 4.724 70 FAST : 22 0.866 2.756 U-LG : 180 330 7.087 12.992 LONG : 140 80 5.512 3.150 FAST : 45 12 0.472 1.772 U-LG : 100 190 3.937 7.480 85 LONG : 45 3.346 1.772 FAST : 20 7 0.276 0.787 U-LG : 330 550 12.992 21.654 270 LONG : 140 10.630 5.512 FAST : 80 27 1.063 3.150 U-LG : 370 630 14.567 24.803 LONG : 310 170 12.205 6.693 FAST : 95 27 1.063 3.740 U-LG : 100 170 3.937 6.693 80 LONG : 40 3.150 1.575 FAST : 24 7.5 0.295 0.945 U-LG : 100 130 3.937 5.118 LONG : 80 24 3.150 0.945 FAST : 19 3 0.118 0.748 U-LG : 45 85 1.772 3.346 LONG : 35 20 1.378 0.787 3.5 FAST : 12 0.138 0.472 U-LG : 110 190 4.331 7.480 LONG : 90 50 3.543 1.969 FAST : 28 9 0.354 1.102 700 1,100 U-LG : 27.559 43.307 LONG : 540 380 21.260 14.961 FAST : 220 70 2.756 8.661 U-LG : 550 960 21.654 37.795 LONG : 410 250 16.142 9.843 FAST : 140 45 1.772 5.512 04/2011 510 20.079 -40 to +60 °C -40 to +140 °F FD-P60 R25 mm -40 to +70 °C R0.984 in -40 to +158 °F FD-T40 R4 mm R0.157 in Flexible U-LG : R1 mm R0.039 in -40 to +60 °C -40 to +140 °F FD-WT4 R4 mm R0.157 in Flexible -40 to +70 °C -40 to +158 °F FD-P40 2m 6.562 ft R25 mm R0.984 in FD-G6 -40 to +60 °C -40 to +140 °F 1m 3.281 ft R10 mm R0.394 in FD-G6X R25 mm R0.984 in FD-EG1 500 mm 19.685 in FD-EG2 R10 mm R0.394 in -20 to +60 °C -4 to +140 °F FD-EG3 1m 3.281 ft R25 mm R0.984 in FD-ENM1S1 R25 mm -40 to +70 °C R0.984 in -40 to +158 °F FD-S80 2m 6.562 ft R1 mm R0.039 in -40 to +60 °C -40 to +140 °F FD-WS8 19 FX-500 Fiber Optic Sensors Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. LIST OF FIBERS Reflective type Type Sensing range (mm in) Shape of fiber head (mm in) ■ : HYPR ■ : STD ■ : H-SP Coaxial 150 5.906 ø3 ø0.118 25 0.984 15 0.591 490 19.291 ø3 ø0.118 120 4.724 Cylindrical type Ultra-small diameter ø1.5 ø0.059 ø2.5 ø0.098 15 0.591 22 0.866 510 20.079 ø2.5 ø0.098 120 4.724 8 0.315 22 0.866 260 10.236 ø1.5 ø0.059 80 3.150 15 0.591 20 0.787 45 1.772 ø1.5 ø0.5 ø0.059 ø0.020 15 3 0.591 0.118 Sleeve part cannot be bent. 12 0.472 2 0.079 Coaxial 210 8.268 ø3 ø0.65 ø0.118 ø0.026 15 5 0.591 0.197 Sleeve part cannot be bent. 55 2.165 11 0.433 140 5.512 110 4.331 FAST : 35 1.378 U-LG : 35 1.378 25 LONG : 0.984 FAST : 8 0.315 U-LG : 250 9.843 LONG : 210 8.268 FAST : 75 2.953 U-LG : 1 to 87 0.039 to 3.425 LONG :1 to 74 0.039 to 2.913 FAST : 1 to 38 0.039 to 1.496 14 0.551 60 2.362 1 0.039 ø3 ø2 ø0.118 ø0.079 2 Sleeve part cannot be bent. 16 0.630 0.079 370 14.567 120 4.724 15 20 0.591 0.787 0.8 0.031 ø5 ø2 ø0.197 ø0.079 Sleeve part cannot be bent. 25 0.984 'LASSSUBSTRATEDETECTIONs Mapping 1 to 110 0.039 to 4.331 1 to 56 0.039 to 2.205 Cannot use W25 × H7.3 × D30 W0.984 × H0.287 × D1.181 'LASSSUBSTRATEDETECTIONs Rectangular Convergent reflective type Alignment W20 × H29 × D3.8 W0.787 × H1.142 × D0.150 'LASSSUBSTRATEDETECTIONs Alignment W23.5 × H29 × D4.5 W0.925 × H1.142 × D0.177 'LASSSUBSTRATEDETECTIONs Alignment W17 × H29 × D3.8 W0.669 × H1.142 × D0.150 'LASSSUBSTRATEDETECTIONs Seating confirmation W18 × H29 × D3.8 W0.709 × H1.142 × D0.150 20 R2 mm R0.079 in Model No. FD-WSG4 -40 to +60 °C -40 to +140 °F 2m 6.562 ft R4 mm R0.157 in Flexible 2m 6.562 ft FD-P50 R25 mm R0.984 in FD-SNFM2 -40 to +70 °C -40 to +158 °F 1m 3.281 ft R4 mm R0.157 in Flexible R10 mm R0.394 in FD-P2 -40 to +60 °C -40 to +140 °F FD-E12 1m 3.281 ft R25 mm -40 to +70 °C FD-E22 R0.984 in -40 to +158 °F R25 mm FD-V41 R0.984 in -40 to +60 °C -40 to +140 °F LONG : 65 2.559 15 15 0.591 0.591 Ambient temperature U-LG : 260 10.236 Small diameter 15 10 0.591 0.394 0.7 0.028 ø3 ø1.5 ø0.118 ø0.059 Sleeve part cannot be bent. Side-view 340 13.386 LONG : 280 11.024 90 FAST : 3.543 U-LG : 250 9.843 LONG : 190 7.480 FAST : 75 2.953 U-LG : 280 11.024 LONG : 215 8.465 FAST : 70 2.756 U-LG : 170 6.693 LONG : 140 5.512 FAST : 55 2.165 U-LG : 25 0.984 LONG : 22 0.866 FAST : 7 0.276 U-LG : 130 5.118 LONG : 110 4.331 FAST : 32 1.260 Bending radius U-LG : 590 23.228 ø3 ø0.118 Fiber cable length U-LG LONG FAST : Free-cut 2m 6.562 ft R1 mm R0.039 in FD-WV42 R25 mm -20 to +60 °C R0.984 in -4 to +140 °F 4m 13.123 ft 43 1.693 43 LONG : 1.693 FAST : 40 1.575 FD-SFM2SV2 R25 mm -40 to +60 °C FD-L46 R0.984 in -40 to +140 °F U-LG : 43 1.693 40 1.575 24 0.945 U-LG : 4 to 47 0.157 to 1.850 LONG :4 to 46 0.157 to 1.811 FAST : 4 to 42 0.157 to 1.654 3 to 51 0.118 to 2.008 4 to 44 0.157 to 1.732 5 to 38 0.197 to 1.496 U-LG : 31 1.220 24 0.945 18 0.709 30 1.181 29 1.142 1.5 to 24 0.059 to 0.945 LONG : FAST : U-LG : LONG : FAST : 04/2011 25 0.984 24 0.945 24 0.945 30 1.181 30 1.181 28 1.102 R4 mm R0.157 in FD-L45 3m 9.843 ft R25 mm R0.984 in 0 to +70 °C 32 to +158 °F FD-L45A FD-L43 2m 6.562 ft R4 mm R0.157 in 3m 9.843 ft -20 to +70 °C -4 to +158 °F FD-L47 FX-500 LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Reflective type Type Shape of fiber head (mm in) 'LASSSUBSTRATEDETECTIONs Seating confirmation Convergent reflective type W12 × H19 × D3 W0.472 × H0.748 × D0.118 Glass substrate detection W24 × H21 × D4 W0.945 × H0.827 × D0.157 W6 × H18 × D14 Rectangular W0.236 × H0.709 × D0.551 W7.2 × H7.5 × D2 W0.283 × H0.295 × D0.079 Front sensing W10 × H7 × D2 W0.394 × H0.276 × D0.079 Small Fiber bending type W2 × H10 × D10 W0.079 × H0.394 × D0.394 Front sensing W14 × H7 × D3.5 W0.551 × H0.276 × D0.138 Fiber bending type Long sensing Wide beam range ,ONG SENSING RANGE s 2ECTANGULAR head W5.2 × H9.5 × D15 W0.205 × H0.374 × D0.591 W7 × H15 × D30 W0.276 × H0.591 × D1.181 Bending radius Ambient temperature Model No. FD-L44 R10 mm R0.394 in -40 to +60 °C -40 to +140 °F R1 mm R0.039 in FD-L44S FD-WL41 FD-L41 R10 mm R0.394 in R1 mm R0.039 in -40 to +70 °C -40 to +158 °F FD-L4 -20 to +60 °C -4 to +140 °F FD-WL48 FD-WZ4 FD-WZ4HB R1 mm R0.039 in -40 to +60 °C -40 to +140 °F FD-WZ7 FD-WZ7HB R1 mm R0.039 in -40 to +60 °C -40 to +140 °F R25 mm R0.984 in FD-WKZ1 FD-A15 Top sensing Array Special W3.5 × H14 × D11 W0.138 × H0.551 × D0.433 Fiber cable length U-LG LONG FAST ■ : HYPR ■ : STD ■ : H-SP : Free-cut U-LG : 10.5 11.5 0.413 0.453 10 LONG : 9.5 0.394 0.374 FAST : 9 8 0.315 0.354 U-LG : 5.5 6 0.217 0.236 LONG : 5.5 5 0.217 0.197 4.5 FAST : 4 0.157 0.177 U-LG : 2 to 14.5 1.5 to 15 0.079 to 0.571 0.059 to 0.591 LONG :2 to 14.5 2.5 to 14 2m 0.079 to 0.571 0.098 to 0.551 6.562 ft FAST :5.5 to 13.5 6.5 to 10 0.256 to 0.394 0.217 to 0.531 U-LG : 1 to 18 1 to 19 0.039 to 0.709 0.039 to 0.748 LONG :1.5 to 16 1.5 to 16 0.059 to 0.630 0.059 to 0.630 FAST : 3 to 15 8 to 11 0.315 to 0.433 0.118 to 0.591 U-LG : 19.5 21.5 0.768 0.846 LONG : 18.5 15.5 0.728 0.610 FAST : 3 to 13 5 to 7.5 0.197 to 0.295 0.118 to 0.512 U-LG : 12.5 16 0.492 0.630 LONG : 11.5 7.5 1m 0.453 0.295 3.281 ft FAST : 0.5 to 6 0.5 to 4 0.020 to 0.157 0.020 to 0.236 U-LG :1 to 110 1 to 230 0.039 to 4.331 0.039 to 9.055 LONG :1 to 85 2 to 65 0.039 to 3.346 0.079 to 2.559 FAST : 3 to 35 5 to 13 0.197 to 0.512 0.118 to 1.378 1m U-LG :1 to 130 1 to 190 3.281 ft 0.039 to 5.118 0.039 to 7.480 LONG : 1 to 90 2.5 to 65 0.039 to 3.543 0.098 to 2.559 3 to 11 FAST : 2.5 to 40 0.118 to 0.433 0.098 to 1.575 U-LG : 230 430 9.055 16.929 LONG : 180 110 7.087 4.331 FAST : 1.5 to 65 3 to 25 0.118 to 0.984 0.059 to 2.559 2m U-LG :0.5 to 320 0.5 to 560 6.562 ft 0.020 to 12.598 0.020 to 22.047 LONG :0.5 to 270 1 to 150 0.020 to 10.630 0.039 to 5.906 2.5 to 30 FAST : 1 to 90 0.098 to 1.181 0.039 to 3.543 20 to 1,700 U-LG : 20 to 1,000 0.787 to 66.929 0.787 to 39.370 LONG : 20 to 820 20 to 490 2m 0.787 to 32.283 0.787 to 19.291 6.562 ft FAST : 20 to 310 20 to 100 0.787 to 3.937 0.787 to 12.205 U-LG : 200 200 7.874 7.874 LONG : 200 200 2m 7.874 7.874 6.562 ft FAST : 140 75 2.953 5.512 Sensing range (mm in) 660 25.984 W5 × H20 × D20 W0.197 × H0.787 × D0.787 Side sensing 280 11.024 50 1.969 510 20.079 LONG : 430 16.929 FAST : 160 6.299 FD-AFM2 U-LG : 2m 6.562 ft R25 mm -40 to +70 °C R0.984 in -40 to +158 °F FD-AFM2E W5 × H20 × D20 W0.197 × H0.787 × D0.787 04/2011 21 FX-500 Fiber Optic Sensors LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Reflective type Type Shape of fiber head (mm in) Heat resistant 125 °C 257 °F Fluorine resin coating ø6 ø0.236 Heat resistant 105 °C 221 °F Fluorine resin coating Liquid level sensing ø4 ø0.157 Heat resistant 70 °C 158 °F Fluorine resin coating throughout the fiber ø4 ø0.157 -OUNTABLEONPIPEs3TANDARD W25 × H13 × D20 W0.984 × H0.512 × D0.787 Sensing range (mm in) ■ : HYPR ■ : STD ■ : H-SP Fiber cable length U-LG LONG FAST : Free-cut ø6 mm ø0.236 in Protective tube: Fluorine resin, length 1,000 mm 39.370 in (not cuttable) Liquid surface contacted: Beam received, Liquid surface not contacted: Beam interrupted ø4 mm ø0.157 in Protective tube: Fluorine resin, length 500 mm 19.685 in (cuttable) Liquid surface contacted: Beam received, Liquid surface not contacted: Beam interrupted ø4 mm ø0.157 in Protective tube: Fluorine resin, length 500 mm 19.685 in (cuttable) Liquid surface contacted: Beam received, Liquid surface not contacted: Beam interrupted Applicable pipe diameter: Outer dia. ø6 to ø26 mm ø0.236 to ø1.024 in transparent pipe 2m 6.562 ft Ambient temperature Protective tube R40 mm -40 to +125 °C R1.575 in -40 to +257 °F Fiber R15 mm R0.591 in Model No. FD-F8Y Protective tube -40 to +105 °C FD-HF40Y -40 to +221 °F R20 mm R0.787 in Fiber R10 mm R0.394 in -40 to +70 °C FD-F41Y -40 to +158 °F 2m 6.562 ft FD-F41 PVC (vinyl chloride), fluorine resin, polycarbonate, acrylic, glass, wall thickness 1 to 3 mm 0.039 to 0.118 in Liquid absent: Beam received, Liquid present: Beam interrupted R10 mm R0.394 in -OUNTABLEONPIPEs&OR0&!WALL Applicable pipe diameter: Outer dia. ø6 to ø26 mm ø0.236 to ø1.024 in transparent pipe thickness 1 mm 0.039 in pipe W25 × H13 × D20 W0.984 × H0.512 × D0.787 Bending radius -40 to +100 °C -40 to +212 °F FD-F4 PFA (fluorine resin) or equivalently transparent pipe, wall thickness 1 mm 0.039 in Liquid absent: Beam received, Liquid present: Beam interrupted Liquid sensing -OUNTABLEONPIPEs!RRAYlBER W6.5 × H28.3 × D17 W0.256 × H1.114 × D0.669 Mountable on pipe SEMI S2 compliant Applicable pipe diameter: Outer dia. ø3 to ø10 mm ø0.118 to ø0.394 in transparent pipe R10 mm R0.394 in 2m 6.562 ft PFA (fluorine resin) or equivalently transparent pipe, wall thickness 0.3 to 1 mm 0.012 to 0.039 in Liquid absent: Beam received, Liquid present: Beam interrupted W20 × H30 × D10 W0.787 × H1.181 × D0.394 Liquid leak detection Leak absent: Beam received, Leak present: Beam interrupted 5m 16.404 ft Protective tube: 3 m 9.843 ft -40 to +70 °C FD-FA90 -40 to +158 °F Protective tube R20 mm R0.787 in -20 to +60 °C Fiber -4 to +140 °F FT-F902 Protective tube R20 mm R0.787 in -20 to +50 °C Fiber FD-F705 R4 mm R0.157 in SEMI S2 compliant Liquid leak detection Special W23 × H20 × D17 W0.906 × H0.787 × D0.669 Applicable pipe diameter: Outer dia. ø8 mm ø0.315 in or more transparent pipe (When used with the tying bands: ø8 to ø80 mm ø0.315 to ø3.150 in) [PFA (fluorine resin), including translucent] Liquid absent: Beam received, Liquid present: Beam interrupted R4 mm R0.157 in -4 to +122 °F 350 °C 662 °Fs#OAXIAL M6 720 28.346 25 0.984 350 °C 662 °Fs Sleeve 60 mm 2.362 in ø2.8 ø0.110 M6 260 10.236 45 1.772 540 21.260 LONG : 460 18.110 FAST : 150 5.906 R25 mm R0.984 in U-LG : 2m 6.562 ft 840 33.071 Heat-resistant 200 °C 392 °Fs#OAXIAL M6 330 12.992 28 1.102 55 2.165 840 33.071 350 °C 662 °Fs Sleeve 90 mm 3.543 in M4 ø2.1 ø0.083 260 10.236 45 1.772 770 30.315 200 °C 392 °Fs#OAXIAL M4 27 1.063 300 °C 572 °Fs'LASSSUBSTRATEDETECTION Convergent reflective type W19 × H27 × D5 W0.748 × H1.063 × D0.197 22 -60 to +350 °C -76 to +662 °F FD-H35-M2S6 R10 mm R0.394 in 22 0.866 27 1.063 Fiber R25 mm R0.984 in Sleeve FD-H35-M2 230 9.055 45 1.772 40 1.575 17 0.669 1.5 to 6 0.059 to 0.236 04/2011 U-LG : 550 21.654 LONG : 500 19.685 FAST : 200 7.874 U-LG : 550 21.654 LONG : 440 17.323 FAST : 140 5.512 U-LG : 500 19.685 LONG : 380 14.961 FAST : 130 5.118 U-LG : 30 1.181 LONG : 25 0.984 FAST : 12 0.472 R25 mm -60 to +200 °C FD-H20-M1 R0.984 in -76 to +392 °F 1m 3.281 ft Fiber R25 mm R0.984 in Sleeve R10 mm R0.394 in -60 to +350 °C -76 to +662 °F FD-H35-20S -60 to +200 °C -76 to +392 °F FD-H20-21 R25 mm R0.984 in 2m 6.562 ft -60 to +300 °C -76 to +572 °F FD-H30-L32 FX-500 LIST OF FIBERS Pliable fibers (flexible and sharp bending fibers) are marked in light blue in the table. Reflective type Type 250 °C 482 °F s 'LASS SUBSTRATE detection Convergent reflective type W21 × H33.2× D5 W0.827 × H1.307 × D0.197 Heat-resistant 250 °C 482 °F s 'LASS SUBSTRATE detection Convergent reflective type Special Sensing range (mm in) Shape of fiber head (mm in) W21 × H34.5 × D5 W0.827 × H1.358 × D0.197 180 °C 356 °F s 'LASS SUBSTRATE detection Convergent reflective type W19 × H27 × D5 W0.748 × H1.063 × D0.197 ■ : HYPR ■ : STD ■ : H-SP 1 to 31 0.039 to 1.220 1.5 to 26 0.059 to 1.024 2 to 18 0.079 to 0.709 4 to 43.5 0.157 to 1.713 5 to 42 0.197 to 1.654 6.5 to 34 0.256 to 1.339 60 2.362 16 0.630 2 to 6.5 0.079 to 0.256 880 34.646 130 °C 266 °F M6 350 13.780 21 0.827 65 2.559 Vacuum-resistant 300 °C 572 °F s 2ECTANGULAR head 1 to 500 0.039 to 19.685 2 to 200 0.079 to 7.874 10 to 25 0.394 to 0.984 W9.5 × H5.2 × D15 W0.374 × H0.205 × D0.591 300 °C 572 °F s 'LASS SUBSTRATE detection Convergent reflective type W19 × H5 × D27 W0.748 × H0.197 × D1.063 18 0.709 8 0.315 1.5 to 3 0.059 to 0.118 Fiber cable length U-LG LONG FAST : Free-cut U-LG : 1 to 30 0.039 to 1.181 LONG :1 to 28 0.039 to 1.102 FAST : 1.5 to 24 0.059 to 0.945 3m 9.843 ft U-LG : 4 to 43 0.157 to 1.693 LONG :4.5 to 43 0.177 to 1.693 FAST : 5 to 40 0.197 to 1.575 U-LG : 32 1.260 LONG : 24 0.945 13 FAST : 0.512 2m U-LG : 640 6.562 ft 25.197 LONG : 600 23.622 FAST : 200 7.874 U-LG : 1 to 340 0.039 to 13.386 LONG : 1 to 270 1m 0.039 to 10.630 3.281 ft FAST : 3 to 120 0.118 to 4.724 U-LG : 12 0.472 LONG : 10 3m 0.394 9.843 ft FAST : 5.5 0.217 Bending radius Ambient temperature Model No. -20 to +250 °C FD-H25-L43 -4 to +482 °F Ordinary temperature side: -20 to +70 °C -4 to +158 °F FD-H25-L45 R25 mm R0.984 in -60 to +180 °C -76 to +356 °F FD-H18-L31 -60 to +130 °C -76 to +266 °F FD-H13-FM2 FD-H30-KZ1V-S R18 mm -30 to +300 °C R0.709 in -22 to +572 °F FD-H30-L32V-S Accessories (attached with fibers) s RF-003 (FR-KZ21/KZ21E exclusive reflector) s RF-13 (Reflective tape) s FX-CT1 (Fiber cutter) s FX-CT2 (Fiber cutter) s FX-CT3 (Fiber cutter) s FX-AT2 (Attachment for fixed-length fiber, Orange) s FX-AT3 (Attachment for ø2.2 mm ø0.087 in fiber, Clear orange) s FX-AT4 (Attachment for ø1 mm ø0.039 in fiber, Black) s FX-AT5 (Attachment for ø1.3 mm ø0.051 in fiber, Gray) s RF-003 s RF-13 s FX-CT1 s FX-CT2 s FX-AT6 Attachment for ø1 mm ø0.039 in / ø1.3 mm ø0.051 in mixed fiber, Black / Gray s FX-CT3 s FX-AT2 s FX-AT3 s FX-AT4 04/2011 s FX-AT5 s FX-AT6 23 FX-CH2 test Sensors Communication Units Fiber FX-CH2 External input unit for digital sensor Features ◾ Up to 16 sensors can be set / switched simultaneously by an external signal ◾ Key lock setting Even the enable / disable command for the key lock setting, a function designed to prevent operational mistakes, can be effectuated simultaneously from an external signal. Up to 16 digital fiber sensors can be set / switched simultaneously not by directly operating the sensors but from a PLC, a touch panel, a push button, or some other external signal generating device. ◾ Batch