MEMS Flow Sensors
D6F
Series Catalog
Faster and more accurate than ever before
MEMS flow sensor : the ideal means for mass flow measurement
Omron flow sensor
so precise
even the flap of a butterfly’s
wings will not be missed.
Realizing a highly accurate flow measurement,
Omron’s MEMS flow sensor accurately detects minute airflow so much as a single flap of a butterfly’s
butterfly
butterf y s wings.
win
w ngs.
A gas flow sensor is capable of "measuring mass flow" independent
nt of temperature and
d pressure.
pressure
sure.
D6F-A6
D6F-W
Q&A on Mass Flow Measurement
Q1 There are two balloons; each having different volumes.
But these balloons have the same mass. Why is that?
A The volume increases/decreases according to the pressure and
temperature changes. The mass, on the other hand,
remains constant regardless of the environmental changes.
The mass flow measurement allows measurement performance
that is not affected by changes in the environment.
Q2 Why is mass flow measurement required?
A An accurate measurement of the flow is required especially for
combustion control. Omron’s flow sensor enables measuring the
gas flow based on the mass flow measurement.
2
Principles of MEMS Flow
D6F Series
No airflow
Temperature distribution
Heater
Thermopile A
Thermopile B
Cross-sectional view of flow sensor chip
During the absence of airflow, the temperature
distribution around the heater is symmetrical.
When there is airflow, the temperature of the
upwind side cools down and the temperature
of the downwind side warms up, disrupting the
symmetry of the temperature distribution.
sensing even a single flap of a butterfly’s wings
Operating
characteristic
Error
Output voltage (V)
Standard lower limit
-4%
-6%
0
4
6
Magnified
5
view 1.04
4
3
1.02
2
1
1.00
0
-0.2 0.0 0.2 0.4 0.6 0.8 1.0
Flow rate(SLM)
Flow rate of 1L: Output corresponding to flow rate change below 1/1000 of full scale.
Compact
0%
-2%
Ambient temperature = 25degC (Model: D6F-20A7D-000-0)
High
Sensitivity
Standard upper limit
2%
Output voltage (V)
Omron’s unique MEMS
technology allows
detection of very low
air velocities
4%
Output voltage (V)
High
Accuracy
±3%RD (25-100%F.S.) is realized by
linear temperature correction using
ASIC technology
6%
1SLM =1000sccm
8
12
Flow rate (L/min)
16
20
Output voltage characteristic
0.98
0.96
-3.2
-1.6
0.0
1.6
Flow rate (sccm)
3.2
The product size is reduced by using the
world-smallest class size MEMS sensor element
Dimension of D6F-V model: 24x8x14mm.
Sensor Measurement
Energy
saving
Highly Resistant to Dust
Pattent
No.4534526
Built-in Dust Segregation System (cyclonic) D6F-W/-V/-P
Airflow
Upwind
Flow of gas
Downwind
Cross-sectional view of flow sensor chip
By detecting this temperature difference appearing as a
difference in the electromotive forces developed by the
thermopiles, it allows the mass flow rate and mass flow
velocity to be measured without the influence of
temperature and pressure. Since the thermopile generates
the thermo-electromotive force, the power consumption is
much lower than when using the resistivity method.
The sensor can be placed anywhere
thanks to its dust-resistant structure.
Omron’s unique design of 3D flow path
provides a high level of reliability by
separating dust particles to reduce its
effect on the sensor chip. Additionally,
Omron succeeded in reducing the
sensor size, allowing it to be used in
wider range of applications.
External flow
Centrifugal
separation
chambers
Dust vent
MEMS sensor
element
= leads the flow
of clean air in
here
Model : D6F-W
3
Applications
Omron flow sensors cover a wide range of applications and can be used for different purposes.
Application Examples
Combustion
For optimal control of the amount of gas
by measuring the mass flow rate
For feedback control of air conditioning
by measuring the amount of air and amount
of ventilation
HVAC
Flow rate
Velocity
Differential
pressure
Differential
pressure
Fuel cell
Ventilation system
Boiler
Measurement
Fans
Welder
Optimizing combustion efficiency
For optimal control of pumps by measuring the flow rate
For management of positive pressure and negative
pressure by measuring the differential pressure
Flow rate
VAV (central air conditioning)
Controlling the amount of air at the required level
and monitoring the amount of ventilation
Clogging
Detection
For monitoring the flow of the cooling air to
optimize the cooling efficiency and
avoid malfunctions.
Flow rate
Differential
pressure
Velocity
Differential
pressure
Gas detector
Gas analyzer
Low differential
pressure transmission
Accurately detecting gas concentrations
Monitoring the positive/negative pressure in a room
4
Projector
Industrial air conditioner
Server
Quiet, low maintenance cost
Selection of Products
Select the most suitable sensor from many variations.
Flow Rate
e
Combustiblee gas
D6F-N2/-L2
D6F-N7/-L7
D6F
N7/ L7
Natural gas, LP gas
Types of gas
D6F-A5/-A6/-A7/-A7D
D6F-AB71/-AB71D
Air
N2, Air
D6F-P
D6F-P
(for bypass use)
D6F-A1
D6F-A3
Flow rate
1
2
3
5
10
20
50
100
Note: The pictures are
re representative examples of our sensors
Flow Velocity
200
L / min
Differential Pressure
Delivers high sensitivity even
at low flow rate, low differential pressure
Air
MEMS differential
pressure sensor
N2, Air
D6F-V
D6F-PH
High precision
Accurate measurement
Low piping effects
High impedance to reduce the influence of
piping variations
High reliability
D6F-W
Detect sensor anomaly
Flow velocity
1
2
3
4
5
10
m/ s
5
List of D6F series
MEMS Flow Sensor
Air
Minute flow
Analog
Air
Applicable gas
Items
Model
D6F-01A1-110
D6F-P0010A
D6F-P0010AM2
D6F-P0001A1
D6F-02A1-110
D6F-03A3-000
Shape
5
4
0∼3L/min
3
Flow rate range
(L/mim)
0∼2L/min
2
1
0∼0.1L/min
0∼1L/min
25
8, 25
0
Page
Gas
Minute to middle flow
12
Analog
Natural gas (13A)
Applicable gas
Items
8
Model
LP gas
Natural gas (13A)
D6F-02L2-000
D6F-02L7-000
D6F-01N2-000
D6F-05N2-000
D6F-05N7-000
Shape
0∼5L/min
5
4
3
Flow rate range
(L/mim)
0∼2L/min
2
0∼1L/min
1
0
10
Page
Air
Middle to high flow
Analog
Digital
10, 18
Digital type only
Applicable gas
Items
Model
10, 16, 18
Air
D6F-10A5-000
D6F-10A6-000
D6F-10A7-000
D6F-10A7D-000
D6F-20A5-000
D6F-20A6-000
D6F-20A7D-000
D6F-30A7-000
D6F-30AB71-000
D6F-50A5-000
D6F-50A6-000
D6F-50A7D-000
D6F-70AB71-000
D6F-70AB71D-000
Shape
0∼70L/min
70
60
0∼50L/min
50
40
Flow rate range
(L/mim)
0∼30L/min
30
20
10
0∼20L/min
0∼10L/min
0
Page
6
14, 16, 18, 20
14, 16, 20
18, 23
14, 16, 20
20, 23
MEMS Flow Sensor
Air
Flow velocity
Analog
Applicable gas
Items
Air
Model
D6F-W01A1
D6F-V03A1
D6F-W04A1
D6F-W10A1
Shape
0∼10m/s
10
8
6
4
Flow velocity range
(m/s)
0∼3m/s
0∼4m/s
36
34
0∼1m/s
2
0
-2
34
Page
34
MEMS Differential Pressure Sensor
Air
Differential pressure
Digital
Digital type only
Applicable gas
Items
Model
Air
D6F-PH0505AD3
D6F-PH0505AD4
D6F-PH0505AMD4
D6F-PH0025AD1
D6F-PH0025AD2
D6F-PH0025AMD2
D6F-PH5050AD3
D6F-PH5050AD4
D6F-PH5050AMD4
Shape
-500∼500Pa
500
250
50
Differential pressure
range (Pa)
0∼250Pa
-50∼50Pa
0
-50
-250
-500
Page
28
7
D6F-A1
MEMS Flow Sensor
A Compact, High-Acuracy Sensor
That Measures Low Flow Rates.
• High accuracy of ±3% FS.
• Flow rates can be measured without being affected by
temperature or pressure.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-01A1-110
0 to 1 L/min
Air
0 to 2 L/min
6.0
6.0
D6F-01A1-110
5.0
5.0
D6F-02A1-110
Accessory (included)
Type
Model
Cable
D6F-CABLE1
Connections
D6F-01A1-110
D6F-02A1-110
Pin No.
Connector
1: Vcc
2: Vout
3: GND
53398-03** (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021-0300 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
Tubes
Install tubes made of materials such as rubber or urethane so
that they will not come out.
For urethane tubes, tubes with an outer diameter of 12 mm and
an inner diameter of 8 mm are recommended.
2: Vout
1: Vcc
3: GND
Enlarged View
8
D6F-02A1-110
Model
Output voltage (V)
Flow rate range
Output voltage (V)
Applicable fluid
4.0
3.0
2.0
1.0
0.0
0.0
0.2
0.4
0.6
Flow rate (L/min)
0.8
1.0
4.0
3.0
2.0
1.0
0.0
0.0
0.4
0.8
1.2
Flow rate (L/min)
1.6
2.0
D6F-01A1-110
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
0.2
0.4
0.6
0.8
1.0
2.31
±0.12
3.21
±0.12
3.93
±0.12
4.51
±0.12
5.00
±0.12
0.4
0.8
1.2
1.6
2.0
2.59
±0.12
3.53
±0.12
4.18
±0.12
4.65
±0.12
5.00
±0.12
D6F-02A1-110
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
D6F-A1
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-01A1-110
Flow Range (See note 1.)
D6F-02A1-110
0 to 1 L/min
0 to 2 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Bamboo joint
Maximum outside diameter: 8.6 mm, Minimum outside diameter: 7.4 mm
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.3% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
200 kPa
Pressure Drop (See note 3.)
0.42 kPa
Operating Temperature (See note 4.)
−10 to 60°C
1.06 kPa
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
12.8 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
(Unit: mm)
CAD Data Please visit our CAD Data website, which is noted on the last page.
D6F-01A1-110
D6F-02A1-110
CAD Data
8.6 dia.
7.4 dia.
