ZMID5201/02/03
Datasheet
Inductive Position Sensor IC
Description
Features
The ZMID5201, ZMID5202, and ZMID5203 family of inductive
position sensor ICs are used for absolute rotary or linear motion
sensing in automotive, industrial, medical, and consumer applications. The ZMID520x uses the physical principles of induction in
a wire loop and eddy currents to detect the position of an electrically
conducting target that is sliding or rotating above a set of coils,
consisting of one transmitter coil and two receiver coils.
Position sensing based on inductive principle
The three coils are typically printed as copper traces on a printed
circuit board (PCB). They are arranged such that the transmitter
coil induces a secondary voltage in the receiver coils that depends
on the position of the metallic target above the coils.
Single IC supports on-axis and off-axis rotation, linear motion,
and arc motion sensing
Cost effective; no magnet required
Immune to magnetic stray fields; no shielding required
Suitable for harsh environments and extreme temperatures
Only three wires (ground, supply, output)
Nonvolatile user memory; programming through output pin
High resolution, even for small angle ranges
High accuracy: ≤ 0.2% full scale
9-point user linearization
A signal representative of the target’s position over the coils is
obtained by demodulating and processing the secondary voltages
from the receiver coils. The target can be any kind of metal, such
as aluminum, steel or a PCB with a printed copper layer.
Rotation sensing up to a full turn of 360º
Overvoltage and reverse-polarity protection:
-14V to +18V maximum, depending on product
The ZMID5201/02/03 ICs are fully qualified according to the
automotive standard AEC-Q100 grade 0 (-40°C to 150°C ambient
temperature).
ESD and short-circuit protection
Power or ground loss detection
Facilitates redundant design requirements
Three versions with different output interfaces are available:
ZMID5201: Analog output
ZMID5202: PWM digital output
ZMID5203: SENT digital output
Programmable non-linearity correction
Adaptive gain control supporting a wide range of coil designs
and target displacement
The ZMID5201/02/03 products are safety-related,
intermediate hardware parts supporting ISO26262-compliant
systems in regard to random failures
Available Support
IDT provides Application Modules that demonstrate ZMID520x
position sensing, including rotary, arc, and linear applications.
Application Circuit
Wide operation temperature: -40 C to +150°C
10
Supply voltage: 4.5V to 5.5V
Small 14-TSSOP package
CVT
Typical Applications
Rotary position sensors up to 360°; e.g. steering angle
sensors, potentiometer replacement
Small-angle sensors or arc-motion sensors; e.g. pedal,
vehicle level, or valve sensors
8
13
12
Linear motion sensors; e.g. linear-actuator position sensors,
fluid-level sensors
© 2018 Integrated Device Technology, Inc.
CT
14
Rx
(cos)
Rx
(sin)
1
VDDE
7
+5V
CVE
9
Tx
VDDT
11
EP
EN
R1P
R1N
R2P
ZMID5201/-02/-03
Physical Characteristics
SOUT
VSSE
VDDA
VDDD
TEST_ENA
R2N
TEST_D
4
OUT
6
5
3
GND
CVA
CVD
2
1
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ZMID5201/02/03 Datasheet
Contents
1.
Pin Assignments ...........................................................................................................................................................................................4
2.
Pin Descriptions............................................................................................................................................................................................4
3.
Absolute Maximum Ratings ..........................................................................................................................................................................5
4.
Operating Conditions ....................................................................................................................................................................................6
5.
Electrical Characteristics ..............................................................................................................................................................................7
6.
Circuit Description ........................................................................................................................................................................................9
6.1 Overview..............................................................................................................................................................................................9
6.2 Block Diagram ...................................................................................................................................................................................10
7.
Redundant Connection ...............................................................................................................................................................................11
8.
Protection and Diagnostics .........................................................................................................................................................................12
8.1 I/O Protection.....................................................................................................................................................................................12
8.2 Diagnostics ........................................................................................................................................................................................12
8.3 Functional Safety ...............................................................................................................................................................................12
9.
ZMID5201 Inductive Sensor with Analog Output ........................................................................................................................................13
10. ZMID5202 Inductive Sensor with PWM Output ..........................................................................................................................................16
11. ZMID5203 Inductive Sensor with SENT Output .........................................................................................................................................19
11.1 SENT Protocol ...................................................................................................................................................................................20
12. Programming Options.................................................................................................................................................................................23
13. Operation at High Rotation Speeds ............................................................................................................................................................24
14. Interpolation, Linearity Error Correction ......................................................................................................................................................25
15. Application Examples .................................................................................................................................................................................26
16. Package Outline Drawings .........................................................................................................................................................................28
17. Marking Diagram ........................................................................................................................................................................................28
18. Ordering Information...................................................................................................................................................................................29
19. Revision History..........................................................................................................................................................................................30
List of Figures
Figure 1. Pin Assignments for 14-TSSOP Package – Top View ........................................................................................................................4
Figure 2. Parallel Resonator Circuit ....................................................................................................................................................................8
Figure 3. Coil Design for a Linear Motion Sensor ...............................................................................................................................................9
Figure 4. Block Diagram ...................................................................................................................................................................................10
Figure 5. Application Diagram, Dual Redundant Sensor with Shared Transmit Coil ........................................................................................11
Figure 6. External Components for ZMID5201 Analog Interface with Pull-Down Resistor ...............................................................................13
Figure 7. External Components for ZMID5201 Analog Interface with Pull-up Resistor ....................................................................................13
Figure 8. Example of ZMID5201 Analog Output Transfer Function and Programming Options .......................................................................15
Figure 9. External Components for ZMID5202 PWM Interface with Pull-Up Resistor ......................................................................................16
Figure 10. PWM Signal Range ...........................................................................................................................................................................17
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ZMID5201/02/03 Datasheet
Figure 11. Example of PWM Output Signal ........................................................................................................................................................18
Figure 12. Example of ZMID5202 PWM Output Transfer Function and Programming Options .........................................................................18
Figure 13. External Components for ZMID5203 SENT Interface, Option A ........................................................................................................19
Figure 14. External Components for ZMID5203 SENT Interface, Option B ........................................................................................................19
Figure 15. External Components for ZMID5203 SENT Interface, Option C .......................................................................................................19
Figure 16. SENT Nibble Output for Value = 15DEC..............................................................................................................................................21
Figure 17. SENT Frame......................................................................................................................................................................................21
Figure 18. Example of ZMID5203 Output Transfer Function and Programming Options ...................................................................................22
Figure 19. Relationship between Resolution and Rotational Speed ...................................................................................................................24
Figure 20. Example Setup: Linear Motion ..........................................................................................................................................................26
Figure 21. Example Setup: Arc Motion ...............................................................................................................................................................26
Figure 22. Example Setup: End-of-Shaft Rotation, On-Axis, 1 × 360 ...............................................................................................................26
Figure 23. Example Setup: Side-Shaft Rotation, Off-Axis, 1 × 360 ...................................................................................................................26
Figure 24. Example Setup: Side-Shaft Rotation, Off-Axis, 2 × 180 ...................................................................................................................27
Figure 25. Example Setup: Side-Shaft Rotation, Off-Axis, 6 × 60 .....................................................................................................................27
List of Tables
Table 1.
