Freescale Semiconductor, Inc.
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by MMA1270D/D
SEMICONDUCTOR TECHNICAL DATA
The MMA series of silicon capacitive, micromachined accelerometers
features signal conditioning, a 2–pole low pass filter and temperature
compensation. Zero–g offset full scale span and filter cut–off are factory set and
require no external devices. A full system self–test capability verifies system
functionality.
MMA1270D: Z AXIS SENSITIVITY
MICROMACHINED
ACCELEROMETER
±2.5g
Features
• Integral Signal Conditioning
• Linear Output
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• 2nd Order Bessel Filter
• Calibrated Self–test
• EPROM Parity Check Status
16
• Transducer Hermetically Sealed at Wafer Level for Superior Reliability
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• Robust Design, High Shock Survivability
1
Typical Applications
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• Vibration Monitoring and Recording
16 LEAD SOIC
CASE 475–01
• Appliance Control
• Mechanical Bearing Monitoring
• Computer Hard Drive Protection
• Computer Mouse and Joysticks
Pin Assignment
• Virtual Reality Input Devices
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• Sports Diagnostic Devices and Systems
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ORDERING INFORMATION
Device
Temperature Range
MMA1270D
–40 to +105°C
Case No.
Package
Case 475–01
SOIC–16
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SIMPLIFIED ACCELEROMETER FUNCTIONAL BLOCK DIAGRAM
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Figure 1. Simplified Accelerometer Functional Block Diagram
REV 0
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MAXIMUM RATINGS (Maximum ratings are the limits to which the device can be exposed without causing permanent damage.)
Symbol
Value
Unit
Powered Acceleration (all axes)
Rating
gpd
1500
g
Unpowered Acceleration (all axes)
gupd
2000
g
Supply Voltage
VDD
–0.3 to +7.0
V
Hdrop
1.2
m
Tstg
–40 to +125
°C
Drop
Test(1)
Storage Temperature Range
NOTES:
1. Dropped onto concrete surface from any axis.
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ELECTRO STATIC DISCHARGE (ESD)
WARNING: This device is sensitive to electrostatic
discharge.
Although the Motorola accelerometers contain internal
2kV ESD protection circuitry, extra precaution must be taken
by the user to protect the chip from ESD. A charge of over
2
2000 volts can accumulate on the human body or associated
test equipment. A charge of this magnitude can alter the performance or cause failure of the chip. When handling the accelerometer, proper ESD precautions should be followed to
avoid exposing the device to discharges which may be detrimental to its performance.
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OPERATING CHARACTERISTICS
(Unless otherwise noted: –40°C TA +105°C, 4.75 VDD 5.25, Acceleration = 0g, Loaded output(1))
Characteristic
Symbol
Min
Typ
Max
Unit
VDD
IDD
TA
gFS
4.75
1.1
40
—
5.00
2.1
—
2.5
5.25
3.0
+105
—
V
mA
°C
g
VOFF
VOFF
S
S
f–3dB
NLOUT
2.25
2.2
712.5
693.8
40
1.0
2.5
2.5
750
750
50
—
2.75
2.8
787.5
806.3
60
+1.0
V
V
mV/g
mV/g
Hz
% FSO
Noise
RMS (0.1 Hz – 1.0 kHz)
Spectral Density (RMS, 0.1 Hz – 1.0 kHz)(6)
nRMS
nSD
—
—
3.5
700
6.5
—
mVrms
µg/√Hz
Self–Test
Output Response (VDD = 5.0 V)
Input Low
Input High
Input Loading(7)
Response Time(8)
VST
VIL
VIH
IIN
tST
0.9
VSS
0.7 VDD
50
—
1.25
—
—
125
10
1.6
0.3 VDD
VDD
300
25
V
V
V
µA
ms
Status(12)(13)
Output Low (Iload = 100 µA)
Output High (Iload = –100 µA)
VOL
VOH
—
VDD 0.8
—
—
0.4
—
V
V
Output Stage Performance
Electrical Saturation Recovery Time(9)
Full Scale Output Range (IOUT = –200 µA)
Capacitive Load Drive(10)
Output Impedance
tDELAY
VFSO
CL
ZO
—
VSS+0.25
—
—
—
—
—
50
2.0
VDD0.25
100
—
ms
V
pF
Ω
Mechanical Characteristics
Transverse Sensitivity(11)
VXZ,YZ
—
—
5.0
% FSO
Operating Range(2)
Supply Voltage(3)
Supply Current
Operating Temperature Range
Acceleration Range
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Output Signal
Zero g (TA = 25°C, VDD = 5.0 V)(4)
Zero g (VDD = 5.0 V)
Sensitivity (TA = 25°C, VDD = 5.0 V)(5)
Sensitivity(VDD = 5.0 V)
Bandwidth Response
Nonlinearity
NOTES:
1. For a loaded output the measurements are observed after an RC filter consisting of a 1 kΩ resistor and a 0.1 µF capacitor to ground.
2. These limits define the range of operation for which the part will meet specification.
3. Within the supply range of 4.75 and 5.25 volts, the device operates as a fully calibrated linear accelerometer. Beyond these supply limits
the device may operate as a linear device but is not guaranteed to be in calibration.
4. The device can measure both + and acceleration. With no input acceleration the output is at midsupply. For positive acceleration the output
will increase above VDD/2 and for negative acceleration the output will decrease below VDD/2.
5. Sensitivity limits apply to 0 Hz acceleration.
6. At clock frequency 35 kHz.
7. The digital input pin has an internal pull–down current source to prevent inadvertent self test initiation due to external board level leakages.