3.5-dia. through hole
15.1
Mounting Hole Dimensions
4
R4
Two, M3 screws
8
66
30±0.1
41
30±0.05
(3.7)
R1.75
4.5
(7.45)
9.5
28±0.05
R4.25
3.5
4
Through hole
(6)
20
28±0.1
Cable (included): D6F-CABLE1
200±35
20
100±15
Brown wire
Black wire
0.5
1. Vcc
2. Vout
4.5
6.5
Connector :51021 (Manufactured by Molex, LLC)
Terminal :50079 (Manufactured by Molex, LLC)
Wire
:0.14SQ
Blue wire
3. GND
9
D6F-N2/-L2
MEMS Flow Sensor
A Compact, High-Acuracy Sensor
That Measures Low Flow Rates.
• High accuracy of ±3% FS.
• Flow rates can be measured without being affected by
temperature or pressure.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-01N2-000
Natural gas (13A)
LP gas
6.0
6.0
0 to 1 L/min
D6F-01N2-000
5.0
5.0
0 to 5 L/min
D6F-05N2-000
0 to 2 L/min
D6F-02L2-000
4.0
3.0
2.0
1.0
0.0
0.0
Accessory (included)
Type
Model
D6F-CABLE1
Connections
D6F-01N2-000
D6F-05N2-000
D6F-02L2-000
Pin No.
Connector
Use the following connectors for connections to the D6F:
Housing
51021-0300 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
0.4
0.6
Flow rate (L/min)
1: Vcc
1.0
2.0
3.0
Flow rate (L/min)
4.0
5.0
2.0
1.0
0.4
0.8
1.2
Flow rate (L/min)
D6F-01N2-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
0.2
0.4
0.6
0.8
1.0
1.90
±0.12
2.81
±0.12
3.64
±0.12
4.37
±0.12
5.00
±0.12
1.0
2.0
3.0
4.0
5.0
2.91
±0.12
3.92
±0.12
4.47
±0.12
4.79
±0.12
5.00
±0.12
0.4
0.8
1.2
1.6
2.0
3.02
±0.08
3.95
±0.08
4.47
±0.08
4.79
±0.08
5.00
±0.12
D6F-05N2-000
0
1.00
±0.12
D6F-02L2-000
Output voltage
V
10
2.0
0.0
0.0
3.0
Flow rate
L/min (normal)
Enlarged View
1.6
1.0
4.0
Output voltage
V
3: GND
1.0
2.0
5.0
Flow rate
L/min (normal)
2: Vout
0.8
3.0
6.0
0.0
0.0
1: Vcc
2: Vout
3: GND
53398-03** (Made by Molex Japan)
0.2
4.0
D6F-02L2-000
Output voltage (V)
Cable
D6F-05N2-000
Model
Output voltage (V)
Flow rate range
Output voltage (V)
Applicable fluid
0
1.00
±0.30
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
D6F-N2/-L2
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-01N2-000
Flow Range (See note 1.)
D6F-05N2-000
0 to 1 L/min
Calibration Gas (See note 2.)
Natural gas (13A)
Flow Port Type
Rc 1/4 thread
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
0 to 2 L/min
Propane gas
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.2% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
±2% to ±7.5% F.S. (25°C
characteristic)
±0.3% FS
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
Aluminum alloy
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
200 kPa
Pressure Drop (See note 3.)
0.017 kPa
Operating Temperature (See note 4.)
−10 to 60°C
D6F-02L2-000
0 to 5 L/min
0.10 kPa
0.14 kPa
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at −10 to 60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
±4% FS for 25°C characteristic at −10
to 60°C
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
35.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
(Unit: mm)
CAD Data Please visit our CAD Data website, which is noted on the last page.
D6F-01N2-000
D6F-05N2-000
D6F-02L2-000
CAD Data
Two, M3 holes with a depth of at least 5 mm
16.2
Mounting Hole Dimensions
16.2±0.05
Two, 3.5 dia.
37
62±0.5
(3.7)
37±0.05
(6)
21.6±0.5
10
3-17
10
Cable (included): D6F-CABLE1
200±35
22.1±0.5
100±15
Brown wire
Black wire
8.85
1. Vcc
2. Vout
Two, tapped threads 0.35
for Rc 1/4 pipe
Blue wire
3. GND
Connector :51021 (Manufactured by Molex, LLC)
Terminal :50079 (Manufactured by Molex, LLC)
Wire
:0.14SQ
11
D6F-A3
MEMS Flow Sensor
High-Acuracy Sensing with a Thin,
Compact Body.
• A thin, lightweight flow sensor.
• Unique flow path structure provides high precision and fast
response.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-03A3-000
Flow rate range
Air
0 to 3 L/min
Model
6.0
D6F-03A3-000
5.0
Accessory (Sold separately)
Type
Model
D6F-CABLE2
Cable
D6F-CABLE2-L
Note: Refer to Accessories for the D6F Series on page 38.
Connections
D6F-03A3-000
1: GND
2: Vout
3: Vcc
1: GND
2: Vout
3: Vcc
Connector
SM03B-SRSS-TB (Made by J.S.T. Mfg. Co.)
Use the following connectors made by J.S.T. Mfg. Co. for
connections to the Sensor:
• Pressure-welded Connector
Socket: 03SR-3S
Wires: AWG30
Or
• Crimp Connector
Contacts: SSH-003T-P0.2
Housing: SHR-03V-S or SHR-03V-S-B
Wires: AWG32 to AWG28
12
4.0
3.0
2.0
1.0
0.0
0.0
0.6
1.2
1.8
Flow rate (L/min)
2.4
3.0
D6F-03A3-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.2
0.6
2.83
±0.2
1.2
3.77
±0.2
1.8
4.34
±0.2
2.4
4.72
±0.2
3.0
5.00
±0.2
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
Enlarged View
Pin No.
Output voltage (V)
Applicable fluid
D6F-A3
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-03A3-000
Flow Range (See note 1.)
0 to 3 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
M5 thread
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±5% FS (25°C characteristic)
Repeatability (See note 3.)
±0.7% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
200 kPa
Pressure Drop (See note 3.)
0.45 kPa
Operating Temperature (See note 4.)
0 to 50°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−10 to 60°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±5% FS for 25°C characteristic at an ambient temperature of 0 to 50°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
5.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
CAD Data Please visit our CAD Data website, which is noted on the last page.
● MEMS Flow Sensors
D6F-03A3-000
Mounting Hole Dimensions
OUT side
D6F
-03A3-000
MADE IN JAPAN
CAD Data
IN side
8
M5 threads
(Effective thread depth: 3.1)
+0.15
(Unit: mm)
Two,
18±0.05
M3 screw holes
14
16.8
3.1−0.05
6.8
3.4-dia.
18±0.15
36.6
3.1 +0.15
−0.05 dia. through hole
13
D6F-A5
MEMS Flow Sensor
High-Acuracy Sensing with a Compact
Body for Flow Rates Up to 50 L/min.
• Accurately detects a mass flow rate of 10 to 50 L/min.
• A compact size of 30 × 78 × 30 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
D6F-10A5-000
Manifold
Air
Flow rate range
0 to 10 L/min
D6F-10A5-000
0 to 20 L/min
D6F-20A5-000
0 to 50 L/min
D6F-50A5-000
Accessory (Sold separately)
Type
Model
6.0
5.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0
2.0
Model
Cable
D6F-CABLE1
D6F-20A5-000
6.0
Output voltage (V)
Applicable fluid
Output voltage (V)
Flow Port Type
4.0
6.0
Flow rate (L/min)
8.0
10.0
40.0
50.0
4.0
3.0
2.0
1.0
0.0
0.0
4.0
8.0
12.0
Flow rate (L/min)
16.0
20.0
D6F-50A5-000
Note: Refer to Accessories for the D6F Series on page 38.
6.0
Connections
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
Pin No.
Connector
1: Vcc
2: Vout
3: GND
53398-03** (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021-0300 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1: Vcc 2: Vout 3: GND
Output voltage (V)
5.0
4.0
3.0
2.0
1.0
0.0
0.0
10.0
20.0
30.0
Flow rate (L/min)
D6F-10A5-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
2.0
4.0
6.0
8.0
10.0
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
4.0
8.0
12.0
16.0
20.0
1.93
±0.12
2.87
±0.12
3.70
±0.12
4.41
±0.12
5.00
±0.12
10
20
30
40
50
2.45
±0.12
3.51
±0.12
4.20
±0.12
4.66
±0.12
5.00
±0.12
D6F-20A5-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
D6F-50A5-000
Flow rate
L/min (normal)
Enlarged View
Output voltage
V
0
1.00
±0.12
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
14
D6F-A5
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-10A5-000
Flow Range (See note 1.)
D6F-20A5-000
0 to 10 L/min
0 to 20 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Manifold
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.3% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS/aluminum alloy
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
500 kPa
Pressure Drop (See note 3.)
0.8 kPa
Operating Temperature (See note 4.)
−10 to 60°C
2.9 kPa
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−30 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
D6F-50A5-000
0 to 50 L/min
17.2 kPa
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
103 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
CAD Data Please visit our CAD Data website, which is noted on the last page.
(Unit: mm)
● MEMS Flow Sensors
D6F-10A5-000
D6F-20A5-000
D6F-50A5-000
CAD Data
Mounting Hole
Dimensions
Lot number label
Two, 1.4±0.1
Four, 3.2-dia. through holes
Four, M3 holes
(3.7)
78±0.5
66±0.1
66±0.05
(6)
(30.05)
Two, 5 dia.
6
14±0.05
30±0.5
30±0.5
15
D6F-A6
MEMS Flow Sensor
High-Acuracy Sensing with a Compact
Body for Flow Rates up to 50 L/min.
• Accurately measures an air mass flow rate of 10 to 50 L/min.
• A compact size of 30 × 78 × 30 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
Rc 1/4 thread
Air
NPT 1/8 thread
Flow rate range
D6F-10A6-000
6.0
6.0
D6F-20A6-000
5.0
5.0
0 to 50 L/min
D6F-50A6-000
0 to 10 L/min
D6F-10A61-000
0 to 20 L/min
D6F-20A61-000
Model
Connections
Connector
D6F-10A61-000
D6F-20A61-000
D6F-50A61-000
1: Vcc
2: Vout
3: GND
53398-03** (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021-0300 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1: Vcc 2: Vout 3: GND
4.0
3.0
2.0
1.0
0.0
0.0
2.0
4.0
6.0
Flow rate (L/min)
8.0
10.0
40.0
50.0
4.0
3.0
2.0
1.0
0.0
0.0
4.0
8.0
12.0
Flow rate (L/min)
16.0
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0.0
10.0
20.0
30.0
Flow rate (L/min)
D6F-10A6-000/D6F-10A61-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
2.0
4.0
6.0
8.0
10.0
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
12
16
20
3.70
±0.12
4.41
±0.12
5.00
±0.12
D6F-20A6-000/D6F-20A61-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±0.12
4
1.93
±0.12
8
2.87
±0.12
D6F-50A6-000/D6F-50A61-000
Flow rate
L/min (normal)
Enlarged View
Output voltage
V
0
1.00
±0.12
10
20
30
40
50
2.45
±0.12
3.51
±0.12
4.20
±0.12
4.66
±0.12
5.00
±0.12
Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient
temperature of 25±5°C, and ambient humidity of 35% to 75%.