Pin Descriptions...................................................................................................................................................................................4
Table 2.
Absolute Maximum Ratings .................................................................................................................................................................5
Table 3.
Operating Conditions ...........................................................................................................................................................................6
Table 4.
ZMID5201/02/03 Electrical Characteristics..........................................................................................................................................7
Table 5.
Coil Specifications ...............................................................................................................................................................................8
Table 6.
ZMID5201 Analog Output Buffer Characteristics...............................................................................................................................14
Table 7.
ZMID5202 PWM Output Buffer Characteristics .................................................................................................................................16
Table 8.
ZMID5203 SENT Output Buffer Characteristics ................................................................................................................................20
Table 9.
SENT Nibble Output for Value = 0DEC................................................................................................................................................20
Table 10. SENT Tick Length .............................................................................................................................................................................21
Table 11. Programming Options Overview ........................................................................................................................................................23
Table 12. Maximum Output Data Rate ..............................................................................................................................................................24
Table 13. Resolution at Different Rotation Speeds ...........................................................................................................................................25
Table 14. Linearity Correction Points ................................................................................................................................................................25
Table 15. Examples of Resolution Differences Depending on Product .............................................................................................................27
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ZMID5201/02/03 Datasheet
1. Pin Assignments
The ZMID5201/02/03 ICs are available in a 14-TSSOP RoHS package.
Figure 1.
Pin Assignments for 14-TSSOP Package – Top View
Note: The SOUT pin is referred to as the AOUT pin for the ZMID5201; PWM OUT for the ZMID5202; and SENT OUT for the ZMID5203.
TEST_D
R1P 14
2
TEST_ENA
R1N 13
3
VDDD
4
SOUT
5
VDDA
6
VSSE
7
VDDE
ZMID5201/-02/-03
1
R2P 12
R2N 11
VDDT 10
EP
9
EN
8
2. Pin Descriptions
Table 1.
Pin Descriptions
Number
Name
Type
1
TEST_D
Input/output
Factory test pin; must be left unconnected.
2
TEST_ENA
Input/output
Factory test pin. Connect to the VSSE pin.
3
VDDD
Supply
4
SOUT
Description
Internal regulated digital supply voltage. Connect capacitor CVD = 100nF from the VDDD pin
to the VSSE pin, no other load.
Analog output:
ZMID5201 only
Analog output (also referred to as AOUT for the ZMID5201). Refer to section 9, Figure
6, and Figure 7 for external connections.
PWM digital output:
ZMID5202 only
PWM digital output (also referred to as PWM OUT for the ZMID5202). Refer to section
10 and Figure 12 for external connections.
SENT digital output:
ZMID5203 only
SENT output (also referred to as SENT OUT for the ZMID5203). Refer to section 11,
Figure 13, Figure 14, and Figure 15 for external connections.
Digital input/output:
programming only
Digital One-Wire Interface (OWI) used during programming.
5
VDDA
Supply
Internal regulated analog supply voltage. Connect CVA = 100nF from the VDDA pin to the
VSSE pin; no other load.
6
VSSE
Ground
Common ground connection.
7
VDDE
Supply
External supply voltage. Connect the VDDE pin to CVE = 100nF capacitor in parallel with a
1pF to 10pF capacitor connected to the VSSE pin.
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ZMID5201/02/03 Datasheet
Number
Name
8
EN
9
EP
10
VDDT
11
R2N
12
R2P
13
R1N
14
R1P
Type
Description
Analog output
Connect the transmitter coil between EP and EN. The resonant frequency is adjusted with a
parallel capacitor CT between EP and EN (see application diagram on page 1 and block
diagram in Figure 4).
Supply
Internal supply voltage for transmitter amplifier. Connect to CVT = 100nF to VSSE.
Analog input
Connect receiver coil 2 between the R2N and R2P pins.
Analog input
Connect receiver coil 1 between the R1N and R1P pins.
3. Absolute Maximum Ratings
The absolute maximum ratings are stress ratings only. Stresses greater than those listed below can cause permanent damage to the device.
Functional operation of the ZMID5201/02/03 at the absolute maximum ratings is not implied. Exposure to absolute maximum rating conditions
could affect device reliability.
Table 2.
Absolute Maximum Ratings
Note: See important notes at the end of the table.
Symbol
VVDDE
VOUT_ANA
VOUT_PWM
VOUT_SENT
VOSC_COIL
Parameter
Conditions
Minimum
Maximum
Units
-18
18
V
For negative voltage, external current
must be limited to 10mA
-14
14
V
Without external current limitation
-0.3
14
V
For negative voltage, external current
must be limited to 10mA
-14
18
V
Without external current limitation
-0.3
18
V
For negative voltage, external current
must be limited to 10mA
-14
18
V
Without external current limitation
-0.3
18
V
-0.3
5.5
V
-0.3
3.6
V
External supply voltage
ZMID5201 analog output voltage on the
AOUT pin [a]
ZMID5202 PWM output voltage on the
PWM OUT pin [a]
ZMID5203 SENT output voltage on the
SENT OUT pin [a]
Oscillator coil pins: EP, EN
VR1P
Receiver coil pin: R1P
VR1N
Receiver coil pin: R1N
VR2P
Receiver coil pin: R2P
VR2N
Receiver coil pin: R2N
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ZMID5201/02/03 Datasheet
Symbol
Minimum
Maximum
Units
Test pin: TEST_ENA
-0.3
5.5
V
VTEST_D
Test pin: TEST_D
-0.3
3.6
V
VVDDA
Regulated supply voltage pin: VDDA
-0.3
3.6
V
VVDDD
Regulated supply voltage pin: VDDD
-0.3
3.6
V
VVDDT
Regulated supply voltage pin: VDDT
-0.3
4.2
V
VTEST_ENA
Parameter
Conditions
[a] The SOUT pin is referred to as the AOUT pin for the ZMID5201; PWM OUT for the ZMID5202; and SENT OUT for the ZMID5203.
4. Operating Conditions
Conditions: VDDE = 5V ±10%, TAMB = -40°C to +150°C.
Table 3.
Operating Conditions
Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
TAMB
Ambient temperature
-40
150
ºC
TJ
Junction temperature
-40
175
ºC
TSTOR
Storage temperature
-50
150
ºC
RTHJA
Thermal resistance junction to ambient
140
ºC/W
VVDDE
Supply voltage
5.5
V
ESD
Electrostatic discharge,
HBM 100pF/ 1.5kΩ
4.5
Pins VSSE, VDDE
Pin
SOUT [a]
All other pins
5
±4
kV
±3
kV
±2
kV
[a] The SOUT pin is referred to as the AOUT pin for the ZMID5201, PWM OUT for the ZMID5202, and SENT OUT for the ZMID5203.
