HBO1500W

DATASHEET Lighting Imaging Telecom Mercury Short Arc Lamps HSH1500PIEO Lamps for Photolithography Description PerkinElmer Optoelectronics is a leading manufacturer of mercury short arc lamps ranging in output power from 1000 to 8000 watts. These lamps are used in the production of printed circuit boards, liquid crystal displays and semiconductors. The HSH Series lamps are used worldwide in microlithography systems manufactured by ASML, Canon, GCA, Nikon, Karl Suss, Ultratech Stepper, and SVG. With extremely high stability, uniform output distribution and extended lamp lifetimes, the HSH Series has become the lamp choice of many of the world’s leading semiconductor manufacturers. PerkinElmer has been a leading manufacturer of high intensity arc lamps for more than 30 years and is a premier lamp supplier for solid state lasers, medical equipment, NASA space systems and microlithography. PerkinElmer has steadily advanced lamp performance from 1000 watts to 8000 watts. With the introduction of new materials and proprietary manufacturing processes, we have extended lamp lifetimes form several hundred hours to more than two thousand hours. The HSH Series provides longer lifetimes, outstanding uniformity, and excellent spectral quality which results in increased throughput, reduced downtime and an overall reduction in the cost of ownership. Applications • Microlithography . www.perkinelmer.com/opto HSH1500PIEO Operational Specifications Description Power Current Voltage Current Ripple Temperature (at base) Lifetime Nominal 1500 watts 65.2 amps (DC 23 volts (DC) 3% 220°C 2250 hours Range 57.5-75 amps (DC) 20-26 volts (DC) Physical Specifications Description Arc Gap Anode Base Cathode Base Specification 4.0 mm (max) M6-P1.0 M10-P1.5 Spectral Output 100 Dimensions Relative Intensity (%) 120 90 80 70 60 50 40 30 20 10 0 250 300 350 400 450 500 550 600 650 700 750 CATHODE (-) END UP Wavelength (nm) Typical Performance Graph 100 241 MAX 90 Relative Intensity (%) 80 70 60 50 40 30 20 10 0 0 500 1000 1500 2000 Ø52 MAX ANODE (+) END DOWN All dimensions are in millimeters. Hours of Operation Notes 1. Lamp must be operated with cathode end up and anode end down. Inclination of lamp axis to vertical must not exceed 10º. Part Number References Used In Replaces ASML 5500/100C, 100D SUV 1500 SIL HBO 1500 W/PIL PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of designing a lamp specifically suited to your needs. For more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto. All values are nominal; specifications subject to change without notice. USA: PerkinElmer Optoelectronics 44370 Christy St. Fremont, CA 94538 Phone: (510) 979-6500 Fax: (510) 687-1140 Europe: PerkinElmer Optoelectronics GmbH Wenzel-Jaksch-Str. 31 65199 Wiesbaden Germany Phone: +49 611 492 0 Fax: +49 611 492 177 Asia: PerkinElmer Optoelectronics 47 Ayer Rajah Crescent #06-12 Singapore 139947 Phone: +65 775 2022 Fax: +65 775 1008 . © 2000 PerkinElmer inc. All rights reserved. DS-184 Rev C 1101 www.perkinelmer.com/opto