SH-72

Glass Substrate Detection Sensor M-DW1 SENSORS FOR SEMICONDUCTOR INDUSTRY SH-72 Optimum sensing capability for LCD manufacturing SH-72 M FD-L43 Glass Substrate / Wafer Sensing HD-T1 FT-F9 FX-301-F FD-F7 EX-F70/F60 Liquid Leak / Liquid Level Sensing Amplifier-separated Reliable detection of glass substrates No null zone Its unique optical system enables detection of transparent glass plate, as well as, film deposite glass plates at the same sensing distance. The sensor can reliably detect a glass substrate right in front of it. Sensing range 0.5 to 7.5 mm 0.020 to 0.295 in Glass substrate Glass substrate Beamemitting part Beamreceiving part High precision Not affected by background Repeatability: 0.03 mm 0.001 in Because it is convergent reflective type, a glass substrate is reliably detected without any effect of background objects. Background object 0.03 mm 0.001 in 564 Glass substrate Glass substrate Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com APPLICATIONS Detecting transparent glass substrates in a cassette Detecting a wafer SENSORS FOR SEMICONDUCTOR INDUSTRY SH-72 Wafer M-DW1 Cassette Transparent glass substrate Glass Substrate / Wafer Sensing FD-L43 M SH-72 SH-72 SH-72 ORDER GUIDE Sensor head Appearance Convergent reflective Type Sensing range 0.5 to 7.5 mm 0.020 to 0.295 in with transparent glass plate ( Model No. SH-72 ) Model No. Supply voltage Output Two NPN open-collector transistor outputs sensing output and self-diagnosis output SU-7 ( Two PNP open-collector transistor outputs sensing output and self-diagnosis output SU-7P ( SU-75 SU-77 12 to 24 V DC 10 % Two NPN open-collector transistor outputs sensing output and self-diagnosis output ( Response time External synchronization function ) )( ON-delay / OFF-delay timer (variable 0 to 5 sec.) 0.6 ms or less 0.8 ms or less when the interference prevention function is used ) ( Incorporated Either gate trigger or edge trigger is selectable SS-A5 ( ) ON-delay / OFF-delay timer (variable 0 to 5 sec.) ) SU-79 Two NPN open-collector transistor outputs sensing output and self-diagnosis output Timer function 1 ms or less Approx. 40 ms fixed OFF-delay timer ) Accessories • MS-DIN-2 (Amplifier mounting bracket for SU-7 series) • MS-DIN-1 (Amplifier mounting bracket for SS-A5) Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com 565 Liquid Leak / Liquid Level Sensing EX-F70/F60 FD-F7 FX-301-F FT-F9 NPN output PNP output External Remote External sensitivity sensitivity synchronization selection type setting type input type Standard type Appearance Manually sensitivity set type Automatic sensitivity setting Type HD-T1 Amplifiers SENSORS FOR SEMICONDUCTOR INDUSTRY SH-72 SPECIFICATIONS Sensor head Type M-DW1 Item Model No. Applicable amplifiers SH-72 SU-7 series, SS-A5 Sensing range 0.5 to 7.5 mm 0.02 to 0.295 in (with transparent glass plate) Sensing object  24 mm 0.945 in or more transparent glass, aluminum-evaporated mirror, etc. 5 % or less of operation distance Hysteresis Repeatability (along sensing axis) Environmental resistance Ambient temperature Ambient humidity 10 to60 C 14 to140 F (No dew condensation or icing allowed), Storage 10 to60 C 14 to140 F 35 to 85 % RH, Storage: 35 to 85 % RH Ambient illuminance Sunlight: 11,000 ?x at the light-receiving face, Incandescent light: 3,500 ?x at the light-receiving face Vibration resistance 10 to 55 Hz frequency, 1.5 mm 0.059 in amplitude in X, Y and Z directions for two hours each Shock resistance Emitting element Material Cable Cable extension Weight 0.03 mm 0.001 in or less 500 m/s2 acceleration (50 G approx.) in X, Y and Z directions for three times each Infrared LED (modulated) Enclosure: Polycarbonate 0.089 mm2 single core two parallel shielded cables, 3 m 9.843 ft long Extension up to total 5 m 16.404 ft is possible with an equivalent cable. 