16
20.0
D6F-50A6-000
D6F-50A61-000
Output voltage (V)
Note: Refer to Accessories for the D6F Series on page 38.
Pin No.
D6F-50A61-000
D6F-CABLE1
D6F-10A6-000
D6F-20A6-000
D6F-50A6-000
D6F-20A6-000
D6F-20A61-000
0 to 20 L/min
Accessory (Sold separately)
Type
D6F-10A6-000
D6F-10A61-000
0 to 10 L/min
0 to 50 L/min
Cable
Model
Output voltage (V)
Applicable fluid
Output voltage (V)
Flow Port Type
D6F-A6
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-10A6-000
Flow Range (See note 1.)
D6F-20A6-000
0 to 10 L/min
0 to 20 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Rc 1/4 thread
Electrical Connection
Three-pin connector
D6F-50A6-000
0 to 50 L/min
D6F-10A61-000
0 to 10 L/min
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10kΩ min.)
Accuracy
±3% FS (25°C characteristic)
Repeatability (See note 3.)
±0.3% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS/aluminum alloy
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
500 kPa
0.10 kPa
Operating Temperature (See note 4.)
−10 to 60°C
Operating Humidity (See note 4.)
35% to 85%
D6F-50A61-000
0 to 50 L/min
0.52 kPa
2.31 kPa
NPT 1/8 thread
Power Supply
Pressure Drop (See note 3.)
D6F-20A61-000
0 to 20 L/min
0.28 kPa
1.44 kPa
0.15 kPa
Storage Temperature (See note 4.) −30 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
103 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
CAD Data Please visit our CAD Data website, which is noted on the last page.
(Unit: mm)
● MEMS Flow Sensors
Lot number label
12±0.2
Mounting Hole
Dimensions
CAD Data
Two, 3.2-dia. Holes
(3.7)
78±0.5
66±0.2
66±0.05
(6)
(30.4)
D6F-10A6-000
D6F-20A6-000
D6F-50A6-000
Two, tapped threads
for Rc 1/4 pipes
6
Two, M3 holes,
Effective screw depth: 4.5
12±0.05
30±0.5
30±0.5
D6F-10A61-000
D6F-20A61-000
D6F-50A61-000
Two, tapped threads
for NPT 1/8 pipes
30±0.5
30±0.5
17
D6F-A7/-L7/-N7
MEMS Flow Sensor
Reduction of Piping Time by Quick Joint
Connection
• Low -flow rate of natural gas and LP gas can be measured.
• 10 L/min and 30 L/min of Air can be measured.
• Compact size of 30 × 84.6 × 30 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
Model
Natural gas (13A) 0 to 5 L/min
D6F-05N7-000
LP gas
0 to 2 L/min
D6F-02L7-000
0 to 10 L/min
D6F-10A7-000
Air
0 to 30 L/min
Accessories (Sold separately)
D6F-CABLE1
Quick fastener (for P10) D6F-FASTENER-P10
Pipe fittings (for P10)
D6F-PLG1
Note: Refer to Accessories for the D6F Series on page 38.
5.0
4.0
3.0
2.0
1.0
1.0
2.0
3.0
4.0
4.0
3.0
2.0
1.0
0.0
0.0
5.0
0.4
0.8
1.2
1.6
2.0
24
30
Flow rate (L/min)
Flow rate (L/min)
D6F-10A7-000
Model
Cable
6.0
5.0
0.0
0.0
Output voltage (V)
Type
D6F-30A7-000
D6F-02L7-000
6.0
Output voltage (V)
Flow rate range
D6F-30A7-000
6.0
6.0
5.0
5.0
Output voltage (V)
Quick joint P10
D6F-05N7-000
Applicable fluid
Output voltage (V)
Flow Port Type
4.0
3.0
2.0
1.0
0.0
4.0
3.0
2.0
1.0
0.0
0
2
4
6
8
10
0
Flow rate (L/min)
6
12
18
Flow rate (L/min)
Connections
D6F-05N7-000 D6F-02L7-000
D6F-10A7-000 D6F-30A7-000
Pin No.
Connector
1: Vcc
2: Vout
3: GND
53398-03** (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021-0300 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1:Vcc 2:Vout
3:GND
Enlarged View
D6F-05N7-000
Flow rate
L/min (normal)
0
1.0
2.0
3.0
4.0
5.0
Output voltage
V
1.00
±0.12
1.68
±0.12
2.47
±0.12
3.31
±0.12
4.15
±0.12
5.00
±0.12
Flow rate
L/min (normal)
0
0.4
0.8
1.2
1.6
2.0
Output voltage
V
1.00
±0.12
1.96
±0.12
2.89
±0.12
3.72
±0.12
4.43
±0.12
5.00
±0.12
Flow rate
L/min (normal)
0
2.0
4.0
6.0
8.0
10.0
Output voltage
V
1.00
±0.12
1.75
±0.12
2.60
±0.12
3.45
±0.12
4.25
±0.12
5.00
±0.12
Flow rate
L/min (normal)
0
6
12
18
24
30
Output voltage
V
1.00
±0.12
2.11
±0.12
3.12
±0.12
3.91
±0.12
4.53
±0.12
5.00
±0.12
D6F-02L7-000
D6F-10A7-000
D6F-30A7-000
Measurement conditions: Power-supply voltage 12±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH.
18
D6F-A7/-L7/-N7
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-05N7-000
Flow Range (See note 1.)
D6F-02L7-000
D6F-10A7-000
0 to 5 L/min
0 to 2 L/min
0 to 10 L/min
Calibration Gas (See note 2.)
Natural gas (13A)
LP gas
Air
Flow Port Type
Quick joint P10
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ min.)
Accuracy
±3%F.S. (25°C characteristic)
Repeatability (See note 3.)
±0.3%F.S.
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Maximum Allowable Withstand Pressure
500 kPa
Pressure Drop (See note 3.)
0.06 kPa
Operating Temperature (See note 4.)
–10 to +60°C
0.03 kPa
D6F-30A7-000
0 to 30 L/min
0.32 kPa
2.19 kPa
Operating Humidity (See note 4.)
35 to 85%RH
Storage Temperature (See note 4.)
–10 to +80°C
Storage Humidity (See note 4.)
35 to 85%RH
Temperature Characteristics
±3%F.S. for 25°C characteristic at an ambient temperature of –10 to +60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
–30 to +80°C
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
72 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
(Unit: mm)
CAD Data Please visit our CAD Data website, which is noted on the last page.
● MEMS Flow Sensors
D6F-05N7-000
D6F-02L7-000
D6F-10A7-000
D6F-30A7-000
CAD Data
Recommended Quick joint male P10 type
A
Lot No. Display
9 max.
A
1.6 max
2.5±0.05
2 min.
X
X
2 min.
R0.4
64.5
84.6±0.5
66.6
60.6
R0.4
(3.7)
10 +0
-0.05 dia.
17 dia.
20 dia. max.
12.85±0.05 dia.
(6)
C0.1
(33.4)
Y
C0.3
2.5
+0.25
-0
C0.5
CROSS X-X
30°
30±0.5
Note
20 dia.
17 dia.
13 +0.1
-0.05 dia.
30±0.5
0.9
C0.5 (circumference)
R2 (circumference)
Description Y
If using a Rc3/8 converter joint, the following is recommended.
REGAL JOINT CO., LTD http://www.rgl.co.jp/
Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM10
O ring: O ring P10 fluororubber (material)
C0.5 (circumference)
6±0.3
3±0.15
CROSS A-A
Note. The Port type of pipe fitting based on “Quick Joint P10 Type”.
* P10 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P10 of JIS B 2406.
* Please obtain a male joint separately.
19
D6F-A7D/-AB71D
MEMS Flow Sensor
Digital Compensation for High
Accuracy
• Temperature compensation and linear compensation produce
high accuracy (±3% RD (25% to 100% FS)).
• Compact models for 10 to 70 L/min.
• Reduced piping work with quick-fastening feature.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
Output Characteristics
MEMS Flow Sensor
D6F-10A7D-000-0
Quick joint P10
Air
Quick joint P14
Flow rate range
Model
0 to 10 L/min
D6F-10A7D-000-0
0 to 20 L/min
D6F-20A7D-000-0
0 to 50 L/min
D6F-50A7D-000-0
0 to 70 L/min
D6F-70AB71D-000-0
70000
60000
60000
50000
40000
30000
20000
10000
0
Quick fastener (for P10) D6F-FASTENER-P10
Pipe fittings (for P10)
D6F-PLG1
Note: Refer to Accessories for the D6F Series on page 38.
4
6
8
30000
20000
10
0
5
Connector
1: Vcc
2: SDA
3: SCL
4: GND
BM04B-GHS (made by J.S.T. Mfg. Co.)
Use the following connectors for connections to the D6F:
Housing
GHR-04V-S (made by J.S.T. Mfg. Co.)
Terminals
SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.)
Wires
AWG26 to AWG30
3: SCL
4: GND
20
50000
60000
50000
40000
30000
20000
10000
0
40000
30000
20000
10000
0
0
10
20
30
40
0
50
10
20
30
40
50
60
70
Flow rate (L/min)
D6F-10A7D-000-0
D6F-10A7D-000-0
D6F-20A7D-000-0
D6F-50A7D-000-0
D6F-70AB71D-000-0
Pin No.
15
D6F-70AB71D-000-0
70000
Flow rate (L/min)
Connections
10
Flow rate (L/min)
Output (Count)
D6F-CABLE3
2
D6F-50A7D-000-0
Model
Cable
40000
Flow rate (L/min)
Output (Count)
Type
50000
10000
0
0
Accessories (Sold separately)
D6F-20A7D-000-0
70000
Output (Count)
Applicable fluid
Output (Count)
Joint
2: SDA
1: Vcc
Enlarged View
Flow rate
L/min (normal)
0
2
4
6
8
10
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 10
D6F-20A7D-000-0
Flow rate
L/min (normal)
0
4
8
12
16
20
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 20
D6F-50A7D-000-0
Flow rate
L/min (normal)
0
10
20
30
40
50
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 50
D6F-70AB71D-000-0
Flow rate
L/min (normal)
0
20
40
60
70
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
43024
(A810)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 100
20
D6F-A7D/-AB71D
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-10A7D-000-0
Flow Range (See note 1.)
