MICROFJ-60035-TSV-TR1 数据手册
DATA SHEET
www.onsemi.com
Silicon Photomultipliers
(SiPM), High PDE and
Timing Resolution Sensors
in a TSV Package
J-Series SiPM Sensors
onsemi’s J-Series low-light sensors feature a high PDE (photon
detection efficiency) that is achieved using a high-volume, P-on-N
silicon foundry process. The J-Series sensors incorporate major
improvements in the transit time spread which results in a significant
improvement in the timing performance of the sensor. J-Series sensors
are available in different sizes (3 mm, 4 mm and 6 mm) and use a TSV
(Through Silicon Via) process to create a package with minimal
deadspace, that is compatible with industry standard lead-free, reflow
soldering processes.
The J-Series Silicon Photomultipliers (SiPM) combine high
performance with the practical advantages of solid-state technology:
low operating voltage, excellent temperature stability, robustness,
compactness, output uniformity, and low cost. For more information
on the J-Series sensors please refer to the website.
ORDERING INFORMATION
See detailed ordering and shipping information on page 11 of
this data sheet.
Table 1. GENERAL PARAMETERS
Parameter (Note 1)
Maximum
Unit
24.2
24.7
V
1
6
V
Operating Voltage (Vop = Vbr + OV))
25.2
30.7
V
Spectral Range (Note 3)
200
900
nm
Breakdown Voltage (Vbr) (Note 2)
Overvoltage (OV)
Minimum
Typical
Peak PDE Wavelength (lp)
420
nm
Temperature dependence of Vbr
21.5
mV/°C
1. All measurements made at 21°C unless otherwise stated.
2. The breakdown voltage (Vbr) is defined as the value of the voltage intercept of a straight line fit to a plot of √I vs V, where I is the current and
V is the bias voltage.
3. The range where PDE > 2.0% at Vbr + 6.0 V.
Table 2. PHYSICAL PARAMETERS
3 mm
Parameter
Active Area
No. of Microcells
Microcell Fill Factor
© Semiconductor Components Industries, LLC, 2017
August, 2021 − Rev. 7
4 mm
30020, 30035
3.07 × 3.07
mm2
6 mm
40035
3.93 × 3.93
60035
mm2
6.07 × 6.07 mm2
30020: 14,410
30035: 5,676
40035: 9,260
60035: 22,292
30020: 62%
30035: 75%
40035: 75%
60035: 75%
1
Publication Order Number:
MICROJ−SERIES/D
J−Series SiPM Sensors
Table 3. PERFORMANCE PARAMETERS
30035
40035
60035
Unit
Overvoltage
+2.5 V
Parameter (Note 4)
+6 V
+2.5 V
+6 V
+2.5 V
+6 V
Unit
PDE (Note 5)
38
50
38
50
38
50
%
Dark Count Rate
50
150
50
150
50
150
kHz/mm2
Gain (anode-cathode)
2.9 × 106
6.3 × 106
2.9 × 106
6.3 × 106
2.9 × 106
6.3 × 106
Dark Current − typical
0.23
1.9
0.35
3.0
0.9
7.5
Dark Current − maximum
0.31
3.00
0.45
4.0
1.25
12.0
110
90
110
180
Rise Time (Note 6) − anode-cathode output
90
Microcell Recharge Time Constant (Note 7)
Capacitance (Note 8) (anode output)
Capacitance (Note 8) (fast output)
Fast Output Pulse Width (FWHM)
Afterpulsing
250
ps
45
48
50
ns
1070
1800
4140
pF
40
70
160
pF
1.5
Crosstalk
mA
1.7
3.0
ns
8
25
8
25
8
25
%
0.75
5.0
0.75
5.0
0.75
5.0
%
30020
Overvoltage
+2.5 V
Parameter (Note 4)
+5 V
Unit
PDE (Note 5)
30
38
%
Dark Count Rate
50
125
kHz/mm2
Gain (anode-cathode)
1.0 × 106
1.9 × 106
Dark Current − typical
0.1
0.45
Dark Current − maximum
0.2
0.72
Rise Time (Note 6) − anode-cathode output
130
160
Microcell Recharge Time Constant (Note 7)
mA
ps
15
ns
1040
pF
Capacitance (Note 8) (fast output)
50
pF
Fast Output Pulse Width (FWHM)
1.4
ns
Capacitance (Note 8) (anode output)
Crosstalk
2.5
7.5
%
Afterpulsing
0.75
5.0
%
4.