loading and saving of bank settings ◾ Simultaneous teaching The bank settings for 3 previously set channels can be loaded and saved all together using an external signal. ▪ Full-auto teaching ▪ 2-level teaching Technical Specifications Type NPN input type Model no. FX-CH2 Applicable sensor FX-CH2-P FX-301(P) (Version upgrade), FX-305(P) Supply voltage Input PNP input type 12 to 24VDC±10% Low: 0 to +2VDC Low: 4V to +V DC High: +5V to +V DC, or open High: 0 to +0.6V DC, or open Power indicator Transmission operation indicator Ambient temperature Dimensions 24 Green LED Green LED (lights up when loaded, and 2-level / limit teaching blinks lights up when saved, and full-auto teaching) −10 to +55°C (if 4 to 7 sensors are mounted close together: −10 to +50°C, If 8 to 16 sensors are mounted close together: −10 to +45°C) 10×27×68.5mm 04/2011 FX-CH2 Typical Applications ◾ Setup changes (external automatic teaching/ data bank switching) ◾ Data bank switching Digital fiber settings can be changed using input from a touch screen or switch, so that production line setup changes can be carried out more easily. Settings such as output operations (L-ON/D-ON) and timer operations can be recorded in the digital fiber sensor’s data bank, and switching can be carried out externally. ◾ External teaching Full auto-teaching is recommended for teaching when the sensing object is changed without stopping the line. 04/2011 25 SC-GU1-485 Fiber Sensors Communication Units SC-GU1-485 We now offer remote maintenance for digital sensors Features ◾ Function handy for startup and maintenance ◾ Series connection (RS485) of a maximum of 31 nodes is possible Using a PLC or PC, this communication unit not only facilitates inputs (teaching, bank switching) to a digital fiber sensor [FX301(P) / 305(P)] but also received-light amount and output status verifications greatly enhance workability during startup and maintenance. A maximum of 31 nodes can be connected in series. This is ideal for flexible handling when the sensors are to be installed in scattered locations or when more sensors are added. FX-301(P) FX-305(P) PLC 1 node 2 node 3 node 4 node… … Max. 31 node SC-GU1-485 RS-485 communication Technical Specifications Type Model no. Applicable sensor Supply voltage Ambient temperature Main Unit SC-GU1-485 FX-301 (P), FX-305 (P) 24VDC±10% Ripple P-P10% or less −10 to +55°C (if 4 to 7 sensors are connected: −10 to +50°C, If 8 to 16 sensors are mounted close together: −10 to +45°C) (No dew condensation or icing allowed), Storage: –20 to +70°C Material Enclosure: Heat-resistant ABS Weight 35g approx. (10g approx. for SC-GU1-EU) 26 04/2011 www.panasonic-electric-works.com You need further information? Please visit us: www.panasonic-electric-works.com or call us: Tel.: +49(0)8024 648-0 04/2011 27 Optical Fiber Heads Optical Fiber Heads FT/FD-W ◾ Compact bending same as electrical wires With the smallest bending radius being over R1mm and the coaxial types capable of highly accurate sensing (FD-WG4 and FD-WSG4) being over R2mm, this fiber can bend sharply like a cable to reduce wasted space. ◾ All 24 models! Complete lineup! Sharp bending fiber Now, an even greater variety of sharp bending fibers 13 thru-beam models and 11 reflective models are available for a total of 24 models. You are sure to find the sharp bending fiber that is best for you. ◾ Does not break even at sharp bends It does not break even at sharp bends. Furthermore, due to low loss in light intensity, there is almost no affect on the sensing range. FT-WA30/A30, FT-WA8/A8, FD-A15 ◾ Wide range It has a wide sensing width of 11mm for FT-WA8/A8 and 32mm for FT-WA30/A30 enabling long distance sensing of objects as far as 3500mm (with FX-301 in LONG mode). Optimal for detecting unsteady objects or small objects. Wide beam fiber Sensing possible across a wide area ◾ Seal slit mask is available A seal slit mask reduces the width and thereby the intensity of the emitting beam, which enables much smaller objects to be detected. ◾ Space saving installation possible FT-WA30/A30 and FT-WA8/A8 depth fibers boast a slim size of 20mm and 13.5mm respectively that enables mounting in even the narrowest of lines. 28 04/2011 ◾ 2 types to choose from to match your working environment ◾ High precision detection Heat-resistant, fixed-focus reflective fiber Glass substrate detection in high temperature production line In addition to excellent heat resistance, these fibers have achieved a repeatability of 0.06mm for transparent glass substrates. ◾ Extended detection range Now available with full-range detection capabilities containing no dead zones (in both LONG and STD modes). Also, an extended detection distance of 15mm (in LONG mode) has been achieved, which even allows warping in glass substrates to be detected. ◾ Glass substrate sensing High temperature (300°C) production line glass substrate sensing possible. Accurately detects transparent glass substrates even at 300°C. FD-H30-L32 FD-H20-21 FD-H35-20S ◾ Heat-resistant fiber saves installation space The fiber head has M4 screw threads allowing installation space savings when using many fibers. Heat-resistant reflective fiber with M4 head ◾ High-precision positioning is possible The 200°C heat-resistant fiber (FD-H20-21) uses a coaxial fiber that makes high-precision positioning possible. ◾ Heat-resistant fiber with sleeve (FD-H35-20S) The sleeve is useful for cases when the fiber head cannot be installed close to the sensing location. ◾ Can be installed in narrow spaces A flexible metal jacket sheath that allows cables to be routed easily has been adopted. 04/2011 29 Optical Fiber Heads FD-H30-L32 FD-H18-L31 Optical Fiber Heads Optical Fiber Heads FR-KZ21/KZ21E ◾ Stable sensing of transparent objects is possible! A unique optical system gives excellent performance in sensing transparent objects at close ranges. Uses an exclusive reflector (RF-003) for stable sensing of transparent objects such as transparent sheets on transparent mounts and transparent tubes. Sharp bending fiber Now, an even greater variety of sharp bending fibers ◾ Ultra compact fiber head & compact reflector! The fiber head size is ultra compact at W9.52×H5.22×D21mm (side sensing type: W9.52×H252×D5.2mm). The reflector is also a compact W10.62×H282×D10.1mm so that it is very space efficient. ◾ Two types of fiber head for different installation directions Two types of fiber head are available: a Top sensing type (FRKZ21) and a Side sensing type (FR-KZ21E). Whichever type best suits the installation conditions can be selected. FR-WKZ11 ◾ Compact head and long sensing range This fiber has a compact head of W9.5×H5.2×D15mm. It is a retroreflective type with a polarizing filter that has a long sensing range of 3200mm. ◾ Unaffected by surface reflection from transparent objects Narrow beam retroreflective type fiber Ideal for sensing transparent objects! FR-WKZ11 has a built-in polarizing filter in its tip, so that it is unaffected by surface reflection from transparent objects and specular objects directly in front of it. ◾ Gives stable detection of transparent objects Because it is a retroreflective type, light passes through transparent objects twice, so differences in the amount of light can be easily picked up and glass substrate and transparent films can be detected with good stability. 