0 to 10L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Quick joint P10
Electrical Connection
Four-pin connector
D6F-20A7D-000-0
0 to 20 L/min
D6F-50A7D-000-0
0 to 50 L/min
Quick joint P14
Power Supply
3.0 to 3.6 VDC
Current Consumption
10 mA max. with no load, Vcc = 3.3 VDC, GND = 0 VDC, 25°C
Resolution
15 bit
Accuracy (See note 3.)
±5%RD (10%F.S. ≤ Flow rate < 25%F.S.)
±3%RD (25%F.S. ≤ Flow rate ≤ 100%F.S.)
Response time
90 ms max.
Repeatability (See note 4.)
0.3 %RD
Interface (See note 5.)
I2C
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
0.3%RD
Maximum Allowable Withstand Pressure
100 kPa
Pressure Drop (See note 4.)
0.034 kPa
Operating Temperature (See note 6.)
–10 to +60°C
D6F-70AB71D-000-0
0 to 70 L/min
0.083 kPa
±5%RD (10L/min ≤ Flow rate < 20L/min)
±3%RD (20L/min ≤ Flow rate ≤ 70L/min)
0.5%RD
1.3%RD
0.28 kPa
0.57 kPa
Operating Humidity (See note 6.)
35 to 85%RH
Storage Temperature (See note 6.)
–30 to +80°C
Storage Humidity (See note 6.)
35 to 85%RH
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
57.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Note: 5.
Note: 6.
Note: 7.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
-10 ≤ Operating Temperature ≤ 60°C
Reference (typical)
Refer to the MEMS Flow Sensor D6F-A7D/-AB71D User's Manual for details.
With no condensation or icing.
The following custom options are available.
Ask your OMRON representative for details.
- Temperature measurement
- Address settings (up to four addresses)
- Fault detection
- Threshold setting
64.4 g
Communication
Serial Interface
Master/Slave
Speed mode
I2C
Slave / Address:
HEX : 0x6C
BIN : 110_1100 (7bit)
Fast Mode 400kHz
Signal
SCL
Serial Clock
SDA
Data Signal
● Evaluation Board (Sold separately)
The D6F-A7D/-AB71D MEMS flow sensor can be connected to the OMRON sensor evaluation board.
The following three platforms are supported, and evaluation can easily be performed by connecting the flow sensor, evaluation board,
and harness to the platform.
Platform
Evaluation board
For connecting to
Raspberry Pi
(See note 1.)
2JCIE-EV01-RP1
For connecting to Arduino
(See note 2.)
2JCIE-EV01-AR1
For connecting to ESP32
Feather
(See note 3.)
2JCIE-EV01-FT1
Connection harness (between the
evaluation board and sensor)
MEMS flow sensor
Sample code
https://github.com/omrondevhub/d6f-2jcieev01-raspberrypi
2JCIE-HARNESS-03
D6F-10A7D-000-0
D6F-20A7D-000-0
D6F-50A7D-000-0
D6F-70AB71D-000-0
https://github.com/omrondevhub/d6f-2jcieev01-arduino
https://github.com/omrondevhub/d6f-2jcieev01-arduino
For more information about the evaluation board, please visit the following URL.
(https://components.omron.com/sensor/evaluation-board/2jcie)
Note: 1. Raspberry Pi is a registered trademark of the Raspberry Pi Foundation.
Note: 2. Arduino is a registered trademark of Arduino LLC and Arduino SRL.
Note: 3. Feather is a registered trademark of Adafruit Industries LLC.
21
D6F-A7D/-AB71D
Dimensions
MEMS Flow Sensor
(Unit: mm)
CAD Data Please visit our CAD Data website, which is noted on the last page.
● MEMS Flow Sensors
D6F-10A7D-000-0
D6F-20A7D-000-0
D6F-50A7D-000-0
CAD Data
Lot No. Display
A
Recommended Quick joint male P10 type
9 max.
A
1.6 max
2.5±0.05
2 min.
(4.4)
84.6±0.5
X
X
2 min.
R0.4
R0.4
(60.6)
(66.6)
10 +0
-0.05 dia.
17 dia.
20 dia. max.
12.85±0.05 dia.
C0.1
(34.9)
Y
B
2.5
C0.3
+0.25
-0
C0.5
CROSS X-X
B
If using a Rc3/8 converter joint, the following is recommended.
REGAL JOINT CO., LTD http://www.rgl.co.jp/
Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM10
O ring: O ring P10 fluororubber (material)
(7.9)
30°
20±0.5 dia.
30±0.5
17±0.5 dia.
Description Y
+0.1
6
13 -0.05 dia.
3±0.15
0.9±0.5
Note
C0.5 (circumference)
R2 (circumference)
Note 1. Note . The Port type of pipe fitting based on “Quick Joint P10 Type”.
* P10 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P10 of JIS B 2406.
* Please obtain a male joint separately.
30±0.5
C0.5 (circumference)
Note 2. Use the following connectors to connect to the Sensor.
Connector
:GHR-04V-S (JST)
Terminals
:SSHL-002T-P0.2 (JST)
Wires
:AWG26 to AWG30
Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND
CROSS A-A (B-B)
D6F-70AB71D-000-0
CAD Data
Lot No. Display
20.5±0.2
A
Recommended Quick joint male P14 type
2-2.6 dia. Depth 6.5
9 max.
A
20.5±0.2
25.8±0.2
1.6 max
2.5±0.05
2 min.
22 dia.
26 dia. max.
Two,
X
R0.4
(4.4)
84.6±0.5 (64.5)
(66.6) (60.6)
25.8±0.2
X
2 min.
14
R0.4
+0
-0.05 dia.
17.85±0.05 dia.
4±0.1 dia.
C0.1
30.9±0.5
(34.8)
Recommended
Installation
Dimensions
from back side
(See note 2.)
B
Y
B
30±0.5
22±0.5 dia.
+0.1
18 -0.05dia.
3±0.15
0.9±0.5
Note 1
C0.5 (circumference)
R2 (circumference)
C0.5 (circumference)
6
CROSS A-A (B-B)
+0.25
-0
Description Y
If using a Rc3/8 converter joint, the following is recommended.
REGAL JOINT CO., LTD http://www.rgl.co.jp/
Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM14
O ring: O ring P14 fluororubber (material)
(7.9)
26±0.5 dia.
2.5
C0.5
CROSS X-X
30°
C0.3
32±0.5
30±0.5
Note 1. The Port type of pipe fitting based on “Quick Joint P14 Type”.
* P14 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P14 of JIS B 2406.
* Please obtain a male joint separately.
Note 2. To mount the Sensor with 2.6-dia. holes, use P-type
self-tapping screws with a nominal diameter of 3 mm and
tighten them to a torque of 1.2 N·m max.
The screw threads must engage for 5.5 mm min.
Note 3. Use the following connectors to connect to the Sensor.
Connector
:GHR-04V-S (JST)
Terminals
:SSHL-002T-P0.2 (JST)
Wires
:AWG26 to AWG30
Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND
22
D6F-AB71
MEMS Flow Sensor
Reduction of Piping Time by Quick Joint
Connection
• Reduce the influence of pulsation flow by bypass flow path
• Compact size of 30 × 84.6 × 32 mm (H × W × D).
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
Output Voltage Characteristics
MEMS Flow Sensor
Quick joint P14
D6F-30AB71-000
Applicable fluid
Air
Flow rate range
Model
0 to 30 L/min
D6F-30AB71-000
0 to 70 L/min
D6F-70AB71-000
Accessory (Sold separately)
Type
6.0
Output voltage (V)
Flow Port Type
D6F-CABLE1
Pin No.
Connector
1.0
6
12
18
24
30
56
70
D6F-70AB71-000
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0
1: Vcc
2: Vout
3: GND
53398-03** (Made by Molex Japan)
Use the following connectors for connections to the D6F:
Housing
51021-0300 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
1:Vcc 2:Vout
2.0
Flow rate (L/min)
Output voltage (V)
D6F-30AB71-000
D6F-70AB71-000
3.0
0
Note: Refer to Accessories for the D6F Series on page 38.
Connections
4.0
0.0
Model
Cable
5.0
3:GND
Enlarged View
14
28
42
Flow rate (L/min)
D6F-30AB71-000
Flow rate
L/min (normal)
0
6
12
18
24
30
Output voltage
V
1.00
±0.12
1.25
±0.12
1.91
±0.12
2.75
±0.12
3.78
±0.12
5.00
±0.12
D6F-70AB71-000
Flow rate
L/min (normal)
0
14
28
42
56
70
Output voltage
V
1.00
±0.12
1.43
±0.12
2.25
±0.12
3.14
±0.12
4.06
±0.12
5.00
±0.12
Measurement conditions: Power-supply voltage 12±0.1 VDC, ambient temperature 25±5°C and ambient humidity 35 to 75%RH.
23
D6F-AB71
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-30AB71-000
Flow Range (See note 1.)
D6F-70AB71-000
0 to 30 L/min
0 to 70 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
Quick joint P14
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
Current Consumption
15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ min.)
Accuracy
±3%F.S. (25°C characteristic)
Repeatability (See note 3.)
±0.3%F.S.
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
100 kPa
Pressure Drop (See note 3.)
0.88 kPa
Operating Temperature (See note 4.)
–10 to +60°C
Operating Humidity (See note 4.)
35 to 85%RH
Storage Temperature (See note 4.)
–30 to +80°C
Storage Humidity (See note 4.)
35 to 85%RH
3.49 kPa
Temperature Characteristics
±3%F.S. for 25°C characteristic at an ambient temperature of –10 to +60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
75 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
(Unit: mm)
CAD Data Please visit our CAD Data website, which is noted on the last page.
● MEMS Flow Sensors
D6F-30AB71-000
D6F-70AB71-000
CAD Data
Lot No. Display
20.5
Recommended Quick joint male P14 type
A
A
84.6
25.8
9 max.
1.6 max
2.5±0.05
2 min.
(64.5)
(66.6)
(60.6)
X
X
2 min.
R0.4
(3.7)
R0.4
B
22 dia.
26 dia. max.
14
+0
-0.05 dia.
17.85±0.05 dia.
(6)
(33.4)
30.9
C0.1
Y
C0.3
2.5
+0.25
-0
C0.5
CROSS X-X
2-2.6 dia Depth 6.5 (See note 2.)
26 dia.
22 dia.
18 +0.1
-0.05 dia.
3±0.15
See note 1.
0.9 C0.5 (circumference)
R2 (circumference)
C0.5 (circumference)
6
CROSS A-A
30
32
Note 1. The flow path inlet and outlet ports conform to P14-type female
quick-connect joints.
(The tube inlet and outlet ports have the same shape.)
* P14 is the number of an O-ring specified in JIS B 2401.