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ZMID5201/02/03 Datasheet
5. Electrical Characteristics
The following electrical specifications are valid for the operating conditions as specified in Table 3: (TAMB = -40°C to 150°C).
Table 4.
ZMID5201/02/03 Electrical Characteristics
Symbol
VVDDE_TH_H
Parameter
Conditions
Minimum
Typical
Maximum
Units
4.4
V
9
ms
VDDE switch ON threshold
The device is activated when VDDE
increases above this threshold
Startup Time
Time between VDDE > VVDDE_TH_H
and valid output at SOUT
VVDDE_TH_L
VDDE switch OFF threshold
The device is deactivated when VDDE
decreases below this threshold
VVDDE_HYST
VDDE hysteresis
VVDDE_OVH
Over-voltage detection high
The device is deactivated after VDDE
increases above this voltage
VVDDE_OVL
Over-voltage detection low
The device is activated after VDDE
decreases below this voltage
5.6
VVDDA
Regulated analog supply
output voltage
Internally regulated, fixed
3.0
3.3
3.6
V
VVDDD
Regulated digital supply
output voltage
Internally regulated, fixed
1.8
2.0
2.5
V
VVDDT
Regulated coil driver supply
output voltage
Internally regulated, user programmable. Nominal voltage at room
temperature
2.7
3.3
4.1
V
TCVDDT
Temperature coefficient of
VDDT regulator
tSTART
Current consumption
4
V
0.1
V
7
5
With coils, no load; depending on
programmable Tx coil current
V
V
4000
Without coils. no load
ICC
5
ppm/K
9
mA
12
20
mA
50
55
µs
10
kHz
Angle Calculation
tSAMPLE
Data acquisition time
45
tREFRESH
Output update rate
Analog output
RESCORDIC
CORDIC resolution
Internal; over 360° electrical
16
bits
Accuracy [a]
See note [a].
0.2
% FS
Performance
INL
[a] The achievable accuracy depends on proper coil and target design. Nonlinearity errors in the calculated position might be further improved by
9-point linearization.
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ZMID5201/02/03 Datasheet
Table 5.
Coil Specifications
Symbol
Parameter
Conditions
Minimum
L
Excitation coil inductance
For Tx coil as shown in block
diagram in Figure 4
1.5
Q
Quality factor [a]
For Tx coil as shown in block
diagram in Figure 4
10
fOSC
Excitation frequency
LC oscillator
2.2
VTX_P
Excitation coil amplitude
Peak voltage, pins EP vs. EN
VRX
Receive coil amplitude
Input signal full range
50
Typical
3.5
Maximum
Units
30
µH
5.6
MHz
7200
mVpp
360
mVpp
[a] Recommendation: To ensure a good quality factor and low temperature drift for the LC tank circuit, use capacitors with NP0 (negative-positivezero) or C0G (C-zero-G) ceramics. Use Equation 1 to calculate the Q factor for the circuit.
Qp =
R'
wr L
C
= R'√
Equation 1
L
Where
Qp
Quality factor of a parallel resonator circuit as illustrated in Figure 2
R’
Equivalent parallel resistor
ω rL
Coil reactance at resonance frequency
CT
Capacitance of parallel capacitor CT
LCOIL
Inductance of the printed circuit Tx coil
Figure 2.
U
Parallel Resonator Circuit
CT
LCOIL
R
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ZMID5201/02/03 Datasheet
6. Circuit Description
6.1 Overview
The ZMID5201/02/03 ICs are inductive position sensors for use in automotive, industrial, medical and consumer applications. They operate on
the principles of induction in a wire loop and eddy currents. The sensing element is a set of coils that are directly connected to the IC. The coils
consist of one transmit coil and two receive coils. The transmit coil and a capacitor form an LC oscillator that is directly driven by the IC. It
generates a magnetic field within the transmit coil area that is picked up by the receiver coils.
The voltage generated by the receiver coils depends on the position of the target in the sense that areas shielded by the target generate a
weaker secondary voltage compared to areas that are not shaded by the target.
The two receive coils are arranged so that the secondary voltages are relatively phase shifted by electrical 90°, thereby generating a response
curve (receive coil output voltages versus position) that resembles a sine and cosine waveform over the range of target travel. By having a sine
and cosine shaped response, a ratiometric measurement is possible, which greatly improves the robustness of the system because the output
signal will remain stable, even if the gap between coils and target is varied.
Figure 3 shows an example of a linear motion sensor with one transmit coil (Tx loop) and two receive coils (Sin loop and Cos loop). The arrows
in the receive coils indicate the direction of the induced current relative to each other. The direction of the current either clockwise (cw) or
counterclockwise (ccw) determines the polarity of the voltage generated in each loop (RxCos, RxSin).
Figure 3.
Coil Design for a Linear Motion Sensor
Cos Loop 1
(cw)
Cos Loop 2
(ccw)
Tx Loop
Sin Loop 2
(ccw)
Sin Loop 3
(cw)
RxCos
Tx
RxSin
Metallic Target
Sin Loop 1
(cw)
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ZMID5201/02/03 Datasheet
6.2 Block Diagram
Figure 4 shows the block diagram of the ZMID5201/02/03
Figure 4.
Block Diagram
VDDA VDDD
VDDT
ZMID520x Family
VDDE
VSSE
Rx
Cosine
Power
Management
ZMID5201
Analog Interface
R1P
R1N
Analog Front-End
R2P
Rx
Sine
One-Wire
Interface
(OWI)
ADC
Digital
Signal
Processing
R2N
ZMID5202
PWM Interface
Protection
SOUT
ZMID5203
SENT Interface
EP
Tx
CT
EN
Oscillator
EEPROM
Test
Control
TEST_ENA
TEST_D
Diagnosis
The main building blocks include the following:
Power management: power-on-reset (POR) circuit, low drop-out (LDO) regulators for internal supplies.
Oscillator: generation of the transmit coil signal.
Analog front-end: demodulator and gain control for the receive signals.
Analog-to-digital converter (ADC): conversion into digital domain.
Digital signal processing: offset correction; conversion of sine and cosine signals into angle and magnitude; angle range adjustment; and
linearization.
EEPROM: nonvolatile storage of factory and user-programmable settings.
One-wire interface (OWI): programming of the chip through the output pin.
Interface options:
Analog output for ZMID5201
PWM output for ZMID5202
SENT output for ZMID5203
Protection: overvoltage, reverse polarity, short circuit protection.
Test control: factory testing; connect TEST_D and TEST_ENA pins as indicated in Table 1.
Note: For the LC tank circuit, the capacitor CT should be placed as close as possible to the ZMID520x pins EP and EN to minimize the loop
area between pins and capacitor(s).
© 2018 Integrated Device Technology, Inc.
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ZMID5201/02/03 Datasheet
7. Redundant Connection
In applications requiring extended reliability, a redundant set-up is required. The ZMID5201/02/03 ICs also support this requirement by either
having two identical but physically separated sensors or by interleaving the 2 2 receiving coils and using one shared transmitter coil.