25 g approx. FT-F9 FD-F7 FX-301-F EX-F70/F60 Liquid Leak / Liquid Level Sensing HD-T1 SH-72 M FD-L43 Glass Substrate / Wafer Sensing Convergent reflective 566 Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com SPECIFICATIONS Amplifiers Slim body with automatic sensitivity setting amplifier SU-7 (Note) SU-7P (Note) Output operation 35 mA or less NPN open-collector transistor • Maximum sink current: 100 mA • Applied voltage: 30 V DC or less (between sensing output and 0 V) • Residual voltage: 1 V or less (at 100 mA sink current) 0.4 V or less (at 16 mA sink current) Output operation 40 mA or less PNP open-collector transistor • Maximum source current: 100 mA • Applied voltage: 30 V DC or less (between sensing output and V) • Residual voltage: 2.0 V or less (at 100 mA source current) 1.0 V or less (at 16 mA source current) Selectable either Light-ON or Dark-ON with the ON and OFF buttons Short-circuit protection Self-diagnosis output SS-A5 12 to 24 V DC10 % Ripple P-P 10 % or less Current consumption Sensing output M-DW1 Model No. Supply voltage NPN open-collector transistor • Maximum sink current: 100 mA • Applied voltage: 30 V DC or less (between sensing output and 0 V) • Residual voltage: 1.5 V or less (at 100 mA sink current) 0.4 V or less (at 16 mA sink current) Selectable either Light-ON or Dark-ON with the operation mode switch Incorporated NPN open-collector transistor • Maximum sink current: 50 mA • Applied voltage: 30 V DC or less (between self-diagnosis output and 0 V) • Residual voltage: 1 V or less (at 50 mA sink current) 0.4 V or less (at 16 mA sink current) PNP open-collector transistor • Maximum source current: 50 mA • Applied voltage: 30 V DC or less (between self-diagnosis output and V) • Residual voltage: 2.0 V or less (at 50 mA source current) 1.0 V or less (at 16 mA source current) NPN open-collector transistor • Maximum sink current: 50 mA • Applied voltage: 30 V DC or less (between self-diagnosis output and 0 V) • Residual voltage: 1 V or less (at 50 mA sink current) 0.4 V or less (at 16 mA sink current) ON under unstable sensing condition (restored automatically after 40 ms approx.), or if the sensing output is short-circuited (restored when short-circuit is rectified) ON under stable sensing condition 0.6 ms or less (0.8 ms or less when the interference prevention function is used) 1 ms or less HD-T1 Item Manually sensitivity set amplifier PNP output Short-circuit protection Response time Red LED (lights up when the sensing output is ON) Operation indicator Stability indicator Green LED (lights up under stable light received condition or stable dark condition) (Refer to the SU-7 series p.392l for details) Sensitivity adjuster Incorporated (Two units of sensors can be mounted close together.) ON-delay / OFF-delay timer (variable 0 to 5 sec.) (Either gate trigger or edge trigger is selectable with SU-75) Ambient temperature 10 to55 C 14 to131 F, Storage:20 to70 C 4 to158 F Environmental resistance External synchronization function Ambient humidity Voltage withstandability Green LED up under stable light received ( lights ) condition or stable dark condition Continuously variable twin adjusters Interference prevention function Timer function Approx. 40 ms fixed OFF-delay timer, selectable either effective or ineffective 25 to60 C 13 to140 F, Storage:30 to70 C 22 to158 F 35 to 85 % RH (No dew condensation or icing allowed), Storage: 35 to 85 % RH 1,000 V AC for one min. between all supply terminals connected together and enclosure Insulation resistance 20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure 20 MΩ, or more, with 500 V DC megger between all supply terminals connected together and enclosure Vibration resistance 10 to 150 Hz frequency, 0.75 mm 0.030 in amplitude in X, Y and Z directions for two hours each 10 to 55 Hz frequency, 1.5 mm 0.059 in amplitude in X, Y and Z directions for two hours each Shock resistance 100 m/s2 acceleration (10 G approx.) in X, Y and Z directions for five times each 100 m/s2 acceleration (10 G approx.) in X, Y and Z directions for three times each Material Enclosure: Heat-resistant ABS Cover: Polycarbonate Cable lock lever: PPS Enclosure: Heat-resistant ABS Cover: Polycarbonate Cable 0.2 mm2 4-core cabtyre cable, 2 m 6.562 ft long 0.2 mm2 4-core cabtyre cable, 3 m 9.843 ft long Weight 65 g approx. 120 g approx. Accessories Glass Substrate / Wafer Sensing FD-L43 M SH-72 NPN output MS-DIN-2 (Amplifier mounting bracket): 1 pc. MS-DIN-1(Amplifier mounting bracket): 1 pc. Adjusting screwdriver: 1 pc. Adjuster cap: 1 pc. Note: Refer to p.392 for details of other SU-7 series amplifiers. Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com 567 Liquid Leak / Liquid Level Sensing EX-F70/F60 FD-F7 FX-301-F FT-F9 Type SENSORS FOR SEMICONDUCTOR INDUSTRY SH-72 SENSORS FOR SEMICONDUCTOR INDUSTRY SH-72 I/O CIRCUIT AND WIRING DIAGRAMS SU-7 Wiring diagram Color code Sensor circuit Load Black Load (Black) Sensing output ZD1 Tr1 ZD2 Brown (Brown)V D Load 100 mA max. (Orange) Self-diagnosis output Tr2   12 to 24 V DC 10 % Load Orange   12 to 24 V DC 10 % 50 mA max. (Blue) 0 V Internal circuit Blue Users’ circuit Symbols ... D: Reverse supply polarity protection diode ZD1, ZD2: Surge absorption zener diode Tr1, Tr2 : NPN output transistor SU-7P I/O circuit diagram Wiring diagram Color code Sensor circuit D Tr1 Brown (Brown)V Black (Black) Sensing output 100 mA max. Tr2 ZD1 50 mA max. Load (Orange) Self-diagnosis output ZD2 (Blue) 0 V Internal circuit   12 to 24 V DC 10 % Orange Load  12 to 24 V DC  10 % Load Load Blue Users’ circuit Symbols ... D: Reverse supply polarity protection diode ZD1, ZD2: Surge absorption zener diode Tr1, Tr2 : PNP output transistor SS-A5 I/O circuit diagram Wiring diagram to sensor head Brown lead wire Color code (Brown)V Sensor circuit D ZD1 Tr1 ZD2 Tr2 Load 100 mA max. (Orange) Self-diagnosis output (Blue) 0 V Gray cable (Beam-emitting) Terminal No. Load (Black) Sensing output Internal circuit 1   12 to 24 V DC 10 % 50 mA max. Users’ circuit Symbols ... D: Reverse supply polarity protection diode ZD1, ZD2: Surge absorption zener diode Tr1, Tr2 : NPN output transistor SS-A5 2 (Amplifier) 3 Sensor head Shield Shield 4 Yellow lead wire Black cable (Beam-receiving) SENSING CHARACTERISTICS (TYPICAL) Sensing field Setting distance L (mm in) HD-T1 SH-72 M FD-L43 Glass Substrate / Wafer Sensing M-DW1 I/O circuit diagram FT-F9 FD-F7 FX-301-F EX-F70/F60 Liquid Leak / Liquid Level Sensing Refer to p.393 for ‘I/O CIRCUIT AND WIRING DIAGRAMS’ of SU-7 series excluding SU-7 and SU-7P, respectively. 8 0.315 2424 mm 0.9450.945 in Transparent glass plate # L 4 0.157 Sensor head 0 4 0.157 568 2 0 2 4 0.079 0.079 0.157 Left Center Right Operating point # (mm in) Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com This product is not a safety sensor. Its use is not intended or designed to protect life and prevent body injury or property damage from dangerous parts of machinery. It is a normal object detection sensor. • Use the sensor head and the amplifier together at a set. Mounting of the sensor head • The tightening torque with M3 screws should be 0.29 N m or less. Wiring • If the attached sensor head cables need to be extended, use two single core shielded cables of at least equivalent quality. (Extension up to total 5 m 16.404 ft is possible.) If a joint terminal or connector is used for extension, refer to the figures below. (The shielded extension cable must be of "1.45 mm "0.057 in outer diameter.) Connection with joint terminal Beam- Beamemitting receiving The beam-emitting cable cable cable and the beam-receiving cable should be separated from each other as much as possible. NG Beamemitting cable Beamreceiving cable This distance should be as short as possible. OK Connection with metal connector M3 screws (Please arrange separately.) Beam- Beamemitting receiving cable cable NG Beam- Beamemitting receiving cable cable OK The CAD data in the dimensions can be downloaded from the SUNX website: http://www.sunx.co.jp/ Refer to p.402 and p.412 for dimensions of SU-7 series, and SS-A5, respectively. DIMENSIONS (Unit: mm in) Sensor head Beamemitting part Liquid Leak / Liquid Level Sensing EX-F70/F60 FD-F7 FX-301-F FT-F9 SH-72 The beam-emitting cable and the beam-receiving cable must not be connected to one metal connector. Use two separate metal connectors. Beamreceiving part 40 36.5 1.575 1.437 2-"3.5 "0.138 mounting holes 19 0.748 62.5 2.461 SENSORS FOR SEMICONDUCTOR INDUSTRY SH-72 M-DW1 Refer to p.1135l for general precautions, p.397l for precautions for SU-7 series, and p.409l for precautions for SS-A5. "1.45 "0.057 single core two parallel shielded cables, 3 m 9.843 ft long 12 0.472 Ramco Innovations - 1207 Maple Street, West Des Moines IA USA 50265 - 800-280-6933 - www.ramcoinnovations.com HD-T1 PRECAUTIONS FOR PROPER USE Glass Substrate / Wafer Sensing FD-L43 M SH-72 SH-72 569