* The O-ring groove in the male joint must conform to P14 in JIS B 2406.
* Please obtain a male joint separately.
Note 2. To mount the Sensor with 2.6-dia. holes, use P-type self-tapping screws with
a nominal diameter of 3 mm and tighten them to a torque of 1.2 N·m max.
The screw threads must engage for 5.5 mm min.
Note 3: Use the following connectors to connect to the Sensor.
Connector
: GHR-04V-S (JST)
Terminals
: SSHL-002T-P0.2 (JST)
Wires
: AWG26 to AWG30
Circuit numbers : 1. Vcc, 2. SDA, 3. SCL, and 4. GND.
24
Description Y
If using a Rc3/8 converter joint, the following is recommended.
REGAL JOINT CO., LTD http://www.rgl.co.jp/
Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM14
O ring: O ring P14 fluororubber (material)
30
30°
D6F-P
MEMS Flow Sensor
A Compact, High-Acuracy Flow
Sensor with Superior Resistance
to Environments.
• Anti-dust performance is improved using the Cyclon method.
• A full lineup of models with different connector types: bamboo
joints, lead terminals for direct mounting on-board, and manifolds.
• High accuracy of ±5% FS.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
MEMS Flow Sensor
Flow Port Type
Connection
Applicable fluid
Flow Rate Change
0 to 0.1 L/min
Lead terminals
Bamboo joint
D6F-P0010A1
Air
0 to 1 L/min
Connector
Manifold
Model
D6F-P0001A1
D6F-P0010A2
D6F-P0010AM2
Accessory (Sold separately)
Type
Model
D6F-CABLE2
Cable
D6F-CABLE2-L
Note: Refer to Accessories for the D6F Series on page 38.
Output Voltage Characteristics
D6F-P0010A1/-P0010A2/-P0010AM2
3.0
3.0
2.5
2.5
Output voltage (V)
Output voltage (V)
D6F-P0001A1
2.0
1.5
1.0
0.5
0.0
2.0
1.5
1.0
0.5
0.0
0
0.02
0.04
0.06
Flow rate (L/min)
0.08
0.10
0
0.25
1
Flow rate
L/min (normal)
0
Output voltage
0.50
0.90
1.30
1.70
2.10
2.50
Output voltage
0.50
1.60
2.10
2.31
2.50
V
±0.10
±0.10
±0.10
±0.10
±0.10
±0.10
V
±0.10
±0.10
±0.10
±0.10
±0.10
0.02
0.04
0.06
0.08
0.10
Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
Flow rate
L/min (normal)
0.5
0.75
Flow rate (L/min)
0
0.25
0.50
0.75
1.00
Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
25
D6F-P
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-P0001A1
Flow Range (See note 1.)
0 to 0.1 L/min
Calibration Gas (See note 2.)
Air
D6F-P0010A1
D6F-P0010A2
Bamboo joint
Flow Port Type
Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
Electrical Connection
Lead terminals
Power Supply
4.75 to 5.25 VDC
Current Consumption
15 mA max. with no load and a Vcc of 5.0 V
0.5 to 2.5 VDC (Load resistance: 10 kΩ)
Accuracy
±5% FS (25°C characteristic)
Repeatability (See note 3.)
±1.0% FS
Output Voltage (Max.)
3.1 VDC (Load resistance: 10 kΩ)
±0.4% FS
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
10 VDC
4 VDC
Case
PBT
Manifold
Three-pin connector
Output Voltage
Rated Output Voltage
D6F-P0010AM2
0 to 1 L/min
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure (See note 3.)
50 kPa
Pressure Drop (See note 3.)
0.005 kPa
0.19 kPa
0.67 kPa
Operating Temperature (See note 4.) −10 to +60°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to +80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±5% FS for 25°C characteristic at an ambient temperature of -10 to +60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
8.5 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
8.0 g
Tubing
You can measure large flows by mounting the Sensor on a bypass.
D6F-P
Flow Sensor
P1
P2
Resistance to flow
Mounting Direction
Bamboo joint Sensor
26
Manifold-type Sensor
D6F-P
MEMS Flow Sensor
Connections/Dimensions
(Unit: mm)
CAD Data Please visit our CAD Data website, which is noted on the last page.
● Lead Terminals
Two, 3-dia.
through hole
10
23.3
Two, 4.9 dia.
2.6 dia.
11.7
7.3
7.2
Two, 1.1 dia.
13.5
4.76
Three, 1.3-dia. lands
Label
2.54
MADE IN JAPAN
D6F
27.2
CAD Data
Label: Gives model and lot numbers.
D6F-P0001A1/D6F-P0010A1
Three, 0.8-dia.
through holes
5.04
7.6±0.2
14
Recommended Dimensions for
Connector Mounting Holes
(Bottom view)
16.2
6
1.2
1.7
17.2
13.5
1.5
Two, R: 1.4
Connector
XG8V-0344
(manufactured
by OMRON)
A
9.8
6
2.8 dia.
3. GND
7.2
2.54
13.2
1. Vcc
5.08
2. Vout
Detailed View of A
4.76
● Connectors
CAD Data
D6F-P0010A2
Label: Gives model and lot numbers.
10
23.3
11.7
Two, 4.9 dia.
2.6 dia.
MADE IN JAPAN
D6F
27.2
A
7.3
Two, 1.1 dia.
1.Vcc
7.6±0.2
14
Label
2.Vout
16.2
8.5
6
3.GND
1.2
Detailed View of A
1.7
8.5
13.5
1.5
Two, R: 1.4
17.2
2.8 dia.
13.2
D6F-P0010AM2
1±0.1 dia.,
Depth: 2.4±0.1
1: Vcc
2: Vout
3: GND
Connector SM03B-SRSS-TB (made by J.S.T. Mfg. Co.)
22
18
6.7±0.1 *1
8
2
0
Two, 4−0.05
dia.
B
3.5 dia.
1+0.1
0
27.2 14±0.05
22.1
A
6.4 9.6
2-R6
Two, C0.3
(entire circumference)
6
3.GND
2.Vout
1.Vcc
2.7±0.1
0.3±0.1
0.3±0.1
Detailed View of A
Detailed View of B
Grooves to stop rotation
Connector Details
Lot number label
*1. Recommended Installation Dimensions
O-ring Installation Hole Dimensions
Depth: 2.6 to 3.0
6.7±0.1
C0.4 (entire circumference)
Two, 7 +0.5
dia.
0
M3 threaded
14±0.05
CAD Data
Pin No.
7 +0.5
0
The recommended
O-ring is JIS B 2401,
nominal number P4.
Note:
Use one of the following connectors from JST Mfg.
Co., Ltd. to connect to the D6F.
1) Pressure welding connector
Socket: 03SR-3S
Wire: AWG#30
Or
2) Crimp type connector
Contact: SSH-003T-P0.2
Housing: SHR-03V-S
Wire: AWG#32 to #28
Tubes
Install tubes made of materials such as rubber or urethane
so that they will not come out.
For urethane tubes, tubes with an outer diameter of 6 mm
and an inner diameter of 4 mm are recommended.
Soldering Conditions
Use a soldering iron for 5 s at 350°C with a pressure of 100
gf max.
(This applies only to PCB-mounting Sensors.)
27
D6F-PH
MEMS Differential Pressure Sensor
A Compact, High-Acuracy
Differential Pressure Sensor
with Superior
Resistance to Environments.
• High accuracy of ±3% RD
• Linearized and temperature compensated
• Digital output (I2C communication)
• High flow impedance to reduce the influence of
bypass configuration
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
Applicable fluid
(See note 1.)
Differential pressure range
(See note 3.)
Flow Port Type
Bamboo joint
0 to 250 Pa
Manifold
Air
(See note 2.)
Bamboo joint
±50 Pa
Manifold
Bamboo joint
±500 Pa
Manifold
Connection
Lead terminals
Connector
Connector
Lead terminals
Connector
Connector
Lead terminals
Connector
Connector
Model
D6F-PH0025AD1
D6F-PH0025AD2
D6F-PH0025AMD2
D6F-PH0505AD3
D6F-PH0505AD4
D6F-PH0505AMD4
D6F-PH5050AD3
D6F-PH5050AD4
D6F-PH5050AMD4
Note. Models with different slave addresses
are also available. Consult your OMRON representative for details.
Note: 1. The Sensor be calibrated for different gas types. Consult your Omron
representative.
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Note: 3. At standard atmospheric pressure
(1013.25 hPa)
● Accessory (Sold separately)
Type
Cable
Model
D6F-CABLE3
Note. This cable is for connection with the D6F-PH0025AD2, D6F-PH0025AMD2, D6F-PH0505AD4, D6F-PH0505AMD4, D6F-PH5050AD4, and D6F-PH5050AMD4
connector-type models. One side is a connector and the other side is a lead wire.
Note. Refer to Accessories for the D6F Series on page 38.
● Evaluation Board (Sold separately)
The D6F-PH MEMS differential pressure sensor can be connected to the OMRON sensor evaluation board.
The following three platforms are supported, and evaluation can easily be performed by connecting the differential pressure sensor,
evaluation board, and harness to the platform.
Platform
Evaluation board
For connecting to
Raspberry Pi
2JCIE-EV01-RP1
(See note 1.)
For connecting to Arduino
(See note 2.)
(See note 3.)
https://github.com/omrondevhub/d6f-2jcieev01-raspberrypi
2JCIE-EV01-AR1
https://github.com/omrondevhub/d6f-2jcieev01-arduino
2JCIE-EV01-FT1
https://github.com/omrondevhub/d6f-2jcieev01-arduino
Connection harness (between the
evaluation board and D6F-PH)
2JCIE-HARNESS-02
(See note 4.)
2JCIE-HARNESS-03
For connecting to ESP32
Feather
Sample code
(See note 5.)
Compatible differential
pressure sensor D6F-PH
D6F-PH0025AD1
D6F-PH0505AD3
D6F-PH5050AD3
D6F-PH0025AD2
D6F-PH0505AD4
D6F-PH5050AD4
D6F-PH0025AMD2
D6F-PH0505AMD4
D6F-PH5050AMD4
For more information about the evaluation board, please visit the following URL.
(https://components.omron.com/sensor/evaluation-board/2jcie)
For information on how to use the sample code, please refer to the D6F-PH User’s Manual.
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Note: 5.
28
Raspberry Pi is a registered trademark of the Raspberry Pi Foundation.
Arduino is a registered trademark of Arduino LLC and Arduino SRL.
Feather is a registered trademark of Adafruit Industries LLC.
The 2JCIE-HARNESS-02 is a connector on one side and a lead wire on the other. The lead wire must be connected to the D6F-PH for use.
The 2JCIE-HARNESS-03 has connectors on both sides. Both the D6F-PH and the evaluation board can be easily connected using these connectors.