In Figure 5, two sensors share one common transmitter coil (Tx). Both sensors must share the same ground connection (GND) but could have
separate positive supply connections (VDD1, VDD2). This setup is particularly useful for designs having limited coil space.
In normal operation, both chips drive the transmitter coil (Tx) and calculate the target’s position through the receiving coil signals. If one chip
fails to drive the transmitter coil, for example due to loss of supply, the host system can detect the failed part (loss of signal) while the second
chip continues to drive the coil and maintains correct operation.
Application Diagram, Dual Redundant Sensor with Shared Transmit Coil
Sensor 1
VDD1
+5V
7
VDDE
Sensor 2
VDDT
10
CVT
OUT1
6
GND
CVA
5
3
CVD
2
1
SOUT
VSSE
VDDA
VDDD
ZMID5201/-02/-03
CVE
4
EP
EN
R1P
R1N
R2P
TEST_ENA
TEST_D
R2N
10
CVT
8
9
CT1
8
CT2
14
Rx1
13 (cos)
14
Rx3
(cos) 13
12
Rx2
11 (sin)
VDDE
VDD 2
7
CVE
9
Tx
VDDT
12
Rx4
(sin) 11
EP
EN
R1P
R1N
ZMID5201/-02/-03
Figure 5.
SOUT
VSSE
VDDA
VDDD
R2P
TEST_ENA
R2N
TEST_D
+5V
4
OUT2
6
5
3
CVA
CVD
2
1
.
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ZMID5201/02/03 Datasheet
8. Protection and Diagnostics
8.1 I/O Protection
In order to meet the automotive requirements for overvoltage and reverse-polarity protection on both the output and power supply pins, the
ZMID5201/02/03 ICs include several protection and diagnosis features:
1. Detection of broken power line, interrupted output signal, and broken ground connection on the receiving side
2.
Protection against short circuit of output pin to VSSE, output pin to VDDE, and supply VDDE to VSSE
3.
Overvoltage protection on supply pin VDDE
4.
Overvoltage protection on output pin
5.
Reverse-polarity protection on supply pin VDDE to VSSE
6.
Reverse-polarity protection on output pin to VSSE
7.
Reverse-polarity protection on output pin to VDDE
8.2 Diagnostics
The ZMID5201/02/03 monitors a number of features to accommodate ISO26262 diagnostic requirements. The monitored diagnostic features
include the following:
1. Supply voltage too low or too high
2.
Rx sine coil: open, short, short to ground, or short to Rx cosine coil
3.
Rx sine coil: amplitude error or offset error
4.
Rx cosine coil: open, short, short to ground, or short to Rx sine coil
5.
Rx cosine coil: amplitude error or offset error
6.
Tx coil: amplitude too low or open
7.
Tx coil: frequency out of range
8.
LC oscillator failure
9.
CORDIC magnitude too high or too low
10. Missing target
11. Internal EEPROM failure
12. ADC signal processing overflow
8.3 Functional Safety
The ZMID5201/02/03 products are safety-related, intermediate hardware parts supporting ISO26262-compliant systems in regard to random
failures, and, as such, they have been qualified according to ISO 26262:2012 Part 8, Clause 13 (Table 6).
Integration of ZMID5201/02/03 products into safety-related applications requires a safety analysis performed by the user.
Note: The ZMID520x Functional Safety Manual (FSM) is available on request (requires a non-disclosure agreement).
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ZMID5201/02/03 Datasheet
9. ZMID5201 Inductive Sensor with Analog Output
Typical interface circuits for the ZMID5201 are shown in Figure 6 and Figure 7.
Note: The pull-up or pull-down resistors are not mandatory for normal operation. However, they are recommended for proper detection of broken
ground or broken supply wires at the receiving side.
Note: RF, CF = optional low pass filter. Values depend on user’s application.
Figure 6.
External Components for ZMID5201 Analog Interface with Pull-Down Resistor
ZMID5201: Sensor with Analog Interface
VDDE
Analog Signal Receiver
Wiring
+5V
+5V
4
OUT
IN
6
GND
GND
7
5V supply
CVE
ZMID5201
AOUT
VSSE
Figure 7.
RF
RPD,A
MCU
CF
CANA
External Components for ZMID5201 Analog Interface with Pull-up Resistor
ZMID5201: Sensor with Analog Interface
VDDE
Analog Signal Receiver
Wiring
7
+5V
+5V
OUT
IN
CVE
ZMID5201
AOUT
4
5V supply
RPU,A
CANA
VSSE
6
© 2018 Integrated Device Technology, Inc.
GND
13
RF
MCU
CF
GND
October 5, 2018
ZMID5201/02/03 Datasheet
Table 6.
ZMID5201 Analog Output Buffer Characteristics
Note: Refer to the VDDE pin description in Table 1 for the value of CVE.
Symbol
Out_err
Step_large
TUPD,ANA
CANA
RESANA
Parameter
Conditions
Minimum
Typical
Units
6
mV
160
μs
µs
Analog output error
Offset and nonlinearity error
Output response, large step
Step = 4.5V, CANA = 10nF,
RPD,A = 5kΩ, 10% to 90%
Analog output update rate
(programmable)
Minimum oversampling rate
50.1
55.7
61.2
Maximum oversampling rate
401
445.4
490
Output capacitor for analog
-6
Maximum
0.47
Analog output resolution
27
nF
10
bits
RPU,A
Output pull-up resistor
3
4.7
10
kΩ
RPD,A
Output pull down resistor
3
4.7
10
kΩ
95
%VDDE
Normal operating range
Diag_high_ana
Diagnostic high for analog
Diag_low_ana
Diagnostic low for analog
Limits are programmable
5
96
%VDDE
4
%VDDE
VCL_L
Clamping level , low [a]
Programmable in 1% steps
5
68
%VDDE
VCL_H
high [a]
Programmable in 1% steps
32
95
%VDDE
50
mA
Current_limit
Clamping level,
Output node short current
Short to VDDE or VSSE
[a] Low clamping level must be programmed lower than the VCL_H high clamping level.
For the ZMID5201, the 100% position range is mapped to a voltage range from 250mV to 4750mV. The stepping rate of the clamping parameters
is 1% so that the analog voltage stepping rate is 47.5 mV/%. The diagnostic low level is ≤ 200mV and the diagnostic high level is ≥ 4800mV.
Note that the minimum and maximum output positions can be mapped to the mechanical range of the application by programming the zero
angle offset, slope programming (linear vs. sawtooth), and clamping level register settings (refer to section 12 and Figure 8). For example, for
a pedal sensor with ratiometric analog output (ZMID5201), having 20° mechanical degrees of movement range and clamping levels of 5% and
95%, the output value 0.25V (5% of VDDE) represents 0° mechanical degrees and the output value 4.75V (95% of VDDE) represents 20°
mechanical degrees. Note that the slope can be programmed to either rising (as shown in Figure 8) or falling with increasing electrical angle.
© 2018 Integrated Device Technology, Inc.