5.
6.
7.
8.
All measurements made at 21°C unless otherwise stated.
PDE does not contain afterpulsing or crosstalk, and is quoted at the peak wavelength (lp).
Measured as time to go from 10% to 90% of the peak amplitude and measured over a 1 W series output resistor.
RC charging time constant of the microcell (τ).
Capacitance values are for the complete TSV package.
Table 4. TVS PACKAGE SPECIFICS
3 mm
4 mm
30020, 30035
Package Dimensions
3.16 × 3.16
mm2
6 mm
40035
4.00 × 4.00
60035
mm2
Recommended Operating Temperature Range
−40°C − +85°C
Soldering Conditions
Reflow Solder
Cover Material
Glass
Cover Refractive Index
Moisture Sensitivity Level
Maximum Average Current
6.13 × 6.13 mm2
1.53 @ 436 nm
Tape & reel
MSL3*
Cut tape
MSL4*
10 mA
10 mA
*Please refer to the TSV Handling and Soldering guide for more information on MSL for different delivery options.
www.onsemi.com
2
15 mA
J−Series SiPM Sensors
PERFORMANCE PLOTS
Figure 1. Photon Detection Efficiency (PDE)
(MicroFJ−60035−TSV)
Figure 2. PDE vs. Overvoltage
Figure 3. PDE vs. Crosstalk
(MicroFJ−60035−TSV)
(MicroFJ−60035−TSV)
www.onsemi.com
3
J−Series SiPM Sensors
Figure 4. Gain vs. Overvoltage
(MicroFJ−30035−TSV)
Figure 5. Fast Output Pulse Shape
Figure 6. Standard Output Pulse Shape
(MicroFJ−30035, MicroFJ−40035, MicroFJ−60035
Vbr + 2.5 V, 10 W Sense Resistor)
(MicroFJ−30035, MicroFJ−40035, MicroFJ−60035
Vbr + 2.5 V, 10 W Sense Resistor)
www.onsemi.com
4
J−Series SiPM Sensors
EVALUATION BOARD OPTIONS
SMA BIASING BOARD (MicroFJ−SMA−XXXXX)
circuit schematic is shown in Figure 8. Please consult the
Readout and Biasing Application Note for further
information on biasing. The SMTPA board electrical
schematics are available to download in the AND9808/D.
The MicroFJ−SMA is a printed circuit board (PCB) that
can facilitate the evaluation of the J-Series sensors. The
board has three female SMA connectors for connecting the
bias voltage, the standard output from the anode and the fast
output signal. The output signals can be connected directly
to a 50 W-terminated oscilloscope for viewing. The biasing
and output signal tracks are laid out in such a way as to
preserve the fast timing characteristics of the sensor.
The MicroFJ−SMA is recommended for users who
require a plug-and-play set-up to quickly evaluate J-Series
TSV sensors with optimum timing performance. The board
also allows the standard output from the anode to be
observed at the same time as the fast output. The outputs can
be connected directly to the oscilloscope or measurement
device, but external preamplification may be required to
boost the signal. The table below lists the SMA board
connections. The SMA board electrical schematics are
available to download in the AND9808/D document.
Figure 7. Top View of the SMTPA Board
Showing the Pin Numbering
MicroFJ−SMA−XXXXX
Output
Function
Vbias
Positive bias input (cathode)
Fout
Fast output
Sout
Standard output (anode)
Figure 8. SMTPA Circuit Schematic
PIN ADAPTER (MicroFJ−SMTPA−XXXXX)
The TSV Pin Adapter board (SMTPA) is a small PCB
board that houses the TSV sensor and has through-hole pins
to allow its use with standard sockets or probe clips. This
product is useful for those needing a quick way to evaluate
the TSV package without the need for specialist
surface-mount soldering. While this is a ‘quick fix’ suitable
for many evaluations, it should be noted that the timing
performance from this board will not be optimized and if the
best possible timing performance is required, the
MicroFJ−SMA−XXXXX is recommended. The SMTPA
MicroFJ−SMTPA−XXXXX
Pin No.