D6F-PH
MEMS Differential Pressure Sensor
Output Characteristics
D6F-PH0505AD3
D6F-PH0505AD4
D6F-PH0505AMD4
70000
70000
60000
60000
Output (count)
Output (count)
D6F-PH0025AD1
D6F-PH0025AD2
D6F-PH0025AMD2
50000
40000
30000
20000
10000
0
0
50
100
150
200
50
13024
(32E0)
40000
30000
20000
10000
0
-50
250
Differential pressure (Pa)
Differential pressure (Pa)
0
Output
1024
(HEX)
(0400)
50000
-30
-10
10
30
50
Differential pressure (Pa)
100
25024
(61C0)
150
37024
(90A0)
200
49024
(BF80)
250
61024
(EE60)
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 250
Dp = Differential pressure, Op = Output
Differential pressure (Pa) -50
-30
-10
0
10
30
50
Output
1024 13024 25024 31024 37024 49024 61024
(HEX)
(0400) (32E0) (61C0) (7930) (90A0) (BF80) (EE60)
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 100 - 50
Dp = Differential pressure, Op = Output
D6F-PH5050AD3
D6F-PH5050AD4
D6F-PH5050AMD4
70000
Output (count)
60000
50000
40000
30000
20000
10000
0
-500
-300
-100
100
300
500
Differential pressure (Pa)
Differential pressure (Pa) -500
-300
-100
0
100
300
500
Output
1024 13024 25024 31024 37024 49024 61024
(HEX)
(0400) (32E0) (61C0) (7930) (90A0) (BF80) (EE60)
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 1000 - 500
Dp = Differential pressure, Op = Output
Note. Change of gas density affects the sensor output.
Change of atmospheric pressure is compensated by the following formula.
Dpeff = Dp × (Pstd / Pamb)
Dpeff: Effective differential pressure
Dp: Differential pressure of the sensor output
Pstd: Standard atmospheric pressure (1013.25 hPa)
Pamb: Actual ambient atmospheric pressure (hPa)
29
D6F-PH
MEMS Differential Pressure Sensor
Characteristics/Performance
D6FD6FD6FD6FD6FD6FD6FD6FD6FPH0025AD1 PH0025AD2 PH0025AMD2 PH0505AD3 PH0505AD4 PH0505AMD4 PH5050AD3 PH5050AD4 PH5050AMD4
Differential pressure range (See note 1) 0 to 250 Pa
±50 Pa
±500 Pa
Calibration Gas (See note 2.)
Air
Bamboo joint
Bamboo joint
Bamboo joint
Maximum outside diameter:
Maximum outside diameter:
Maximum outside diameter:
Port Type
Manifold
Manifold
Manifold
4.9 mm, minimum outside
4.9 mm, minimum outside
4.9 mm, minimum outside
diameter: 4.0 mm
diameter: 4.0 mm
diameter: 4.0 mm
Lead
Four-pin
Four-pin
Lead
Four-pin
Four-pin
Lead
Four-pin
Four-pin
Electrical Connection
terminals
connector
connector
terminals
connector
connector
terminals
connector
connector
Power Supply
2.3 to 3.6 VDC
Current Consumption
6 mA max. with no load and Vcc of 3.3 VDC, GND = 0 VDC, 25°C
Resolution
12 bit
Zero point tolerance (See note 3.)
±0.2 Pa
Span tolerance (See note 3.)
±3% RD
Span shift due to temperature variation < 0.5% RD per 10°C
33 ms typical at 12 bit resolution (50 ms max.)
Response time
The processing time is 6 ms typical at 12 bit resolution.
Gas flow through sensor (See note 5.) 63 mL/min
23 mL/min
100 mL/min
Interface
I2C
Case material
PPS
Degree of Protection
IEC IP40 (Excluding tubing sections.)
Withstand Pressure
10 kPa
Operating temperature (See note 4.)
-20 to +80°C
Operating humidity (See note 4.)
35 to 85 %RH
Storage temperature (See note 4.)
-40 to +80°C
Storage humidity (See note 4.)
35 to 85 %RH
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
5.0 g
5.0 g
5.4 g
5.0 g
5.0 g
5.4 g
5.0 g
5.0 g
5.4 g
Note: 1. At standard atmospheric pressure (1013.25 hPa)
Note: 4. With no condensation or icing.
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Note: 5. Type D6F-PH is based on thermal flow principle. Air flow is needed to
Note: 3. The zero point tolerance and span tolerance are independent uncermeasure the differential pressure.
tainties and add according to the principles of error propagation.
Typical characteristic of air flow by differential pressure is below.
Model
Relation between pressure and flow rate
Flow rate (mL/min)
60
40
20
0
-20
-40
-60
-500
-300
-100
100
300
500
Differential pressure (Pa)
Tubing (Example for Bamboo Joint)
You can use the bypass method to connect and measure the differential pressure.
D6F-PH
Differential pressure sensor
P1
Resistance to flow
30
P2
D6F-PH
MEMS Differential Pressure Sensor
Connections/Dimensions
(Unit: mm)
CAD Data Please visit our CAD Data website, which is noted on the last page.
● Lead Terminals
CAD Data
D6F-PH0025AD1
D6F-PH0505AD3
D6F-PH5050AD3
18
7.05
High pressure side
26
20
16.5
10
Low pressure side
Two, through hole 2 dia
22
Two, 4 dia.
Two, 4.9 dia
6.5 Two, 4 dia.
12 10.5
4
Recommendation size for pin header installation
(tolerrances: ±0.1)
Two, through h
Two, through ole 2.2 dia
hole 2 dia.
16.5
10.3
5
Two, R2
3.35
(2.6)
Pin Header
(3.7)
Four, 0.48 dia.
Three, 2
5.25
Four, through hole 0.8 dia.
Three, 2
3.1
1.2
4:SCL
3:VCC
7.2
2:GND
1:SDA
Tubes
Install tubes made of materials such as rubber, urethane or
nylon so that they will not come out.
For urethane tubes, tubes with an outer diameter of 6 mm
and an inner diameter of 4 mm are recommended.
Soldering Conditions
Use a soldering iron for 5 s at 350°C with a pressure of 100
gf max.
31
D6F-PH
MEMS Differential Pressure Sensor
● Connectors
D6F-PH0025AD2
D6F-PH0505AD4
D6F-PH5050AD4
Note. Use M1.8 panhead screws or tapping screws for installation, and
tighten the screws to a maximum torque of 0.36 N·m.
Use the following connectors to connect to the Sensor.
Connector : GHR-04V-S (made by J.S.T. Mfg. Co.)
Terminals : SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.)
Wires
AWG26 to AWG30
18
7.05
High pressure side
26
20
16.5
10
Two, through hole 2 dia
Low pressure side
22
Two, 4 dia.
Two, 4.9 dia.
12 10.5
Two, 4 dia.
6.5
Two, through
hole 2 dia.
4
10.3
5
2-R2
4:GND
3:SCL
2:SDA
1:VCC
Label: Gives model and lot numbers.
D6F-PH0025AMD2
D6F-PH0505AMD4
D6F-PH5050AMD4
CAD Data
Note: 1. Use M3 screws (round head screws) or tapping screws as the installation screws, and tighten the screws
to a maximum torque of 1.0 N·m.
Note: 2. The outer diameter of screw heads and washers must be 6 mm or less.
Note: 3. The sealing part of the inlet port must have a 7.0-dia. ditch and P4 O-ring. (Compliant with JIS B 2401)
Note: 4. Use the following connectors to connect to the Sensor.
Connector : GHR-04V-S (made by J.S.T. Mfg. Co.)
Terminals : SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.)
Wires
AWG26 to AWG30
Recommended Installation Dimensions
Two, M3
C0.3 (circumference)
High
pressure
side
6.65±0.1
10±0.1 16.3 28±0.1
10±0.05
28±0.05
A
A
Low
pressure
side
through hole
Two, 3.2 dia. +0.1
0
Two, (6 dia.)
(See note 1, 2.)
R0.5
A-A inlet port
Recommended dimensions of O-ring sealing surface
(See note.3)
Inlet port (See note 3.)
4±0.1
Two, 4 dia.±0.1
B
R0.5
10.35
2.5 +0.1
0
(20.7)
2.20±0.07
R0.400
18
R0.400
0.07
2.6 dia. ±0.03
0.07
0.07
0.07
Two, (C0.2)
B
B
7 dia.+0.05
0
(0.05)
(See note 4.)
4: GND
3: SCL
4.7 dia. ±0.05
35
(1.55)
B
2: SDA
1: VCC
Label: Gives model and lot numbers.
5.05
12.45
15.65
32
Detailed View of B
Scale 10:1
CAD Data
D6F-PH
MEMS Differential Pressure Sensor
Electrical connection
Vcc
pull-up resister 2.2 kΩ
SDA
Sensor
(slave)
GND
Vcc 3.3 V
Master
SCL
pull-up resister 2.2 kΩ
Vcc
Communication
Serial Interface
Slave address
I2C
HEX
BIN (7bit)
Speed mode
Signal
0x6C
0b110_1100
Max. 400kHz (Fast Mode)
SCL
Serial Clock
SDA
Data Signal
33
D6F-W
MEMS Flow Sensor
A Compact Sensor That Uses
OMRON’s Unique Flow Path Structure
for High-Performance Flow Velocity*
Measurement.
• Anti-dust performance enhanced by OMRON’s unique three-dimensional
flow path structure.
• High accuracy of ±5% FS.
*
The flow velocity is the value calculated from the mass flow rate in OMRON's specified wind tunnel.
It does not indicate the flow velocity determined by the Measurement Law of JAPAN.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Output Voltage Characteristics
Applicable fluid
Flow rate range
0 to 1 m/s
Air
Model
D6F-W01A1
0 to 4 m/s
D6F-W04A1
0 to 10 m/s
D6F-W10A1
D6F-W01A1
Type
Model
5.0
4.0
3.0
2.0
1.0
6.0
D6F-W CABLE-L
5.0
Note: Refer to Accessories for the D6F Series on page 38.
Connections
2. Vout.
3.0
2.0
1.0
0.0
0.25
0.50
0.75
Flow velocity (m/s)
0.0
1.00
1.0
2.0
3.0
Flow velocity (m/s)
4.0
4.0
3.0
2.0
1.0
0.0
0
D6F-W01A1
D6F-W04A1
D6F-W10A1
4.0
D6F-W10A1
D6F-W CABLE
Output voltage (V)
Cable
6.0
5.0
0.0
0.00
Accessory (Sold separately)
D6F-W04A1
6.0
Output voltage (V)
MEMS Flow Sensor
Output voltage (V)
Ordering Information
2
4
6
Flow velocity (m/s)
8
10
D6F-W01A1
Flow velocity
m/s
3. GND.
Output voltage V
0
1.00±0.2
0.25
0.50
1.35±0.2
0.75
2.01±0.2
3.27±0.2
1.00
5.00±0.2
D6F-W04A1
1. Vcc.
Pin No.