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Figure 8.
Example of ZMID5201 Analog Output Transfer Function and Programming Options
Note: The following figure illustrates an example of 5% and 95% clamping levels and a rising slope setting.
DAC Value
Output Voltage (%VDDE)
100%
95%
Linear Sensor
Programming Option
Vclamp, low = 5 + (0 to 63)%
1024
68%
Sawtooth
Programming Option
Vclamp, high = 95 - (0 to 63)%
1023 DEC
32%
Slope
0
5%
0°
Zero Angle
© 2018 Integrated Device Technology, Inc.
360°
Position
Movement Range (programmable 90° to 360° electrical)
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ZMID5201/02/03 Datasheet
10. ZMID5202 Inductive Sensor with PWM Output
The typical interface circuit for the ZMID5202 is shown in Figure 9.
Note: RF, CF = optional low pass filter. Values depend on user’s application.
Figure 9.
External Components for ZMID5202 PWM Interface with Pull-Up Resistor
ZMID5202: Sensor with PWM Interface
VDDE
Digital Signal Receiver
Wiring
+5V
+5V
4
OUT
IN
6
GND
GND
7
CVE
ZMID5202
PWM
OUT
VSSE
Table 7.
VPullup
RPU,PWM
RF
MCU
CPWM
CF
ZMID5202 PWM Output Buffer Characteristics
Note: Refer to VDDE pin in Table 1 for the value of CVE.
Symbol
fPWM
Parameter
Conditions
Minimum
Typical
Maximum
Units
Typical – 7%
0.125
0.25
0.50
0.75
1.00
1.25
1.50
2.00
Typical + 7%
kHz
4.55
μs
PWM output frequency
User programmable
tPWM_FALL
PWM fall time
CPWM =4.7nF, RPU,PWM=1kΩ,
VPullup=5V, 2 correction bits
RESPWM
PWM resolution
10
bits
PWM output voltage
(pull-up)
16
V
10
%VPullup
VPullup
2.45
VOL_PWM
PWM output LOW level
VPullup=5V to VPullup=16V
VOH_PWM
PWM output HIGH level
VPullup=5V to VPullup=16V
90
RPU,PWM
Pullup resistor for PWM
VPullup=5V
1
10
VPullup=16V
3
10
CPWM
Output capacitor for PWM
Normal operating range
© 2018 Integrated Device Technology, Inc.
1
Limits are programmable
16
5
%VPullup
4.7
kΩ
20
nF
95
% duty
cycle
October 5, 2018
ZMID5201/02/03 Datasheet
Symbol
Parameter
Diag_high_PWM
Diagnostic high for PWM
Diag_low_PWM
Diagnostic low for PWM
Conditions
Minimum
Typical
96
97.5
2.5
Maximum
Units
% duty
cycle
4
% duty
cycle
DCL_L
Clamping level , low [a]
Programmable in 1% steps
5
68
% duty
cycle
DCL_H
Clamping level, high [a]
Programmable in 1% steps
32
95
% duty
cycle
[a] Low clamping level must be programmed lower than the DCL_H high clamping level.
The 100% position range is mapped to a duty cycle of 5% to 95%. A clamping step of 1% is mapped to a duty cycle change of 0.9%. The
diagnostic low level is mapped to a 2.5% (typical) duty cycle; the diagnostic high level is mapped to a 97.5% (typical) duty cycle.
Position 1023
Diagnostic High
Position 0000
Diagnostic Low
Figure 10. PWM Signal Range
Normal Operating Range
PWM Duty Cycle
[%]
1
4 5
32
Clamping Level, Low
68
95 96 99
Clamping Level, High
The graph in Figure 11 shows examples of different PWM signals with 5%, 50%, and 95% duty cycle, representing the minimum, 50%, and
maximum output values.
Note that the minimum and maximum output positions can be mapped to the mechanical range of the application by programming the zero
angle offset, slope programming (linear or sawtooth), and clamping level (minimum/maximum duty cycle) register settings (see section 12 and
Figure 12). For example, for a pedal sensor with PWM output (ZMID5202), having 20° mechanical degrees of movement range and clamping
levels of 5% and 95%, the output value 0 represents 0° mechanical degrees and the output value 1023DEC represents 20° mechanical degrees.
Note that the slope can be programmed to either rising (as shown in Figure 12) or falling with increasing electrical angle.
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Figure 11. Example of PWM Output Signal
Vout
5% duty cycle = 0000DEC
50% duty cycle = 512DEC
95% duty cycle =1023DEC
VOH_PWM
VOL_PWM
0
1
2
3
4
5
6
7
8
9
0
1
2
3
tPWM
4
5
6
7
8
9
0
1
2
tPWM
3
4
5
6
7
8
9
tPWM
0
time
Figure 12. Example of ZMID5202 PWM Output Transfer Function and Programming Options
PWM Output Value
(Digital)
PWM Duty Cycle (%)
Note: The following figure illustrates an example of 5% and 95% clamping levels and a rising slope setting.
100%
1023DEC
95%
Sawtooth
Programming Option
Linear Sensor
Programming Option
Vclamp, low = 5 + (0 to 63)%
1024
Vclamp, high = 95 - (0 to 63)%
68%
32%
Slope
0
5%
0°
Zero Angle
© 2018 Integrated Device Technology, Inc.
360°
Position
Mechanical Movement Range
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11. ZMID5203 Inductive Sensor with SENT Output
Three options for the typical interface circuit for the ZMID5203 are shown in Figure 13, Figure 14, and Figure 15.
Note: RF, CF and RP = optional low pass filter for the SENT interface. Values depend on user’s application.
Figure 13. External Components for ZMID5203 SENT Interface, Option A
ZMID5203: Sensor with SENT Interface
VDDE
Digital Signal Receiver
Wiring
+5V
7
CVE
ZMID5203
SENT OUT
R01
4
C11
VSSE
OUT
IN
C12
GND
6
5V supply
+5V
GND
RPU,SENT
51k
RS,SENT
560
RF
CSENT
2.2nF
CF
MCU
RP
Figure 14. External Components for ZMID5203 SENT Interface, Option B
ZMID5203: Sensor with SENT Interface
VDDE
Digital Signal Receiver
Wiring
7
+5V
+5V
OUT
IN
GND
RS,SENT 560
CSENT
GND
2.2nF
CVE
ZMID5203
SENT OUT
C11
VSSE
RPU,SENT 10k
R01
4
5V supply
C12
6
to 51k
RF
CF
MCU
RP
Figure 15. External Components for ZMID5203 SENT Interface, Option C
ZMID5203: Sensor with SENT Interface
VDDE
Digital Signal Receiver
Wiring
7
+5V
+5V
OUT
IN
GND
GND
CVE
ZMID5203
SENT OUT
C11
VSSE
RPU,SENT 10k
R01
4
6
© 2018 Integrated Device Technology, Inc.
5V supply
C12
19
RF
CSENT
100pF
MCU
CF
RP
October 5, 2018
ZMID5201/02/03 Datasheet
Table 8.