Connection
1
Anode
2
Fast output
3
Cathode
4
Ground
5
No connect
www.onsemi.com
5
J−Series SiPM Sensors
CIRCUIT SCHEMATICS
An SiPM is formed of a large number (hundreds or
thousands) of microcells. Each microcell (Figure 9) is an
avalanche photodiode with its own quench resistor and a
capacitively coupled fast output. These microcells are
arranged in a close-packed array with all of the like terminals
(e.g. all of the anodes) summed together (Figure 10). The
array of microcells can thus be considered as a single
photodiode sensor with three terminals: anode, cathode and
fast output, as shown in Figure 11.
Figure 9. Circuit Schematic of the onsemi
SiPM Microcell, showing Details of the
Fast Output
Figure 11. onsemi SiPM Component Symbol
Figure 10. Simplified Circuit Schematic of the onsemi
SiPM showing only a 12 Microcell Example. Typically,
SiPM Sensors have Hundreds or Thousands of
Microcells
TILING OF THE TSV PACKAGE
For the J-Series, onsemi has developed a market-leading,
high-performance package using a TSV process. It is
a chip-scale package that is compatible with lead-free,
reflow soldering processes. The glass cover is ideal for
coupling to scintillators or fibre optic elements.
The dead-space between the sensor active area and the
edge of the package has been minimized, resulting in
a package that can be tiled on 4 sides with high fill-factor.
This allows multiple sensors to be configured into unique
layouts for a wide range of custom applications. The
distance between sensor packages can be as little as 200 mm
when tiled, but actual alignment and placement tolerances
will depend on the accuracy of the user’s assembly process.
An Application Note is available that gives advice on
creating arrays of the TSV sensors.
www.onsemi.com
6
J−Series SiPM Sensors
PACKAGE DIMENSIONS
(All Dimensions in mm)
MicroFJ−300XX−TSV
TOP VIEW
BOTTOM VIEW
Pin Assignments
Pin Number
SIDE VIEW
MicroFJ−300XX−TSV
B1
Anode
B3
Fast output
A1, C3
Cathode
All others
No Connect*
*The ‘No Connect’ pins are electrically isolated and should be soldered to a ground (or bias) plane to help with heat dissipation.
The MicroFJ−300XX−TSV−A2 CAD, and solder footprint, is available to download here.
www.onsemi.com
7
J−Series SiPM Sensors
PACKAGE DIMENSIONS
(All Dimensions in mm)
MicroFJ−40035−TSV
TOP VIEW
BOTTOM VIEW
Pin Assignments
Pin Number
MicroFJ−40035−TSV
B1, C1
Anode
B4, C4
Fast output
A1, D4
Cathode
All others
No Connect*
SIDE VIEW
*The ‘No Connect’ pins are electrically isolated and should be soldered to a ground (or bias) plane to help with heat dissipation.
The MicroFJ−40035−TSV CAD, and solder footprint, is available to download here.
www.onsemi.com
8
J−Series SiPM Sensors
PACKAGE DIMENSIONS
(All Dimensions in mm)
MicroFJ−60035−TSV
TOP VIEW
BOTTOM VIEW
Pin Assignments
Pin Number
MicroFJ−60035−TSV
C1, D1
Anode
A1, F6
Cathode
C6, D6
Fast output
All others
No Connect*
SIDE VIEW
*The ‘No Connect’ pins are electrically isolated and should be soldered to a ground (or bias) plane to help with heat dissipation.
The MicroFJ−60035−TSV CAD, and solder footprint, is available to download here.
www.onsemi.com
9
J−Series SiPM Sensors
MicroFJ−SMA−60035 Board
TOP VIEW
BOTTOM VIEW
SIDE VIEW
The complete CAD for the SMA boards can be downloaded from the website: 3 mm, 4 mm and 6 mm versions.
MicroFJ−SMTPA−60035 Board
TOP VIEW
SIDE VIEW
BOTTOM VIEW
The complete CAD for the SMTPA boards can be downloaded from the website: 3 mm and 6 mm versions.