1: Vcc
2: Vout
Enlarged View
3: GND
Connector S3B-ZR-SM2-TF
(made by J.S.T. Mfg. Co.)
Use the following connectors from
J.S.T. Mfg. Co. Ltd. to connect the D6F:
Flow velocity
m/s
Output voltage V
0
1.00±0.2
1.0
2.0
1.58±0.2
4.11±0.2
4.0
5.00±0.2
The flow velocity is the value calculated from the mass flow rate in OMRON’s specified
48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 1, below.
Figure 1: Wind Tunnel
Flow velocity measurement
position
Air volume sensor
48 dia.
Housing: ZHR-3
20.8
Contacts: SZH-002T-P0.5
Wires:
AWG28 to AWG26
Or
Contacts: SZH-003T-P0.5
Wires:
AWG32 to AWG28
3.0
2.88±0.2
60
Measurement conditions: Power supply voltage of 12 VDC, ambient temperature of 25°C, and ambient humidity of 35% to 75%.
D6F-W10A1
Flow velocity
m/s
Output voltage V
0
2.0
4.0
6.0
8.0
10.0
1.00±0.24 1.94±0.24 3.23±0.24 4.25±0.24 4.73±0.24 5.00±0.24
The flow velocity is the value calculated from the mass flow rate in OMRON’s specified
155-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are shown in Figure 2, below.
Figure 2: Wind Tunnel
Air volume sensor Honeycomb flow grate
155 dia.
18
Flow velocity measurement position
10
100
Measurement conditions: Power supply voltage of 12 VDC and ambient temperature of 25°C
34
D6F-W
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-W01A1
Flow Range (See note 1.)
0 to 1 m/s
Calibration Gas (See note 2.)
Air
D6F-W04A1
D6F-W10A1
0 to 4 m/s
Electrical Connection
Three-pin connector
Power Supply
10.8 to 26.4 VDC
0 to 10 m/s
Current Consumption
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±5% FS (25°C characteristic)
Repeatability (See note 3.)
±0.4% FS
Output Voltage (Max.)
5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
26.4 VDC
±6% FS (25°C characteristic)
Rated Output Voltage
6 VDC
Case
PPS
Degree of Protection
IEC IP40 (except for flow inlet and outlet)
Operating Temperature (See note 4.) −10 to 60°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±5% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
6.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 25°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
(Unit: mm)
CAD Data Please visit our CAD Data website, which is noted on the last page.
● MEMS Flow Sensors
D6F-W01A1
D6F-W04A1
D6F-W10A1
CAD Data
9
Mounting Hole Dimensions
20
3.2±0.2
1.2
2.6
8
Two, R: 1.6
2.6
1.2
R4
Two, M3 screws
8
4.2±0.2
Flow inlet
Flow outlet
MADE IN JAPAN
5
30.5±0.2
30.5±0.05
5
39 24
19.5
Flow outlet
2 dia., Depth: 2.5
4
3.2 ±0.2 dia.
7
R4
Lot number label
35
D6F-V
MEMS Flow Sensor
A Compact Sensor That Uses
OMRON’s Unique Flow Path Structure
for High-Performance Flow Velocity*
Measurement.
• Anti-dust performance enhanced by OMRON’s unique
three-dimensional flow path structure.
• Extremely compact, measuring only 24 × 14 × 8 mm.
*
The flow velocity is the value calculated from the mass flow rate in OMRON's specified wind tunnel. It does
not indicate the flow velocity determined by the Measurement Law of JAPAN.
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 39.
Ordering Information
Output Voltage Characteristics
D6F-V03A1
MEMS Flow Sensor
Flow velocity range
Air
0 to 3 m/s
Model
D6F-V03A1
Accessory (Sold separately)
Type
Model
D6F-CABLE2
Cable
D6F-CABLE2-L
Note: Refer to Accessories for the D6F Series on page 38.
Connections
D6F-V03A1
2. Vout.
1. Vcc.
3. GND.
2.5
Output voltage (V)
Applicable fluid
2.0
1.5
1.0
0.5
0.0
0.0
0.75
1.5
2.25
Flow velocity (m/s)
3.0
D6F-V03A1
Flow velocity
m/s
0
0.75
Output voltage
V
0.5±0.15
0.7±0.15
1.5
1.11±0.15 1.58±0.15
3
2±0.15
The flow velocity is the value calculated from the mass flow rate in OMRON’s
specified 48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of Japan. The wind tunnel conditions are
shown in Figure 1 below.
Figure 1: Wind Tunnel
Flow velocity
Air volume sensor measurement position
Enlarged View
Pin No.
3: GND
Connector
Mesh
48 dia.
1: Vcc
2: Vout
SM03B-SRSS-TB (made by J.S.T. Mfg. Co.)
Use the following connectors from J.S.T. Mfg. Co. Ltd. to connect
the D6F:
• Pressure-welded Connectors
Socket: 03SR-3S
Wires: AWG30
Or
• Crimp Connectors
Contact: SSH-003T-P0.2
Housing: SHR-03V-S
• Wires: AWG32 to AWG28
36
2.25
23.6
60
Measurement conditions: Power supply voltage of 3.3 VDC, ambient temperature of 25°C, and dry air.
D6F-V
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-V03A1
Flow Range (See note 1.)
0 to 3 m/s
Calibration Gas (See note 2.)
Air
Electrical Connection
Three-pin connector
Power Supply
3.15 to 3.45 VDC
Current Consumption
15 mA max. with no load, with a Vcc of 3.3 VDC, and at 25°C
Output Voltage
0.5 to 2 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy
±10% FS (25°C characteristic)
Repeatability (See note 3.)
±1.5% FS
Output Voltage (Max.)
2.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
12 VDC
Rated Output Voltage
3 VDC
Case
PBT
Degree of Protection
IEC IP40 (except for flow inlet and outlet)
Operating Temperature (See note 4.) −10 to 60°C
Operating Humidity (See note 4.)
35% to 85%
Storage Temperature (See note 4.)
−40 to 80°C
Storage Humidity (See note 4.)
35% to 85%
Temperature Characteristics
±20% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
5.3 g
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Volumetric flow rate at 25°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
(Unit: mm)
CAD Data Please visit our CAD Data website, which is noted on the last page.
● MEMS Flow Sensors
D6F-V03A1
CAD Data
Lot number label
Three, R0.5
22
21
3.1 ±0.1 dia.
3.6 ±0.1 dia.
16
4
(3.7)
13
11
2
14
0.8
4.4
1.6
Flow inlet
15.2
18.2
24
Three, R1.8
8
Flow outlet
37
Accessories for the D6F Series
Dimensions
(Unit: mm)
CAD Data Please visit our CAD Data website, which is noted on the last page.
● Cable (Sold separately)
D6F-CABLE1
Brown wire
Black wire
CAD Data
1. Vcc
2. Vout
3. GND
100±15
Blue wire
200±35
Connector :51021 (Manufactured by Molex, LLC)
Terminal :50079 (Manufactured by Molex, LLC)
Wire
:0.14SQ
D6F-CABLE2
CAD Data
White wire
Black wire
15±3
Red wire
180±10
(5)
D6F-CABLE2-L
White wire
Black wire
6-(9)
3: GND
2: Vout
1: Vcc
Contact :SSH-003T-P0.2 (Manufactured by J.S.T. Mfg. Co., Ltd.)
Housing :SHR-03V-S (Manufactured by J.S.T. Mfg. Co., Ltd.)
Wire
:AWG#30
Red wire
(300)
5-(300)
1980±200
(15)
(5)
CAD Data
3: GND
2: Vout
1: Vcc
Contact :SSH-003T-P0.2 (Manufactured by J.S.T. Mfg. Co., Ltd.)
Housing :SHR-03V-S (Manufactured by J.S.T. Mfg. Co., Ltd.)
Wire
:AWG#30
D6F-CABLE3
CAD Data
Black wire
Red wire
Blue wire
15±3
1. Vcc
2. SDA
3. SCL
4. GND
Yellow wire
660±10
730±10
(5)
750±35
Contact :SSHL-002T-P0.2 (Manufactured by J.S.T. Mfg. Co., Ltd.)
Housing :GHR-04V-S (Manufactured by J.S.T. Mfg. Co., Ltd.)
Wire
:AWG#28
D6F-W CABLE
CAD Data
D6F-W CABLE-L
CAD Data
Blue wire
Black wire
5±1
GND: Blue
Vout: Black
Vcc: Brown
50±10
30±10 100±10
Contact :SZH-002T-P0.5 (Manufactured by J.S.T. Mfg. Co., Ltd.)
Housing :ZHR-3 (Manufactured by J.S.T. Mfg. Co., Ltd.)
Wire
:AWG#26
Brown wire
15±3
(50)
(1900)
(15)
1980±200
(5)
Contact :SZH-002T-P0.5 (Manufactured by J.S.T. Mfg. Co., Ltd.)
Housing :ZHR-3 (Manufactured by J.S.T. Mfg. Co., Ltd.)
Wire
:AWG#26
● Quick fastener (Sold separately)
● Pipe fittings (Sold separately)
D6F-FASTENER-P10 (for P10)
D6F-PLG1 (for P10)
Return direction
32±1
2.5
16.5±2
11.5±1
Rolling direction
Contact 1
Contact 2
Contact 3
(17.7)
3.3
1
2-R2
4-R1.5
10 dia.
R8.5
R8.5
11
20±0.5 dia.
11 dia.
17 dia.
1
14
2-R2
CAD Data
“10” is
engraved
here.
3
6±0.15
12±0.15
3±0.15
8-R2.5
8±0.3
15±1
2-R1
t=0.8±0.04
CAD Data
38
Common Precautions for the D6F Series
Safety Precautions
Precautions for Correct Use
● Sensor Applications
The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device
safety through measures such as fail-safe designs, redundant
designs, and regular inspections.
•Safety devices for ensuring safety for persons
•Transportation equipment control (such as applications to
stop operation)
•Aviation and space equipment
•Nuclear power equipment
Do not use the D6F for applications in which D6F operation
would directly affect human life.
● Fluids, Pipe Mounting and Sensor Installation
All D6F Models
(1) Use clean fluids. Install a filter or mist separator on the
inflow pipe. Failure to do so may result in malfunction or
changes in characteristics due to dust or mist. This does not
apply to the D6F-W, D6F-V, D6F-P and D6F-PH.