30 04/2011 Optical Fiber Heads FD-G6 FD-G6 ◾ Fiber allows installation space saving FX-MR6 Extremely small chip The fiber head has M3 screw threads, allowing installation space saving when using many fibers. ◾ High-precision positioning is possible This coaxial fiber has the emitting fiber at the center and the receiving fiber around it. This fiber is ideal for high-precision positioning. Coaxial M3 head reflective fiber High-precision & space saving ◾ Allows sensing of very small objects FX-MR6 and FX-MR3 finest spot lenses can be attached making this fiber ideal for sensing very small objects e.g. the orientation of chips. FD-WKZ1 ◾ Compact fiber head FD-WKZ1 has a compact head with dimensions of 9.2×5.2×15mm (W×H×D). ◾ Narrow-view reflective type fiber allows for accurate aiming through narrow aperture obstruction Long sensing range rectangular head reflective fiber Narrow field of view / long distance detection! The beam spread of FD-WKZ1 has been reduced to approximately 1 ⁄ 5 of that of conventional fiber, enabling detection through narrow apertures. ◾ Long sensing range Sensing can now be performed over distances of 480mm. Furthermore, the implementation of a powerful light beam allows the sensor to perform detection under difficult sensing conditions where high levels of dust and coarse particulates are present. View port Wafer Wafer cassette 04/2011 31 Standard Fibers Standard Fibers Optical Fibers for FX 100 Series Thru-beam type (one pair set) Fibers are listed in alphabetic order. Sensing range (mm) Model no. Sensing range (mm) Model no. Standard type FX-101□ Long sensing range type FX-102□ Standard type FX-101□ Long sensing range type FX-102□ FT-A8 1500 3500 FT-PS1 40 90 FT-A30 3500 3500 FT-R80 180 430 FT-AFM2 280 720 FT-SFM2 300 800 FT-SFM2L 760 2400 FT-SFM2SV2 180 470 130 280 FT-AFM2E 240 670 FT-B8 400 1,150 FT-E12 6 19 FT-SNFM2 FT-E22 15 60 FT-T80 300 800 FT-V10 1000 2350 FT-V22 140 380 FT-V41 40 120 FT-V80Y 340 800 FT-W4 80 220 FT-FM2 FT-FM2S 300 800 FT-FM2S4 FT-FM10L 9300 15,000 FT-H13-FM2 250 700 135 420 210 540 150 500 FT-H20-J20-S FT-H20-J30-S FT-H20-J50-S FT-H20-M1 FT-H20-VJ50-S FT-H20-VJ80-S FT-W8 260 650 FT-WA8 1500 3500 FT-WA30 3500 3500 FT-WKV8 700 2200 FT-WR80 215 570 FT-WR80L 430 1150 150 600 FT-H20W-M1 100 300 FT-WS3 FT-H30-M1V-S 110 280 FT-WS4 80 220 FT-WS8 260 650 FT-H35-M2 170 490 FT-WS8L 600 1500 990 2340 FT-WV42 30 80 FT-K8 1000 3000 FT-WZ4 230 670 FT-KV1 135 500 FT-WZ4HB 80 230 FT-H35-M2S6 FT-HL80Y FT-KV8 1000 3000 FT-WZ7 330 1000 FT-L80Y 1100 2600 FT-WZ7HB 190 580 FT-WZ8 330 950 130 280 FT-WZ8E 700 2100 FT-WZ8H 1200 2800 FT-P2 120 330 FT-Z8 360 1000 FT-P40 80 240 FT-Z8E 800 1850 FT-NFM2 FT-NFM2S FT-NFM2S4 FT-P60 130 300 FT-Z8H 1400 3100 FT-P80 230 650 FT-Z802Y 520 3100 FT-P81X 260 800 32 04/2011 Standard Fibers Optical Fibers for FX 100 Series Retroreflective type Fibers are listed in alphabetic order. Sensing range (mm) (Notes 1, 2) Model no. Standard type FX-101□ Long sensing range type FX-102□ FR-KV1 15 to 200 15 to 360 FR-KZ21 200 200 FR-KZ21E 200 200 FR-WKZ11 100 to 550 100 to 830 Amplifier FX-101□ FX-102□ FR-WKZ11 + RF-210 100 to 700 100 to 1100 FR-WKZ11 + RF-220 100 to 1300 100 to 2600 FR-WKZ11 + RF-230 100 to 2000 100 to 4000 Reflector Reflective type Fibers are in alphabetic order. Model no. Sensing range (mm) (Notes 1, 2) Standard type FX-101□ Long sensing range type FX-102□ FD-A15 125 250 FD-AFM2 105 285 Model no. Sensing range (mm) (Notes 1, 2) Standard type FX-101□ Long sensing range type FX-102□ FD-G6 50 120 FD-G6X 45 160 FD-AFM2E 85 245 FD-H13-FM2 100 280 FD-B8 170 440 FD-H18-L31 0 to 10 0 to 25 FD-E12 3.5 13 FD-H20-21 90 280 FD-E22 16 45 FD-H20-M1 FD-EG1 18 50 FD-H30-KZ1V-S (Note 3) FD-EG2 10 30 FD-H30-L32 FD-EG3 7 22 FD-H30-L32V-S (Note 3) 2 to 9 0 to 17 0 to 11 85 200 75 280 FD-L4 5 to 8 (Convergent point 6) 1 to 17 (Convergent point 6) FD-L41 3 to 14 (Convergent point 8) 1.5 to 16 (Convergent point 8) FD-L43 0 to 19 0 to 25 FD-L44 0 to 6 0 to 8 FD-L44S 0 to 4.5 0 to 5.5 FD-L45 0 to 40 0 to 50 FD-L46 16 to 30 12 to 50 35 100 25 65 1 4 FD-H35-20S FD-ENM1S1 15 48 FD-H35-M2 FD-F4 FD-F41 Applicable pipe diameter: Outer dia. ø6 to ø26mm transparent pipe [PVC (vinyl chloride), fluorine resin, polycarbonate, acrylic, glass, wall thickness 1 to 3mm] FD-H35-M2S6 – FD-F8Y FD-FM2 300 10 to 220 2.5 to 6.5 FD-EN500S1 Applicable pipe diameter: Outer dia. ø6 to ø26mm transparent pipe [PFA (fluorine resin) or equivalently transparent pipe, wall thickness 1mm] 120 25 to 80 100 410 FD-FM2S 100 345 FD-FM2S4 FD-NFM2 FD-G4 50 120 FD-NFM2S FD-NFM2S4 FD-P2 04/2011 33 Standard Fibers Standard Fibers Optical Fibers for FX 100 Series Reflective type Fibers are listed in alphabetic order. Sensing range (mm) Model no. FD-P40 Standard type FX-101□ Long sensing range type FX-102□ 8 30 FD-P50 45 150 FD-P60 45 150 FD-P80 90 200 FD-P81X 70 220 FD-R80 70 180 FD-S80 100 345 FD-SFM2SV2 30 90 FD-SNFM2 35 100 FD-T40 35 100 FD-T80 100 345 FD-V41 25 70 FD-W8 80 230 FD-W44 15 40 34 Sensing range (mm) Model no. Standard type FX-101□ Long sensing range type FX-102□ FD-WG4 28 75 FD-WKZ1 20 to 180 20 to 480 FD-WL41 7 to 12 (Convergent point 8) 6 to 13.5 (Convergent point 8) FD-WL48 1 to 4.5 0.5 to 6.5 FD-WS8 80 230 FD-WSG4 28 75 FD-WT4 15 40 FD-WT8 80 230 FD-WV42 6 20 2 to 20 1 to 70 FD-WZ7 1 to 55 160 FD-WZ7HB 1 to 60 0.5 to 180 FD-WZ4 FD-WZ4HB 04/2011 Standard Fibers Optical Fibers for FX 300 Series Thru-beam type (one pair set) Type Shape of fiber head (mm) Lens mountable The FX-305 and FX-301(-HS) have different sensing modes. FX-305: H-SP, FAST, STD, STDF, LONG, U-LG (no S-D mode) FX-301(-HS): S-D, H-SP (Note 1), FAST, STD, LONG (no STDF or U-LG mode) Sensing range (mm) (Note 1) M4 700 530 ◾: U-LG ◾: LONG ◾: STDF ◾: STD ◾: FAST ◾: H-SP ◾: S-D 1600 1100 200 180 400 Min. sensing object Fiber cable length : Free-cut Bending radius ø0.04mm opaque object FT-B8 R25mm Lens mountable FT-FM2 M4 Sleeve 90mm M4 500 400 ø1.48 Sleeve 40mm 1000 780 280 150 130 Fiber R25mm Sleeve FT-FM2S R10 mm R0.394 in FT-FM2S4 R1 mm R0.039 in FT-W8 R4 mm R0.157 Flexiblein FT-P80 R10 mm R0.394 in FT-P81X R4 mm R0.157 Flexiblein FT-P60 2m 2m R1 mm R0.039 in ø0.03mm opaque object M4 2m M4 ø1.48 Lens mountable M4 Lens mountable 750 570 350 290 M4 400 320 Lens mountable M4 380 320 Tough flexible Square head type Elbow M4 M4 650 M4 Lens mountable 750 600 M4 (except FX-LE2) M3 230 100 110 ø0.04mm opaque object 230 100 110 ø0.05mm opaque object 70 80 140 ø0.04mm opaque object 200 90 100 1500 1200 200 210 740 530 320 230 500 400 ø0.03mm opaque object 900 550 400 250 190 W7 × H9 × D14.6 200 90 100 900 750 570 350 290 W7 × H9 × D13.9 With lens 650 Lens mountable 75 80 1000 780 1m ø0.06mm opaque object 420 150 ø0.04mm opaque object ø0.04mm opaque object 280 150 130 FT-WR80 FT-WR80L 2m R25mm ø0.03mm opaque object Sleeve 90mm M3 M3 ø0.88 Sleeve 40mm R25mm FT-NFM2 400 270 200 140 100 55 49 ø0.025mm opaque object M3 2m ø0.88 M3 M3 With lens M14 FT-R80 FT-T80 M3 Long sensing range Threaded type Lens mountable Model no. 220 160 100 80 25 28 350 250 150 100 30 35 Fiber R25mm Sleeve FT-NFM2S R10 mm R0.394 in FT-NFM2S4 R1 mm R0.039 in FT-W4 R4 mm R0.157 Flexiblein FT-P40 R25mm FT-FM10L 55 ø0.02mm opaque object 75 19,500 19,500 19,500 14,000 10,000 3500 3800 ø0.4mm opaque object 10m Pliable fibers (flexible and sharp bending fibers) are marked with light red in the table. 04/2011 35 Optical Fibers for FX 300 Series Thru-beam type (one pair set) Shape of fiber head (mm) Type The FX-305 and FX-301(-HS) have different sensing modes. FX-305: H-SP, FAST, STD, STDF, LONG, U-LG (no S-D mode) FX-301(-HS): S-D, H-SP (Note 1), FAST, STD, LONG (no STDF or U-LG mode) ø3 750 600 ø2.5 500 400 1000 780 280 150 130 ø1.5 ø1 Cylindrical type ø1 50 40 Beam diameter ø0.25 ø3 ø0.125 mm Sleeve part cannot be bent. ø3 Sleeve part cannot be bent. 60 50 80 Side-view ø2.5 Sleeve part cannot be bent. ø1 ø2 Sleeve part cannot be bent. ø1 0.6 18 15 Sleeve part cannot be bent. ø1 ø2 1 Sleeve part cannot be bent. 55 40 FT-SFM2 2m ø0.02mm opaque object ø0.02mm opaque object R1 mm R0.039 in FT-WS8 R25mm FT-SNFM2 R1 mm R0.039 in FT-WS4 FT-P2 Flexible 500mm FT-PS1 500mm 36 FT-E12 R5mm ø0.02mm opaque object 1m 340 350 65 70 410 390 220 180 60 63 120 90 FT-SFM2L R4 mm R0.157 in 550 400 240 200 220 175 100 80 ø2.5 FT-WS3 1m 2350 2000 1400 1000 ø1.5 R1 mm R0.039 in 2m 30 13 17 130 3 2m ø0.025mm opaque object 8 3 3 ø4 0.6 100 90 40 42 20 18 13 10 Model no. FT-WS8L ø0.02mm opaque object 55 25 28 100 80 ø0.02mm opaque object ø0.03mm opaque object 200 90 100 350 280 160 120 ø1.5 580 Bending radius R25mm 55 49 220 160 100 80 ø1.5 Fiber cable Min. sensing object length (Note 2) : Free-cut ø0.05mm opaque object 170 280 400 270 200 140 ø1.5 420 200 90 100 750 570 350 290 ø2.5 0.8 200 210 2000 1600 820 800 


 
  
