E32VF4

R Fiber-Optic System for Sensing Under Vacuum E32-V Omron’s First Complete System for Sensing Under Vacuum H Vacuum rated to 1 x 10--10 Pa S m3/s max. (7.5 x 10 -10 torr S l/s) H The industry’s First 4-Channel Snap-On Fiber Mounting Feature allows ease of use and implementation H A Single-Channel Flange with screw-mounting is also available H Increases process productivity by performing operations inside vacuum chambers H The external fiber can be cut on both ends, allowing customized lengths H Stainless steel and fluoro-resin fiber cables are available for vacuum processes H CE approval Ordering Information J CONFIGURATION EXAMPLE (TYPICAL) To Order a Complete Fiber-Optic System for Sensing Under Vacuum Select: Vacuum chamber E39-F1V Lens Unit D A Flange D Vacuum Fibers Inside vacuum chamber Outside D External Fiber Cable D A Lens Unit (if necessary) D The Appropriate Fiber-Optic Amplifier A pair of E32-T10V A combination of Fibers for outside E32-T51V, E32-T54V, and E32-T84SV Vacuum Fibers E32-VF4 Four-Channel Flange or E32-VF1 One-Channel Flange E3X-NMVV or E3X-NH11 Amplifier Unit J FLANGES Item Part number Four channel E32-VF4 One-channel E32-VF1 J VACUUM FIBERS Item Through-beam, straight model Through-beam, 90° model Through-beam, heat-resistant model Part number E32-T51V 1M E32-T54V 1M E32-T84SV 1M E32-T51V 0.5M E32-T54V 0.5M -- -- E32-V E32-V J FIBERS FOR OUTSIDE Item Part number External Fiber Cable E32-T10V 2M J LENS UNIT Item Part number Long distance lens E39-F1V J AMPLIFIER UNIT W/HIGH-PRECISION SENSING AND TEACH FUNCTION (SOLD SEPARATELY) Item NPN output PNP output Part number E3X-NH11 E3X-NH41 Appearance Light source Red LED (λ = 680 nm) Power supply voltage 12 to 24 VDC ±10%, ripple (p-p) 10% max. Current consumption 75 mA max. Response time 1 ms max. (see note) Output Control output Alarm output NPN open collector, load current: 50 mA max., residual voltage: 1 V max. Sensitivity setting Teaching method Fine sensitivity adjustment Automatic or manual fine threshold adjustment (13 levels) Note: The E3X-NH adopts a new digital sensing algorithm and has the same capacity for detecting minute objects as the conventional E3X-NTj1 (response time of 0.5 ms). J FOUR-CHANNEL AMPLIFIER UNIT WITH TEACH FUNCTION (SOLD SEPARATELY) Item Four-channel Part number E3X-NM11 (NPN output) E3X-NM41 (PNP output) Appearance 33 59 32.2 Light source Red LED (λ = 680 nm) Power supply voltage 12 to 24 VDC ±10%, ripple (p-p) 10% max. Current consumption 150 mA max. Response time 500 µs max. at rated sensing distance Control output PNP or NPN open collector, load current: 100 mA, residual voltage: 1 V max. Timer function (see note) OFF-delay timer (fixed to 40 ms) (independent channel) Teaching confirmation function Indicator (red/green LEDs) and buzzer Remote teaching input Pink and blue (0 V) wires are short-circuited when remote input is ON. (0 V short-circuit current: 1 mA max.) Pink and blue (0 V) wires are not short-circuited when remote input is OFF. (Open or 9 V min.; max. input voltage: 24 V) Response time is 0.5 ms max. when remote input is OFF. Mode Light-ON