ZMID5203 SENT Output Buffer Characteristics
Note: Refer to VDDE pin in Table 1 for the value of CVE.
Symbol
Parameter
RESSENT
Conditions
Minimum
Typical
SENT output resolution
tSTABLE_HIGH
SENT HIGH stabilization time
HIGH level at 3.8V
Maximum
Units
12
bits
6
μs
VOL
Output LOW level
0.5
VOH
Output HIGH level
R01
SENT output pi (π) filter
resistor
For application circuits options A,B,
and C
120
Ω
C11
SENT output pi (π) filter first
capacitor
For application circuits options A, B,
and C
2.2
nF
tTICK
Clock tick time
C12
SENT output pi (π) filter,
second capacitor
4.1
3.0
V
V
3.36
3.67
µs
For application circuit option C
3.9
nF
For application circuits options A
and B
2.2
nF
11.1 SENT Protocol
The SENT (Single Edge Nibble Transmission) protocol conforms to SAE J2716, Revision 2. In addition, SENT Pause and CRC can be
programmed according to SAE J2716, Revision 3.
For transmitting a nibble with the 0 value, 12 clock ticks are required: a fixed LOW period of 5 ticks followed by a HIGH period of 7 ticks. One
tick equals tTICK = 3.0µs to 3.67µs (see Table 8 ).
Table 9.
SENT Nibble Output for Value = 0DEC
Vout
5
7
5
VOH
VOL
0
1
2
3
4
5
6
7
8
9
10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29
t (ticks)
For transmitting a nibble with the value 15DEC (1111BIN, FHEX), 27 clock ticks are required: a fixed LOW period of 5 ticks followed by a HIGH
period of 22 ticks. The total time for one nibble can be calculated as with the following equation:
tNIBBLE = tTICK (12 + x)
Where x = the nibble decimal value = 0 to 15.
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Table 10.
SENT Tick Length
Decimal
0
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Hexadecimal
0
1
2
3
4
5
6
7
8
9
A
B
C
D
E
F
Number of Ticks
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
Figure 16. SENT Nibble Output for Value = 15DEC
Vout
5
22
5
VOH
VOL
0
1
2
3
4
5
6
7
8
9
10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29
t (ticks)
Figure 17. SENT Frame
The SENT protocol frame consists of a fixed-length synch pulse (LOW period of 5 ticks followed by a HIGH period of 51 ticks), followed by a
status nibble, 6 data nibbles, and a CRC nibble. An optional pause pulse can be programmed to adjust the SENT frame to a fixed length of 270
ticks.
Vout
Sync
Data1
MSN
4-bit (#1)
Status
4-bit (#0)
Data1
MidN
4-bit (#2)
Data1
LSN
4-bit (#3)
Data2
MSN, ctr
4-bit (#4)
Data2
LSN, ctr
4-bit (#5)
Data2
inv MSN
4-bit (#6)
CRC
4-bit (#7)
Pause
(optional)
VOH
VOL
5
51
5
7 to 10
5
7 to 22
5
7 to 22
5
7 to 22
5
7 to 22
5
7 to 22
5
7 to 22
152 to 260
5
7 to 22
5
var
ticks
270
Note that the status nibble has a maximum length of only 5 + 10 = 15 ticks since bits 2 and 3 are always zero:
Status nibble:
0000BIN = Normal operation
0011BIN = Diagnostic state
The SENT output frame format can be programmed in one of two options:
1. 12-bit position data + 8-bit rolling counter (“ctr” in Figure 17) + inverted copy of Data1 MSN (nibble #1 in Figure 17) + cyclic redundancy
check (CRC). In this option, the SENT frame length is between 152 and 260 ticks with a variable frame length and 270 ticks with a fixed
frame length.
2. 12-bit position data + “000” data + CRC. In this option, if the pause pulse is disabled, the SENT frame has the shortest possible length:
less than 220 ticks.
© 2018 Integrated Device Technology, Inc.
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Note that the minimum and maximum output positions can be mapped to the mechanical range of the application by programming the zero
angle offset and slope register settings (see section 12 and Figure 18). For example for a pedal sensor with SENT output (ZMID5203) with 20°
mechanical degrees of movement range, the output value 0 represents 0° mechanical degrees and the output value 4095DEC represents 20°
mechanical degrees. Note that the slope can be programmed to either rising (as shown in Figure 18) or falling with increasing electrical angle.
Figure 18. Example of ZMID5203 Output Transfer Function and Programming Options
SENT Output Value
(Digital)
Note: The following figure illustrates an example using the rising slope setting.
4095DEC
Sawtooth
Programming Option
4096
Linear Sensor
Programming Option
Slope
0
0°
Zero Angle
360°
Position
Mechanical Movement Range
© 2018 Integrated Device Technology, Inc.
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12. Programming Options
The ZMID520x family offers a variety of programming options. The IC is programmed through the output pin via a proprietary bi-directional onewire interface (OWI). For programming, no additional wires or programming voltage is required, so the IC can be fully programmed in the field.
Note: A full description of the IDT one-wire interface protocol and a detailed memory map are available on request. The main programming
functions are described in Table 11.
Table 11.
Programming Options Overview
Function
Products
Programming Option
Notes
Coil input
All
Reverse coil polarity (increasing or decreasing output
relative to target movement)
Invert coils to change the direction of the
output values
Input amplifier
All
Offset of sine and cosine channels
Offset correction before CORDIC angle
calculation
Slope of transfer function
All
Steepness of slope, rising/falling
Adjustment of angle range
Zero position
All
Zero angle
To match mechanical zero position with
electrical zero position
Linearization
All
9-point linearization
To increase accuracy and compensate
for imperfections in coil design
Transmit coil
All
Coil driver current and amplitude
To optimize Tx oscillator
Output mode
All
Linear or sawtooth
Single or multiple ramps
ZMID5201
Minimum, maximum output voltage
Define normal operating range
ZMID5202
Minimum, maximum PWM duty cycle
Define normal operating range
ZMID5201
Output voltage in diagnostic mode
To indicate diagnostic alarm
ZMID5202
PWM duty cycle in diagnostic mode
To indicate diagnostic alarm
PWM fall time
ZMID5202
PWM output signal slew rate
To optimize EMC performance
PWM base frequency
ZMID5202
PWM frequency
Base frequency of PWM signal
SENT CRC
ZMID5203
CRC according to SAE J2716, Rev.2 or Rev.3
Implementation of CRC calculation
SENT Pause
ZMID5203
Optional pause setting according to SAE J2716,
Revision 2 or Revision 3
Revision 2: No pause pulse
Revision 3: Fixed frame length + pause
SENT Frame
ZMID5203
Type of data transmitted in SENT frame
12-bit position data + 8-bit rolling counter
+ inverted copy of first data nibble + CRC
(see Figure 17)
12-bit position data + “000” data + CRC
CORDIC magnitude upper and lower levels
To trigger alarm if CORDIC magnitude is
out of range
Transmit coil frequency alarm
Detects out of range Tx frequency
Automatic gain control (AGC)
Detects AGC out of range
EEPROM double error; shadow register parity error
Internal memory errors
R1 or R2 coil open or short
Detect defective receiver coils
Signal processing overflow
Internal processing errors
Clamp low, clamp high
Diagnostic levels
Diagnostics
All
© 2018 Integrated Device Technology, Inc.
