910000200003

VSO® Low Flow Normally closed proportional solenoid valve FEATURES · 2-way normally closed · Applications where control is critical or flow is required below 600 sccm · Provides computer-automated calibrations and full calibration traceability · Uses either DC current or pulse width modulation with closed loop feedback to deliver optimal system performance · Maintains ideal flow through thermal compensation · Highly repeatable · Oxygen and analytically clean MEDIA COMPATIBILITY Air, argon, helium, hydrogen, methane, nitrogen, oxygen & others PHYSICAL PROPERTIES Operating environment Storage temperature Length 0 to 55 °C -40 to 70 °C 45.3 mm (1.785 in) 16.5 mm (0.625 in) 17 mm (0.67 in) manifold mount with 17 µm screens 63 g (2.2 oz) 0.508 cm3 (0.031 in3) 17 µm None required ELECTRICAL Power Voltage max. 2 W max. 6.5, 8, 12 or 18 VDC Width Height Porting Weight Internal volume Filtration (recommended) Lubrication VSO is a registered trademark of Parker Hannifin Corporation. October 2006 / 255 1/4 www.sensortechnics.com VSO® Low Flow Normally closed proportional solenoid valve PERFORMANCE CHARACTERISTICS Part no. 910000200... Orifice siz es 0.003" (0.076 mm) Leak rate1 ≤0.2 sccm of helium (bubble tight) R esp o n se