8. Time for the output to reach 90% of its final value after a self–test is initiated.
9. Time for amplifiers to recover after an acceleration signal causing them to saturate.
10. Preserves phase margin (60°) to guarantee output amplifier stability.
11. A measure of the device’s ability to reject an acceleration applied 90° from the true axis of sensitivity.
12. The Status pin output is not valid following power–up until at least one rising edge has been applied to the self–test pin. The Status pin is
high whenever the self–test input is high.
13. The Status pin output latches high if the EPROM parity changes to odd. The Status pin can be reset by a rising edge on self–test, unless
a fault condition continues to exist.
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PRINCIPLE OF OPERATION
SPECIAL FEATURES
The Motorola accelerometer is a surface–micromachined
integrated–circuit accelerometer.
The device consists of a surface micromachined capacitive sensing cell (g–cell) and a CMOS signal conditioning
ASIC contained in a single integrated circuit package. The
sensing element is sealed hermetically at the wafer level using a bulk micromachined “cap’’ wafer.
The g–cell is a mechanical structure formed from semiconductor materials (polysilicon) using semiconductor processes (masking and etching). It can be modeled as two
stationary plates with a moveable plate in–between. The
center plate can be deflected from its rest position by subjecting the system to an acceleration (Figure 2).
When the center plate deflects, the distance from it to one
fixed plate will increase by the same amount that the distance to the other plate decreases. The change in distance is
a measure of acceleration.
The g–cell plates form two back–to–back capacitors (Figure 3). As the center plate moves with acceleration, the distance between the plates changes and each capacitor’s
value will change, (C = Aε/D). Where A is the area of the
plate, ε is the dielectric constant, and D is the distance between the plates.
The CMOS ASIC uses switched capacitor techniques to
measure the g–cell capacitors and extract the acceleration
data from the difference between the two capacitors. The
ASIC also signal conditions and filters (switched capacitor)
the signal, providing a high level output voltage that is ratiometric and proportional to acceleration.
Filtering
The Motorola accelerometers contain an onboard 2–pole
switched capacitor filter. A Bessel implementation is used
because it provides a maximally flat delay response (linear
phase) thus preserving pulse shape integrity. Because the filter is realized using switched capacitor techniques, there is
no requirement for external passive components (resistors
and capacitors) to set the cut–off frequency.
Self–Test
The sensor provides a self–test feature that allows the verification of the mechanical and electrical integrity of the accelerometer at any time before or after installation. This
feature is critical in applications such as automotive airbag
systems where system integrity must be ensured over the life
of the vehicle. A fourth “plate’’ is used in the g–cell as a self–
test plate. When the user applies a logic high input to the
self–test pin, a calibrated potential is applied across the
self–test plate and the moveable plate. The resulting electrostatic force (Fe = 1/2 AV2/d2) causes the center plate to
deflect. The resultant deflection is measured by the accelerometer’s control ASIC and a proportional output voltage results. This procedure assures that both the mechanical
(g–cell) and electronic sections of the accelerometer are
functioning.
Acceleration
Status
Motorola accelerometers include fault detection circuitry
and a fault latch. The Status pin is an output from the fault
latch, OR’d with self–test, and is set high whenever the following event occurs:
Figure 2. Transducer
Physical Model
4
Figure 3. Equivalent
Circuit Model
• Parity of the EPROM bits becomes odd in number.
The fault latch can be reset by a rising edge on the self–
test input pin, unless one (or more) of the fault conditions
continues to exist.
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PCB Layout
BASIC CONNECTIONS
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Figure 4. Pinout Description
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Pin No.
Pin Name
Description
1 thru 3
VSS
Redundant connections to the internal
VSS and may be left unconnected.
4
VOUT
5
STATUS
6
VDD
The power supply input.
7
VSS
The power supply ground.
NOTES:
8
ST
Logic input pin used to initiate self–
test.
9 thru 13
Trim pins
Used for factory trim.
Leave unconnected.
• Use a 0.1 µF capacitor on VDD to decouple the power
source.
14 thru 16
—
No internal connection.
Leave unconnected.
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Output voltage of the accelerometer.
Figure 6. Recommended PCB Layout for Interfacing
Accelerometer to Microcontroller
Logic output pin used to indicate fault.
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• Physical coupling distance of the accelerometer to the microcontroller should be minimal.
• Place a ground plane beneath the accelerometer to reduce
noise, the ground plane should be attached to all internal
VSS terminals shown in Figure 4.
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Figure 5. SOIC Accelerometer with Recommended
Connection Diagram
Motorola Sensor Device Data
• Use an RC filter of 1 kΩ and 0.1 µF on the output of the accelerometer to minimize clock noise (from the switched
capacitor filter circuit).
• PCB layout of power and ground should not couple power
supply noise.
• Accelerometer and microcontroller should not be a high
current path.
• A/D sampling rate and any external power supply switching
frequency should be selected such that they do not interfere with the internal accelerometer sampling frequency.
This will prevent aliasing errors.
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ACCELERATION SENSING DIRECTIONS
DYNAMIC ACCELERATION
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N/C pins are recommended to be left FLOATING
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–g
STATIC ACCELERATION
Direction of Earth’s gravity field.*
+1g
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0g
0g
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–1g
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* When positioned as shown, the Earth’s gravity will result in a positive 1g output
6
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PACKAGE DIMENSIONS
A
A
G/2
2 PLACES, 16 TIPS
G
B
P
B
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CASE 475–01
ISSUE B
16 LEAD SOIC
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Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit,
and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different
applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by
customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed,
intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life,
or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase
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indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent
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Opportunity/Affirmative Action Employer.
MOTOROLA and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective
owners.
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Motorola Sensor Device Data
MMA1270D/D