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13. Operation at High Rotation Speeds
The ZMID520x ICs are primarily designed for low-speed or static operation due to their inherent interface types (analog ramp, PWM, SENT).
There is no upper speed limit for using the ZMID520x in high speed applications; however, due to the maximum data rate at the various outputs,
the resolution (on a rotary application: number of measurements per revolution) will be reduced with increasing speed.
The maximum output data rates for the various versions are given in Table 12.
Table 12.
Maximum Output Data Rate
Product
Type of Output
Maximum Output Rate, Updates per Second
Notes
ZMID5201
Analog ramp
10000
Linear analog ramp
ZMID5202
PWM
2000
Programmable from 125Hz to 2000Hz
ZMID5203
SENT
1235
270 ticks at 3µS
With these maximum output data rates, the resolution versus rotation speed relationship is shown in the graph in Figure 19.
Figure 19. Relationship between Resolution and Rotational Speed
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ZMID5201/02/03 Datasheet
For example, the number of readings per revolution at 10rpm and 1000rpm are given in Table 13.
Table 13.
Resolution at Different Rotation Speeds
Product
Type of Output
Readings per Revolution at 10rpm
Readings per Revolution at 1000rpm
ZMID5201
Analog ramp
1024 (10-bit)
600 (9.2-bit)
ZMID5202
PWM
1024 (10-bit)
120 (6.9-bit)
ZMID5203
SENT
4096 (12-bit)
74 (6.2-bit)
14. Interpolation, Linearity Error Correction
A post-CORDIC linearity correction is available to correct nonlinearities and to further increase the overall accuracy of the system.
The correction factors are applied by linear interpolation between 9 equidistant points over one phase (0 to 360°) with one of two options:
Option 1: Starting at 0° with intervals of 45°
Option 2: Same as option1 shifted by 22.5°, starting at 22.5° with intervals of 45°
Table 14.
Linearity Correction Points
Point
1
2
3
4
5
6
7
8
9
Option 1
0°
45°
90°
135°
180°
225°
270°
315°
360°
Option 2
22.5°
67.5°
112.5°
157.5°
202.5°
247.5°
292.5°
337.5°
382.5° (22.5°)
Note that in a rotating application, correction point 1 (0°) and point 9 (360°) coincide at the same angle. Therefore in such cases, it is useful to
use the same correction values for both point 1 and point 9.
In general, the correction points are applicable as follows:
Correction point 1 is used for angles 0° ≤ α < 45° and optionally for 22.5° ≤ α < 67.5°.
(…)
Correction point 9 is used for angles 315° ≤ α < (360° = 0°) and optionally for 337.5° ≤ α < 22.5°.
For each point, an offset can be applied. Angle values between two points are corrected by linear interpolation between the two linearization
points.
© 2018 Integrated Device Technology, Inc.
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15. Application Examples
Typical coil and target arrangements are shown in Figure 20 to Figure 25: linear motion; arc motion; and on-axis (end of shaft) and off-axis (side
shaft) rotary. Many other arrangements are also possible. In the figures, blue indicates the target and the dashed lines indicate range of travel.
See Table 15 for resolution values.
Note: The coils are shown in a simplified form. Detailed guidelines on coil design and programming options are available on request from IDT
application support. Note that within each base configuration, the movement range can be further fine-trimmed by user programming.
Examples:
An angle sensor for 0 to 270° angle range would use a 360° base configuration (360°/1) and could then be trimmed to a maximum angle
of 270° by user programming.
An angle sensor for 0 to 110° angle range would use a 120° configuration (360°/3) and could then be trimmed to a maximum angle of
110° by user programming.
Figure 20. Example Setup: Linear Motion
Figure 21. Example Setup: Arc Motion
Figure 22. Example Setup: End-of-Shaft Rotation,
On-Axis, 1 × 360
Figure 23. Example Setup: Side-Shaft Rotation,
Off-Axis, 1 × 360
© 2018 Integrated Device Technology, Inc.
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Figure 24. Example Setup: Side-Shaft Rotation,
Off-Axis, 2 × 180
Figure 25. Example Setup: Side-Shaft Rotation,
Off-Axis, 6 × 60
The different coil and target arrangements provide different ranges for the degrees measurement, which affects the measurement resolution
(degrees per step). This varies depending on the ZMID520x product. Table 15 gives examples of resolution for various ranges of motion for
each product.
Table 15.
Examples of Resolution Differences Depending on Product
Resolution of Measurement
ZMID5201/ ZMID5202
(1024 steps per phase)
ZMID5203
(4096 steps per phase)
Linear Position Sensing Range of Travel =
Coil Length Minus Target Length
(See the example in Figure 20)
(Range of Travel)/1024
(Range of Travel)/4096
Arc Position Sensing Range of Travel =
Coil Arc Angle Minus Target Angle (Width of Target)
(See the example in Figure 21)
(Range of Travel)/1024
(Range of Travel)/4096
Arc Position Sensing Range of Travel = 1 130
(The ZMID520xMARC13001 kits provide examples; see
section 18)
130/1024 = 0.127
130/4096 = 0.0317
1 360 (See the examples in Figure 22 and Figure 23)
0.35/Step
0.088/Step
2 180 (See the example in Figure 24)
0.18/Step
0.044/Step
6 60 (See the example in Figure 25)
0.059/Step
0.015/Step
Range of Travel for Example Application
© 2018 Integrated Device Technology, Inc.
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16. Package Outline Drawings
The package outline drawings are appended at the end of this document and are accessible from the link below. The package information is
the most current data available and is subject to change without notice or revision of this document.
www.idt.com/document/psc/14-tssop-package-outline-drawing-44mm-body-065mm-pitch-pgg14t1
17. Marking Diagram
ZMID
520xAE
XXXXXX
YYWW
© 2018 Integrated Device Technology, Inc.
Line 1:
Line 2:
Line 3:
Line 4:
First four characters of part code (ZMID)
Next four characters of the part code (5201, 5202, or 5203) followed by
A = Design revision
E = Operation temperature range, extended automotive
“XXXXXX” = Lot number
“YYWW” = Manufacturing date:
YY = last two digits of manufacturing year
WW = manufacturing week
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ZMID5201/02/03 Datasheet
18. Ordering Information
Orderable Part Number
Description and Package
MSL Rating
Shipping Packaging
Temperature
ZMID5201AE1R
ZMID5201; Analog Output; 14-TSSOP
1
Reel
-40° to +150°C
ZMID5202AE1R
ZMID5202; PWM Output; 14-TSSOP
1
Reel
-40° to +150°C
ZMID5203AE1R
ZMID5203; SENT Output; 14-TSSOP
1
Reel
-40° to +150°C
Note: For communication and programming, the ZMID520x Application Modules listed below require a ZMID-COMBOARD, which is available
separately. The ZMID-COMBOARD can connect to two Application Modules simultaneously if the modules are the same type.