  ø2.5 ø2.5 ◾: FAST ◾: H-SP ◾: S-D 1500 1200 780 570 340 290 ø3 Beam diameter ø0.4 ø0.25 mm ◾: U-LG ◾: LONG ◾: STDF ◾: STD Sensing range (mm) 


 
  
  ø3 Ultra small diameter Standard Fibers Standard Fibers 800 FT-E22 ø0.05mm opaque object FT-V10 2m 140 FT-SFM2SV2 R25mm 125 60 25 27 1m FT-V22 ø0.02mm opaque object FT-V41 30 13 15 2m R1 mm R0.039 in FT-WV42 Pliable fibers (flexible and sharp bending fibers) are marked with light red in the table. 36 04/2011 Standard Fibers Optical Fibers for FX 300 Series Thru-beam type (one pair set) Type Shape of fiber head (mm) The FX-305 and FX-301(-HS) have different sensing modes. FX-305: H-SP, FAST, STD, STDF, LONG, U-LG (no S-D mode) FX-301(-HS): S-D, H-SP (Note 1), FAST, STD, LONG (no STDF or U-LG mode) Sensing range (mm) (Note 1) %ASYMOUNTINGs4OPSENSING W3 × H8 × D12 %ASYMOUNTINGs3IDESENSING W3 × H12 × D8 700 ◾: U-LG ◾: LONG ◾: STDF ◾: STD ◾: FAST ◾: H-SP ◾: S-D 3500 2500 1600 1200 400 410 3100 2700 1550 1400 420 490 850 1000 2100 1500 950 1850 1600 950 800 420 330 Compact Rectangular %ASYMOUNTINGs&RONTSENSING W8.5 × H12 × D3 700 500 400 Front sensing Fiber bending type W2 × H10 × D10 75 Front sensing W14 × H7 × D3.5 Fiber bending type W3.5 × H14 × D11 950 1100 800 220 150 105 30 30 660 440 308 220 Side-view type with small light dispersion 700 ø4 3 2 ø0.05mm opaque object ø0.03mm opaque object R1 mm R0.039 in 2m FT-Z8H FT-WZ8E R4 mm R0.157 in FT-Z8E Flexible FT-WZ8 300 120 140 ø0.03mm opaque object R4 mm R0.157 in Flexible FT-Z8 ø0.08mm opaque object FT-WZ4 1m 50 ø0.08mm opaque object ø0.08mm opaque object FT-WZ7 2m ø0.03mm opaque object 300 350 2200 1700 1000 FT-WZ4HB R1 mm R0.039 in 150 210 110 110 600 500 300 250 R4 mm R0.157 in Flexible ø0.03mm opaque object FT-WZ8H R1 mm R0.039 in 280 300 3000 2000 1500 1000 W2 × H1.5 × D20 R1 mm R0.039 in Model no. ø0.04mm opaque object 3000 2000 1500 1000 ø3.7 ø0.08mm opaque object Bending radius 240 100 120 80 80 870 580 406 290 600 70 40 40 ø3.5 Narrow beam 250 280 300 200 140 100 W10 × H7 × D2 500 200 210 Fiber cable Min. length sensing object (Note 2) : Free-cut 800 600 300 350 FT-WZ7HB R25mm R0.984 in ø0.06mm opaque object 800 180 90 100 R1 mm R0.039 in 2m ø0.02mm opaque object R25mm R0.984 in FT-K8 FT-WKV8 FT-KV8 R10 mm R0.394 in FT-KV1 R1 mm R0.039 in FT-WA30 R10 mm R0.394 in FT-A30 R1 mm R0.039 in FT-WA8 R10 mm R0.394 in FT-A8 Wide beam Sensing width 32mm W5 × H69 × D20 Wide area sensing Sensing width 11mm Top sensing W5 × H15 × D15 Side sensing W5 × H15 × D15 3500 3500 3500 3500 (Note 3) (Note 3) (Note 3) (Note 3) (Note 4) (Note 4) 3500 3000 3500 ø0.3mm opaque object 2m (Note 3) (Note 3) W4.2 × H31 × D13.5 Array Special Wide area sensing 380 330 3500 3500 3500 1500 850 650 800 590 350 290 1100 1080 750 220 100 115 200 90 100 ø0.25mm opaque object Horizontal:ø0.025mm opaque object Vertical:ø0.45mm opaque object FT-AFM2 2m R25mm FT-AFM2E Pliable fibers (flexible and sharp bending fibers) are marked with light red in the table. 04/2011 37 Optical Fibers for FX 300 Series Thru-beam type (one pair set) Type Shape of fiber head (mm) 350°C Lens mountable M4 Heat-resistant The FX-305 and FX-301(-HS) have different sensing modes. FX-305: H-SP, FAST, STD, STDF, LONG, U-LG (no S-D mode) FX-301(-HS): S-D, H-SP (Note 1), FAST, STD, LONG (no STDF or U-LG mode) Sensing range (mm) (Note 2) ◾: U-LG ◾: LONG ◾: STDF ◾: STD ◾: FAST ◾: H-SP ◾: S-D Fiber cable Min. sensing object length (Note 3) : Free-cut M4 350°C Sleeve 60mm Bending radius R25mm 330 280 550 750 85 90 200 ø0.04mm opaque object 2m Fiber R25mm Sleeve Allows flexible wiring, 200°C Lens mountable M4 M4 130°C Lens mountable (FX-LE2 only) M4 420 310 180 140 320 280 550 440 100 40 50 550 750 85 90 1200 880 200 300 150 155 ø0.02mm opaque object 1m ø0.04mm opaque object 1m R10 mm R0.394 in (EAT RESISTANTs*OINT M4 Special 530 390 225 200 ø0.06mm opaque object 60 60 140 ø0.12mm opaque object FT-H20-J20-S (Note 6) ø4 550 370 280 90 90 200 ø0.16mm opaque object FT-H20-J30-S (Note 6) 300mm (Note 4) Side-view 840 Heat-resistant fiber R18mm (Note 5) 3500 3500 3000 1500 Heat-resistant 115°C 3500 3500 1800 1350 ø5.5 FT-H20-VJ80-S (Note 6) ø5.5 500 400 350 250 150 125 ø4mm opaque object 2m R25mm 900 450 480 3500 3500 2000 1500 ø5.5 300°C Lens mountable (FV-LE1/SV2 only) M4 1000 500 530 1000 500 530 1000 800 90 04/2011 FT-Z802Y FT-HL80Y ø0.2mm opaque object 2m (Note 7) R30mm 280 120 140 50 40 FT-H20-J50-S (Note 6) FT-H20-VJ50-S (Note 6) 500mm (Note 4) 800mm (Note 4) Easy mounting · Rectangular head SEMI S2 compliant W7 × H15 × D13 FT-H20W-M1 FT-H13-FM2 2m 500mm (Note 4) ø3.8 Chemical-resistant FT-H35-M2S6 FT-H20-M1 200mm (Note 4) 38 FT-H35-M2 R25mm Lens mountable (FX-LE1) Side-view Model no. R10 mm R0.394 in ø2.1 200°C Lens mountable Vacuumresistant Standard Fibers Standard Fibers FT-L80Y FT-V80Y ø0.03mm opaque object 1m R1mm FT-H30-M1V-S Standard Fibers Optical Fibers for FX 300 Series Retroreflective type Shape of fiber head (mm) W9.5 × H5.2 × D15 W30 × H30 × D0.5 W9.5 × H5.2 × D21 W10.6 × H28 × D10.1 W9.5 × H25 × D5.2 Sensing range (mm) (Notes 2, 3) 100 to 910 100 to 730 100 to 600 100 to 520 (Note 3) ◾: U-LG ◾: LONG ◾: STDF ◾: STD ◾: FAST ◾: H-SP ◾: S-D 100 to 460 Cannot use Cannot use 200 200 200 200 Fiber cable length Min. sensing object (Note 4) : Free-cut ø0.3mm opaque object 2m R1 mm R0.039 in 2m R10 mm R0.394 in Horizontal:ø5.5mm opaque object 200 200 200 Model no. FR-WKZ11 FR-KZ21 Vertical:ø0.06mm opaque object W10.6 × H28 × D10.1 15 to 370 15 to 330 15 to 240 15 to 210 15 to 170 15 to 80 15 to 90 FR-KZ21E ø0.12mm opaque object 2m R10 mm R0.394 in FR-KV1 W4 × H2 × D21.5 Reflective type Type Shape of fiber head (mm) The FX-305 and FX-301(-HS) have different sensing modes. FX-305: H-SP, FAST, STD, STDF, LONG, U-LG (no S-D mode) FX-301(-HS): S-D, H-SP (Note 1), FAST, STD, LONG (no STDF or U-LG mode) Sensing range (mm) (Notes 1, 2) M6 280 220 ◾: U-LG ◾: LONG ◾: STDF ◾: STD 600 480 ◾: FAST ◾: H-SP ◾: S-D Min. sensing object (Note 3) 85 75 410 310 200 140 Coaxial M6 Fiber cable length : Free-cut 370 270 170 110 M6 ø2.5 Sleeve 40mm M6 FD-B8 FD-FM2 250 190 110 90 300 220 130 100 M6 M6 Elbow Tough flexible 80 270 185 100 M6 85 240 185 110 Fiber R25mm Sleeve 85 45 39 ø0.02mm gold wire ø2.5 M6 25 32 30 35 30 35 25 30 Model no. R25mm 100 55 47 Bending radius 160 Sleeve 90mm M6 Threaded type Bending radius W7.5 × H2.2 × D11.2 Wafer mapping Narrow beam Side sending Sharp bending Top With polarizsending ing filters Type The FX-305 and FX-301(-HS) have different sensing modes. FX-305: H-SP, FAST, STD, STDF, LONG, U-LG (no S-D mode) FX-301(-HS): S-D, H-SP (Note 1), FAST, STD, LONG (no STDF or U-LG mode) 2m FD-FM2S R10 mm R0.394 in FD-FM2S4 R1 mm R0.039 in FD-W8 R4 mm R0.157 in FD-P80 60 70 Flexible 60 1m 60 ø0.02mm gold wire 2m R10 mm R0.394 in FD-P81X R25mm FD-R80 Pliable fibers (flexible and sharp bending fibers) are marked with light red in the table. 04/2011 39 Optical Fibers for FX 300 Series Reflective type Type The FX-305 and FX-301(-HS) have different sensing modes. FX-305: H-SP, FAST, STD, STDF, LONG, U-LG (no S-D mode) FX-301(-HS): S-D, H-SP (Note 1), FAST, STD, LONG (no STDF or U-LG mode) Shape of fiber head (mm) ◾: U-LG ◾: LONG ◾: STDF ◾: STD Sensing range (mm) (Notes 1, 2) 370 270 170 110 M4 45 39 ◾: FAST ◾: H-SP ◾: S-D Fiber cable Min. sensing object length (Note 3) : Free-cut Bending radius Model no. 85 FD-T80 R25mm M4 FD-NFM2 Sleeve 90 mm M4 60 45 ø1.48 140 90 16 16 35 Sleeve 40mm M4 ø1.48 Sleeve 40mm 1.575 in M4 M4 12 4.5 5 250 190 110 90 M4 Minute objects can be detected due to the small spot beam. #OAXIALs,ENSMOUNTABLE 65 37 32 M4 65 55 55 45 M4 Small diameter M3 M3 M3 60 45 M3 M3 ø0.5 Sleeve part cannot be bent. Coaxial M3 48 45 Tough flexible 