www.onsemi.com
10
J−Series SiPM Sensors
ORDERING INFORMATION
Table 5. ORDERING INFORMATION
Product Code
Microcell Size
(No. of Microcells)
Sensor
Active
Area
Description
Delivery
Option
(Note 9)
3 mm Sensors
MICROFJ−30020−TSV
20 mm
(14,410)
3.07 × 3.07 mm
4-side tileable, chip scale package with
through-silicon vias (TSV)
TR1, TR
MICROFJ−SMA−30020−GEVB
TSV sensor mounted onto a PCB with
three SMA connectors for bias, standard
output and fast output
PK
MICROFJ−SMTPA−30020−GEVB
TSV sensor mounted onto a pin adapter
board
PK
4-side tileable, chip scale package with
through-silicon vias (TSV)
TR1, TR
MICROFJ−30035−TSV
35 mm
(5,676)
MICROFJ−SMA−30035−GEVB
TSV sensor mounted onto a PCB with
three SMA connectors for bias, standard
output and fast output
PK
MICROFJ−SMTPA−30035−GEVB
TSV sensor mounted onto a pin adapter
board
PK
4-side tileable, chip scale package with
through-silicon vias (TSV)
TR1, TR
4 mm Sensors
MICROFJ−40035−TSV
35 mm
(9,260)
3.93 × 3.93 mm
MICROFJ−SMA−40035−GEVB
TSV sensor mounted onto a PCB with
three SMA connectors for bias, standard
output and fast output.
PK
6 mm Sensors
MICROFJ−60035−TSV
35 mm
(22,292)
6.07 × 6.07 mm
4-side tileable, chip scale package with
through-silicon vias (TSV)
TR1, TR
MICROFJ−SMA−60035−GEVB
TSV sensor mounted onto a PCB with
three SMA connectors for bias, standard
output and fast output
PK
MICROFJ−SMTPA−60035−GEVB
TSV sensor mounted onto a pin adapter
board
PK
9. The two-letter delivery option code should be appended to the order number, e.g.) to receive a MICROFJ−60035−TSV on tape and reel, use
MICROFJ−60035−TSV−TR. The codes are as follows:
PK = ESD Package
TR1 = Tape
TR = Tape and Reel
There is a minimum order quantity (MOQ) of 3000 for the tape and reel (TR) option. Quantities less than this are available on tape (−TR1).
The TR option is only available in multiples of the MOQ.
SensL is a registered trademark of Semiconductor Components Industries, LLC dba “onsemi” or its affiliates and/or subsidiaries in the United
States and/or other countries.
www.onsemi.com
11
onsemi,
, and other names, marks, and brands are registered and/or common law trademarks of Semiconductor Components Industries, LLC dba “onsemi” or its affiliates
and/or subsidiaries in the United States and/or other countries. onsemi owns the rights to a number of patents, trademarks, copyrights, trade secrets, and other intellectual property.
A listing of onsemi’s product/patent coverage may be accessed at www.onsemi.com/site/pdf/Patent−Marking.pdf. onsemi reserves the right to make changes at any time to any
products or information herein, without notice. The information herein is provided “as−is” and onsemi makes no warranty, representation or guarantee regarding the accuracy of the
information, product features, availability, functionality, or suitability of its products for any particular purpose, nor does onsemi assume any liability arising out of the application or use
of any product or circuit, and specifically disclaims any and all liability, including without limitation special, consequential or incidental damages. Buyer is responsible for its products
and applications using onsemi products, including compliance with all laws, regulations and safety requirements or standards, regardless of any support or applications information
provided by onsemi. “Typical” parameters which may be provided in onsemi data sheets and/or specifications can and do vary in different applications and actual performance may
vary over time. All operating parameters, including “Typicals” must be validated for each customer application by customer’s technical experts. onsemi does not convey any license
under any of its intellectual property rights nor the rights of others. onsemi products are not designed, intended, or authorized for use as a critical component in life support systems
or any FDA Class 3 medical devices or medical devices with a same or similar classification in a foreign jurisdiction or any devices intended for implantation in the human body. Should
Buyer purchase or use onsemi products for any such unintended or unauthorized application, Buyer shall indemnify and hold onsemi and its officers, employees, subsidiaries, affiliates,
and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death
associated with such unintended or unauthorized use, even if such claim alleges that onsemi was negligent regarding the design or manufacture of the part. onsemi is an Equal
Opportunity/Affirmative Action Employer. This literature is subject to all applicable copyright laws and is not for resale in any manner.
PUBLICATION ORDERING INFORMATION
LITERATURE FULFILLMENT:
Email Requests to: orderlit@onsemi.com
onsemi Website: www.onsemi.com
◊
TECHNICAL SUPPORT
North American Technical Support:
Voice Mail: 1 800−282−9855 Toll Free USA/Canada
Phone: 011 421 33 790 2910
Europe, Middle East and Africa Technical Support:
Phone: 00421 33 790 2910
For additional information, please contact your local Sales Representative