ZMID-COMBOARD
USB Communication and Programming Interface for ZMID Inductive Application Modules, Micro-USB Cable.
Further information, user manual, and software download, visit www.IDT.com/ZMID-COMBOARD.
ZMID5201MARC13001
Inductive Arc Application Module with 130 Measurement Range and Analog Output including Arc Application
Module Sensor PCB, Sensor Target, Target Holder, Rotation Axis, Knob, Module Connection Cable. For further
information, kit manual, and software download, visit www.IDT.com/ZMID5201MARC.
ZMID5202MARC13001
Inductive Arc Application Module with 130 Measurement Range and PWM Output including Arc Application
Module Sensor PCB, Sensor Target, Target Holder, Rotation Axis, Knob, Module Connection Cable. For further
information, kit manual, and software download, visit www.IDT.com/ZMID5202MARC
ZMID5203MARC13001
Inductive Arc Application Module with 130 Measurement Range and SENT Output including Arc Application
Module Sensor PCB, Sensor Target, Target Holder, Rotation Axis, Knob, Module Connection Cable. For further
information, kit manual, and software download, visit www.IDT.com/ZMID5203MARC.
ZMID5201MLIN01201
Linear Inductive Application Module with 12mm Measurement Range and Analog Output including the Linear
Application Module Sensor PCB, Sensor Target, Target Holder, Knob, and Module Connection Cable. For further
information, kit manual, and software download, visit www.IDT.com/ZMID5201MLIN.
ZMID5202MLIN01201
Linear Inductive Application Module with 12mm Measurement Range and PWM Output including the Linear
Application Module Sensor PCB, Sensor Target, Target Holder, Knob, and Module Connection Cable. For further
information, kit manual, and software download, visit www.IDT.com/ZMID5202MLIN.
ZMID5203MLIN01201
Linear Inductive Application Module with 12mm Measurement Range and SENT Output including the Linear
Application Module Sensor PCB, Sensor Target, Target Holder, Knob, and Module Connection Cable. For further
information, kit manual, and software download, visit www.IDT.com/ZMID5203MLIN.
ZMID5201MROT36001
Inductive Rotary Application Module with 360 Measurement Range and Analog Output including Rotary
Application Module Sensor PCB, Sensor Target, Target Holder, Rotation Axis, Knob, Module Connection Cable.
For further information, kit manual, and software download, visit www.IDT.com/ZMID5201MROT.
ZMID5202MROT36001
Inductive Rotary Application Module with 360 Measurement Range and PWM Output including Rotary
Application Module Sensor PCB, Sensor Target, Target Holder, Rotation Axis, Knob, Module Connection Cable.
For further information, kit manual, and software download, visit www.IDT.com/ZMID5202MROT.
ZMID5203MROT36001
Inductive Rotary Application Module with 360 Measurement Range and SENT Output including Rotary
Application Module Sensor PCB, Sensor Target, Target Holder, Rotation Axis, Knob, Module Connection Cable.
For further information, kit manual, and software download, visit www.IDT.com/ZMID5203MROT.
© 2018 Integrated Device Technology, Inc.
29
October 5, 2018
ZMID5201/02/03 Datasheet
19. Revision History
Revision Date
October 5, 2018
Description of Change
Update for part order table to remove part codes ending in AE1T. Product is no longer offered in tubes.
Correction of specifications for resolution. Values have been changed from “Minimum” to “Maximum”
designation.
Minor edits.
June 22, 2018
Revision of the absolute maximum VVDDT specification in Table 2.
Revision of the electrical characteristic VVDDT specification in Table 4.
Addition of the VDDT temperature coefficient specification in Table 4.
May 28, 2018
March 5, 2018
Revision for section 16. The package outline drawings have been updated and are now appended at the end of
the document.
December 20, 2017
Revision of ASIL text on page 1 and in section 8.3.
Addition of VVDDD and VVDDA specifications in Table 4.
Revision of VVDDT specification in Table 4.
Minor edits.
Addition of example for arc position sensing with a 130 travel range to Table 15.
Revision of Figure 4 and Table 1 for the name for the external capacitance.
Addition of recommendations for LC oscillator components.
Addition of update rate for analog output.
Minor edits
Revision of order table for new ZMID520x Application Sensor Module Kits, which replace the previous ZMID520x
Evaluation Kit.
Update for template removing “short-form datasheet” section on page 2.
Revision of “Available Support” section on page 1.
Minor edits
May 24, 2017
Addition of tSTART specification to Table 4.
April 28, 2017
Correction for sine and cosine labels in the following figures: application circuit on page 1, the block diagram on
page 2, Figure 4, and Figure 5.
Minor edits.
March 28, 2017
Correction for Table 15 for step values.
Addition of new images for Figure 20 to Figure 25.
Correction of name of ZMID520x Reference Board to ZMID520x Demo Board in kit contents given in part order
table.
March 23, 2017
Initial release.
© 2018 Integrated Device Technology, Inc.
30
October 5, 2018
ZMID5201/02/03 Datasheet
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DISCLAIMER Integrated Device Technology, Inc. (IDT) and its affiliated companies (herein referred to as “IDT”) reserve the right to modify the products and/or specifications described herein at any time,
without notice, at IDT's sole discretion. Performance specifications and operating parameters of the described products are d etermined in an independent state and are not guaranteed to perform the same
way when installed in customer products. The information contained herein is provided without representation or warranty of a ny kind, whether express or implied, including, but not limited to, the suitability
of IDT's products for any particular purpose, an implied warranty of merchantability, or non -infringement of the intellectual property rights of others. This document is presented only as a guide and does not
convey any license under intellectual property rights of IDT or any third parties.
IDT's products are not intended for use in applications involving extreme environmental conditions or in life support systems or similar devices where the failure or malfunction of an IDT product can be
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Integrated Device Technology, IDT and the IDT logo are trademarks or registered trademarks of IDT and its subsidiaries in the United States and other countries. Other trademarks used herein are the
property of IDT or their respective third party owners. For datasheet type definitions and a glossary of common terms, visit www.idt.com/go/glossary. All contents of this document are copyright of Integrated
Device Technology, Inc. All rights reserved.
© 2018 Integrated Device Technology, Inc.
31
October 5, 2018
14-TSSOP Package Outline Drawing
4.4mm Body, 0.65mm Pitch
PGG14T1, PSC-4056-01, Rev 02, Page 1
14-TSSOP Package Outline Drawing
4.4mm Body, 0.65mm Pitch
PGG14T1, PSC-4056-01, Rev 02, Page 2
Package Revision History
Description
Date Created
Rev No.
Mar, 10 2017
Rev 01
Added Land Pattern
Dec, 19 2017
Rev 02
New Format
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