  (FX-MR3, FX-MR6) M3 Light emitting fiber element High precision ø0.125 50 38 25 18 15 19 130 90 140 90 R10 mm R0.394 in FD-NFM2S4 150 110 90 15 19 150 20 18 R1 mm R0.039 in FD-WT8 R2 mm R0.079 in FD-WG4 R25mm FD-G4 R4 mm R0.157 in FD-P60 R25mm FD-T40 R1 mm R0.039 in FD-WT4 42 35 2m 42 R4 mm R0.157 in FD-P40 R25mm FD-G6 R10 mm R0.394 in FD-G6X R25mm FD-EG1 Flexible ø0.02mm gold wire 1m (Note 4) 14 5 6 5 2.5 3 FD-W44 60 35 12 20 20 15 9 8 Sleeve R10 mm R0.394 in Flexible 16 16 9 3 5 6.5 5 3 3 2m 30 13 16 40 25 14 12 ø0.8 Sleeve part cannot be bent. 150 110 14 5.5 6 Lens mountable (FX-MR3, FX-MR6) M3 

 
  (FX-MR3, FX-MR6) M3 Light emitting fiber element High precision ø0.175 FD-NFM2S R1 mm R0.039 in 25 10 11 50 36 20 18 Coaxial High precision 25 32 12 4.5 5 65 55 

 
  (FX-MR3, FX-MR6) M3 85 ø0.02mm gold wire 40 30 18 15 Lens mountable (FX-MR3, FX-MR6) M3 Coaxial Fiber R25mm Sleeve Fiber 40 30 18 15 ø1.48 Threaded type Standard Fibers Standard Fibers FD-EG2 ø0.04mm gold wire 500mm R10 mm R0.394 in FD-EG3 2 Cannot use Cannot use 50 38 FD-EN500S1 ø0.02mm gold wire 14 5 6 R25mm 1m FD-ENM1S1 Pliable fibers (flexible and sharp bending fibers) are marked with light red in the table. 40 04/2011 Standard Fibers Optical Fibers for FX 300 Series Reflective type Type The FX-305 and FX-301(-HS) have different sensing modes. FX-305: H-SP, FAST, STD, STDF, LONG, U-LG (no S-D mode) FX-301(-HS): S-D, H-SP (Note 1), FAST, STD, LONG (no STDF or U-LG mode) Shape of fiber head (mm) ø3 ø3 ø3 Coaxial 65 37 32 ø3 ø2.5 ø1.5 30 25 ø0.5 Sleeve part cannot be bent. Side-view ø3 ø2 1 Sleeve part cannot be bent. ø5 ø2 0.8 Sleeve part cannot be bent. 'LASSSUBSTRATEDETECTIONs-APPING W25 × H7.3 × D30 'LASSSUBSTRATEDETECTIONs!LIGNMENT W20 × H29 × D3.8 80 25 32 ◾: FAST ◾: H-SP ◾: S-D 85 ø0.02mm gold wire 30 35 16 16 45 30 25 20 15 8.5 7 65 55 80 55 45 8 9 17 0 to 50 0 to 36 0 to 33 0 to 30 2m 17 15 16 32 16 to 29 Cannot use Cannot use 2m ø0.02mm gold wire 2m ø0.02mm gold wire 2m ø0.3mm gold wire 4m Rectangular Convergent reflective type Glass substrate detection W24 × H21 × D4 W6 × H18 × D14 W7.2 × H7.5 × D2 6.5 to 14.5 (Convergent point 8) 6.5 to 14 (Convergent point 8) 7 to 14 (Convergent point 8) 7 to 12 (Convergent point 8) 2 to 19 (Convergent point 8) 2.5 to 18 (Convergent point 8) 3 to 16 (Convergent point 8) 3 to 16 (Convergent point 8) 2 to 20 (Convergent point 6) 2.5 to 18 (Convergent point 6) 4 to 12 (Convergent point 6) 4 to 12 (Convergent point 6) 0.5 to 8.5 0.5 to 7.5 1 to 6.5 1 to 5.5 R1 mm R0.039 in FD-WS8 R2 mm R0.079 in FD-WSG4 R4 mm R0.157 in FD-P50 R25mm FD-SNFM2 R4 mm R0.157 in FD-P2 Flexible R10 mm R0.394 in FD-E12 R25mm FD-E22 R25mm FD-V41 R1 mm R0.039 in FD-WV42 R25mm FD-SFM2SV2 R25mm FD-L46 FD-L45 R4 mm R0.157 in FD-L43 2m 0 to 23 W12 × H19 × D3 FD-S80 3m (LCD glass) W17 × H29 × D3.8 0 to 8.2 0 to 7 0 to 6.5 0 to 6 0 to 4.7 0 to 4.5 0 to 4 0 to 4 R25mm Flexible ø0.02mm gold wire 0 to 30 0 to 15 0 to 21 'LASSSUBSTRATEDETECTIONs!LIGNMENT 'LASSSUBSTRATEDETECTIONs Seating confirmation 1m ø0.02mm gold wire Cannot use Cannot use 12 to 50 12.5 to 37.5 15 to 36 15 to 35 ø0.02mm gold wire 1m 5 170 100 2m ø0.02mm gold wire 8 7 Model no. 2m ø0.02mm gold wire ø0.02mm gold wire 4 2 1 28 23 2m Bending radius 60 25 10 11 13 16 Fiber cable Min. sensing object length (Note 3) : Free-cut ø0.02mm gold wire 19 7.5 9 15 11 8 6 Coaxial ø3 ø0.65 Sleeve part cannot be bent. Small diameter ø1.5 0.7 ø3 Sleeve part cannot be bent. 50 45 39 140 90 60 45 ø1.5 Ultra small diameter Cylindrical type 55 45 ø1.5 370 270 170 110 250 190 110 90 85 130 90 ø3 ø2.5 ◾: U-LG ◾: LONG ◾: STDF ◾: STD Sensing range (mm) (Notes 1, 2) 0 to 5.7 0 to 5 0 to 5.2 FD-L44 ø0.03mm gold wire 0 to 3.8 0 to 3 0 to 3.5 FD-L44S 7.5 to 12 (Convergent point 8) Cannot use Cannot use 3.5 to 15 (Convergent point 8) Cannot use Cannot use 4.5 to 11 (Convergent point 6) 5 to 8.5 (Convergent point 6) 4.8 to 9.5 (Convergent point 6) 1 to 5 Cannot use Cannot use 2m R10 mm R0.394 in ø1.9mm metal pipe (gray) 2m ø0.06mm gold wire 2m ø0.02mm gold wire 2m ø0.3mm copper wire 1m R1 mm R0.039 in FD-WL41 FD-L41 R10 mm R0.394 in FD-L4 R1 mm R0.039 in FD-WL48 Pliable fibers (flexible and sharp bending fibers) are marked with light red in the table. 04/2011 41 Optical Fibers for FX 300 Series Reflective type The FX-305 and FX-301(-HS) have different sensing modes. FX-305: H-SP, FAST, STD, STDF, LONG, U-LG (no S-D mode) FX-301(-HS): S-D, H-SP (Note 1), FAST, STD, LONG (no STDF or U-LG mode) FX-305 / FX-301 (Red LED type) sensing range (Note 1) Type Shape of fiber head (mm) Front sensing W10 × H7 × D2 Small Rectangular Fiber bending type W2 × H10 × D10 Fiber bending type Long sensing range W3.5 × H14 × D11 Wide beam Sensing range (mm) (Notes 1, 2) 1 to 50 1.5 to 34 2 to 24 3 to 17 ,ONGSENSINGRANGEs2ECTANGULARHEAD W5.2 × H9.5 × D15 W7 × H15 × D30 120 1 to 84 1 to 60 ◾: U-LG ◾: LONG ◾: STDF ◾: STD ◾: FAST ◾: H-SP ◾: S-D Fiber cable Min. sensing object length (Note 3) : Free-cut Bending radius Model no. 3 to 10 Cannot use Cannot use 1 to 70 1 to 46 1 to 32.2 2.5 to 23 Front sensing W14 × H7 × D3.5 FD-WZ4 ø0.16mm copper wire 2.5 to 15 3 to 7 3 to 7 200 1m FD-WZ4HB R1 mm R0.039 in 1.5 to 35 2.5 to 18 2.5 to 18 0.5 to 270 0.5 to 180 1 to 126 1 to 90 FD-WZ7 ø0.03mm gold wire 1 to 70 1 to 35 1 to 35 20 to 660 20 to 480 20 to 300 20 to 230 230 200 150 150 FD-WZ7HB 20 to 170 25 to 90 25 to 100 100 45 50 2m ø0.3mm copper wire 2m ø0.02mm gold wire 2m R1 mm R0.039 in FD-WKZ1 R25mm FD-A15 Array Top sensing W5 × H20 × D20 Side sensing 290 220 135 110 35 39 FD-AFM2 78 ø0.02mm gold wire 2m R25mm FD-AFM2E W5 × H20 × D20 2m (Note 5) Protective tube R40mm Fiber R15mm 2m R10 mm R0.394 in Contact type — -OUNTABLEONPIPEs3TANDARD Liquid level sensing Special ø6 W25 × H13 × D20 