and Dark-ON switch-selectable Note: 2 It is possible to disable the OFF-delay timer function by using the switch setting. E32-V E32-V J DIGITAL FIBER AMPLIFIER UNIT (SOLD SEPARATELY) Item NPN output PNP output NPN output PNP output Part number E3X-DAN11 E3X-DAN41 E3X-DAN21 E3X-DAN51 Appearance Light source (wavelength) Red LED (660 nm) Supply voltage 12 to 24 VDC ± 10%, ripple (p-p) 10% max. Current consumption 75 mA max. Response time High-speed mode: 250 ms for operation and reset Standard mode: 1 ms for operation and reset Long-distance mode: 4 ms for operation and reset Control output ON/OFF output NPN open collector Load current: 50 mA max. Residual voltage: 1 V max. Monitor output --- PNP open collector Load current: 50 mA max. Residual voltage: 2 V max. NPN open collector Load current: 50 mA max. Residual voltage: 1 V max. PNP open collector Load current: 50 mA max. Residual voltage: 2 V max. Load 1 to 5 VDC, 10 kΩ min. Load resistance 10 kΩ min. Sensitivity setting Teaching or manual method Timer function OFF-delay timer, range: 0 to 200 ms (5 ms increment) 3 E32-V E32-V Specifications J RATINGS/CHARACTERISTICS Flanges Item E32-VF4 E32-VF1 Number of channels Four-channel One-channel Vacuum ratings 1 x 10- 10 Pa S m3/s max. (7.5 x 10 -10 torr S l/s) Ambient operating temperature -- 25°C to 55°C (-- 13°F to 131°F) with no icing Material Aluminum (A5056) Flange seal material Fluoro rubber Weight Approx. 250 g Stainless steel (SS 304) Approx. 220 g Fiber Unit for Outside Item E32-T10V Standard length 2 m (cut freely) Ambient operating temperature -- 25°C to 70°C (-- 13°F to 158°F) with no icing Permissible bending radius 25 mm max. Material Core Acrylic resin Sheath Fluoro-resin Protection tube Black polyethylene Vacuum Fibers Item E32-T51V Sensing method Through-beam Standard length Sensing distance E32-T54V E32-T84SV 1 m (not cut freely) E3X-NM11/NM41 60 mm 40 mm 150 mm E3X-NH11 100 mm 100 mm 400 mm Ambient operating temperature -- 25°C to 120°C (-- 13°F to 248°F) with no icing -- 25°C to 200°C Permissible bending radius 30 mm max. 25 mm max. Material Core Quartz Optical glass Sheath Fluoro-resin Optical glass Protection tube Fluoro-resin Stainless steel (SS 304) Fiber head/ Connection tube Aluminum (A5056), Stainless steel (SS 304) Lens Unit Item E39-F1V Applicable fiber Sensing distance E32-T51V E32-T54V E3X-NM11/NM41 360 mm 240 mm E3X-NH11 700 mm 600 mm Ambient operating temperature -- 25°C to 120°C (-- 13°F to 248°F) with no icing Material Housing Aluminum (A5056) Lens Optical glass 4 E32-V E32-V Dimensions Unit: mm (inch) J FLANGES E32-VF4 49 (1.93) 8 36 (1.42) dia. 24 (0.94) 44 (1.73) dia. (0.31) Flange (vacuum side) Flange (outside) O ring Mounting hole: 38 ±0.5 (1.50 ±0.02) dia. E32-VF1 23 (0.90) 22 (0.87) 22 (0.87) Nut Two, M14 Washer O ring 19 (0.75) Connector Mounting hole: 14.5±0.2 (0.57 ±0.01) dia. 5 E32-V E32-V J VACUUM FIBERS E32-T51V 1.15 (0.05) M4x0.7 dia. M2.6x0.45 Nut Washer 4 (0.16) dia. 3-(0.12) dia. optical fiber 4 (0.16) dia. 2.2 (0.09) dia. -(0.12) 8 (0.31) 3 1.15 (0.05) dia. E32-T54V M2.6x0.45 3 4.5 18 (0.71) Connects to Flange (vacuum side). 