(2) Do not use corrosive gases other than the specified applicable fluids (such as chlorine, sulfur, acid,or alkali) . Doing so
may cause product failure.
(3) The specified performance may not be obtained if the D6F is
used for fluids other than the specified applicable fluids.
(4) After removing the Sensor from the package, do not allow
foreign particles to enter the piping. Foreign particles in the
piping may cause product failure.
(5) Install the sensor so that the fluid flows in the direction indicated by the arrow on the Sensor. Correct measurements
cannot be obtained if the fluid flows in the wrong direction.
This does not apply to the D6F-V, D6F-P and D6F-PH.
(6) It is recommended that the Sensor (except for the D6F-A3)
be mounted horizontally. If it is not mounted horizontally, an
error of ±1% FS or higher may result.
(7) Install the Sensor on a flat surface. Incorrect installation may
damage the Sensor and make it impossible to obtain correct
measurements.
(8) Make sure that the power to all equipment is turned OFF
before you install the Sensor. Installing the Sensor while the
power supply is ON may result in electrical shock or abnormal operation.
(9) Always check operation after installation.
(10) Do not drop the Sensor or disassemble the cover.
D6F-A1
(1) Make sure that pipes with bamboo joints are airtight. Correct
measurements cannot be obtained if there is leakage from
joints.
D6F-N2/-L2
(1) Use the Rc 1/4 tapped threads for the pipes, and tighten the
threads to a maximum torque of 5 N•m. Tightening beyond
this value may result in fractures, which can cause leaks.
Apply a suitable amount of pipe sealer. Do not apply sealer
on the first two threads from the end of the threaded section.
When you tighten the pipes, do not allow foreign matter or
oil on the joint area.
(2) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
D6F-A3
(1) When installing the pipes, use M5 screws for the joints and
tighten to a torque of 1.5 N•m maximum. Use sealing tape to
make the joints airtight. Incorrect installation may make it
impossible to obtain correct measurements.
(2) It is recommended that the Sensor be mounted either horizontally or vertically. Mounting the Sensor at an angle may
make it impossible to obtain correct measurements.
(3) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
D6F-A5
(1) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
(2) Install O-rings to seal the fluid inlet and outlet points. The
recommended O-ring is JIS B 2401, nominal number P5.
Installation Example
OUTLET
O-ring
INLET
D6F-A6
(1) Use the appropriate threads (R1/4, NPT1/8 or NPT1/2) for
the pipes, and tighten the pipes to a maximum torque of 5
N•m. Tightening beyond this value may result in fractures,
which can cause leaks. When you tighten the pipes, do not
allow foreign matter or oil on the joint area. Use a spanner or
adjustable wrench to turn the connecting section (aluminum
alloy) and connect the pipe. Do not place the spanner or
wrench on the Sensor (PPS). Doing so may damage the
Sensor or result in leaks. Apply a suitable amount of pipe
sealer. Do not apply sealer on the first two threads from the
end of the threaded section. When you tighten the pipes, do
not allow foreign matter or oil on the joint area.
(2) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
(2) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
39
Common Precautions for the D6F Series
D6F-A7/-L7/-N7/-A7D/-AB71/-AB71D
D6F-P0010AM2
(1) Use male quick couplings for the piping, and secure them
with the applicable quick fasteners.
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
(2) Do not apply excessive force to the adapter section when
connecting the pipes. If strong force is applied to the connected pipes, or if strong force is applied directly to the
adapter section while holding the Sensor, it may damage
the Sensor or cause leakage.
Installation Example
Use male, P10-type quick-connect joints for the D6F-A7/-L7/N7/-A7D and P14-type quick-connect joints for the D6F-AB71/AB71D.
(2) Attach all tubes so that the fluid flows only in the direction
from the positive side (+) to the negative side (-). Install the
Sensor with the manifold facing downward. Refer to the figure on page 26 for the installation direction.
(3) Use M3 panhead screws or equivalent tapping screws to
mount the Sensor, and tighten the screws to a maximum
torque of 0.59 N•m.
Quick fastener
(4) Install O-rings to seal the fluid inlet and outlet points. The
recommended O-ring is JIS B 2401, nominal number P4.
Installation Example
Male quick couplings
M3 panhead screw or a tappin
screw with the same diameter
Applicable male quick coupling dimensions (Unit: mm)
X
Symbol
P10 model
P14 model
A
+0
10 -0.05 dia.
+0
14 -0.05 dia.
B
12.85 ±0.05 dia.
17.85 ±0.05 dia.
C
20 dia.
26 dia.
D
17 dia. max.
22 dia. max.
X
9 max.
1.6 max.
2.5±0.05
2 min.
2 min.
R0.4
C
D
A
R0.4
B
C0.1
Y
C0.3
2.5
+0.25
-0
C0.5
CROSS X-X
Description Y
Note. There is a possibility that leak damage or faulty of the body occurs when
static load of more than 40 N is applied to 300 mm from the center of
product as fulcrum point.
D6F-P0001A1/-P0010A1/-P0010A2
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
(2) Attach all tubes so that the fluid flows only in the direction
from the positive side (+) to the negative side (-).
Refer to the figure on page 26 for the installation direction.
(3) For PCB-mounting Sensors, perform terminal soldering only
after the Sensor is secured into place on the PCB.
Use a soldering iron for 5 s at 350°C with a pressure of 100
gf max. (This applies only to PCB-mounting Sensors.)
(4) Use M2.6 panhead screws or equivalent tapping screws to
mount the Sensor, and tighten the screws to a maximum
torque of 0.59 N•m.
40
O-ring
D6F-PHAD1/-PHAD2/-PHAD3/-PHAD4
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
(2) Attach all tubes so that the fluid flows only in the direction
from the high pressure side (+) to the low pressure side (-).
(3) Use M1.8 panhead screws or equivalent tapping screws to
mount the Sensor, and tighten the screws to a maximum
torque of 0.36 N•m.
(4) The sensor output is affected with the length of a tube. The
error is less than 1% with a tube (ID:4mm) length up to 800mm.
(5) Connection (D6F-PHAD1/-PHAD3)
•Wire with the correct terminal names and polarities. Incorrect wiring will cause failure of internal components.
•Do not use flow soldering.
•Please solder after fixed on the circuit board by screw.
•Use a soldering iron:
Soldering condition Pressure Max.100gf
Temperature 350 degree C
Time Max. 5s
Common Precautions for the D6F Series
D6F-PHAMD2/-PHAMD4
● Operating Environment
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
Do not use the Sensor in the following locations:
•Locations directly subject to heat radiated from heating equipment
•Locations subject to water or oil
•Locations subject to direct sunlight
•Locations subject to intense temperature changes
•Locations subject to icing or condensation
•Locations subject to excessive vibration or shock
(2) Attach all tubes so that the fluid flows only in the direction
from the high pressure side (+) to the low pressure side (-).
(3) Use M3 screws (round head screws) to install the Sensor,
and tighten them to a maximum torque of 1.0 N•m. The
outer diameter of screw heads and washers must be 6 mm
or less. Check that the Sensor is securely fastened by the
screws.
(4) Seal the sealing part of the inlet port with an O-ring.
The recommended O-ring is JIS B 2401, nominal number
P4.
D6F-W
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
● Countermeasures against Noise
Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
•Allow as much space as possible between the Sensor and
devices that generates high frequencies (such as highfrequency welders and high-frequency sewing machines)
or surges.
•Attach surge absorbers or noise filters to noise-generating
devices that are near the Sensor (in particular, equipment
with inductance, such as motors, transformers, solenoids,
and magnetic coils).
(It also helps to separate pipes and ducts, and to use
shielded cables.)
● Power Supply
•Force of connector terminal is 20 N max. Do not add strength
more than tension of wire bending to connector at wiring.
Install the connector coaxially to the fitting axis with holding
all wires. And pulling angle should be within 15 degrees.
•Use the applicable connectors. Directly soldering the
connection terminals will cause product failure. (except for
the D6F-PH)
•Check the terminal names and polarity and wire the power
supply correctly. Incorrect wiring will cause failure of internal components.
•When using a commercially available switching regulator,
ground the FG (frame ground) and G (ground) terminals.
(2) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
D6F-V
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
(2) Use M3 panhead screws to install the Sensor, and tighten
them to a maximum torque of 0.59 N•m.
(3) This Sensor does not contain any protective circuits. Never
allow the electrical load to exceed the maximum ratings.
Doing so may damage the circuits. Install protective circuits
if required.
(4) Mount the Sensor so that the flow inlet side (the side with
the logo) is perpendicular to the windward side and ensure
that the flow inlet and flow outlet are not blocked in any way.
If the Sensor is not mounted correctly, accurate measurements cannot be made.
● Handling
The sensor is a precision device, and if large shock and load is
applied, it may cause a failure or characteristic change. Do not
drop it, disassemble it, or apply force to the terminals more than
necessary. And please do not use dropped product.
•The sensor shall only be handled in electrostatic discharge protected areas (EPA) under protected and controlled conditions
RoHS Directive
The RoHS mark is displayed on the packing of products for
which the six substances banned by the RoHS Directive have
been abolished (both in processing and in the electronic components mounted to the PCBs).
*
RoHS marking may be terminated if it is later determined that parts that were
previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts.
● RoHS Compliance Criteria
Installation Example
Downwind
Upwind
The following standards are used to determine RoHS compliance for the six banned substances.
(Items to which the RoHS Directive is not applicable are not given.)
•Lead: 1,000 ppm max.
•Hexavalent chromium: 1,000 ppm max.
•Mercury: 1,000 ppm max.
•PBB: 1,000 ppm max.
•Cadmium: 100 ppm max.
•PBDE: 1,000 ppm max.
41
For correct way of use, please check respective User's Manuals below.
1) MEMS Flow Sensor D6F Series User's Manual (Manual No. A286-E1)
2) MEMS Flow Sensor D6F-A7D/-AB71D User's Manual (Manual No. A302-E1)
3) MEMS Flow Sensor D6F-P User's Manual (Manual No. A299-E1)
4) MEMS Flow Sensor D6F-W/D6F-V User's Manual (Manual No. A300-E1)
5) MEMS Flow Sensor D6F-PH User's Manual (Manual No. A288-E1)
Please check each region's Terms & Conditions by region website.
OMRON Corporation
Electronic and Mechanical Components Company
Regional Contact
Americas
https://www.components.omron.com/
Asia-Pacific
https://ecb.omron.com.sg/
Korea
https://www.omron-ecb.co.kr/
Europe
http://components.omron.eu/
China
https://www.ecb.omron.com.cn/
Japan
https://www.omron.co.jp/ecb/
© OMRON Corporation 2016-2021 All Rights Reserved.
In the interest of product improvement, specifications are subject to change without notice.
Cat. No. X211-E1-14
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