A, wall thickness 1 mm pipe W25 × H13 × D20 Mountable on pipe SEMI S2 compliant W23 × H20 × D17 Liquid leak detection Standard Fibers Standard Fibers Applicable pipe diameter: Outer dia. ø6 to ø26mm transparent pipe PVC (vinyl chloride), fluorine resin, polycarbonate, acrylic, glass, wall thickness 1 to 3mm (Liquid) Applicable pipe diameter: Outer dia. ø6 to ø26mm transparent pipe PFA (fluorine resin) or equivalently transparent pipe, wall thickness 1mm Applicable pipe diameter: Outer dia. ø3 to ø10mm transparent pipe PFA (fluorine resin) or equivalently transparent pipe, wall thickness 0.3 to 1mm FD-F41 FD-F4 (Liquid) Protective tube R20mm Fiber 2m SEMI S2 compliant (Liquid) — W20 × H30 × D10 FD-F8Y 5m (Protective tube: 3m) FT-F902 R4 mm R0.157 in Protective tube R20mm Fiber FD-F705 R4 mm R0.157 in Pliable fibers (flexible and sharp bending fibers) are marked with light red in the table. 42 04/2011 Standard Fibers Optical Fibers for FX 300 Series Reflective type Type The FX-305 and FX-301(-HS) have different sensing modes. FX-305: H-SP, FAST, STD, STDF, LONG, U-LG (no S-D mode) FX-301(-HS): S-D, H-SP (Note 1), FAST, STD, LONG (no STDF or U-LG mode) Shape of fiber head (mm) Sensing range (mm) (Notes 1, 2) ◾: U-LG ◾: LONG ◾: STDF ◾: STD ◾: FAST ◾: H-SP ◾: S-D Fiber cable Min. sensing object length (Note 3) : Free-cut  #s#OAXIAL M6  #s Sleeve 60mm M6 300 270 150 140 ø2.8 2m 100 35 47 Heat-resistant Special M4 80 80 ø2.1 300 270 150 140  #s#OAXIAL M4 ª#s'LASSSUBSTRATEDETECTION Convergent reflective type W19 × H27 × D5 ª#s'LASSSUBSTRATEDETECTION Convergent reflective type W19 × H27 × D 0 to 20 0 to 15 0 to 10 0 to 10 1 to 8 R25mm FD-H35-M2 Fiber R25mm Sleeve FD-H35-M2S6 R25mm FD-H20-M1 Fiber R25mm Sleeve FD-H35-20S R10 mm R0.394 in 100 FD-H20-21 Cannot use 2m 2 to 6 FD-H30-L32 R25mm  #s2ECTANGULARHEAD W9.5 × H5.2 × D15 W19 × H5 × D27 1m ø0.02mm gold wire 35 47 1 to 8 Cannot use FD-H18-L31 2 to 6 410 310 200 140 ª#s'LASSSUBSTRATEDETECTION Convergent reflective type 57 20 26 0 to 20 0 to 15 0 to 10 0 to 10 130°C M6 Vacuum-resistant 190 160 Model no. R10 mm R0.394 in  #s#OAXIAL M6  #s Sleeve 90mm Bending radius 20 to 300 20 to 200 20 to 150 25 to 130 0 to 11 0 to 8 1.5 to 6 1.5 to 5 Accessories (attached with fibers) sRF-003 (FR-KZ21/KZ21E exclusive reflector) sRF-13 (Reflective tape) sFX-CT1 (Fiber cutter) sFX-CT2 (Fiber cutter) sFX-AT2 (Attachment for fixed-length fiber, Orange) sFX-AT3 (Attachment for ø2.2mm fiber, Transparent orange) sFX-AT4 (Attachment for ø1mm fiber, Black) sFX-AT5 (Attachment for ø1.3mm fiber, Gray) sFX-AT6 sAttachment for ø1mm / ø1.3mm mixed fiber, Black / Gray 2m 100 55 47 FD-H13-FM2 30 to 100 Cannot use Cannot use 1m ø0.8mm gold wire 2 to 4 Cannot use Cannot use sRF-003 R18mm 3m sRF-13 FD-H30-KZ1V-S FD-H30-L32V-S sFX-CT1 sFX-CT2 sFX-AT2 sFX-AT3 sFX-AT4 sFX-AT10 sFX-AT13 sFX-AT15 sFX-AT5 sFX-AT6 If connecting to the FX2 / FX3 series sFX-AT10 (Attachment for ø1mm fiber) sFX-AT13 (Attachment for ø1.3mm fiber) sFX-AT15 sAttachment for ø1mm / ø1.3mm mixed fiber 04/2011 43 Standard Fibers Standard Fibers Accessories for the FX 300 Series Accessories for retroreflective fiber optics Figure Description Effective distance expanded 5 times or more; Ambient temperature: -60°C to +350°C Tremendously increases the sensing range with large diameter lenses Ambient temperature: -60°C to +350°C Beam axis is bent by 90° Ambient temperature: -60°C to +350°C Sensing range increases by 15 times or more Ambient temperature: -40°C to +120°C * ** 44 Fiber optics Sensing range* Sensing range** FT-B8 2500 3500 FT-FM2 3500 3500 FT-T80 3500 3500 FT-R80 2300 3500 FT-W8 2900 3500 FT-P80 3500 3500 FT-P60 3500 3500 FT-H35M2 2000 3500 FT-H20WM1 1300 1600 FT-H20WM2 1300 3500 FT-H20M1 1600 1000 FT-B8 3500 3500 FT-FM2 3500 3500 FT-T80 3500 3500 FT-R80 3500 3500 FT-W8 2900 3500 FT-P80 3500 3500 FT-P60 3500 3500 Model no. FX-LE1 FX-LE2 FT-H35M2 3500 3500 FT-H20WM1 1600 1600 FT-H20WM2 3500 1600 FT-H20M1 1600 1600 FT-H13 3500 1600 FT-B8 530 1100 FT-FM2 600 1200 FT-T80 600 1200 FT-W8 450 900 FT-P80 600 1200 FT-P60 300 650 FX-SV1 FT-H35M2 280 550 FT-H20WM1 140 310 FT-H20WM2 140 310 FT-H20M1 280 550 FT-6V 2700 3500 FT-60V 1450 3500 FV-LE1 Refers to response time “Standard” Refers to response time “Ultralong” 04/2011 Standard Fibers Accessories for the FX Series Accessories for retroreflective fiber optics Effective distance (with FX-301) Figure Description Model no. Fiber Screw-in depth Spot diameter FD-WG4 6mm ± 1mm Ø 0.5mm Pinpoint spot of Ø 0.5mm enables detection of minute objects or small marks Applicable fibers: FD-WG4 / FD-G4 Ambient temperature: - 40°C to + 70°C FX-MR1 FD-G4 6mm ± 1mm Ø 0.5mm Effective distance (with FX-301) Figure Description Fiber Screw-in depth FD-WG4 The spot diameter is adjustable from 0.7mm to Ø2mm according to how far the fiber is screwed in. Ambient temperature: - 40°C to + 70°C Sensing width Screw-in depth Sensing width Spot diameter 7mm approx. 18.5mm Ø 0.7mm 12mm approx. 27mm Ø 1.2mm 14mm approx. 43mm Ø 2.0mm 7mm approx. 18.5mm Ø 0.7mm 12mm approx. 27mm Ø 1.2mm 14mm approx. 43mm Ø 2.0mm Model no. FX-MR2 FD-G4 Spot diameter Effective distance (with FX-301) Figure Description Fiber Screw-in depth Sensing width Spot diameter 8mm approx. 13mm Ø 0.5mm FD-WG4 10mm approx. 15mm Ø 0.8mm Screw-in depth FX-MR2 is converted into a side sensing type and can be mounted in a very small space. Ambient temperature: - 40°C to + 70°C Sensing width 14mm approx. 30mm Ø 3.0mm 8mm approx. 13mm Ø 0.5mm 10mm approx. 15mm Ø 0.8mm 14mm approx. 30mm Ø 3.0mm Model no. FX-MR5 FD-G4 Spot diameter Effective distance (with FX-301) Figure Description Extremely fine spot of approx. Ø 0.3mm achieved Ambient temperature: - 40°C to + 70°C Sensing width Spot diameter Model no. Fiber Screw-in depth Spot diameter FD-WG4 7.5mm ± 0.5mm Ø 0.5mm FD-G4 7.5mm ± 0.5mm Ø 0.5mm FD-EG1 7.5mm ± 0.5mm Ø 0.3mm FD-EG3 7.5mm ± 0.5mm Ø 0.15mm FX-MR3 Effective distance (with FX-301) Figure Description Extremely fine spot of approx. Ø 0.3mm achieved Ambient temperature: - 40°C to + 70°C Sensing width Spot diameter Model no. Fiber Screw-in depth Spot diameter FD-WG4 7mm ± 0.5mm Ø 0.4mm FD-G4 7mm ± 0.5mm Ø 0.4mm FD-EG1 7mm ± 0.5mm Ø 0.2mm FD-EG3 7mm ± 0.5mm Ø 0.1mm FX-MR6 04/2011 45 FD-L40 Sensors for Semiconductor / FPD Industry FD-L40 Fibers for liquid crystal display industry Features Mapping Fiber Variety of glass substrates FD-L46 FD-L46 The adoption of a unique large lens allows even thin glass substrates to be sensed directly from the side. In addition, due to the wide sensing range (25±12.5mm), stable mapping is possible even if glass substrates are in irregular positions. Large light amounts can be obtained for a variety of glass edge shapes such as R surfaces and C surfaces, so that accurate mapping of glass substrates inside cassettes is possible. Glass that has received black or yellow masking can also be sensed in addition to clear glass. Alignment fiber FD-L43 / FD-L45 Increases in size of glass substrates mean greater amounts of flexure, but a single fiber can sense glass even if horizontal flexure is within ±8° (FD-L45% ± 6°). A sensing range of 3 to 17mm (FDL45: 10 to 25mm) and a positioning error of 0.2mm or less makes higher precision sensing possible 0.5mm glass substrates can also be sensed 12.5 mm 12.5 mm Fiber head 25mm (At LONG mode) Technical Specifications Applicable amplifiers: Sensing range (Note 1): FX-100/301/305/311/411 series red LED type FD-L46 12.5 to 37.5mm (LONG mode) FD-L43 0 to 23mm (STD mode) FD-L44 0 to 7mm (LONG mode) FD-L44S 0 to 4.5mm (LONG mode) FD-L45 0 to 36mm (LONG mode) FD-WL48 0.5 to 7.5mm (LONG mode) Allowable bending radius: FD-L46 R25mm or more, FD-L45 / FD-L43 R4mm or more FD-L44(S) R10mm or more, FD-WL48 R1mm or more Fiber cable length: FD-L46 4m (free-cut), FD-L43/44(S) 2m (free-cut) FD-L45 3m (free-cut), FD-WL48 1m (free-cut) 46 04/2011 Seating confirmation fiber FD-L44 / FD-L44S / FD-WL48 Long sensing range of 0 to 7mm for seating confirmation. Sensing is even possible if absorption pads are present. SENSORS FOR SEMICONDUCTOR / FPD INDUSTRY FT/FD-V FT/FD-V Vacuum resistant fiber Features ◾ Usable in high temperatures of 300°C and vacuum Highly reliable sensing of objects is possible even after high-temperature processing used in FPD manufacturing. ◾ Compact routing Photo-terminal Vacuum resistant fiber Leakage 1.33⳯10ⳮ10Pa䡠m3/s [He] We have realized a bending radius of R18mm. 1/2 previous amount Free-cut 300°C high temperature resistance 2.5 times previous previous level level Atmospheric side fiber cable Fiber