26 (1.02) 1,000 or 500 (39.37 or 19.69) 20 (0.79) 30 (1.18) 4 (0.16) 12 15 (0.59) (0.47) 3 (0.12) dia. 1,000 or 500 (39.37 or 19.69) 5 dia. 4 4 (0.16) dia. R9 3 (0.12) dia. 3 (0.12) 4 (0.16) dia. 2.2 (0.09) dia. 26 (1.02) Connects to Flange (vacuum side). E32-T84SV 2-dia. lens 3 (0.12)-dia. sensing head (stainless steel) 14.2 (0.56) 12 (0.47) standard length:1,000 (39.37) 3.5 dia. 30 (1.18) 6 (0.24) 12 (0.47) R8 3 dia. 90° 4 dia. 2.9-(0.11) dia. flexible tube (stainless steel) 4 (0.16) dia. 2.2-(0.09) dia. sleeve 26 (1.02) J MOUNTING BRACKET E39-L54V Mounting Bracket (Sold Separately) 4 (0.16) 0.5 (0.02) 6 8 (0.31) 4.5 (0.18) 4.1 (0.16) 23 (0.90) 15 (0.59) 4.1 (0.16) Material: SS 304 E32-V E32-V Unit: mm (inch) J EXTERNAL FIBER CABLE E32-T10V 2000 (78.74) * * 2.2 (0.09)-dia. optical fiber * Freely cut and connected to the outside Flange or Amplifier Unit. J LENS UNIT E32-F1V 0.5-dia. (0.02) hole 4 (0.16) dia. 8.9 (0.35) 6 (0.24) M2.6 x 0.45 Effective depth: 3.8 (0.15) Spot facing depth: 0.9 (0.04) J AMPLIFIER (SOLD SEPARATELY) E3X-NH11 Note: Operation indicator Threshold indicators The mounting bracket can be attached to side A. (Side A - see note) 7 (0.28) 9.8 (0.39) 10 (0.39) Incident level indicators 58 (2.28) 6 (0.24) Two, 2.4 dia. 8 (0.31) 10.7 (0.42) 32.5 (1.28) 33 (1.30) 4.1 (0.16) 22.4 13 (0.51) (0.88) 16 (0.63) 34.8 (1.37) Two, 3.2(0.13) dia. holes 2.4 (0.09) 4 (0.16) Mounting bracket Cable: Polyvinyl chloride covered cable 4-mm dia. (18/0.12 dia), 4 cores Standard length: 2 m Weight: Approx. 100 g 3.4 (0.13) 22.4 (0.88) 44 (1.73) 16 (0.63) Two, mounting holes 7 E32-V E32-V J AMPLIFIER UNIT (SOLD SEPARATELY) E3X-NM11 E3X-NM41 Operation indicator Stability indicator Note: The mounting bracket can be attached to this side. 7 (0.28) 8.3 (0.33) 10 (0.39) 7 (0.28) 10.8 (0.43) 21.4 (0.84) 32.2 (1.27) 3.5 (0.14) 6.2 (0.24) 59 (2.32) Eight, 2.4 dia. 32.5 (1.28) 33 (1.30) 8 (0.31) 10.7 (0.42) 4.1 (0.16) 7 8.3 (0.28) (0.33) 7 (0.28) 3.8 (0.15) 22.4 (0.88) 16 (0.63) Two, 3.2-dia. holes Two, mounting holes (0.21) Cable: Polyvinyl chloride-covered cable 4-mm dia. (40/0.08 dia), 7 cores Standard length: 2 m Weight: Approx. 200 g 8 22.4 (0.88) 16 (0.63) Mounting bracket 6.1 (0.24) E32-V E32-V J AMPLIFIER E3X-DAj1 Operation indicator (orange) Incident level display Threshold level display The mounting bracket can be attached to this side. 8 10 (0.39) 61 (2.40) 6 Two, 2.4 mm-dia. Mounting Holes 3.3 (0.13) Two, M3 16 32.5 (1.28) 8 10.75 10.7 4.1 16 34.8 22.4 13 Two, 3.2-mm-dia. holes 3.4 22.4 2.4 4 Mounting bracket SUS304 stainless steel 4 mm-dia. vinyl-insulated round cable with 3/4 conductors (40/0.12 mm-dia) Standard length: 2 m 4.4 16 Two, mounting holes 9 E32-V E32-V Engineering Data (with E3X-NM11/NM41 Amplifier Unit) J EXCESS GAIN RATIO VS. DISTANCE CHARACTERISTICS (TYPICAL) E32-T54V E32-T84SV Sensing distance E32-T51V with E39-F1V E32-T51V Sensing distance (cm) Excess gain ratio Excess gain ratio Sensing distance Sensing distance Excess gain ratio E32-T51V E32-T54V with E39-F1V E32-T54V Sensing distance (cm) Sensing distance (cm) J PARALLEL OPERATING