cutter Vacuum side Atmospheric side ◾ Highly durable It can be bent over 100,000 times (at R20mm). Technical Specifications Applicable amplifiers: FX-100/301/305/311/411 series Sensing range (at LONG mode of red LED type): FT-H30-M1V 250mm FD-H30-KZ1V 20 to 200mm FD-H30-L32V 0 to 8mm Allowable bending radius: FD-L46 R25mm or more, FD-L45 / FD-L43 R4mm or more FD-L44(S) R10mm or more, FD-WL48 R1mm or more Fiber cable length: FD-L46 4m (free-cut), FD-L43/44(S) 2m (free-cut) FD-L45 3m (free-cut), FD-WL48 1m (free-cut) 04/2011 47 EX-F70/F60 Sensors for Semiconductor / FPD Industry EX-F70/F60 High-speed detection of even small liquid leaks Features ◾ Reliable detection The unique effect of capillarity enables reliable detection of small leaks and viscous liquids. ◾ PFA enclosure gives excellent chemical resistance Accurate sensing can be obtained even if there are leaks of chemicals such as sulfuric acid, hydrochloric acid or ammonia ◾ Safe design Liquid Sensor body If the sensor is installed incorrectly, the cable breaks or a sensor problem occurs, the same output is used as for a liquid leak. This guards against human error in setup that might occur during maintenance. ◾ Compact, space-saving Leakage pan The EX-F70 series is a slim (10mm) side mounting sensor. The EX-F60 series is compact at 26×19×9mm (W×H×D), so that it can be used even in narrow spaces. Technical Specifications EX-F7□ Water, Fluorinert™ Sensing object: EX-F6□Agent, such as sulfuric acid, hydrochloric acid, phosphoric acid or ammonia etc. Supply voltage: 12 to 24V DC±10% Output: EX-F7□/F6□ NPN open-collector transistor EX-F7□/F6□-PNP open-collector transistor Response time: 50ms or less Emitting element: Infrared LED (non-modulated) 48 04/2011 FR-KV1 FR-KV1 Wafer mapping fiber Features ◾ Retroreflective type: new concept ◾ Thru-beam type: ultra compact size A 2.0mm fiber head and an ultrathin 2.2mm reflector allow these sensors to be mounted even in thin robot hands. Since they are retroreflective type fibers, the amount of wiring needed can be reduced, and the robot hands require less processing and so can be kept strong. A heat-resistant type that can resist heat of +105°C is also available. The ultra compact size of 2×1.52×20mm (W×H×D) means that mounting is possible even in places such as robot hands where space is limited. Furthermore, a heat-resistant type that can resist heat of +105°C is also available. 7.5mm 2mm 21.5mm 2mm 20mm 2.2mm 2mm 4mm 1.5mm FT-KV1 fiber can be embedded into a plate with a thickness of 2mm. Technical Specifications Applicable amplifiers: FX-100/301/305/311/411 series Sensing range: (at LONG mode of red LED type) Retroreflective type 15 to 330mm (Note: thru-beam type 500mm) Allowable bending radius: R10mm or more Fiber cable length: 2m (free-cut) 04/2011 49 FD-F705 Fiber Heads FD-F705 A new slim fiber sensor ideal for sensing chemical leaks Features ◾ Reliable detection ◾ Compact, space-saving The unique effect of capillarity enables reliable detection of small leaks and viscous liquids. This slim (10mm) side-mounting sensor is especially well suited for use in confined spaces. Fiber head Liquid 10mm Leakage pan ◾ Ideal for chemicals and volatile materials This fiber type sensor is safe to use with volatile materials (SEMI S2 compliant). The PFA (fluorine resin) fiber head makes it ideal for use with chemicals. Technical Specifications Applicable amplifiers: FX-301-F, FX-301P-F Sensing object: Liquid Fiber cable length: 5m (free-cut) Protective tube length: 3m Dimensions (W×H×D): 20×30×10mm Notes: 1) FluorinertTM is the worldwide TradeMark of 3M. 50 04/2011 FT-F902 FT-F902 Reliably detect liquid in pipes Features ◾ Safe fiber type sensor ◾ Worry-free design that doesn’t overlook liquid-absent condition and sensor malfunction Because it is a fiber sensor, it is safe to use in dangerous areas where there is a risk of fire or explosion. It meets the stringent demands for higher safety levels placed by international standards including SEMI S2. When liquid is present in the pipe, the lens effect of the liquid condenses the beam so that the sensor is in beam receiving condition. ◾ Easy to use and reliable detection Even when shape and thickness of the pipe vary, this sensor uses a method where the beam axis follows the diameter of the pipe, and so, when compared to conventional methods, the shape and thickness of the pipe have no influence on the performance of this sensor. ◾ Reliable detection not affected by bubbles or droplets Liquid present Liquid absent Beam-receiving signal High Beam-receiving signal Low Problems encountered by conventional pipe-mountable sensors, such as bubbles, droplets or liquid leakage, have been solved using the latest optical fiber techniques. Technical Specifications Applicable amplifiers: FX-301-F, FX-301P-F Sensing object: Liquid Applicable pipe diameter: Outer dia. ∅3.0 to ∅10.0mm Fiber cable length: 2m (free-cut) Protective tube length: 1m Dimensions (W×H×D): 23×17×20mm 04/2011 51 M18-L Laser Sensors M18-L Thru-beam and retroreflective laser sensors Features Technical Specifications ◾ Great lineup of 48 models The M18-L series offers all optical functions in an M18 housing. The visible laser light spot makes the sensor simple to align. It is easy to install and requires little space due to its ultracompact size. ▪ Available types: thru-beam laser sensor up to 60m, retroreflective type up to 16m, diffuse reflective type up to 350mm ▪ Complete range of optic functions, laser class 1 NPN-Output M18-LT5000[R]-[M/P]-[J] M18-LT6000[A]-[M/P]-[J] M18-LP0900[R]-[M/P]-[J] M18-LP1600[A]-[M/P]-[J] PNP-Output M18-LT5000[R]-[M/P]PN-[J] M18-LT6000[A]-[M/P]PN-[J] M18-LP0900[R]-[M/P]PN-[J] M18-LP1600[A]-[M/P]PN-[J] Thru-beam Retroreflective Sensor type Maximum operation distance ▪ Flat plastic tubular housing for improved versatility, or metal cylindrical housing Sensing range ▪ Cable or M12 connection Sensing object Radial Axial Radial Axial 50m 60m 9m 16m 0 to 50m 0 to 60m 0.1 to 9m 0.1 to 16m Metal, black Ø 10mm ▪ NPN or PNP Detectable target ▪ Radial and axial versions Hysteresis Ø 5mm Opaque Opaque, translucent – Response time 333μs Output Max. 100mA Emitting element Red semiconductor laser, 650nm (class 1) Emitter: max. 35mA Current consumption without load Max. 35mA Receiver: max. 30mA Metal version: nickel-plated brass Typical Applications Material Plastic version: PBT Lens: PMMA Protection Dimensions (H×W×D) IP67 Cable type: M18×89mm Cable type: M18×77mm Cable type: M18×89mm Cable type: M18×77mm Connector type: M18×93.5mm Connector type: M18×81.5mm Connector type: M18×93.5mm Connector type: M18×81.5mm Connection Supply voltage Ambient temperature Weight Packaging Precise object detection ;2=2ADIALs;!=!XIAL [P] = Plastic ;-=-ETALs;0.=0.0 [J] = M12 connector * Reflector not included 52 04/2011 Cable 2m or M12 connector 10 to 30V DC Operation: −10 to +50°C, storage: −25 to +70°C Cable type: Emitter and receiver each approx. 75g Connector type: Emitter and receiver each approx. 25g Cable type: approx. 75g (plastic version) or approx. 110g (metal version) Connector type: Approx. 25g (plastic version) or approx. 60g (metal type) LASER SENSORS M18-L Reflective laser sensors Typical Applications Technical Specifications NPN-output M18-LD0025-R-[M/P]-[J] M18-LD0035-A-[M/P]-[J] PNP output M18-LD0025-R-[M/P]-PN-[J] M18-LD0035-A-[M/P]-PN-[J] Reflective Sensor type Maximum operation distance Sensing range Radial Axial 250mm 350mm 0 to 250mm 0 to 350mm Spot diameter 0.3mm at 50mm Paper, white Control of sag Sensing object 100×100mm Detectable target Opaque, translucent Hysteresis ˜Þ ΣÇ{ÊiÕi˜ÊäÎÉ££