RANGE (TYPICAL) E32-T54V E32-T51V E32-T51V with E39-F1V Sensing distance X (cm) Parallel operating range Y (mm) E32-T84SV Sensing distance X (cm) 10 Parallel operating range Y (mm) Parallel operating range Y (mm) E32-T51V E32-T54V E32-T54V with E39-F1V Sensing distance X (cm) E32-V E32-V Engineering Data (with E3X-NH11 Amplifier Unit) J EXCESS GAIN RATIO VS. DISTANCE CHARACTERISTICS (TYPICAL) E32-T54V E32-T51V 8 7 7 6 6 Excess gain ratio Excess gain ratio 8 5 4 3 5 4 3 2 2 1 1 0 50 100 150 200 250 0 300 100 Sensing Distance (mm) E32-T51V + E39-F1V 300 400 E32-T54V - E39-F1V 8 8 7 7 6 Excess gain ratio Excess gain ratio 200 Sensing Distance (mm) 5 4 3 6 5 4 3 2 2 1 0 1000 500 1500 2000 Sensing Distance (mm) 1 0 200 400 600 800 1000 1200 1400 1600 1800 2000 Sensing Distance (mm) 8 7 Excess gain ratio 6 5 4 3 2 1 0 100 200 300 400 500 600 700 Sensing Distance (mm) 11 E32-V E32-V J PARALLEL OPERATING RANGE (TYPICAL) E32-T51V E32-T51V + E39-F1V 150 Parallel operating range (mm) 100 Fiber 50 0 - 50 Fiber with lens - 100 - 150 0 500 1000 1500 2000 Sensing Distance (mm) E32-T54V E32-T54V + E39-F1V 100 80 Parallel operating range (mm) 60 Fiber 40 20 0 - 20 - 40 Fiber with lens - 60 - 80 - 100 0 500 1000 1500 Sensing Distance (mm) E32-T84SV 20 Parallel operating range (mm) 15 10 5 0 -5 - 10 - 15 - 20 500 1000 Sensing Distance (mm) 12 1500 2000 E32-V E32-V Precautions J APPLICATIONS The E32-V Vacuum Fiber Unit is used to detect a variety of objects located in high-vacuum chambers heated up to 120°C (some chambers operate at a maximum temperature of 200°C). J CLEANING Although Flanges, Vacuum Fibers, and Lens Units are cleaned before shipping, clean them with alcohol before use in high-vacuum chambers to make sure there is no foreign matter on them. J ORGANIC SOLVENTS J FOR CONDITIONS OR ENVIRONMENTS NOT SPECIFIED FOR THIS PRODUCT Consult your OMRON representative before attempting an application for: conditions or environments not specified in instruction manuals, and applications insuring safety, including nuclear reactor control, train facilities, aviation facilities, motorized vehicles, furnaces, medical equipment, amusement equipment, and safety equipment. Note: You must allow a sufficient margin between ratings and required performance in addition to providing appropriate fail-safe measures and other safety measures when using the E32-V in applications such as mentioned above. Keep organic solvents away from the E32-V Vacuum Sensor. J EXCESSIVE FORCE The E32-V Vacuum Fiber Unit can resist a maximum force of 29.4 N (3 kgf). Do not impose extreme force, such as pulling force or pressure, on the E32-V Fibers. 13 E32-V E32-V NOTE: DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters to inches divide by 25.4. R OMRON ELECTRONICS LLC OMRON ON--LINE OMRON CANADA, INC. 1-800-55-OMRON Global -- http://www.omron.com USA -- http://www.omron.com/oei Canada -- http://www.omron.com/oci 416-286-6465 One East Commerce Drive Schaumburg, IL 60173 Cat. No. CEDSAX4 11/01 Specifications subject to change without notice. 885 Milner Avenue Scarborough, Ontario M1B 5V8 Printed in U.S.A.